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高稳定双频激光光源是实现国家超精密测量能力的关键技术, 也是支撑高端装备制造质量的基石. 本文基于双声光调制方案搭建了高稳定双频激光光源及其频差稳定性评估系统. 通过研究双声光调制生成双频激光的机理, 逐级构建了频差稳定性劣化模型, 并针对性地进行了技术改进. 研究表明, 双频激光光源的频率稳定性与双频频差稳定性均会影响外差干涉测量的精度, 而双频频差稳定性由射频信号稳定性和功率放大器非线性失真决定. 本文通过设计高阶谐波滤除技术和基于铷钟的高稳定射频发生器, 将频差稳定性优化至9×10–11@1 s, 6×10–10@1000 s, 双频频差稳定性对外差干涉测量精度的影响降低至亚飞米量级. 此时, 双频激光光源的频差稳定性指标充分满足皮米级激光干涉测量应用需求. 结合当前最先进的超稳腔稳频技术, 本文高稳定双频激光光源可以支持皮米甚至飞米级精度的外差干涉测量, 在超精密测量等领域具有重要应用前景.A high-stability dual-frequency laser source is a key technology for achieving national ultra-precision measurement capability and also the foundation for supporting the quality of high-end equipment manufacturing. In this work, a high-stability dual-frequency laser source and its frequency difference stability evaluation system are both built based on a double acousto-optic modulation scheme. By investigating the mechanism of generating dual-frequency laser based on double acousto-optic modulation, a degradation model of frequency difference stability is constructed, and targeted technical improvements are implemented. The study shows that the frequency stability of the dual-frequency laser source and the stability of the frequency difference both affect the accuracy of heterodyne interference measurement. The frequency difference stability is determined by factors such as the stability of RF signal and the nonlinear distortion of the power amplifier. This study first optimizes the frequency difference stability to 7.5×10–10 for 1s operation and 1.2×10–9 for 1000s operation by designing a high-order harmonic filtering technique. Then, the DG 4202 RF generator is replaced with a rubidium-clock-based high-stability RF signal generator, thus further optimizing the frequency difference stability to 9×10–11 for 1s operation and 6×10–10 for 1000s operation. The influence of dual-frequency frequency difference stability on heterodyne interference measurement accuracy is reduced to the sub-femtometer level. And the frequency difference stability of the dual-frequency laser source fully meets the application requirements of picometer-level laser interference measurement. Combined with the most advanced frequency stabilization technology using ultra-stable cavity, our high-stability dual-frequency laser source can support heterodyne interference measurement with picometer or even femtometer-level accuracy, demonstrating significant potential for applications in fields such as ultra-precision measurements.
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Keywords:
- dual-frequency laser /
- frequency difference stability /
- heterodyne interference measurement
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图 1 双声光调制双频激光干涉测量系统整体框架图(Phase register为相位累加器; PTDC为脉冲时间数字转换器; DAC为数字-模拟转换器; IF Filter为中频滤波器; RF Filter为射频滤波器; 信号处理系统为正交锁相解调与相位细分)
Fig. 1. Overall framework diagram of dual frequency laser measurement system generated by dual AOM (PTDC represents pulse-time digital converter; DAC represents digital-to-analog converter; IF filter represents intermediate frequency filter; RF filter represents radio frequency filter; Signal processing system represents quadrature phase-locked calculation and phase subdivision).
图 2 (a)位移测量误差与双频频差短期波动关系图; (b)位移测量误差与双频频差长期漂移关系图
Fig. 2. (a) Relationship between position measurement error and short-term fluctuations of dual-frequency frequency difference; (b) relationship between position measurement error and long-term drift of dual-frequency frequency difference.
图 3 基于双声光调制的双频激光光源及其频差稳定性评估系统装置图(NPRO激光器为非平面环形腔激光器; PBS为偏振分束棱镜; HR为1064 nm高反射镜; AOM为声光调制器; NPBS为消偏振分束棱镜; P为检偏器; PD为光电探测器)
Fig. 3. Device diagram of the dual-frequency laser source based on double acousto-optic modulation and its frequency difference stability evaluation system. (NPRO laser represents non-planar ring oscillator laser; PBS1-2 represents polarizing beam splitter prism; HR1-3 represents 1064 nm high reflection mirror; AOM1-2 represents acousto-optic modulator; NPBS represents depolarization beam splitter prism; P represents polarizer; PD represents photodetector).
图 4 (a)未滤除高阶谐波的拍频信号频域图; (b)滤除高阶谐波后的拍频信号频域图
Fig. 4. (a) Frequency domain diagram of beat signal without high-order harmonics filtered; (b) frequency domain diagram of beat signal with high-order harmonics filtered.
图 5 基于DG 4202射频发生器的双频激光频差稳定性测试结果, 内插图为红色方框部分对应的频差稳定性短期测量结果
Fig. 5. Dual-frequency laser frequency difference stability test results based on the DG 4202 RF generator, with the inset figure showing the short-term measurement results of frequency difference stability corresponding to the red-framed section.
图 6 基于铷钟高稳定射频发生器的双频激光频差稳定性测试结果, 内插图为红色方框部分对应的频差稳定性短期测量结果
Fig. 6. Dual-frequency laser frequency difference stability test results based on a rubidium clock high-stability RF generator, with the inset figure showing the short-term measurement results of frequency difference stability corresponding to the red-framed section.
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