光纤飞秒激光五倍频产生206 nm深紫外激光

石凉竹; 张萌; 储玉喜; 刘博文; 胡明列

doi:10.7498/aps.72.20230877

摘要

深紫外飞秒激光兼具深紫外激光单光子能量高和飞秒激光峰值功率高的优势, 这使得深紫外飞秒激光在半导体晶圆检测和角分辨光电子能谱等领域被广泛应用, 但是色散导致的群速度失配使得深紫外飞秒激光的输出变得十分困难, 本文基于掺镱光纤飞秒激光器, 实现了一种基于延迟线的深紫外飞秒激光脉冲产生方案. 通过优化延迟线精确补偿时间走离, 基于掺镱飞秒光纤激光五倍频获得了重复频率为1 MHz、中心波长为206 nm的深紫外飞秒激光输出, 其平均功率102 mW, 从近红外到深紫外的转换效率为4.25%.

关键词:

Abstract

Deep ultraviolet (DUV) femtosecond laser, which combines the advantages of high single-photon energy of DUV laser with high peak power of femtosecond laser, is widely used in scientific research, biomedicine, material processing and so on. However, in the process of generating DUV femtosecond laser based on nonlinear frequency conversion is encountered a problem that the group velocity mismatch caused by dispersion makes the temporal walk-off of the nonlinear frequency conversion larger than the pulse duration of the femtosecond laser, thus making the generation of the DUV femtosecond laser very difficult. In this work, based on a Yb-doped fiber femtosecond laser, the delay line is optimized to precisely compensate for the spatial and temporal walk-off, so DUV femtosecond laser possesses the following performances: the center wavelength is 206 nm, the repetition rate is 1 MHz, the maximum output power is 102 mW, the maximum conversion efficiency is 4.25% from near infrared to DUV, the root mean square (RMS) power stability is 0.88% within 3 h, and the peak-to-peak power stability is 3.75%. The evolution of laser spectra and beam quality in the process of second harmonic generation (SHG), fourth harmonic generation (FHG) and sum-frequency generation (SFG) are also systematically studied. The experimental results provide a basis for generating DUV femtosecond laser from femtosecond fiber lasers.

Keywords:

作者及机构信息

天津大学, 精密仪器与光电子工程学院超快激光研究室, 光电信息技术教育部重点实验室, 天津　300072

通信作者: 胡明列, huminglie@tju.edu.cn

基金项目: 国家自然科学基金(批准号: 61805174, 61535009, 61827821, 61377041, 11527808, U1730115)、广东省重点领域研发计划(批准号: 2020B090922004)和天津市自然科学基金(批准号: 20JCQNJC01180)资助的课题.

Authors and contacts

Key Laboratory of Opto-Electronic Information Technology (Ministry of Education), Ultrafast Laser Laboratory, College of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China

Corresponding author: Hu Ming-Lie, huminglie@tju.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61805174, 61535009, 61827821, 61377041, 11527808, U1730115), the Research and Development Plan in Key Fields of Guangdong Province, China (Grant No. 2020B090922004), and the Natural Science Foundation of Tianjin, China (Grant No. 20JCQNJC01180).

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参考文献

[1]	Tuschel D D, Mikhonin A V, Lemoff B E, Asher S A 2010 Appl. Spectrosc. 64 425 Google Scholar
[2]	Kang Y F, Zhao J Y, Wu J X, Zhang L, Zhao J, Zhang Y Q, Zhao Y Q, Wang X F 2020 IEEE T. Electron Dev. 67 3391 Google Scholar
[3]	Herman P R, Marjoribanks R S, Oettl A, Chen K, Konovalov I, Ness S 2000 Appl. Surf. Sci. 154 577
[4]	Stern R S, Zierler S, Parrish J A 1980 Lancet 315 732 Google Scholar
[5]	Vengris M, Gabryte E, Aleknavicius A, Barkauskas M, Ruksenas O, Vaiceliunaite A, Danielius R 2010 J. Cataract Refract. Surg. 36 1579 Google Scholar
[6]	Kohler B, Andres T, Nebel A, Wallenstein R 2000 Conference on Lasers and Electro-Optics San Jose, The United States of America, May 9, 2000 p142
[7]	Turcicova H, Novak O, Roskot L, Smrz M, Mocek T 2019 Opt. Express 27 24286 Google Scholar
[8]	Willenberg B, Brunner F, Phillips C R, Keller U 2020 Optica 7 485 Google Scholar
[9]	Chu Y X, Zhang X D, Chen B B, Wang J Z, Yang J H, Jiang R, Hu M L 2021 Opt. Laser Technol. 134 1
[10]	Willenberg B, Brunner F, Phillips C R, Keller U 2019 Conference on Lasers and Electro-Optics San Jose, USA, March 16, 2019 p1
[11]	Cui Z J, Sun M Y, Liu D A, Zhu J Q 2022 Opt. Express 30 43354 Google Scholar
[12]	Fu X Y, Chen Z D, Han D D, Zhang Y L, Xia H, Sun H B 2020 Photonics Res. 8 577 Google Scholar
[13]	Yan D Y, Liu B W, Chu Y X, Song H Y, Chai L, Hu M L, Wang Q Y 2019 Chin. Opt. Lett. 17 041404 Google Scholar
[14]	Zhang X, Wang Z M, Luo S Y, Wang G L, Zhu Y, Xu Z Y, Chen C T 2011 Appl. Phys. B 102 825 Google Scholar
[15]	Wang G L, Wang X Y, Zhou Y, Li C M, Zhu Y, Xu Z Y, Chen C T 2008 Appl. Opt. 47 486 Google Scholar
[16]	孟祥昊, 刘华刚, 黄见洪, 戴殊韬, 邓晶, 阮开明, 陈金明, 林文雄 2015 物理学报 64 164205 Google Scholar Meng X H, Liu H G, Huang J H, Dai S T, Deng J, Ruan K M, Chen J M, Lin W X 2015 Acta Phys. Sin. 64 164205 Google Scholar
[17]	Susnjar P, Demidovich A, Kurdi G, Cinquegrana P, Nikolov I, Sigalotti P, Danailov M B 2023 Opt. Commun. 528 129031 Google Scholar
[18]	Otsu T, Ishida Y, Ozawa A, Shin S, Kobayashi Y 2014 19th International Conference on Ultrafast Phenomena OSA Technical Digest (online), July 7, 2014 p1 Otsu T, Ishida Y, Ozawa A, Shin S, Kobayashi Y 2014 19th International Conference on Ultrafast Phenomena OSA Technical Digest (online), July 7, 2014 p1
[19]	Chaitanya N A, Aadhi A, Jabir M V, Samanta G K 2015 Opt. Lett. 40 4269 Google Scholar
[20]	Liu H G, Hu M L, Liu B W, Song Y J, Chai L, Wang Q Y 2010 J. Opt. Soc. Am. B: Opt. Phys. 27 2284
[21]	Ran Q D, Short J S, Wang Q J, Li H 2023 Front. Phys. 10 1391

施引文献

图 1 实验装置示意图. λ/2, 半波片; TFP, 薄膜偏振片; M₁—M₅, 1030 nm反射镜; M₆, M₇, 515 nm反射镜; F₁, 450 mm透镜; F₂, 125 mm透镜; F₃, 150 mm透镜; DM₁, DM₂, 双色镜; SHG, 3 mm LBO倍频晶体; FHG, 1 mm BBO四倍频晶体; FiHG, 1 mm BBO五倍频晶体; PP, 佩林布洛卡棱镜

Fig. 1. Schematic of experimental setup. λ/2, half-wave plate; TFP, thin-film polarizer; M₁—M₅, plano mirror at 1030 nm; M₆, M₇, plano mirror at 515 nm; F₁, 450 mm lenses; F₂, 125 mm lenses; F₃, 150 mm lenses; DM₁, DM₂, dichroic mirror; SHG, second harmonic generation, 3 mm LBO crystal; FHG, fourth harmonic generation, 1 mm BBO crystal; FiHG, fifth harmonic generation, 1 mm BBO crystal; PP, Pellin-Broca prism.

下载: 全尺寸图片幻灯片

图 2 (a) 基频光光谱图; (b) 基频光脉宽图, 插图为近场光斑图

Fig. 2. (a) Spectrum of the fundamental frequency laser; (b) pulse width of the fundamental frequency laser, and the inset is the near-field beam profile of the fundamental frequency laser.

下载: 全尺寸图片幻灯片

图 3 (a) 倍频光的平均功率和倍频转换效率随入射基频光功率变化关系图, 插图为最高平均功率输出时倍频光的近场光斑图; (b) 倍频光光谱图

Fig. 3. (a) Average output power and conversion efficiency of the SH beam as functions of the fundamental power, inset, the near-field beam profile of the SH beam at maximum average power output; (b) spectrum of the SH.

下载: 全尺寸图片幻灯片

图 4 (a) 四倍频光的平均功率和四倍频转换效率随入射基频光功率变化关系图, 插图为最高功率输出时的四倍频光光斑图; (b) 四倍频光光谱图

Fig. 4. (a) Average output power and conversion efficiency of the FH beam as functions of the fundamental power. Inset, the near-field beam profile of the FH beam at maximum average power output; (b) spectrum of the FH.

下载: 全尺寸图片幻灯片

图 5 (a) 五倍频光的平均功率和五倍频转换效率随入射基频光功率变化关系图, 插图为最高功率输出时的五倍频光光斑图; (b) 五倍频光的平均功率随延迟线系统位置变化关系图, 插图为BBO晶体表面膜损伤; (c) 五倍频光谱图; (d) 功率稳定性测试

Fig. 5. (a) Average output power and conversion efficiency of the FiH beam as functions of the fundamental power, inset, the near-field beam profile of the FiH beam at maximum average power output; (b) average output power of the FiH beam as functions of the location. Inset, damage to the surface film of the BBO crystal; (c) spectrum of the FiH; (d) power stability tests.

下载: 全尺寸图片幻灯片

表 1 基频光和四倍频光之间的时间走离

Table 1. Delay time between fourth harmonic and fundamental frequency laser.

LBO F₂ F₃ BBO (FHG) BBO (FiHG)

Δt/fs 155.8 337.6 409.2 1042.5 1327.1

下载: 导出CSV

[1]	Tuschel D D, Mikhonin A V, Lemoff B E, Asher S A 2010 Appl. Spectrosc. 64 425 Google Scholar
[2]	Kang Y F, Zhao J Y, Wu J X, Zhang L, Zhao J, Zhang Y Q, Zhao Y Q, Wang X F 2020 IEEE T. Electron Dev. 67 3391 Google Scholar
[3]	Herman P R, Marjoribanks R S, Oettl A, Chen K, Konovalov I, Ness S 2000 Appl. Surf. Sci. 154 577
[4]	Stern R S, Zierler S, Parrish J A 1980 Lancet 315 732 Google Scholar
[5]	Vengris M, Gabryte E, Aleknavicius A, Barkauskas M, Ruksenas O, Vaiceliunaite A, Danielius R 2010 J. Cataract Refract. Surg. 36 1579 Google Scholar
[6]	Kohler B, Andres T, Nebel A, Wallenstein R 2000 Conference on Lasers and Electro-Optics San Jose, The United States of America, May 9, 2000 p142
[7]	Turcicova H, Novak O, Roskot L, Smrz M, Mocek T 2019 Opt. Express 27 24286 Google Scholar
[8]	Willenberg B, Brunner F, Phillips C R, Keller U 2020 Optica 7 485 Google Scholar
[9]	Chu Y X, Zhang X D, Chen B B, Wang J Z, Yang J H, Jiang R, Hu M L 2021 Opt. Laser Technol. 134 1
[10]	Willenberg B, Brunner F, Phillips C R, Keller U 2019 Conference on Lasers and Electro-Optics San Jose, USA, March 16, 2019 p1
[11]	Cui Z J, Sun M Y, Liu D A, Zhu J Q 2022 Opt. Express 30 43354 Google Scholar
[12]	Fu X Y, Chen Z D, Han D D, Zhang Y L, Xia H, Sun H B 2020 Photonics Res. 8 577 Google Scholar
[13]	Yan D Y, Liu B W, Chu Y X, Song H Y, Chai L, Hu M L, Wang Q Y 2019 Chin. Opt. Lett. 17 041404 Google Scholar
[14]	Zhang X, Wang Z M, Luo S Y, Wang G L, Zhu Y, Xu Z Y, Chen C T 2011 Appl. Phys. B 102 825 Google Scholar
[15]	Wang G L, Wang X Y, Zhou Y, Li C M, Zhu Y, Xu Z Y, Chen C T 2008 Appl. Opt. 47 486 Google Scholar
[16]	孟祥昊, 刘华刚, 黄见洪, 戴殊韬, 邓晶, 阮开明, 陈金明, 林文雄 2015 物理学报 64 164205 Google Scholar Meng X H, Liu H G, Huang J H, Dai S T, Deng J, Ruan K M, Chen J M, Lin W X 2015 Acta Phys. Sin. 64 164205 Google Scholar
[17]	Susnjar P, Demidovich A, Kurdi G, Cinquegrana P, Nikolov I, Sigalotti P, Danailov M B 2023 Opt. Commun. 528 129031 Google Scholar
[18]	Otsu T, Ishida Y, Ozawa A, Shin S, Kobayashi Y 2014 19th International Conference on Ultrafast Phenomena OSA Technical Digest (online), July 7, 2014 p1 Otsu T, Ishida Y, Ozawa A, Shin S, Kobayashi Y 2014 19th International Conference on Ultrafast Phenomena OSA Technical Digest (online), July 7, 2014 p1
[19]	Chaitanya N A, Aadhi A, Jabir M V, Samanta G K 2015 Opt. Lett. 40 4269 Google Scholar
[20]	Liu H G, Hu M L, Liu B W, Song Y J, Chai L, Wang Q Y 2010 J. Opt. Soc. Am. B: Opt. Phys. 27 2284
[21]	Ran Q D, Short J S, Wang Q J, Li H 2023 Front. Phys. 10 1391

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光纤飞秒激光五倍频产生206 nm深紫外激光