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利用波长为800 nm的飞秒脉冲激光,对表面贴有聚对苯二甲酸乙二醇酯透明膜的单晶硅片进行扫描, 研究了不同激光制备参数对微结构形成的影响. 结果表明, 锥状微结构是否形成取决于激光能量密度, 能量密度太小时不能形成锥状结构, 能量密度太大时易破坏锥状突起; 而激光扫描速度可直接影响锥状微结构的质量, 扫描速度太小时也易破坏锥状结构突起, 扫描速度太大时,由于作用深度太浅使得锥状结构轮廓不分明. 在此基础上对实验参数进行优化, 得到了较理想的锥状微结构. 最后通过分析指出, 贴膜条件下锥状微结构的形成是由激光烧蚀作用和氧化作用共同引起的, 且激光烧蚀作用占主导.
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关键词:
- 飞秒激光 /
- 硅 /
- 锥状微结构 /
- 聚对苯二甲酸乙二醇酯透明膜
We investigate the effect of preparation parameters on the formation of microstructures created on a single crystal silicon wafer covered with a polyethylene terephthalate (PET) transparent film by femtosecond pulse laser with a central wavelength of 800 nm. The results reveal that formation of the cone microstructures depends on laser fluence, and the cone microstructures cannot be created by lower laser fluence or can be destroyed by higher laser fluence. The laser scanning speed can directly affect the quality of the cone microstructures, and lower speed will destroy the cone, while higher speed will create indistinct cone microstructures each with smaller depth. Some idealized structures are obtained by optimizing the experimental parameters. Finally, we find that the cone microstructures on silicon wafer covered with a film are caused by both laser ablation and oxidation, and laser ablation plays a major role.-
Keywords:
- femtosecond laser /
- silicon /
- cone microstructures /
- PET transparent films
[1] Yuan H, Yost V E, Page M R, Stradins P, Meier D L, Branz H M 2009 Appl. Phys. Lett. 95 123501
[2] Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673
[3] Her T H, Finlay R J, Wu C, Mazur E 2000 Appl. Phys. A 70 383
[4] Lowndes D H, Fowlkes J D, Pedraza A J 2000 Appl. Surf. Sci. 154-155 647
[5] Younkin R, Carey J E, Mazur E, Levinson J A, Friend C M 2003 J. Appl. Phys. 93 2626
[6] Crouch C H, Carey J E, Warrender J M, Aziz M J, Mazur E, Génin F Y 2004 Appl. Phys. Lett. 84 1850
[7] Crouch C H, Carey J E, Shen M Y, Mazur E, Génin F Y 2004 Appl. Phys. A 79 1635
[8] Carey J E 2004 Ph. D. Dissertation (Harvard University) pp40-49
[9] Sheehy M A, Winston L, Carey J E, Friend C M, Mazur E 2005 Chem. Mater. 17 3582
[10] Tull B R, Carey J E, Mazur E, McDonald J P, Yalisove S M 2006 MRS Bulletin 31 626
[11] Li P, Wang Y, Feng G J, Zheng C D, Zhao L, Zhu J T 2006 Chinese Journal of Lasers 33 1688 (in Chinese) [李平, 王煜, 冯国进, 郑春弟, 赵利, 朱京涛 2006 中国激光 33 1688]
[12] Yuan C H, Li X H, Tang D C, Yang H D, Li G Q 2010 High Power Laser and Particle Beams 22 2749 (in Chinese) [袁春华, 李晓红, 唐多昌, 杨宏道, 李国强 2010 强激光与粒子束 22 2749]
[13] Shen M Y, Crouch C H, Carey J E, Mazur E 2004 Appl. Phys. Lett. 85 5694
[14] Men H N, Cheng G H, Sun C D 2006 High Power Laser and Particle Beams 18 1081 (in Chinese) [门海宁, 程光华, 孙传东 2006 强激光与粒子束 18 1081]
[15] Yuan C H, Li X H, Tang D C, Yang H D, Li G Q 2010 Acta Phys. Sin. 59 7015 (in Chinese) [袁春华, 李晓红, 唐多昌, 杨宏道, 李国强 2010 物理学报 59 7015]
[16] Yang H D, Li X H, Li G Q, Yuan C H, Tang D C, Xu Q, Qiu R, Wang J B 2011 Acta Phys. Sin. 60 027901 (in Chinese) [杨宏道, 李晓红, 李国强, 袁春华, 唐多昌, 徐琴, 邱荣, 王俊波 2011 物理学报 60 027901]
[17] Goldman J R, Prybyla J A 1994 Phys. Rev. Lett. 72 1364
[18] Gao X, Song X W, Guo K M, Tao H Y, Lin J Q 2011 Acta Phys. Sin. 60 025203 (in Chinese) [高勋, 宋晓伟, 郭凯敏, 陶海岩, 林景全 2011 物理学报 60 025203]
[19] Linde D V, Tinten K S, Bialkowski J 1997 Appl. Surf. Sci. 109-110 1
[20] Shank C V, Yen R, Hirlimann C 1983 Phys. Rev. Lett. 50 454
[21] Shank C V, Yen R, Hirlimann C 1983 Phys. Rev. Lett. 51 900
[22] Seel M, Bagus P S 1983 Phys. Rev. B 28 2023
[23] Wu C, Crouch C H, Zhao L, Mazur E 2002 Appl. Phys. Lett. 81 1999
[24] Stoian R, Ashkenasi D, Rosenfeld A, Campbell E E B 2000 Phys. Rev. B 62 13167
[25] Wang R, Yang J J, Liang C Y, Wang H S, Han W, Yang Y 2009 Acta Phys. Sin. 58 5429 (in Chinese) [王锐, 杨建军, 梁春永, 王洪水, 韩伟, 杨阳 2009 物理学报 58 5429]
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[1] Yuan H, Yost V E, Page M R, Stradins P, Meier D L, Branz H M 2009 Appl. Phys. Lett. 95 123501
[2] Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673
[3] Her T H, Finlay R J, Wu C, Mazur E 2000 Appl. Phys. A 70 383
[4] Lowndes D H, Fowlkes J D, Pedraza A J 2000 Appl. Surf. Sci. 154-155 647
[5] Younkin R, Carey J E, Mazur E, Levinson J A, Friend C M 2003 J. Appl. Phys. 93 2626
[6] Crouch C H, Carey J E, Warrender J M, Aziz M J, Mazur E, Génin F Y 2004 Appl. Phys. Lett. 84 1850
[7] Crouch C H, Carey J E, Shen M Y, Mazur E, Génin F Y 2004 Appl. Phys. A 79 1635
[8] Carey J E 2004 Ph. D. Dissertation (Harvard University) pp40-49
[9] Sheehy M A, Winston L, Carey J E, Friend C M, Mazur E 2005 Chem. Mater. 17 3582
[10] Tull B R, Carey J E, Mazur E, McDonald J P, Yalisove S M 2006 MRS Bulletin 31 626
[11] Li P, Wang Y, Feng G J, Zheng C D, Zhao L, Zhu J T 2006 Chinese Journal of Lasers 33 1688 (in Chinese) [李平, 王煜, 冯国进, 郑春弟, 赵利, 朱京涛 2006 中国激光 33 1688]
[12] Yuan C H, Li X H, Tang D C, Yang H D, Li G Q 2010 High Power Laser and Particle Beams 22 2749 (in Chinese) [袁春华, 李晓红, 唐多昌, 杨宏道, 李国强 2010 强激光与粒子束 22 2749]
[13] Shen M Y, Crouch C H, Carey J E, Mazur E 2004 Appl. Phys. Lett. 85 5694
[14] Men H N, Cheng G H, Sun C D 2006 High Power Laser and Particle Beams 18 1081 (in Chinese) [门海宁, 程光华, 孙传东 2006 强激光与粒子束 18 1081]
[15] Yuan C H, Li X H, Tang D C, Yang H D, Li G Q 2010 Acta Phys. Sin. 59 7015 (in Chinese) [袁春华, 李晓红, 唐多昌, 杨宏道, 李国强 2010 物理学报 59 7015]
[16] Yang H D, Li X H, Li G Q, Yuan C H, Tang D C, Xu Q, Qiu R, Wang J B 2011 Acta Phys. Sin. 60 027901 (in Chinese) [杨宏道, 李晓红, 李国强, 袁春华, 唐多昌, 徐琴, 邱荣, 王俊波 2011 物理学报 60 027901]
[17] Goldman J R, Prybyla J A 1994 Phys. Rev. Lett. 72 1364
[18] Gao X, Song X W, Guo K M, Tao H Y, Lin J Q 2011 Acta Phys. Sin. 60 025203 (in Chinese) [高勋, 宋晓伟, 郭凯敏, 陶海岩, 林景全 2011 物理学报 60 025203]
[19] Linde D V, Tinten K S, Bialkowski J 1997 Appl. Surf. Sci. 109-110 1
[20] Shank C V, Yen R, Hirlimann C 1983 Phys. Rev. Lett. 50 454
[21] Shank C V, Yen R, Hirlimann C 1983 Phys. Rev. Lett. 51 900
[22] Seel M, Bagus P S 1983 Phys. Rev. B 28 2023
[23] Wu C, Crouch C H, Zhao L, Mazur E 2002 Appl. Phys. Lett. 81 1999
[24] Stoian R, Ashkenasi D, Rosenfeld A, Campbell E E B 2000 Phys. Rev. B 62 13167
[25] Wang R, Yang J J, Liang C Y, Wang H S, Han W, Yang Y 2009 Acta Phys. Sin. 58 5429 (in Chinese) [王锐, 杨建军, 梁春永, 王洪水, 韩伟, 杨阳 2009 物理学报 58 5429]
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