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MECHANISM OF ION BEAM MIXING OF Mo LAYER ON Si

GAO WEN-YU LI HONG-CHENG WANG RUI-LAN LIU JIA-RUI

Citation:

MECHANISM OF ION BEAM MIXING OF Mo LAYER ON Si

GAO WEN-YU, LI HONG-CHENG, WANG RUI-LAN, LIU JIA-RUI
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(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

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  • Abstract views:  6860
  • PDF Downloads:  580
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Publishing process
  • Received Date:  11 June 1988
  • Published Online:  08 July 2005

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