搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

跨尺度亚纳米分辨的可溯源外差干涉仪

贺寅竹 赵世杰 尉昊赟 李岩

引用本文:
Citation:

跨尺度亚纳米分辨的可溯源外差干涉仪

贺寅竹, 赵世杰, 尉昊赟, 李岩

Traceable trans-scale heterodyne interferometer with subnanometer resolution

He Yin-Zhu, Zhao Shi-Jie, Wei Hao-Yun, Li Yan
PDF
导出引用
  • 提出了一种能够实现跨尺度测量具有亚纳米分辨力的可溯源外差干涉仪,利用小型化碘稳频532 nm激光器,将激光频率溯源至国际计量委员会推荐的复现米定义谱线之一的R(56)32-O(a10)上;使用双频激光空间分离的设计方法,抑制了双频激光混叠引起的测量位移非线性误差,补偿了光纤与声光调制器引入的相位噪声;通过高精度的相位测量技术,使相位测量分辨率达到了0.017.干涉仪的不确定度评估结果显示,100 mm的量程内,其不确定度达322 pm,实现了跨尺度亚纳米分辨力可溯源的位移测量.
    In order to realize the traceable trans-scale displacement measurements with high resolutions in the fields of fundamental scientific research and ultra-precision machining, we demonstrate a trans-scale heterodyne interferometer with a sub-nanometer resolution, through assembling a compact iodine-stabilized laser at 532 nm. Using modulation transfer spectroscopy, the green laser is traced back to the transition line R(56)32-O(a10), which is one of the recommended spectral lines for meter redefinition. The Allan standard deviation of the laser frequency is 1.310-12 within an average time of 1 s. Compared with most He-Ne lasers, the green laser has a short wavelength and good stability, which leads to a higher resolution. We use two acoustic-optic modulators driven by a two-channel acoustic-optic driver sharing the same crystal oscillator to separate input beams spatially. The frequency of one beam is shifted by 80 MHz and the other is shifted by 82 MHz, which results in a beat frequency of 2 MHz. As a result, the nonlinearity caused by source mixing substantially is reduced. The phase noises of the fibers and two acoustic-optic modulators are well compensated. In order to minimize the difficulty in adjusting the optical path and the error of the measurement, we integrate the interferometry components and design a monolithic prism. The optical resolution of the interferometer reaches to /4. The experiment is carried out in a vacuum environment to reduce the influence of the refractive index of air. High-precision phase measurement technology is used to improve the accuracy of the interferometer. The errors of the interferometer can be classified as random and systematic errors. Random errors include the error from the frequency instability of the laser and the error due to environmental effects. Systematic errors include the phase measurement error and the nonlinearity error. To verify the performance of the interferometer, these errors must be evaluated. In a span of 100 mm, the measurement uncertainties caused by laser wavelength uncertainty, the air refractive index uncertainty, the phase measurement uncertainty and the nonlinearity error are 3 pm, 300 pm, 6.3 pm and 118 pm, respectively. Finally, the performance evaluation shows that the combined uncertainty of the interferometer reaches 322 pm in a span of 100 mm, which is mainly due to the refractive index of air. The heterodyne interferometer meets the requirements for traceable trans-scale measurement with a sub-nanometer resolution, which can be widely used in instrument calibration, length standard making, and geometric measurement.
      通信作者: 赵世杰, zhao_sj2012@163.com;liyan@mail.tsinghua.edu.cn ; 李岩, zhao_sj2012@163.com;liyan@mail.tsinghua.edu.cn
    • 基金项目: 国家自然科学基金(批准号:51575311)和国家重大科学仪器设备开发专项(批准号:2014YQ09070907)资助的课题.
      Corresponding author: Zhao Shi-Jie, zhao_sj2012@163.com;liyan@mail.tsinghua.edu.cn ; Li Yan, zhao_sj2012@163.com;liyan@mail.tsinghua.edu.cn
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 51575311) and the National Key Scientific Instrument and Equipment Development Project of China (Grant No. 2014YQ09070907).
    [1]

    Mcclelland J J, Scholten R E, Palm E C, Celotta R J 1993 Science 262 877

    [2]

    Li T B 2005 Shanghai Measurement and Testing 32 8 (in Chinese) [李同保 2005 上海计量测试 32 8]

    [3]

    Zhang P P, Ma Y, Zhang B W, Li T B 2011 Acta Opt. Sin. 31 190 (in Chinese) [张萍萍, 马艳, 张宝武, 李同保 2011 光学学报 31 190]

    [4]

    Bustillo J M, Howe R T, Muller R S 1998 Proc. IEEE 86 1552

    [5]

    Zhang X J, Meng Y G, Wen S Z 2004 Acta Phys. Sin. 53 728 (in Chinese) [张向军, 孟永刚, 温诗铸 2004 物理学报 53 728]

    [6]

    Zhu M H, Wu X J, Wei H Y, Zhang L Q, Zhang J T, Li Y 2013 Acta Phys. Sin. 62 070702 (in Chinese) [朱敏昊, 吴学健, 尉昊赟, 张丽琼, 张继涛, 李岩 2013 物理学报 62 070702]

    [7]

    Zuo A B, Li W B, Peng Y X, Cao J P, Zang E J 2005 Chin. J. Lasers 32 164 (in Chinese) [左爱斌, 李文博, 彭月祥, 曹建平, 臧二军 2005 中国激光 32 164]

    [8]

    Cordiale P, Galzerano G, Schnatz H 2000 Metrologia 37 177

    [9]

    Bi Z Y, Luo M, Ding J X, Ma L S 2000 Acta Opt. Sin. 20 1699 (in Chinese) [毕志毅, 罗明, 丁晶新, 马龙生 2000 光学学报 20 1699]

    [10]

    Galzerano G, Svelto C, Bertinetto F, Bava E 1999 Proceedings of the 16th IEEE Instrumentation and Measurement Technology Conference, 1999, IMTC/99 3 1913

    [11]

    Lin B K, Cao S Y, Zhao Y, Li Y, Wang Q, Lin Y G, Cao J P, Zang E J, Fang Z J, Li T C 2014 Chin. J. Lasers 41 8 (in Chinese) [林百科, 曹士英, 赵阳, 李烨, 王强, 林弋戈, 曹建平, 臧二军, 方占军, 李天初 2014 中国激光 41 8]

    [12]

    Zang E J, Cao J P, Zhong M C, Li C Y, Shen N C, Hong D M, Cui L R, Zhu Z, Liu A H 2002 Appl. Opt. 41 7012

    [13]

    Badami V G, Patterson S R 2000 Precis. Eng. 24 41

    [14]

    Quenelle R C 1983 Hewlett Packard 34 10

    [15]

    Hou W, Wilkening G 1992 Precis. Eng. 14 91

    [16]

    Cosijins S J A G, Haitjema H, Schellekens P H J 2002 Precis. Eng. 26 448

    [17]

    Zang E J, Cao J P, Li Y, Deng Y K, Yang T, Li C Y, Li W B 2007 Chin. J. Lasers 34 203 (in Chinese) [臧二军, 曹建平, 李烨, 邓勇开, 杨涛, 李成阳, 李文博 2007 中国激光 34 203]

    [18]

    Born M, Wolf E 1992 Principles of Optics (7th Ed.) (Cambridge: Press of University of Cambridge) p92

    [19]

    Schwarz D, Wormeester H, Poelsema B 2011 Thin Solid Films 519 2994

    [20]

    Wu C M, Lawall J, Deslattes R D 1999 Appl. Opt. 38 4089

    [21]

    Ellis J D, Meskers A J, Spronck J W, Munning R H 2011 Opt. Lett. 36 3584

    [22]

    Hu P C, Chen P, Ding X M, Tan J B 2014 Appl. Opt. 53 5448

    [23]

    Pdooer P, Zaman Khan T, Haque Khan M, Muktadir Rahman M 2014 Int. J. Computer Appl. 96 1

  • [1]

    Mcclelland J J, Scholten R E, Palm E C, Celotta R J 1993 Science 262 877

    [2]

    Li T B 2005 Shanghai Measurement and Testing 32 8 (in Chinese) [李同保 2005 上海计量测试 32 8]

    [3]

    Zhang P P, Ma Y, Zhang B W, Li T B 2011 Acta Opt. Sin. 31 190 (in Chinese) [张萍萍, 马艳, 张宝武, 李同保 2011 光学学报 31 190]

    [4]

    Bustillo J M, Howe R T, Muller R S 1998 Proc. IEEE 86 1552

    [5]

    Zhang X J, Meng Y G, Wen S Z 2004 Acta Phys. Sin. 53 728 (in Chinese) [张向军, 孟永刚, 温诗铸 2004 物理学报 53 728]

    [6]

    Zhu M H, Wu X J, Wei H Y, Zhang L Q, Zhang J T, Li Y 2013 Acta Phys. Sin. 62 070702 (in Chinese) [朱敏昊, 吴学健, 尉昊赟, 张丽琼, 张继涛, 李岩 2013 物理学报 62 070702]

    [7]

    Zuo A B, Li W B, Peng Y X, Cao J P, Zang E J 2005 Chin. J. Lasers 32 164 (in Chinese) [左爱斌, 李文博, 彭月祥, 曹建平, 臧二军 2005 中国激光 32 164]

    [8]

    Cordiale P, Galzerano G, Schnatz H 2000 Metrologia 37 177

    [9]

    Bi Z Y, Luo M, Ding J X, Ma L S 2000 Acta Opt. Sin. 20 1699 (in Chinese) [毕志毅, 罗明, 丁晶新, 马龙生 2000 光学学报 20 1699]

    [10]

    Galzerano G, Svelto C, Bertinetto F, Bava E 1999 Proceedings of the 16th IEEE Instrumentation and Measurement Technology Conference, 1999, IMTC/99 3 1913

    [11]

    Lin B K, Cao S Y, Zhao Y, Li Y, Wang Q, Lin Y G, Cao J P, Zang E J, Fang Z J, Li T C 2014 Chin. J. Lasers 41 8 (in Chinese) [林百科, 曹士英, 赵阳, 李烨, 王强, 林弋戈, 曹建平, 臧二军, 方占军, 李天初 2014 中国激光 41 8]

    [12]

    Zang E J, Cao J P, Zhong M C, Li C Y, Shen N C, Hong D M, Cui L R, Zhu Z, Liu A H 2002 Appl. Opt. 41 7012

    [13]

    Badami V G, Patterson S R 2000 Precis. Eng. 24 41

    [14]

    Quenelle R C 1983 Hewlett Packard 34 10

    [15]

    Hou W, Wilkening G 1992 Precis. Eng. 14 91

    [16]

    Cosijins S J A G, Haitjema H, Schellekens P H J 2002 Precis. Eng. 26 448

    [17]

    Zang E J, Cao J P, Li Y, Deng Y K, Yang T, Li C Y, Li W B 2007 Chin. J. Lasers 34 203 (in Chinese) [臧二军, 曹建平, 李烨, 邓勇开, 杨涛, 李成阳, 李文博 2007 中国激光 34 203]

    [18]

    Born M, Wolf E 1992 Principles of Optics (7th Ed.) (Cambridge: Press of University of Cambridge) p92

    [19]

    Schwarz D, Wormeester H, Poelsema B 2011 Thin Solid Films 519 2994

    [20]

    Wu C M, Lawall J, Deslattes R D 1999 Appl. Opt. 38 4089

    [21]

    Ellis J D, Meskers A J, Spronck J W, Munning R H 2011 Opt. Lett. 36 3584

    [22]

    Hu P C, Chen P, Ding X M, Tan J B 2014 Appl. Opt. 53 5448

    [23]

    Pdooer P, Zaman Khan T, Haque Khan M, Muktadir Rahman M 2014 Int. J. Computer Appl. 96 1

  • [1] 方波浪, 王建国, 冯国斌. 基于物理信息神经网络的光斑质心计算. 物理学报, 2022, 0(0): . doi: 10.7498/aps.71.20220670
    [2] 孙思彤, 丁应星, 刘伍明. 基于线性与非线性干涉仪的量子精密测量研究进展. 物理学报, 2022, 71(13): 130701. doi: 10.7498/aps.71.20220425
    [3] 孙腾飞, 卢鹏, 卓壮, 张文浩, 卢景琦. 基于单一分光棱镜干涉仪的双通路定量相位显微术. 物理学报, 2018, 67(14): 140704. doi: 10.7498/aps.67.20172722
    [4] 苗银萍, 靳伟, 杨帆, 林粤川, 谭艳珍, 何海律. 光纤光热干涉气体检测技术研究进展. 物理学报, 2017, 66(7): 074212. doi: 10.7498/aps.66.074212
    [5] 彭博栋, 宋岩, 盛亮, 王培伟, 黑东炜, 赵军, 李阳, 张美, 李奎念. 辐射致折射率变化用于MeV级脉冲辐射探测的初步研究. 物理学报, 2016, 65(15): 157801. doi: 10.7498/aps.65.157801
    [6] 郑东晖, 李金鹏, 陈磊, 朱文华, 韩志刚, 乌兰图雅, 郭仁慧. 空域移相偏振点衍射波前检测技术. 物理学报, 2016, 65(11): 114203. doi: 10.7498/aps.65.114203
    [7] 刘国栋, 许新科, 刘炳国, 陈凤东, 胡涛, 路程, 甘雨. 基于振动抑制高精度宽带激光扫频干涉测量方法. 物理学报, 2016, 65(20): 209501. doi: 10.7498/aps.65.209501
    [8] 王峰, 彭晓世, 薛全喜, 徐涛, 魏惠月. 基于神光III原型的整形激光直接驱动准等熵压缩实验研究. 物理学报, 2015, 64(8): 085202. doi: 10.7498/aps.64.085202
    [9] 易仕和, 陈植. 隔离段激波串流场特征的试验研究进展. 物理学报, 2015, 64(19): 199401. doi: 10.7498/aps.64.199401
    [10] 许新科, 刘国栋, 刘炳国, 陈凤东, 庄志涛, 甘雨. 基于光纤色散相位补偿的高分辨率激光频率扫描干涉测量研究. 物理学报, 2015, 64(21): 219501. doi: 10.7498/aps.64.219501
    [11] 王峰, 彭晓世, 单连强, 李牧, 薛全喜, 徐涛, 魏惠月. 基于神光Ⅲ原型装置的激光加载条件下准等熵压缩实验研究进展. 物理学报, 2014, 63(18): 185202. doi: 10.7498/aps.63.185202
    [12] 钟诚, 陈智全, 杨伟国, 夏辉. 电解质对浓悬浮液中胶体颗粒扩散特性的影响. 物理学报, 2013, 62(21): 214207. doi: 10.7498/aps.62.214207
    [13] 满天龙, 万玉红, 江竹青, 王大勇, 陶世荃. 孪生光束干涉法测量光源的空间相干性. 物理学报, 2013, 62(21): 214203. doi: 10.7498/aps.62.214203
    [14] 吴学健, 尉昊赟, 朱敏昊, 张继涛, 李岩. 基于飞秒光频梳的双频He-Ne激光器频率测量. 物理学报, 2012, 61(18): 180601. doi: 10.7498/aps.61.180601
    [15] 王峰, 彭晓世, 刘慎业, 蒋小华, 徐涛, 丁永坤, 张保汉. 三明治靶型在间接驱动冲击波实验中的应用. 物理学报, 2011, 60(11): 115203. doi: 10.7498/aps.60.115203
    [16] 蔡元学, 掌蕴东, 党博石, 吴昊, 王金芳, 袁萍. 基于Ⅲ-Ⅴ与Ⅱ-Ⅵ族半导体材料色散特性的高灵敏度慢光干涉仪. 物理学报, 2011, 60(4): 040701. doi: 10.7498/aps.60.040701
    [17] 王峰, 彭晓世, 刘慎业, 李永升, 蒋小华, 丁永坤. 超高压下冲击波速度直接测量技术. 物理学报, 2011, 60(2): 025202. doi: 10.7498/aps.60.025202
    [18] 王海霞, 殷雯, 王芳卫. 耦合量子点中的纠缠测量. 物理学报, 2010, 59(8): 5241-5245. doi: 10.7498/aps.59.5241
    [19] 董一鸣, 徐云飞, 张 璋, 林 强. 复杂像散椭圆光束的轨道角动量的实验研究. 物理学报, 2006, 55(11): 5755-5759. doi: 10.7498/aps.55.5755
    [20] 祁胜文, 杨秀芹, 陈 宽, 张春平, 张连顺, 王新宇, 许 棠, 柳永亮, 张光寅. 偶氮材料——乙基橙的光致双折射特性. 物理学报, 2005, 54(7): 3189-3193. doi: 10.7498/aps.54.3189
计量
  • 文章访问数:  3335
  • PDF下载量:  259
  • 被引次数: 0
出版历程
  • 收稿日期:  2016-11-11
  • 修回日期:  2016-12-23
  • 刊出日期:  2017-03-05

跨尺度亚纳米分辨的可溯源外差干涉仪

    基金项目: 国家自然科学基金(批准号:51575311)和国家重大科学仪器设备开发专项(批准号:2014YQ09070907)资助的课题.

摘要: 提出了一种能够实现跨尺度测量具有亚纳米分辨力的可溯源外差干涉仪,利用小型化碘稳频532 nm激光器,将激光频率溯源至国际计量委员会推荐的复现米定义谱线之一的R(56)32-O(a10)上;使用双频激光空间分离的设计方法,抑制了双频激光混叠引起的测量位移非线性误差,补偿了光纤与声光调制器引入的相位噪声;通过高精度的相位测量技术,使相位测量分辨率达到了0.017.干涉仪的不确定度评估结果显示,100 mm的量程内,其不确定度达322 pm,实现了跨尺度亚纳米分辨力可溯源的位移测量.

English Abstract

参考文献 (23)

目录

    /

    返回文章
    返回