Atomic simulation of SiyHx structure configuration in a-Si:H thin films

Zhai Shi-Ming; Liao Huang-Sheng; Zhou Nai-Gen; Huang Hai-Bin; Zhou Lang

doi:10.7498/aps.69.20191275

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Zhai Shi-Ming, Liao Huang-Sheng, Zhou Nai-Gen, Huang Hai-Bin, Zhou Lang. Atomic simulation of SiyHx structure configuration in a-Si:H thin filmsJ. Acta Physica Sinica, 2020, 69(7): 076801. DOI: 10.7498/aps.69.20191275

Citation:

Zhai Shi-Ming, Liao Huang-Sheng, Zhou Nai-Gen, Huang Hai-Bin, Zhou Lang. Atomic simulation of SiyHx structure configuration in a-Si:H thin filmsJ. Acta Physica Sinica, 2020, 69(7): 076801. DOI: 10.7498/aps.69.20191275

Citation:

Zhai Shi-Ming, Liao Huang-Sheng, Zhou Nai-Gen, Huang Hai-Bin, Zhou Lang. Atomic simulation of SiyHx structure configuration in a-Si:H thin filmsJ. Acta Physica Sinica, 2020, 69(7): 076801. DOI: 10.7498/aps.69.20191275