半导体自组织量子点量子发光机理与器件

尚向军; 马奔; 陈泽升; 喻颖; 查国伟; 倪海桥; 牛智川

doi:10.7498/aps.67.20180594

摘要

介绍了自组织量子点单光子发光机理及器件研究进展.主要内容包括：半导体液滴自催化外延GaAs纳米线中InAs量子点和GaAs量子点的单光子发光效应、自组织InAs/GaAs量子点与分布布拉格平面微腔耦合结构的单光子发光效应和器件制备，单量子点发光的共振荧光测量方法、量子点单光子参量下转换实现的纠缠光子发射、单光子的量子存储效应以及量子点单光子发光的光纤耦合输出芯片制备等.

关键词:

Self-assembled semiconductor single quantum dots (QDs), as a good candidate of solid-state real single photon (SP) emitters in high purity and counting rate, have attracted great attention in recent two decades, promising for quantum information, optical quantum computation, quantum storage, and quantum coherent manipulation. To isolate single QD from the other QDs surrounding, 1) dilute QD density is well controlled during epitaxy; 2) micro-pillars or nanowires individually in space as hosts are fabricated. To enhance their uni-directional emission, GaAs/AlAs distributed Bragg reflector (DBR) planar cavity is integrated. To improve the system (i.e. confocal microscope, traditionally) stability and its optical collection efficiency, a near-field fiber coupling by adhering a micro-pillar chip to fiber facets directly is used. To enhance the coherence of QD spontaneous emission, resonant excitation technique is applied. In this article, we review our research progress in self-assembled QD SP emission, including SP emission from InAs or GaAs QDs on Ga droplet-self-catalyzed GaAs nanowires (with g2(0) of 0.031 or 0.18, respectively), SP emission from InAs/GaAs QDs coupled with high-Q (1000-5000) DBR micro-pillar cavities and their fiber-coupled device fabrication with SP fiber output rate ~1.8 MHz, single QD resonant fluorescence with inter-dot coherent visibility of 40%, strain-coupled bilayer InAs QDs to extend their emission wavelength to 1320 nm and parametric down conversion of 775 nm SP emission from single QD in nanowire to realize entangled photon pairs at 1550 nm (entanglement fidelity of 91.8%) for telecomm application, and definite quantum storage of InAs QD SPs at 879 nm in ion-doped solid (at most 100 time-bins). In future, there will be still several urgent things to do, including 1) puring the environment of a single QD (e.g. growing GaAs QDs to avoid the wetting layer, and optimizing QD growth to avoid smaller QDs) to reduce its spectral diffusion and developing a high-symmetric QD (e.g. GaAs QD) to reduce the fine structure splitting of its emission; 2) positioning single QD precisely for a good alignment of single QD to a micro-cavity or fiber cone (single mode with high numerical aperture) to increase optical excitation efficiency and SP collection efficiency; 3) developing optical quantum integrated chip, including hybrid structures of active micro-cavity and passive waveguide, and high-transmission waveguide beamsplitter or Mach-Zender interferometer to improve SP extraction (micro-cavity), collection (optical setup) and counting rate (at avalanched photon detectors and coincidence counting module).

Keywords:

作者及机构信息

1.
中国科学院半导体研究所, 半导体超晶格国家重点实验室, 北京 100083;

2.
中国科学院大学材料科学与光电技术学院, 北京 100049

通信作者: 牛智川, zcniu@semi.ac.cn

基金项目: 国家自然科学基金（批准号：91321313，90921015，61505196）资助的课题.

Authors and contacts

1.
State Key Laborotory of Superlattices and Microsturctures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;

2.
College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

Corresponding author: Niu Zhi-Chuan, zcniu@semi.ac.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 91321313, 90921015, 61505196).

参考文献

[1]	Dou X M, Chang X Y, Sun B Q, Xiong Y H, Niu Z C, Huang S S, Ni H Q, Du Y, Xia J B 2008 Appl. Phys. Lett. 93 101107
[2]	Ding X, He Y, Duan Z C, Gregersen N, Chen M C, Unsleber S, Maier S, Schneider C, Kamp M, Hofling S, Lu C Y, Pan J W 2016 Phys. Rev. Lett. 116 020401
[3]	Heindel T, Schneider C, Lermer M, Kwon S H, Braun T, Reitzenstein S, Höfling S, Kamp M, Forchel A 2010 Appl. Phys. Lett. 96 011107
[4]	Hargart F, Kessler C A, Schwarzbäck T, Koroknay E, Weidenfeld S, Jetter M, Michler P 2013 Appl. Phys. Lett. 102 011126
[5]	Muller M, Bounouar S, Jons K D, Glassl M, Michler P 2014 Nat. Photon. 8 224
[6]	Wang H, Duan Z C, Li Y H, Chen S, Li J P, He Y M, Chen M C, He Y, Ding X, Peng C Z, Schneider C, Kamp M, Hofling S, Lu C Y, Pan J W 2016 Phys. Rev. Lett. 116 213601
[7]	He Y, He Y M, Wei Y J, Jiang X, Chen M C, Xiong F L, Zhao Y, Schneider C, Kamp M, Hofling S, Lu C Y, Pan J W 2013 Phys. Rev. Lett. 111 237403
[8]	Keil R, Zopf M, Chen Y, Hofer B, Zhang J X, Ding F, Schmidt O G 2017 Nat. Comm. 8 15501
[9]	Chen Y, Zhang J X, Zopf M, Jung K, Zhang Y, Keil R, Ding F, Schmidt O G 2016 Nat. Comm. 7 10387
[10]	Chen Z S, Ma B, Shang X J, Ni H Q, Wang J L, Niu Z C 2017 Nanoscale Research Lett. 12 378
[11]	Ma B, Chen Z S, Wei S H, Shang X J, Ni H Q, Niu Z C 2017 Appl. Phys. Lett. 110 142104
[12]	Zha G W, Shang X J, Su D, Yu Y, Wei B, Wang L, Li M F, Wang L J, Xu J X, Ni H Q, Ji Y, Sun B Q, Niu Z C 2014 Nanoscale 6 3190
[13]	Yu Y, Li M F, He J F, He Y M, Wei Y J, He Y, Zha G W, Shang X J, Wang J, Wang G W, Ni H Q, Lu C Y, Niu Z C 2013 Nano Lett. 13 1399
[14]	Yu Y, Dou X M, Wei B, Zha G W, Shang X J, Wang L, Su D, Xu J X, Wang H Y, Ni H Q, Sun B Q, Ji Y, Han X D, Niu Z C 2014 Adv. Mater. 26 2710
[15]	Zha G W, Shang X J, Ni H Q, Yu Y, Xu J X, Wei S H, Ma B, Zhang L C, Niu Z C 2015 Nanotechnology 26 385706
[16]	Tang J S, Zhou Z Q, Wang Y T, Li Y L, Liu X, Hua Y L, Zou Y, Wang S, He D Y, Chen G, Sun Y N, Yu Y, Li M F, Zha G W, Ni H Q, Niu Z C, Li C F, Guo G C 2015 Nat. Comm. 6 8652
[17]	Konthasinghe K, Peiris M, Yu Y, Li M F, He J F, Wang L J, Ni H Q, Niu Z C, Shih C K, Muller A 2012 Phys. Rev. Lett. 109 267402
[18]	Konthasinghe K, Walker J, Peiris M, Shih C K, Yu Y, Li M F, He J F, Wang L J, Ni H Q, Niu Z C, Muller A 2012 Phys. Rev. B 85 235315
[19]	Peiris M, Konthasinghe K, Yu Y, Niu Z C, Muller A 2014 Phys. Rev. B 89 155305
[20]	Chen G, Zou Y, Xu X Y, Tang J S, Li Y L, Xu J S, Han Y J, Li C F, Guo G C, Ni H Q, Yu Y, Li M F, Zha G W, Niu Z C, Kedem Y 2014 Phys. Rev. X 4 021043
[21]	Chen G, Zou Y, Zhang W H, Zhang Z H, Zhou Z Q, He D Y, Tang J S, Liu B H, Yu Y, Zha G W, Ni H Q, Niu Z C, Han Y J, Li C F, Guo G C 2016 Sci. Rep. 6 26680
[22]	Shang X J, Xu J X, Ma B, Chen Z S, Wei S H, Li M F, Zha G W, Zhang L C, Yu Y, Ni H Q, Niu Z C 2016 Chin. Phys. B 25 107805
[23]	Zhou P Y, Dou X M, Wu X F, Ding K, Li M F, Ni H Q, Niu Z C, Jiang D S, Sun B Q 2014 Sci. Rep. 4 3633
[24]	Michler P, Kiraz A, Zhang L, Becher C, Hu E, Imamoglu A 2000 Appl. Phys. Lett. 77 184

施引文献

[1]	Dou X M, Chang X Y, Sun B Q, Xiong Y H, Niu Z C, Huang S S, Ni H Q, Du Y, Xia J B 2008 Appl. Phys. Lett. 93 101107
[2]	Ding X, He Y, Duan Z C, Gregersen N, Chen M C, Unsleber S, Maier S, Schneider C, Kamp M, Hofling S, Lu C Y, Pan J W 2016 Phys. Rev. Lett. 116 020401
[3]	Heindel T, Schneider C, Lermer M, Kwon S H, Braun T, Reitzenstein S, Höfling S, Kamp M, Forchel A 2010 Appl. Phys. Lett. 96 011107
[4]	Hargart F, Kessler C A, Schwarzbäck T, Koroknay E, Weidenfeld S, Jetter M, Michler P 2013 Appl. Phys. Lett. 102 011126
[5]	Muller M, Bounouar S, Jons K D, Glassl M, Michler P 2014 Nat. Photon. 8 224
[6]	Wang H, Duan Z C, Li Y H, Chen S, Li J P, He Y M, Chen M C, He Y, Ding X, Peng C Z, Schneider C, Kamp M, Hofling S, Lu C Y, Pan J W 2016 Phys. Rev. Lett. 116 213601
[7]	He Y, He Y M, Wei Y J, Jiang X, Chen M C, Xiong F L, Zhao Y, Schneider C, Kamp M, Hofling S, Lu C Y, Pan J W 2013 Phys. Rev. Lett. 111 237403
[8]	Keil R, Zopf M, Chen Y, Hofer B, Zhang J X, Ding F, Schmidt O G 2017 Nat. Comm. 8 15501
[9]	Chen Y, Zhang J X, Zopf M, Jung K, Zhang Y, Keil R, Ding F, Schmidt O G 2016 Nat. Comm. 7 10387
[10]	Chen Z S, Ma B, Shang X J, Ni H Q, Wang J L, Niu Z C 2017 Nanoscale Research Lett. 12 378
[11]	Ma B, Chen Z S, Wei S H, Shang X J, Ni H Q, Niu Z C 2017 Appl. Phys. Lett. 110 142104
[12]	Zha G W, Shang X J, Su D, Yu Y, Wei B, Wang L, Li M F, Wang L J, Xu J X, Ni H Q, Ji Y, Sun B Q, Niu Z C 2014 Nanoscale 6 3190
[13]	Yu Y, Li M F, He J F, He Y M, Wei Y J, He Y, Zha G W, Shang X J, Wang J, Wang G W, Ni H Q, Lu C Y, Niu Z C 2013 Nano Lett. 13 1399
[14]	Yu Y, Dou X M, Wei B, Zha G W, Shang X J, Wang L, Su D, Xu J X, Wang H Y, Ni H Q, Sun B Q, Ji Y, Han X D, Niu Z C 2014 Adv. Mater. 26 2710
[15]	Zha G W, Shang X J, Ni H Q, Yu Y, Xu J X, Wei S H, Ma B, Zhang L C, Niu Z C 2015 Nanotechnology 26 385706
[16]	Tang J S, Zhou Z Q, Wang Y T, Li Y L, Liu X, Hua Y L, Zou Y, Wang S, He D Y, Chen G, Sun Y N, Yu Y, Li M F, Zha G W, Ni H Q, Niu Z C, Li C F, Guo G C 2015 Nat. Comm. 6 8652
[17]	Konthasinghe K, Peiris M, Yu Y, Li M F, He J F, Wang L J, Ni H Q, Niu Z C, Shih C K, Muller A 2012 Phys. Rev. Lett. 109 267402
[18]	Konthasinghe K, Walker J, Peiris M, Shih C K, Yu Y, Li M F, He J F, Wang L J, Ni H Q, Niu Z C, Muller A 2012 Phys. Rev. B 85 235315
[19]	Peiris M, Konthasinghe K, Yu Y, Niu Z C, Muller A 2014 Phys. Rev. B 89 155305
[20]	Chen G, Zou Y, Xu X Y, Tang J S, Li Y L, Xu J S, Han Y J, Li C F, Guo G C, Ni H Q, Yu Y, Li M F, Zha G W, Niu Z C, Kedem Y 2014 Phys. Rev. X 4 021043
[21]	Chen G, Zou Y, Zhang W H, Zhang Z H, Zhou Z Q, He D Y, Tang J S, Liu B H, Yu Y, Zha G W, Ni H Q, Niu Z C, Han Y J, Li C F, Guo G C 2016 Sci. Rep. 6 26680
[22]	Shang X J, Xu J X, Ma B, Chen Z S, Wei S H, Li M F, Zha G W, Zhang L C, Yu Y, Ni H Q, Niu Z C 2016 Chin. Phys. B 25 107805
[23]	Zhou P Y, Dou X M, Wu X F, Ding K, Li M F, Ni H Q, Niu Z C, Jiang D S, Sun B Q 2014 Sci. Rep. 4 3633
[24]	Michler P, Kiraz A, Zhang L, Becher C, Hu E, Imamoglu A 2000 Appl. Phys. Lett. 77 184

[1]	危语嫣, 高子凯, 王思颖, 朱雅静, 李涛. 基于单光子双量子态的确定性安全量子通信. 物理学报, 2022, 71(5): 050302. doi: 10.7498/aps.71.20210907
[2]	赵宁, 江英华, 周贤韬. 基于单光子的高效量子安全直接通信方案. 物理学报, 2022, 71(15): 150304. doi: 10.7498/aps.71.20220202
[3]	危语嫣, 高子凯, 王思颖, 朱雅静, 李涛. 基于单光子双量子态的确定性的安全量子通讯. 物理学报, 2021, (): . doi: 10.7498/aps.70.20210907
[4]	张柏富, 朱康, 武恒, 胡海峰, 沈哲, 许吉. 双凹型谐振腔结构的金属半导体纳米激光器的数值仿真. 物理学报, 2019, 68(22): 224201. doi: 10.7498/aps.68.20190972
[5]	白鹏, 张月蘅, 沈文忠. 半导体上转换单光子探测技术研究进展. 物理学报, 2018, 67(22): 221401. doi: 10.7498/aps.67.20180618
[6]	黄科, 李松, 马跃, 田昕, 周辉, 张智宇. 单光子激光测距的漂移误差理论模型及补偿方法. 物理学报, 2018, 67(6): 064205. doi: 10.7498/aps.67.20172228
[7]	刘志昊, 陈汉武. 基于Bell态粒子和单光子混合的量子安全直接通信方案的信息泄露问题. 物理学报, 2017, 66(13): 130304. doi: 10.7498/aps.66.130304
[8]	张森, 陶旭, 冯志军, 吴淦华, 薛莉, 闫夏超, 张蜡宝, 贾小氢, 王治中, 孙俊, 董光焰, 康琳, 吴培亨. 超导单光子探测器暗计数对激光测距距离的影响. 物理学报, 2016, 65(18): 188501. doi: 10.7498/aps.65.188501
[9]	曹正文, 赵光, 张爽浩, 冯晓毅, 彭进业. 基于Bell态粒子和单光子混合的量子安全直接通信方案. 物理学报, 2016, 65(23): 230301. doi: 10.7498/aps.65.230301
[10]	张佳, 徐旭明, 何灵娟, 于天宝, 郭浩. 基于光子晶体共振耦合的四波长波分复用/解复用器. 物理学报, 2012, 61(5): 054213. doi: 10.7498/aps.61.054213
[11]	王晶晶, 何博, 于波, 刘岩, 王晓波, 肖连团, 贾锁堂. 单光子调制锁定Fabry-Perot腔. 物理学报, 2012, 61(20): 204203. doi: 10.7498/aps.61.204203
[12]	周长柱, 王晨, 李志远. 硅基二维平板光子晶体高Q微腔的制作和光谱测量. 物理学报, 2012, 61(1): 014214. doi: 10.7498/aps.61.014214
[13]	周渝, 张蜡宝, 郏涛, 赵清源, 顾敏, 邱健, 康琳, 陈健, 吴培亨. 超导纳米线多光子响应特性研究. 物理学报, 2012, 61(20): 208501. doi: 10.7498/aps.61.208501
[14]	陈翔, 米贤武. 量子点腔系统中抽运诱导受激辐射与非谐振腔量子电动力学特性的研究. 物理学报, 2011, 60(4): 044202. doi: 10.7498/aps.60.044202
[15]	张蜡宝, 康琳, 陈健, 赵清源, 郏涛, 许伟伟, 曹春海, 金飚兵, 吴培亨. 超导纳米线单光子探测器. 物理学报, 2011, 60(3): 038501. doi: 10.7498/aps.60.038501
[16]	柯熙政, 卢宁, 杨秦岭. 单光子轨道角动量的传输特性研究. 物理学报, 2010, 59(9): 6159-6163. doi: 10.7498/aps.59.6159
[17]	权东晓, 裴昌幸, 刘丹, 赵楠. 基于单光子的单向量子安全通信协议. 物理学报, 2010, 59(4): 2493-2497. doi: 10.7498/aps.59.2493
[18]	杨磊, 李小英, 王宝善. 利用光纤中自发四波混频产生纠缠光子的实验装置. 物理学报, 2008, 57(8): 4933-4940. doi: 10.7498/aps.57.4933
[19]	卢励吾, 王占国, C.L.Yang, J.Wang, Z.H.Ma, I.K.Sou, WeikunGe. 分子束外延生长ZnSe自组织量子点光、电行为研究. 物理学报, 2002, 51(2): 310-314. doi: 10.7498/aps.51.310
[20]	肖君军, 孙超, 薛德胜, 李发伸. 铁纳米线磁行为的微磁学模拟与研究. 物理学报, 2001, 50(8): 1605-1609. doi: 10.7498/aps.50.1605

计量

文章访问数: 7132
PDF下载量: 151
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板