光盘上集成的液体微透镜阵列与可重构超分辨成像

谷同凯; 王兰兰; 国阳; 蒋维涛; 史永胜; 杨硕; 陈金菊; 刘红忠

doi:10.7498/aps.72.20222251

摘要

微透镜辅助显微镜实现超分辨成像观测, 具有免标记、无损伤、实时、定域和环境兼容性好等优势. 液体微透镜阵列具有均一、易操控的特性, 可实现无复杂机械扫描与驱动的超分辨成像. 然而, 简单高效地精确控制成像距离是微透镜实现超分辨成像的关键技术挑战. 本文利用紫外曝光技术, 实现了光盘上光刻胶微孔深度的均一性. 结合液体自组装技术, 在微孔中填充甘油液滴, 保证微透镜辅助超分辨的成像距离. 在光学显微镜下实现了对226 nm光栅栅线的可重构超分辨观测与1.59倍成像放大. 本文从液体微透镜的阿贝显微成像原理出发, 通过理论与模拟解释了液体微透镜的成像放大与超分辨特性. 由此可见, 光盘上集成的液体微透镜阵列在光学纳米测量与传感等器件中展现了巨大的应用潜力.

关键词:

Abstract

The microlens-assisted microscope realizes super-resolution imaging and observation, and has the advantages of no marking, no damage, real-time, localization, and good environmental compatibility. Liquid microlens arrays with uniformity and easy manipulation can realize super-resolution imaging without complicated mechanical scanning and driving. However, simply and efficiently controlling the imaging distance is a key technical challenge to the realization of super-resolution imaging of microlens. In this paper, the uniform depths of photoresist microholes on light disk are fabricated by ultraviolet exposure technology. Using liquid self-assembly technology, the microholes are filled with glycerol droplets, and thus ensuring the near-field imaging distance of the microlens. The reconfigurable super-resolution of 226-nm-wide grating line and the imaging magnification of 1.59 times are observed under the optical microscope. At present, the theory of super-resolution imaging based on microlens is not unified and perfect. In this paper, the Abbe imaging principle is used to explain the imaging magnification and super-resolution characteristics. Therefore, the liquid microlens arrays integrated on the light disk show great potential application in optical nanometer measurements and sensing devices.

Keywords:

作者及机构信息

1.
西安交通大学机械工程学院, 机械制造系统工程国家重点实验室, 西安　710054

2.
西安建筑科技大学机电工程学院, 西安　710055

3.
北京航天计量测试技术研究所, 北京　100076

4.
纽卡斯尔大学工学院, 纽卡斯尔 NE1 7RU

通信作者: 王兰兰, lanlan1900@mail.xjtu.edu.cn ; 刘红忠, hzliu@mail.xjtu.edu.cn

基金项目: 国家自然科学基金(批准号: 52075433, 52011530186, 51625504, 51827805)、陕西省重点产业链项目(批准号: 2021ZDLGY12-04)和高等学校博士学科点专项科研基金(批准号: 2016M600785, 2016BSHEDZZ126, 2018T111048)资助的课题.

Authors and contacts

1.
State Key Laboratory for Manufacturing System Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710054, China

2.
School of Mechanical and Electrical Engineering, Xi’an University of Architecture and Technology, Xi’an 710055, China

3.
Beijing Aerospace Institute for Metrology and Measurement Technology, Beijing 100076, China

4.
School of Engineering, Newcastle University, Newcastle, NE1 7RU, United Kingdom

Corresponding author: Wang Lan-Lan, lanlan1900@mail.xjtu.edu.cn ; Liu Hong-Zhong, hzliu@mail.xjtu.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 52075433, 52011530186, 51625504, 51827805), the Key Research and Development Program of Shaanxi Province, China (Grant No. 2021ZDLGY12-04), and the Specialized Research Fund for the Doctoral Program of High Education, China (Grant Nos. 2016M600785, 2016BSHEDZZ126, 2018T111048).

文章全文 : translate this paragraph

参考文献

[1]	Ling J Z, Wang Y C, Liu X, Wang X R 2021 Opt. Lett. 46 1265 Google Scholar
[2]	Chen L W, Zhou Y, Li Y, Hong M H 2019 Appl. Phys. Rev. 6 021304 Google Scholar
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施引文献

图 1 阿贝成像过程示意图

Fig. 1. Schematic diagram of the Abbe imaging process.

下载: 全尺寸图片幻灯片

图 2 光盘上液体微透镜阵列制备的示意图　(a)光盘光栅; (b)旋涂光刻胶; (c)紫外曝光; (d)疏水处理; (e)自组装过程

Fig. 2. Schematic diagram of the fabrication process of liquid microlens arrays on light disk grating: (a) Disk grating; (b) spin-on photoresist; (c) UV exposure; (d) hydrophobic treatment; (e) liquid self-assembly process.

下载: 全尺寸图片幻灯片

图 3 光盘及其观测结果　(a)通过3000×显微镜; (b)通过扫描电子显微镜

Fig. 3. Blue disk and its observation: (a) Through 3000× microscopy; (b) through SEM.

下载: 全尺寸图片幻灯片

图 4 液体自组装前后模板的共聚焦扫描结果　(a) 微孔阵列; (b)微孔轮廓和结构参数; (c)微透镜阵列; (d) 微透镜轮廓和结构参数

Fig. 4. Observation of template before and after liquid self-assembly process through CLSM: (a) Microhole arrays; (b) profile and parameters of microholes; (c) liquid microlens arrays (LMLAs); (d) profile and parameters of microlenses.

下载: 全尺寸图片幻灯片

图 5 光盘光栅的金相显微镜观测　(a) 成像示意图; (b) 实验全局图; (c) 通过微透镜阵列; (d) 未通过微透镜阵列

Fig. 5. Observation of blue disk gratings through metalloscope: (a) Schematic diagram of experiment; (b) figure of experimental equipment; (c) through LMLAs; (d) not through LMLAs.

下载: 全尺寸图片幻灯片

图 6 光盘光栅透过微透镜在5000×光学显微镜下的观测　(a) 通过微透镜阵列成像; (b) 在(a)图中蓝线对应的灰度分布

Fig. 6. Observation of blue disk gratings through 5000× microscope: (a) Image grating through LMLAs; (b) the grayscale of blue line in (a).

下载: 全尺寸图片幻灯片

图 7 液体微透镜阵列对光盘光栅的可重构超分辨成像

Fig. 7. Reconstructable super-resolution imaging of optical disk gratings by LMLA.

下载: 全尺寸图片幻灯片

图 8 光盘上液体微透镜成像过程的模拟　(a)设置物光栅; (b)微透镜所在平面光强分布; (c)微透镜焦平面光强分布; (d)匹配滤波器

Fig. 8. Simulation of imaging process of liquid microlens on blue disk: (a) Set gratings; (b) light intensity of microlens surface; (c) light intensity of microlens focal plane; (d) light wave filter.

下载: 全尺寸图片幻灯片

图 9 光盘光栅再现像与剖线　(a)未用滤波器的再现像; (b)用滤波器的再现像; (c) 图(a)中心横向截线上灰度分布; (d)图(b)中心横向截线上灰度分布

Fig. 9. Reconstructed images of blue disk gratings and their section lines: (a) Reconstructed image without filter; (b) reconstructed image with filter; (c) section line of (a); (d) section line of (b).

下载: 全尺寸图片幻灯片

图 10 微透镜聚焦的FDTD模型与结果　(a) FDTD模型; (b) xy平面光强分布; (c) y = 0时x方向上的光强分布; (d) x = 53.5 μm处y方向上的光强分布

Fig. 10. FDTD model and results of microlens focusing: (a) FDTD modeling; (b) light intensity in xy plane; (c) light intensity at y = 0 μm; (d) light intensity at x = 53.5 μm.

下载: 全尺寸图片幻灯片

[1]	Ling J Z, Wang Y C, Liu X, Wang X R 2021 Opt. Lett. 46 1265 Google Scholar
[2]	Chen L W, Zhou Y, Li Y, Hong M H 2019 Appl. Phys. Rev. 6 021304 Google Scholar
[3]	Hüser L, Pahl T, Künne M, Lehmann P 2022 J. Opt. Microsyst. 2 044501 Google Scholar
[4]	Wang Z B, Guo W, Li L, Luk'yanchuk B S, Khan A, Liu Z, Chun Z C, Hong M H 2011 Nat. Commun. 2 218 Google Scholar
[5]	周锐, 吴梦雪, 沈飞, 洪明辉 2017 物理学报 66 140702 Google Scholar Zhou R, Wu M X, Shen F, Hong M H 2017 Acta Phys. Sin. 66 140702 Google Scholar
[6]	宋扬, 杨西斌, 闫冰, 王驰, 孙建美, 熊大曦 2020 物理学报 69 134201 Google Scholar Song Y, Yang X B, Yan B, Wang C, Sun J M, Xiong D X 2020 Acta Phys. Sin. 69 134201 Google Scholar
[7]	王建国, 杨松林, 叶永红 2018 物理学报 67 214209 Google Scholar Wang J G, Yang S L, Ye Y H 2018 Acta Phys. Sin. 67 214209 Google Scholar
[8]	Darafsheh A 2022 J. Appl. Phys. 131 031102 Google Scholar
[9]	Pei Y, Zang J J, Yang S L, Wang J G, Cao Y Y, Ye Y H 2021 ACS Appl. Nano Mater. 4 11281 Google Scholar
[10]	Yang S L, Ye Y H, Shi Q F, Zhang J Y 2020 J. Phys. Chem. C 124 25951 Google Scholar
[11]	Gu G Q, Zhang P C, Chen S H, Zhang Y, Yang H 2021 Photonics. Res. 9 1157 Google Scholar
[12]	Zhang P P, Yan B, Gu G Q, Yu Z T, Chen X, Wang Z B, Yang H 2022 Sensor. Actuat. B-Chem. 357 131401 Google Scholar
[13]	Kwon S, Park J, Kim K, Cho Y, Lee M 2022 Light Sci. Appl. 11 32 Google Scholar
[14]	Gu G Q, Song J, Ming C, Xiao P, Liang H D, Qu J L 2018 Nanoscale 10 14182 Google Scholar
[15]	Xie Y, Cai D, Pan J, Zhou N, Guo X, Wang P, Tong L 2022 Adv. Opt. Mater. 10 2102269 Google Scholar
[16]	Su S J, Liang J S, Li X J, Xin W W, Chen L, Yin P H, Wang Z Z, Ye X S, Xiao J P, Wang D 2021 Adv. Mater. Technol-US. 6 2100449 Google Scholar
[17]	Darafsheh A 2021 J. Phys. Photonics. 3 022001 Google Scholar
[18]	Wang F F, Liu L Q, Yu H B, Wen Y D, Yu P, Liu Z, Wang Y C, Li W J 2016 Nat. Commun. 7 13748 Google Scholar
[19]	Wang S Y, Zhang D X, Zhang H J, Han X, Xu R 2015 Microsc. Res. Techniq. 78 1128 Google Scholar
[20]	Zhang T Y, Yu H B, Li P, Wang X D, Wang F F, Shi J L, Liu Z, Yu P, Yang W G, Wang Y C, Liu L Q 2020 ACS Appl. Mater. Inter. 12 48093 Google Scholar
[21]	Chen X X, Wu T L, Gong Z Y, Guo J H, Liu X S, Zhang Y, Li Y C, Ferraro P, Li B J 2021 Light Sci. Appl. 12 242 Google Scholar
[22]	李姮, 张熙熙, 张垚, 李宇超, 李宝军 2022 光学学报 42 0411003 Google Scholar Li H, Chen X X, Zhang Y, Li Y C, Li B J 2022 Acta. Opt. Sin. 42 0411003 Google Scholar
[23]	Jia B L, Wang F F, Chan H Y, Zhang G L, Li W J 2019 Microsyst. Nanoeng. 5 13 Google Scholar
[24]	Gu T K, Wang L L, Li R, Dong Y Z, Zhang Y J, Jia M C, Jiang W T, Liu H Z 2018 Opt. Commun. 428 89 Google Scholar
[25]	Zhang H C, Qi T Y, Zhu X Y, Zhou L J, Li Z H, Zhang Y F, Yang W C, Yang J J, Peng Z L, Zhang G M, Wang F, Guo P F, Lan H B 2021 ACS Appl. Mater. Inter. 13 36295 Google Scholar
[26]	Wang L, Luo Y, Liu Z Z, Feng X M, Lu B H 2018 Appl. Surf. Sci. 442 417 Google Scholar
[27]	Wang L L, Liu H Z, Jiang W T, Li R, Li F, Yang Z B, Yin L, Shi Y S, Chen B D 2015 J. Mater. Chem. C 3 5896 Google Scholar
[28]	Wang L L, Li F, Liu H Z, Jiang W T, Niu D, Li R, Yin L, Shi Y S, Chen B D 2015 ACS Appl. Mater. Inter. 7 21416 Google Scholar
[29]	Xu M, Zhou Z W, Wang Z, Lu H B 2020 ACS Appl. Mater. Inter. 12 7826 Google Scholar
[30]	Chen X X, Wu T L, Gong Z Y, Li Y C, Zhang Y, Li B J 2020 Photonics. Res. 8 225 Google Scholar
[31]	Yang H, Trouillon R, Huszka G, Gijs M A 2016 Nano. Lett. 16 4862 Google Scholar
[32]	叶燃, 许楚, 汤芬, 尚晴晴, 范瑶, 李加基, 叶永红, 左超 2022 红外与激光工程 51 20220086 Google Scholar Ye R, Xu C, Tang F, Shang Q Q, Fan Y, Li J J, Ye Y H, Zuo C 2022 Infrared Laser Eng. 51 20220086 Google Scholar
[33]	Duan Y, Barbastathis G, Zhang B 2013 Opt. Lett. 38 2988 Google Scholar
[34]	Zhou S, Deng Y B, Zhou W C, Yu M X, Urbach H P, Wu Y H 2017 Appl. Phys. B 123 236 Google Scholar

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[20]	刘力, 邓小强, 王桂英, 徐至展. 改善共焦系统轴向分辨率的位相型光瞳滤波器. 物理学报, 2001, 50(1): 48-51. doi: 10.7498/aps.50.48

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