搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

全三维电离粒子有源像素探测器优化仿真

胡海帆 王颖 陈杰 赵士斌

引用本文:
Citation:

全三维电离粒子有源像素探测器优化仿真

胡海帆, 王颖, 陈杰, 赵士斌

Full three-dimensional simulations of optimized active pixel detector for ionizing particle detection

Hu Hai-Fan, Wang Ying, Chen Jie, Zhao Shi-Bin
PDF
导出引用
  • 提出了一种双外延高能离子注入的单片集成有源像素探测器的传感器结构,以提升传感器对电荷的收集性能和辐射加固,并进行了三维工艺模拟和物理级器件仿真计算. 研究结果表明,所提出的传感器结构改善了内部电场和电势的分布,且目标电极的电荷收集效率提高70%,电荷收集时间减少64%. 此外,当等效中子辐射流通量在1012–1015 cm-2范围内时,所提出的传感器结构比标准传感器结构有更高的电荷收集能力.
    In this paper, a double epitaxial and high energy implant (DEI) is proposed to improve the performance of charge collection and radiation hardness. Three-dimensional process procedure and physical level simulation are presented. The results show that the internal distributions of electric potential and electric field are improved; the seed point pixel collected charge increases about 70% and reduces the collected time to 64%. In addition, the DEI structure increases the collecting efficiency in a radiation range from 1012 to 1015 cm-2as compared with the standard monolithic active pixel sensors.
    • 基金项目: 教育部科学技术研究重大项目(批准号:313017)、高等学校博士学科点专项科研基金(批准号:20122304110016)和中央高等学校基本科研业务费(批准号:HEUCF130818,HEUCF140814)资助的课题.
    • Funds: Project supported by the Foundation for Key Program of the Ministry of Education, China (Grant No. 313017), the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20122304110016), and the Fundamental Research Funds for the Central Universities of China (Grant Nos. HEUCF130818, HEUCF140814).
    [1]

    E R Fossum 1997 IEEE Trans. Electron. Dev. 44 1689

    [2]

    E R Fossum 1993 Proc. SPIE 1900 2

    [3]

    Wang B, Li Y D, Guo Q, Liu C J, Wen L, Ma L Y, Sun J, Wang H J, Cong Z C, Ma W Y 2014 Acta Phys. Sin. 63 056102 (in Chinese)[汪波, 李豫东, 郭旗, 刘昌举, 文林, 玛丽娅, 孙静, 王海娇, 丛忠超, 马武英 2014 物理学报 63 056102]

    [4]

    Turchetta R, Berst J D, Casadei B, Claus G, Colledani C, Dulinski W, Hu Y, Husson D, Le Normand J P, Riester J L, Deptuch G, Goerlach U, Higueret S, Winter M 2001 Nucl. Instrum. Meth. A 458 677

    [5]

    Ma X Y, Guo Y M, Rao C H, Wei K, Tian Y, Rao X J 2012 Acta Phys. Sin. 61 242902 (in Chinese)[马晓燠, 郭友明, 饶长辉, 魏凯, 田雨, 饶学军 2012 物理学报 61 242902]

    [6]

    Ma X Y, Mu J, Rao C H 2012 Acta Phys. Sin. 61 072903 (in Chinese)[马晓燠, 郭友明, 饶长辉 2012 物理学报 61 072903]

    [7]

    Claus G, Colledani C, Deptuch G, Dulinski W, Gornushkin Y, Hu Y, Husson D, Orazi G, Turchetta R, Riester J L, Winter M 2001 Nucl. Instrum. Meth. A 473 83

    [8]

    Noschis E, Eremin V, Ruggiero G 2007 Nucl. Instrum. Meth. A 574 420

    [9]

    Dulinski W, Berst J D, Besson A, Claus G, Colledani C, Deptuch G, Deveaux M, Gay A, Grandjean D, Gornushkin Y, Himmi A, Hu C, Riester J L, Valin I, Winter M 2004 IEEE Trans. Nucl. Sci. 51 1613

    [10]

    Deptuch G, Winter M, Dulinski W, Husson D, Turchetta R, Riester J L 2001 Nucl. Instrum. Meth. A 465 92

    [11]

    Moses W W, Derenzo S E, Melcher C L, Manente R A 1995 IEEE Trans. Nucl. Sci. 42 1085

    [12]

    Niraula M, Yasuda K, Agata Y, Nakamura A, Aoki T, Hatanaka Y 2003 IEEE Nucl. Sci. Symp. Conf. Rec. 5 3320

    [13]

    Dorokhov A, Bertolone G, Baudot J, Brogna A S, Colledani C, Claus G, De Masi R, Deveaux M, Dozière G, Dulinski W, Fontaine J C, Goffe M, Himmi A, Hu-Guo Ch, Jaaskelainen K, Koziel M, Morel F, Santos C, Specht M, Valin I, Voutsinas G, Wagner F M, Winter M 2010 Nucl. Instrum. Meth. A 624 432

    [14]

    Fu M, Tang Z 2011 Nucl. Instrum. Meth. A 646 153

    [15]

    Parkera S I, Kenneya C J, Segalb J 1997 Nucl. Instrum. Meth. A 395 328

    [16]

    Piemonte C, Boscardin M, Dalla Betta G F, Ronchin S, Zorzi N 2005 Nucl. Instrum. Meth. A 541 441

    [17]

    Silvaco International 2012 Atlas3D User's Manual-Device Simulation Software

    [18]

    Silvaco International 2012 Victory Process Cell User's Manual-Device Simulation Software

    [19]

    Silvaco International 2012 Tonyplot3D User's Manual-Device Simulation Software

    [20]

    Silvaco International 2012 Maskviews User's Manual-Device Simulation Software

    [21]

    Claus G, Colledani C, Dulinski W, Husson D, Turchetta R, Riester J L, Deptuch G, Orazi G, Winter M 2001 Nucl. Instrum. Meth. A 465 120

    [22]

    Deptuch G 2005 Nucl. Instrum. Meth. A 543 537

    [23]

    Sadrozinski H F W, Betancourt C, Heffern R, Henderson I, Pixley J, Polyakov A, Wilder M, Boscardin M, Piemonte C, Pozza A, Zorzi N, Dalla Betta G F, Resta G, Bruzzi M, Macchiolo A, Borrello L, Messineo A, Creanza D, Manna N 2007 Nucl. Instrum. Meth. A 579 769

    [24]

    Gao B, Yu X F, Ren D Y, Li Y D, Cui J W, Li M S, Li M, Wang Y Y 2011 Acta Phys. Sin. 60 036106 (in Chinese) [高博, 余学峰, 任迪远, 李豫东, 崔江维, 李茂顺, 李明, 王义元 2011 物理学报 60 036106]

    [25]

    Zheng Z S, Liu Z L, Yu F, Li N 2012 Chin. Phys. B 21 116104

  • [1]

    E R Fossum 1997 IEEE Trans. Electron. Dev. 44 1689

    [2]

    E R Fossum 1993 Proc. SPIE 1900 2

    [3]

    Wang B, Li Y D, Guo Q, Liu C J, Wen L, Ma L Y, Sun J, Wang H J, Cong Z C, Ma W Y 2014 Acta Phys. Sin. 63 056102 (in Chinese)[汪波, 李豫东, 郭旗, 刘昌举, 文林, 玛丽娅, 孙静, 王海娇, 丛忠超, 马武英 2014 物理学报 63 056102]

    [4]

    Turchetta R, Berst J D, Casadei B, Claus G, Colledani C, Dulinski W, Hu Y, Husson D, Le Normand J P, Riester J L, Deptuch G, Goerlach U, Higueret S, Winter M 2001 Nucl. Instrum. Meth. A 458 677

    [5]

    Ma X Y, Guo Y M, Rao C H, Wei K, Tian Y, Rao X J 2012 Acta Phys. Sin. 61 242902 (in Chinese)[马晓燠, 郭友明, 饶长辉, 魏凯, 田雨, 饶学军 2012 物理学报 61 242902]

    [6]

    Ma X Y, Mu J, Rao C H 2012 Acta Phys. Sin. 61 072903 (in Chinese)[马晓燠, 郭友明, 饶长辉 2012 物理学报 61 072903]

    [7]

    Claus G, Colledani C, Deptuch G, Dulinski W, Gornushkin Y, Hu Y, Husson D, Orazi G, Turchetta R, Riester J L, Winter M 2001 Nucl. Instrum. Meth. A 473 83

    [8]

    Noschis E, Eremin V, Ruggiero G 2007 Nucl. Instrum. Meth. A 574 420

    [9]

    Dulinski W, Berst J D, Besson A, Claus G, Colledani C, Deptuch G, Deveaux M, Gay A, Grandjean D, Gornushkin Y, Himmi A, Hu C, Riester J L, Valin I, Winter M 2004 IEEE Trans. Nucl. Sci. 51 1613

    [10]

    Deptuch G, Winter M, Dulinski W, Husson D, Turchetta R, Riester J L 2001 Nucl. Instrum. Meth. A 465 92

    [11]

    Moses W W, Derenzo S E, Melcher C L, Manente R A 1995 IEEE Trans. Nucl. Sci. 42 1085

    [12]

    Niraula M, Yasuda K, Agata Y, Nakamura A, Aoki T, Hatanaka Y 2003 IEEE Nucl. Sci. Symp. Conf. Rec. 5 3320

    [13]

    Dorokhov A, Bertolone G, Baudot J, Brogna A S, Colledani C, Claus G, De Masi R, Deveaux M, Dozière G, Dulinski W, Fontaine J C, Goffe M, Himmi A, Hu-Guo Ch, Jaaskelainen K, Koziel M, Morel F, Santos C, Specht M, Valin I, Voutsinas G, Wagner F M, Winter M 2010 Nucl. Instrum. Meth. A 624 432

    [14]

    Fu M, Tang Z 2011 Nucl. Instrum. Meth. A 646 153

    [15]

    Parkera S I, Kenneya C J, Segalb J 1997 Nucl. Instrum. Meth. A 395 328

    [16]

    Piemonte C, Boscardin M, Dalla Betta G F, Ronchin S, Zorzi N 2005 Nucl. Instrum. Meth. A 541 441

    [17]

    Silvaco International 2012 Atlas3D User's Manual-Device Simulation Software

    [18]

    Silvaco International 2012 Victory Process Cell User's Manual-Device Simulation Software

    [19]

    Silvaco International 2012 Tonyplot3D User's Manual-Device Simulation Software

    [20]

    Silvaco International 2012 Maskviews User's Manual-Device Simulation Software

    [21]

    Claus G, Colledani C, Dulinski W, Husson D, Turchetta R, Riester J L, Deptuch G, Orazi G, Winter M 2001 Nucl. Instrum. Meth. A 465 120

    [22]

    Deptuch G 2005 Nucl. Instrum. Meth. A 543 537

    [23]

    Sadrozinski H F W, Betancourt C, Heffern R, Henderson I, Pixley J, Polyakov A, Wilder M, Boscardin M, Piemonte C, Pozza A, Zorzi N, Dalla Betta G F, Resta G, Bruzzi M, Macchiolo A, Borrello L, Messineo A, Creanza D, Manna N 2007 Nucl. Instrum. Meth. A 579 769

    [24]

    Gao B, Yu X F, Ren D Y, Li Y D, Cui J W, Li M S, Li M, Wang Y Y 2011 Acta Phys. Sin. 60 036106 (in Chinese) [高博, 余学峰, 任迪远, 李豫东, 崔江维, 李茂顺, 李明, 王义元 2011 物理学报 60 036106]

    [25]

    Zheng Z S, Liu Z L, Yu F, Li N 2012 Chin. Phys. B 21 116104

  • [1] 方靖岳, 文之豪, 朱海碧涛, 李欣幸, 邓联文. 基于集成法布里-珀罗微腔阵列的16通道快照式多光谱成像. 物理学报, 2024, 73(7): 074206. doi: 10.7498/aps.73.20231775
    [2] 董攀, 田昌, 李杰, 王韬, 于海涛, 苏明旭, 何佳龙, 石金水. 基于Mie散射在线测量真空弧放电液滴方法探索. 物理学报, 2023, 72(8): 084203. doi: 10.7498/aps.72.20222406
    [3] 江新帅, 罗尹虹, 赵雯, 张凤祁, 王坦. 阱接触对28 nm SRAM单粒子多位翻转的影响. 物理学报, 2023, 72(3): 036101. doi: 10.7498/aps.72.20221742
    [4] 杨生辉, 董明义, 渠超越, 田兴成, 董静, 吴冶, 马骁妍, 章红宇, 江晓山, 欧阳群, 李岚坤, 郑国恒. 基于单片有源像素传感器的探测模块测试研究. 物理学报, 2021, 70(17): 170702. doi: 10.7498/aps.70.20210464
    [5] 蒋伟, 江浩雨, 易晗, 樊瑞睿, 崔增琪, 孙康, 张国辉, 唐靖宇, 孙志嘉, 宁常军, 高可庆, 安琪, 白怀勇, 鲍杰, 鲍煜, 曹平, 陈昊磊, 陈琪萍, 陈永浩, 陈裕凯, 陈朕, 封常青, 顾旻皓, 韩长材, 韩子杰, 贺国珠, 何泳成, 洪杨, 黄翰雄, 黄蔚玲, 黄锡汝, 季筱璐, 吉旭阳, 姜智杰, 敬罕涛, 康玲, 康明涛, 李波, 李超, 李嘉雯, 李论, 李强, 李晓, 李样, 刘荣, 刘树彬, 刘星言, 栾广源, 穆奇丽, 齐斌斌, 任杰, 任智洲, 阮锡超, 宋朝晖, 宋英鹏, 孙虹, 孙晓阳, 谭志新, 唐洪庆, 唐新懿, 田斌斌, 王丽娇, 王鹏程, 王琦, 王涛峰, 王朝辉, 文杰, 温中伟, 吴青彪, 吴晓光, 吴煊, 解立坤, 羊奕伟, 于莉, 余滔, 于永积, 张林浩, 张奇玮, 张显鹏, 张玉亮, 张志永, 赵豫斌, 周路平, 周祖英, 朱丹阳, 朱科军, 朱鹏, CSNS Back-n合作组 . 基于反角白光中子源次级质子的探测器标定. 物理学报, 2021, 70(8): 082901. doi: 10.7498/aps.70.20201823
    [6] 高占占, 侯鹏飞, 郭红霞, 李波, 宋宏甲, 王金斌, 钟向丽. 选择性埋氧层上硅器件的单粒子瞬态响应的温度相关性. 物理学报, 2019, 68(4): 048501. doi: 10.7498/aps.68.20191932
    [7] 康健彬, 李倩, 李沫. 氮化物子带跃迁探测器材料结构对器件效率的影响. 物理学报, 2019, 68(22): 228501. doi: 10.7498/aps.68.20190722
    [8] 张天奎, 于明海, 董克攻, 吴玉迟, 杨靖, 陈佳, 卢峰, 李纲, 朱斌, 谭放, 王少义, 闫永宏, 谷渝秋. 激光高能X射线成像中探测器表征与电子影响研究. 物理学报, 2017, 66(24): 245201. doi: 10.7498/aps.66.245201
    [9] 史生才, 李婧, 张文, 缪巍. 超高灵敏度太赫兹超导探测器. 物理学报, 2015, 64(22): 228501. doi: 10.7498/aps.64.228501
    [10] 邓宁勤, 赵宝升, 盛立志, 鄢秋荣, 杨颢, 刘舵. 基于X射线的空间语音通信系统. 物理学报, 2013, 62(6): 060705. doi: 10.7498/aps.62.060705
    [11] 毕津顺, 刘刚, 罗家俊, 韩郑生. 22 nm工艺超薄体全耗尽绝缘体上硅晶体管单粒子瞬态效应研究. 物理学报, 2013, 62(20): 208501. doi: 10.7498/aps.62.208501
    [12] 张晋新, 郭红霞, 郭旗, 文林, 崔江维, 席善斌, 王信, 邓伟. 重离子导致的锗硅异质结双极晶体管单粒子效应电荷收集三维数值模拟. 物理学报, 2013, 62(4): 048501. doi: 10.7498/aps.62.048501
    [13] 王朋, 赵宝升, 盛立志, 胡慧君, 鄢秋荣. X射线脉冲星导航系统导航精度的研究. 物理学报, 2012, 61(20): 209702. doi: 10.7498/aps.61.209702
    [14] 刘永安, 鄢秋荣, 盛立志, 赵菲菲, 胡慧君, 赵宝升. 电荷云尺寸对紫外光子计数成像探测器性能的影响. 物理学报, 2011, 60(4): 048501. doi: 10.7498/aps.60.048501
    [15] 王光强, 王建国, 童长江, 李小泽, 王雪锋. 高功率太赫兹脉冲半导体探测器的分析与设计. 物理学报, 2011, 60(3): 030702. doi: 10.7498/aps.60.030702
    [16] 张蜡宝, 康琳, 陈健, 赵清源, 郏涛, 许伟伟, 曹春海, 金飚兵, 吴培亨. 超导纳米线单光子探测器. 物理学报, 2011, 60(3): 038501. doi: 10.7498/aps.60.038501
    [17] 赵菲菲, 刘永安, 胡慧君, 赵宝升. 采用Si薄膜的光子计数成像系统性能的研究. 物理学报, 2010, 59(10): 7096-7104. doi: 10.7498/aps.59.7096
    [18] 侯立飞, 李芳, 袁永腾, 杨国洪, 刘慎业. 化学气相沉积金刚石探测器测量软X射线能谱. 物理学报, 2010, 59(2): 1137-1142. doi: 10.7498/aps.59.1137
    [19] 陈贵宾, 陆 卫, 蔡炜颖, 李志锋, 陈效双, 胡晓宁, 何 力, 沈学础. HgCdTe红外探测器离子注入剂量优化研究. 物理学报, 2004, 53(3): 911-914. doi: 10.7498/aps.53.911
    [20] 王 茺, 张鹏翔, 张国勇. 高温超导体和巨磁阻薄膜激光感生热电电压的最佳膜厚研究. 物理学报, 2004, 53(6): 1727-1730. doi: 10.7498/aps.53.1727
计量
  • 文章访问数:  5019
  • PDF下载量:  766
  • 被引次数: 0
出版历程
  • 收稿日期:  2014-01-25
  • 修回日期:  2014-03-06
  • 刊出日期:  2014-05-05

/

返回文章
返回