| [1] |
Zhao Ming-Liang, Xing Si-Yu, Tang Wen, Zhang Yu-Ru, Gao Fei, Wang You-Nian. Three-dimensional fluid simulation of a planar coil inductively coupled argon plasma source for semiconductor processes. Acta Physica Sinica,
2024, 73(21): 215201.
doi: 10.7498/aps.73.20240952
|
| [2] |
Chen Jin-Feng, Zhu Lin-Fan. Electron collision cross section data in plasma etching modeling. Acta Physica Sinica,
2024, 73(9): 095201.
doi: 10.7498/aps.73.20231598
|
| [3] |
Zhu Cheng, Chen Xian-Hui, Wang Cheng, Song Ming, Xia Wei-Dong. Calculation of thermodynamic properties and transport coefficients of Ar-C-Si plasma. Acta Physica Sinica,
2023, 72(12): 125202.
doi: 10.7498/aps.72.20222390
|
| [4] |
Pan Zi-Han, Chen Xian-Hui, Wang Cheng, Xia Wei-Dong. Calculation of two-temperature thermodynamic and transport properties of argon-nitrogen plasma. Acta Physica Sinica,
2021, 70(8): 085201.
doi: 10.7498/aps.70.20202040
|
| [5] |
Zhao Jia-Yi, Hu Peng, Wang Yu-Lin, Wang Jin-Can, Tang Hui-Bo, Hu Guang-Yue. Optimization of pulsed intense magnetic field device for laser plasma experiment via inductively coupled coil. Acta Physica Sinica,
2021, 70(16): 165202.
doi: 10.7498/aps.70.20210441
|
| [6] |
Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu. Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe. Acta Physica Sinica,
2020, 69(8): 085201.
doi: 10.7498/aps.69.20191864
|
| [7] |
Sun An-Bang, Li Han-Wei, Xu Peng, Zhang Guan-Jun. Monte Carlo simulations of electron transport coefficients in low temperature streamer discharge plasmas. Acta Physica Sinica,
2017, 66(19): 195101.
doi: 10.7498/aps.66.195101
|
| [8] |
Wang Jun, Wang Tao, Tang Cheng-Shuang, Xin Yu. Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency. Acta Physica Sinica,
2016, 65(5): 055203.
doi: 10.7498/aps.65.055203
|
| [9] |
Ming Zhang-Jian, Lan Tao, Li Hong, Xie Jin-Lin, Liu A-Di, Liu Wan-Dong. The electrical-neutrality constraint of single Langmuir probe measurement in collisional plasma. Acta Physica Sinica,
2015, 64(11): 115201.
doi: 10.7498/aps.64.115201
|
| [10] |
Luan Bo-Han, Qiao Zeng-Xi, Liu Peng, Zhao Wei, E Peng, Yu Da-Ren. Atomic-hydrogen Balmer line's abnormal broadening of argon and hydrogen plasma in hollow cathode. Acta Physica Sinica,
2012, 61(1): 015202.
doi: 10.7498/aps.61.015202
|
| [11] |
Du Yin-Chang, Cao Jin-Xiang, Wang Jian, Zheng Zhe, Liu Yu, Meng Guang, Ren Ai-Min, Zhang Sheng-Jun. Mode transition of inductively coupled plasma in interlayer chamber. Acta Physica Sinica,
2012, 61(19): 195206.
doi: 10.7498/aps.61.195206
|
| [12] |
Zou Xiu, Ji Yan-Kun, Zou Bin-Yan. The Bohm criterion for a collisional plasma sheath in an oblique magnetic field. Acta Physica Sinica,
2010, 59(3): 1902-1906.
doi: 10.7498/aps.59.1902
|
| [13] |
Ding Ding, He Bin, Liu Ling, Zhang Cheng-Hua, Wang Jian-Guo. Plasma screening effect on the differential cross sections of collision ionization of H by He2+. Acta Physica Sinica,
2009, 58(12): 8419-8425.
doi: 10.7498/aps.58.8419
|
| [14] |
Niu Tian-Ye, Cao Jin-Xiang, Liu Lei, Liu Jin-Ying, Wang Yan, Wang Liang, Lü You, Wang Ge, Zhu Ying. The techniques of single probe and emission spectroscopy diagnostics in low temperature argon plasmas. Acta Physica Sinica,
2007, 56(4): 2330-2336.
doi: 10.7498/aps.56.2330
|
| [15] |
Zha Xue-Jun, Han Shen-Sheng, Xu Zhi-Zhan, Wang Yan. Collision operator for moderately coupled plasma. Acta Physica Sinica,
2006, 55(6): 2825-2829.
doi: 10.7498/aps.55.2825
|
| [16] |
Zheng Zhi-Yuan, Zhang Jie, Hao Zuo-Qiang, Yuan Xiao-Hui, Zhang Zhe, Lu Xin, Wang Zhao-Hua, Wei Zhi-Yi. Effects of target configuration on the laser plasma momentum-coupling coefficient. Acta Physica Sinica,
2006, 55(1): 326-330.
doi: 10.7498/aps.55.326
|
| [17] |
Wang Xiao-Qiang, Li Jun-Shuai, Chen Qiang, Qi Jing, Yin Min, He De-Yan. Aluminum-induced crystallization during deposition of silicon films by inductively coupled plasma CVD. Acta Physica Sinica,
2005, 54(1): 269-273.
doi: 10.7498/aps.54.269
|
| [18] |
MA YAN-YUN, CHANG WEN-WEI, YIN YAN, YUE ZONG-WU, CAO LI-HUA, LIU DA-QING. A COLLISION MODEL IN PLASMA PARTICLE SIMULATIONS. Acta Physica Sinica,
2000, 49(8): 1513-1519.
doi: 10.7498/aps.49.1513
|
| [19] |
CHEN YIN-HUA, ZHU DONG-PEI, YANG WEI-HONG. NONLINEAR COUPLING OF THE ELECTROSTATIC DRIFT WAVE AND SHEAR ALFVEN WAVE IN MAGNETIZED PLASMAS. Acta Physica Sinica,
1991, 40(10): 1638-1641.
doi: 10.7498/aps.40.1638
|
| [20] |
HU XI-WEI, HUO YU-PING, CHEN ZHENG-XONG, ZHANG CHENG. TRAVERSE TRANSPORT COEFFICIENTS OF PLASMA IN HOMOGENEOUS STRONG MAGNETIC FIELD. Acta Physica Sinica,
1981, 30(3): 315-324.
doi: 10.7498/aps.30.315
|
下载:
