Thin-film lithium niobate photonic integrated devices: Advances and oppotunities

Xiong Xiao; Cao Qi-Tao; Xiao Yun-Feng

doi:10.7498/aps.72.20231295

Abstract

Lithium niobate, known as one of the most widely used nonlinear optical crystals, has recently received significant attention from both academia and industrial circles. The surge in interest can be attributed to the commercial availability of thin-film lithium niobate (TFLN) wafers and the rapid advancements in nanofabrication techniques. A milestone was achieved in 2020 with the successful fabrication of wafer-scale TFLN photonic integrated circuits, which paved the way for mass-producible and cost-effective manufacturing of TFLN-based products.At present, the majority of research on TFLN photonic integrated devices focuses on light manipulation, i.e. field modulation and frequency conversion. The electro-optic, acousto-optic, photo-elastic and piezo-electric effects of lithium niobate are harnessed to modulate the amplitude, phase and frequency of light. The second-order and third-order nonlinearities of lithium niobate enable frequency conversion processes, which leads to the development of frequency converters, optical frequency combs, and supercontinuum generation devices. These exceptional optical properties of lithium niobate enable the electromagnetic wave to manipulate covering from radio-frequency to terahertz, infrared, and visible bands. Using the outstanding performance of TFLN photonic integrated devices, including remarkable modulation rate, wide operation bandwidth, efficient nonlinear frequency conversion, and low power consumption, diverse applications, such as spanning optical information processing, laser ranging, optical frequency combs, microwave optics, precision measurement, quantum optics, and quantum computing, are demonstrated.Additionally, it is reported that TFLN-based lasers and amplifiers have made remarkable progress, and both optical and electrical pumps are available. These achievements include combining gain materials, such as rare-earth ions or heterostructures, with III-V semiconductors. The integration of low-dimensional materials or absorptive metals with TFLN can also realize TFLN-based detectors. These significant developments expand the potential applications of TFLN photonic integrated devices, thus paving the way for monolithic TFLN chips.The versatility and high performances of TFLN photonic integrated devices have made revolutionary progress in these fields, opening up new possibilities for cutting-edge technologies and their practical implementations. In this point of view, we briefly introduce the development of TFLN nanofabricationn technology. Subsequently, we review the latest progress of TFLN photonic integrated devices, including lasers, functional nonlinear optical devices, and detectors. Finally, we discuss the future development directions and potential ways of TFLN photonics.

Keywords:

Authors and contacts

Frontiers Science Center for Nano-optoelectronics, State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China

Corresponding author: Xiao Yun-Feng, yfxiao@pku.edu.cn

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References

[1]	Zhu D, Shao L, Yu M, Cheng R, Desiatov B, Xin C J, Hu Y, Holzgrafe J, Ghosh S, Shams-Ansari A, Puma E, Sinclair N, Reimer Christian, Zhang M, Lončar M 2021 Adv. Opt. Photon. 13 242 Google Scholar
[2]	Boes A, Chang L, Langrock C, Yu M, Zhang M, Lin Q, Lončar M, Fejer M, Bowers J, Mitchell A 2023 Science 379 eabj4396 Google Scholar
[3]	Jia Y, Wu J, Sun X, Yan X, Xie R, Wang L, Chen Y, Chen F 2022 Laser Photonics Rev. 16 2200059 Google Scholar
[4]	Luo Q, Bo F, Kong Y, Zhang G, Xu J 2023 Adv. Photonics 5 034002 Google Scholar
[5]	Saravi S, Pertsch T, Setzpfandt F 2021 Adv. Opt. Mater. 9 2100789 Google Scholar
[6]	Zhang M, Wang C, Cheng R, Shams-Ansari A, Lončar M 2017 Optica 4 1536 Google Scholar
[7]	Gao R, Yao N, Guan J, Deng L, Lin J, Wang M, Qiao L, Fang W, Cheng Y 2022 Chin. Opt. Lett. 20 011902 Google Scholar
[8]	Hu H, Ricken R, Sohler W, Wehrspohn R B 2007 IEEE Photon. IEEE Photon. Technol. Lett. 19 417 Google Scholar
[9]	Zhuang R, He J, Qi Y, Li Y 2022 Adv. Mater. 35 2208113 Google Scholar
[10]	Luke K, Kharel P, Reimer C, He L, Loncar M, Zhang M 2020 Opt. Express 28 24452 Google Scholar
[11]	Snigirev V, Riedhauser A, Lihachev G, Churaev M, Riemensberger, Wang R N, Siddharth A, Huang G, Möhl C, Popoff Y, Drechsler U, Caimi D, Hönl S, Liu J, Seidler P, Kippenberg T J 2023 Nature 615 411 Google Scholar
[12]	Wang C, Zhang M, Chen X, Bertrand M, Shams-Ansari A, Chandrasekhar S, Winzer P, Lončar M 2018 Nature 562 101 Google Scholar
[13]	He M, Xu M, Ren Y, Jian J, Ruan Z, Xu Y, Gao S, Sun S, Wen X, Zhou L, Liu L, Guo C, Chen H, Yu S, Liu L, Cai X 2019 Nat. Photonics 13 359 Google Scholar
[14]	Zhang M, Buscaino B, Wang C, Shams-Ansari A, Reimer C, Zhu R, Kahn J, Lončar M 2019 Nature 568 373 Google Scholar
[15]	Hu Y, Yu M, Zhu D, Sinclair N, Shams-Ansari A, Shao L, Holzgrafe J, Puma E, Zhang M, Lončar M 2021 Nature 599 587 Google Scholar
[16]	Yu M, Barton D, Cheng R, Reimer C, Kharel P, He L, Shao L, Zhu D, Hu Y, Grant H R, Johansson L, Okawachi Y, Gaeta A L, Zhang M, Lončar M 2022 Nature 612 252 Google Scholar
[17]	Sarabalis C J, McKenna T P, Patel R N, Van Laer R, Safavi-Naeini A H 2020 APL Photonics 5 086104 Google Scholar
[18]	Lu J, Li M, Zou C-L, Sayem A A, Tang H X 2020 Optica 7 1654 Google Scholar
[19]	Lin J, Yao N, Hao Z, Zhang J, Mao W, Wang M, Chu W, Wu R, Fang Z, Qiao L, Fang W, Bo F, Cheng Y 2019 Phys. Rev. Lett. 122 173903 Google Scholar
[20]	Luo R, He Y, Liang H, Li M, Lin Q 2019 Laser Photonics Rev. 13 1800288 Google Scholar
[21]	Yuan T, Wu J, Liu Y, Yan X, Jiang H, Li H, Liang Z, Lin Q, Chen Y, Chen X F 2023 Sci. China-Phys. Mech. Astron. 66 284211 Google Scholar
[22]	He Y, Yang Q F, Ling J W, Luo R, Liang H X, Li M X, Shen B Q, Wang H M, Vahala K, Lin Q 2019 Optica 6 1138 Google Scholar
[23]	Shao L, Yu M, Maity S, Sinclair N, Zheng L, Chia C, Shams-Ansari A, Wang C, Zhang M, Lai K, Lončar M 2019 Optica 6 1498 Google Scholar
[24]	Xue G T, Niu Y F, Liu X, Duan J C, Chen W, Pan Y, Jia K, Wang X, Liu H Y, Zhang Y, Xu P, Zhao G, Cai X, Gong Y X, Hu X, Xie Z, Zhu S N 2021 Phys. Rev. Applied 15 064059 Google Scholar
[25]	Nehra R, Sekine R, Ledezma L, Guo Q, Gray R M, Roy A, Marandi A 2022 Science 377 1333 Google Scholar
[26]	Liu H Y, Shang M, Liu X, Wei Y, Mi M, Zhang L, Gong Y X, Xie Z, Zhu S N 2022 Adv. Photon. Nexus 2 016003 Google Scholar
[27]	Desiatov B, Lončar M 2019 Appl. Phys. Lett. 115 121108 Google Scholar
[28]	Guan H Y, Hong J Y, Wang X L, Ming J Y, Zhang Z L, Liang A J, Han X Y, Dong J L, Qiu W T, Chen Z, Lu H H, Zhang H 2021 Adv. Opt. Mater. 9 2100245 Google Scholar
[29]	Sun X L, Sheng Y, Gao X, Liu Y, Ren F, Tan Y, Yang Z X, Jia Y C, Chen F 2022 Small 18 2203532 Google Scholar
[30]	Sayem A A, Cheng R, Wang S, Tang H X 2020 Appl. Phys. Lett. 116 151102 Google Scholar

Cited By

图 1 刻蚀后的TFLN晶圆, 以及TFLN微纳结构的平滑表面^[10]

Figure 1. TFLN wafers after patterning, and TFLN nanostructures with smooth surface^[10].

DownLoad: Full-Size Img PowerPoint

图 2 薄膜铌酸锂非线性光子器件　光调制器^[12], 谐波产生^[18], 光频率梳^[22], 量子光学^[26]

Figure 2. TFLN nonlinear optical devices: optical modulators^[12], harmonics generation^[18], frequency combs^[22], quantum optics^[26].

DownLoad: Full-Size Img PowerPoint

[1]	Zhu D, Shao L, Yu M, Cheng R, Desiatov B, Xin C J, Hu Y, Holzgrafe J, Ghosh S, Shams-Ansari A, Puma E, Sinclair N, Reimer Christian, Zhang M, Lončar M 2021 Adv. Opt. Photon. 13 242 Google Scholar
[2]	Boes A, Chang L, Langrock C, Yu M, Zhang M, Lin Q, Lončar M, Fejer M, Bowers J, Mitchell A 2023 Science 379 eabj4396 Google Scholar
[3]	Jia Y, Wu J, Sun X, Yan X, Xie R, Wang L, Chen Y, Chen F 2022 Laser Photonics Rev. 16 2200059 Google Scholar
[4]	Luo Q, Bo F, Kong Y, Zhang G, Xu J 2023 Adv. Photonics 5 034002 Google Scholar
[5]	Saravi S, Pertsch T, Setzpfandt F 2021 Adv. Opt. Mater. 9 2100789 Google Scholar
[6]	Zhang M, Wang C, Cheng R, Shams-Ansari A, Lončar M 2017 Optica 4 1536 Google Scholar
[7]	Gao R, Yao N, Guan J, Deng L, Lin J, Wang M, Qiao L, Fang W, Cheng Y 2022 Chin. Opt. Lett. 20 011902 Google Scholar
[8]	Hu H, Ricken R, Sohler W, Wehrspohn R B 2007 IEEE Photon. IEEE Photon. Technol. Lett. 19 417 Google Scholar
[9]	Zhuang R, He J, Qi Y, Li Y 2022 Adv. Mater. 35 2208113 Google Scholar
[10]	Luke K, Kharel P, Reimer C, He L, Loncar M, Zhang M 2020 Opt. Express 28 24452 Google Scholar
[11]	Snigirev V, Riedhauser A, Lihachev G, Churaev M, Riemensberger, Wang R N, Siddharth A, Huang G, Möhl C, Popoff Y, Drechsler U, Caimi D, Hönl S, Liu J, Seidler P, Kippenberg T J 2023 Nature 615 411 Google Scholar
[12]	Wang C, Zhang M, Chen X, Bertrand M, Shams-Ansari A, Chandrasekhar S, Winzer P, Lončar M 2018 Nature 562 101 Google Scholar
[13]	He M, Xu M, Ren Y, Jian J, Ruan Z, Xu Y, Gao S, Sun S, Wen X, Zhou L, Liu L, Guo C, Chen H, Yu S, Liu L, Cai X 2019 Nat. Photonics 13 359 Google Scholar
[14]	Zhang M, Buscaino B, Wang C, Shams-Ansari A, Reimer C, Zhu R, Kahn J, Lončar M 2019 Nature 568 373 Google Scholar
[15]	Hu Y, Yu M, Zhu D, Sinclair N, Shams-Ansari A, Shao L, Holzgrafe J, Puma E, Zhang M, Lončar M 2021 Nature 599 587 Google Scholar
[16]	Yu M, Barton D, Cheng R, Reimer C, Kharel P, He L, Shao L, Zhu D, Hu Y, Grant H R, Johansson L, Okawachi Y, Gaeta A L, Zhang M, Lončar M 2022 Nature 612 252 Google Scholar
[17]	Sarabalis C J, McKenna T P, Patel R N, Van Laer R, Safavi-Naeini A H 2020 APL Photonics 5 086104 Google Scholar
[18]	Lu J, Li M, Zou C-L, Sayem A A, Tang H X 2020 Optica 7 1654 Google Scholar
[19]	Lin J, Yao N, Hao Z, Zhang J, Mao W, Wang M, Chu W, Wu R, Fang Z, Qiao L, Fang W, Bo F, Cheng Y 2019 Phys. Rev. Lett. 122 173903 Google Scholar
[20]	Luo R, He Y, Liang H, Li M, Lin Q 2019 Laser Photonics Rev. 13 1800288 Google Scholar
[21]	Yuan T, Wu J, Liu Y, Yan X, Jiang H, Li H, Liang Z, Lin Q, Chen Y, Chen X F 2023 Sci. China-Phys. Mech. Astron. 66 284211 Google Scholar
[22]	He Y, Yang Q F, Ling J W, Luo R, Liang H X, Li M X, Shen B Q, Wang H M, Vahala K, Lin Q 2019 Optica 6 1138 Google Scholar
[23]	Shao L, Yu M, Maity S, Sinclair N, Zheng L, Chia C, Shams-Ansari A, Wang C, Zhang M, Lai K, Lončar M 2019 Optica 6 1498 Google Scholar
[24]	Xue G T, Niu Y F, Liu X, Duan J C, Chen W, Pan Y, Jia K, Wang X, Liu H Y, Zhang Y, Xu P, Zhao G, Cai X, Gong Y X, Hu X, Xie Z, Zhu S N 2021 Phys. Rev. Applied 15 064059 Google Scholar
[25]	Nehra R, Sekine R, Ledezma L, Guo Q, Gray R M, Roy A, Marandi A 2022 Science 377 1333 Google Scholar
[26]	Liu H Y, Shang M, Liu X, Wei Y, Mi M, Zhang L, Gong Y X, Xie Z, Zhu S N 2022 Adv. Photon. Nexus 2 016003 Google Scholar
[27]	Desiatov B, Lončar M 2019 Appl. Phys. Lett. 115 121108 Google Scholar
[28]	Guan H Y, Hong J Y, Wang X L, Ming J Y, Zhang Z L, Liang A J, Han X Y, Dong J L, Qiu W T, Chen Z, Lu H H, Zhang H 2021 Adv. Opt. Mater. 9 2100245 Google Scholar
[29]	Sun X L, Sheng Y, Gao X, Liu Y, Ren F, Tan Y, Yang Z X, Jia Y C, Chen F 2022 Small 18 2203532 Google Scholar
[30]	Sayem A A, Cheng R, Wang S, Tang H X 2020 Appl. Phys. Lett. 116 151102 Google Scholar

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Vol. 72, Issue 23 - 2023-12-05

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