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载能原子沉积Au/Au(100)外延薄膜生长的计算机模拟

张庆瑜 马腾才 潘正瑛 汤家镛

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载能原子沉积Au/Au(100)外延薄膜生长的计算机模拟

张庆瑜, 马腾才, 潘正瑛, 汤家镛

INVESTIGATION OF Au/Au(100)FILM GROWTH WITH ENERGETIC DEPOSITION BY KINETIC MONTE CARLO SIMULATION

ZHANG QING-YU, MA TENG-CAI, PAN ZHENG-YING, TANG JIA-YONG
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  • 在分子动力学研究的基础上建立了载能原子的沉积动力学物理模型,并根据在局域环境下的表面原子扩散模型,通过运动学Monte Carlo方法研究了载能粒子沉积Au/Au(100)薄膜的初期生长过程,探讨了载能粒子沉积对薄膜生长的影响及其随基体温度的变化.通过计算机模拟发现:载能粒子沉积的Au/Au(100)薄膜生长仍然呈现层状生长-三维岛状生长-准二维层状.在薄膜生长初期,载能粒子的作用是促进表面原子的成核,增加基体表面的缺陷;在薄膜的生长阶段,载能粒子通过抑制三维岛的生长速率起着平滑薄膜表面形貌的作用.载能粒
    The Au/Au(100) epitaxial growth with energetic deposition was simulated by using kinetic Monte Carlo method.The influences of energetic atoms on morphology and atomistic processes in the early stage of film growth were investigated.The reentrant layer-by-layer growth was observed in the temperature range of 450K to 100K.We found the energetic atoms can promote the nucleation and island growth in the early stages of film growth and enhance the smoothness of film surface at temperatures of film growth in 3-dimensional mode and in quasi-two-dimensional mode.The atomistic mechanism that promotes the nucleation and island growth and enhances the smoothness of film surface is discussed.
    • 基金项目: 国家自然科学基金(批准号:19835030)重点资助的课题.
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  • 文章访问数:  6034
  • PDF下载量:  1478
  • 被引次数: 0
出版历程
  • 收稿日期:  1999-10-07
  • 修回日期:  1999-11-24
  • 刊出日期:  2000-03-05

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