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放电激励KrF,ArF激光器中电子能量分布函数和输运系数的计算

物理学报, 1981, 30(9): 1165-1173.
DOI: 10.7498/aps.30.1165
CSTR: 32037.14.aps.30.1165

ELECTRON ENERGY DISTRIBUTION AND TRANSPORT COEFFICIENTS IN ELECTRICALLY EXCITED KrF AND ArF

Acta Phys. Sin., 1981, 30(9): 1165-1173.
DOI: 10.7498/aps.30.1165
CSTR: 32037.14.aps.30.1165
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  • 摘要

    采用玻耳兹曼稳态方程计算了He-Kr,Ne-Kr,He-Ar和Ne-Ar混合物中电子能量分布函数和有关输运系数,并对计算结果作了讨论。

     

    Abstract

    Electron energy distributions and transport coefficients have been calculated for He-Kr, Ne-Kr, He-Ar and Ne-Ar mixtures by using Boltzmann stability equation. The calculated results are discussed.

     

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