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Study on the microstructure and properties of (Ti, Al)N film deposited by pulsed high energy density plasma

Liu Yuan-Fu Han Jian-Min Zhang Gu-Ling Wang Jiu-Li Chen Guang-Liang Li Xue-Ming Feng Wen-Ran Fan Song-Hua Liu Chi-Zi Yang Si-Ze

Citation:

Study on the microstructure and properties of (Ti, Al)N film deposited by pulsed high energy density plasma

Liu Yuan-Fu, Han Jian-Min, Zhang Gu-Ling, Wang Jiu-Li, Chen Guang-Liang, Li Xue-Ming, Feng Wen-Ran, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze
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  • Abstract views:  8353
  • PDF Downloads:  704
  • Cited By: 0
Publishing process
  • Received Date:  12 May 2004
  • Accepted Date:  27 May 2004
  • Published Online:  17 March 2005

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