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Gabor波带片是一种理想的单级聚焦光学元件, 但制备困难. 本文采用聚焦离子束直写技术成功制备出30 环、20扇区的二值化Beynon-Gabor波带片, 其有效面积半径为700 m, 第一环半径90 m. 利用各向异性腐蚀液对硅基底进行开孔, 实现了Beynon-Gabor波带片二值化、自支撑、镂空的结构特征. 在波长为355 nm的激光下测试其光学性能, 结果表明所制备的Beynon-Gabor波带片主光轴上只存在1级衍射叠加后的焦点, 不存在高级衍射焦点, 具有优异的单级聚焦性能.
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关键词:
- 二值化Beynon-Gabor波带片 /
- 自支撑 /
- 衍射性能 /
- 聚焦离子束直写技术
The Gabor zone plate is an ideal zone plate with single focus spot, which has the potential applications in spectroscopy, X-ray imaging, etc. However, the Gabor zone plate is very difficult to prepare because of its sinusoidal transmission characteristic, thereby restricting its applications. Traditionally, the zone plate is prepared on the transparent substrate such as quartz glass, polyimide, etc. This restricts the applications of Gabor zone plates in the extreme ultraviolet and soft X-ray frequency band due to the strong absorption of quartz and polyimide in such bands.In this work, we report a method of preparing the self-standing binary Gabor zone plate by using the focused ion beam direct writing. By combining the techniques of focused ion beam and chemical wet etching, the binary Gabor zone plate with self-standing and curved structure is fabricated. The main characteristic parameters of the Gabor zone plate are as follows: the diameter of 1400 m, the radius of the first zone 90 m, the outset zone number of 60, and a gold absorber thickness of 500 nm. The focusing properties of the self-standing binary Gabor zone plate are measured at different transfer distances with a 355 nm laser. The experimental results show that the high-order focus is removed with only the first-order focus spot reserved, and the focal distance is 2.28 cm, which is in agreement with the theoretical value of 2.41 cm. The self-standing Gabor zone plate is free from the influence of the substrate. Therefore, this kind of binary Gabor zone plate has potential applications in ultraviolet and soft X-ray regions.-
Keywords:
- binary Beynon-Gabor zone plate /
- self-standing /
- diffraction property /
- focused ion beam direct writing
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[8] Chu Y S, Yi J M, de Carlo F, Shen Q, Lee W K, Wu H J, Wang C L, Wang J Y, Liu C L, Wang C H, Wu S R, Chien C C, Hwu Y, Tkachuk A, Yun W, Feser M, Liang K S, Yang C S, Je J H, Margaritondo G 2008 Appl. Phys. Lett. 92 103119
[9] Gorelick S, Vila-Comamala J, Guzenko V A, Barrett R, Salom M, David C 2011 J. Synchrotron Radiat. 18 442
[10] Zhang Y, Qi H J, Yi K, Wang Y Z, Sui Z, Shao J D 2015 Chin. Phys. B 24 054212
[11] Huang C L, Zhang J C, Diao K D, Zeng Y, Yi Y, Cao L F, Wang H B 2014 Acta Phys. Sin. 63 018101 (in Chinese) [黄成龙, 张继成, 刁凯迪, 曾勇, 易勇, 曹磊峰, 王红斌 2014 物理学报 63 018101]
[12] Zhang J C, Liu Y W, Huang C L, Zhang Q Q, Yi Y, Zeng Y, Zhu X L, Fan Q P, Qian F, Wei L, Wang H B, Wu W D, Cao L F 2014 Chin. Phys. Lett. 31 124204
[13] Cao L F, Frster E, Fuhrmann A, Wang C K, Kuang L Y, Liu S Y, Ding Y K 2007 Appl. Phys. Lett. 90 053501
[14] Wang C K, Kuang L Y, Wang Z B, Liu S Y, Ding Y K, Cao L F, Foerster E, Wang D Q, Xie C Q, Ye T C 2007 Rev. Sci. Instrum. 78 053503
[15] Wang C K, Kuang L Y, Wang Z B, Cao L F, Liu S Y, Ding Y K, Wang D Q, Xie C Q, Ye T C, Hu G Y 2008 Rev. Sci. Instrum. 79 123502
[16] Beynon T D, Kirk I, Mathews T R 1992 Opt. Lett. 17 544
[17] Choy C M, Cheng L M 1994 Appl. Opt. 33 794
[18] Wei L, Kuang L Y, Fan W, Zang H P, Cao L F, Gu Y Q, Wang X F 2011 Opt. Express 19 21419
[19] Fan W, Wei L, Zang H P, Cao L F, Zhu B, Zhu X L, Xie C Q, Gao Y L, Zhao Z Q, Gu Y Q 2013 Opt. Express 21 1473
[20] Greve M M, Vial A M, Stamnes J J, Holst B 2013 Opt. Express 21 28483
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[1] Vila-Comamala J, Borris X, Prez-Murano F, Campos J, Ferrer S 2006 Microelectron. Eng. 83 1355
[2] Wang Y, Yun W, Jacobsen C 2003 Nature 424 50
[3] Tao S H, Yuan X C, Lin J, Burge R E 2006 Appl. Phys. Lett. 89 031105
[4] Shu J H, Chen Z Y, Pu J X, Liu Y X 2011 Chin. Phys. B 20 114202
[5] Gimnez F, Monsoriu J A, Furlan W D, Pons A 2006 Opt. Express 14 11958
[6] Fabrizio E D, Romanato F, Gentili M, Cabrini S, Kaulich B, Susini J, Barrett R 1999 Nature 401 895
[7] Srisungsitthisunti P, Ersoy O K, Xu X 2009 J. Opt. Soc. Am. A 26 2114
[8] Chu Y S, Yi J M, de Carlo F, Shen Q, Lee W K, Wu H J, Wang C L, Wang J Y, Liu C L, Wang C H, Wu S R, Chien C C, Hwu Y, Tkachuk A, Yun W, Feser M, Liang K S, Yang C S, Je J H, Margaritondo G 2008 Appl. Phys. Lett. 92 103119
[9] Gorelick S, Vila-Comamala J, Guzenko V A, Barrett R, Salom M, David C 2011 J. Synchrotron Radiat. 18 442
[10] Zhang Y, Qi H J, Yi K, Wang Y Z, Sui Z, Shao J D 2015 Chin. Phys. B 24 054212
[11] Huang C L, Zhang J C, Diao K D, Zeng Y, Yi Y, Cao L F, Wang H B 2014 Acta Phys. Sin. 63 018101 (in Chinese) [黄成龙, 张继成, 刁凯迪, 曾勇, 易勇, 曹磊峰, 王红斌 2014 物理学报 63 018101]
[12] Zhang J C, Liu Y W, Huang C L, Zhang Q Q, Yi Y, Zeng Y, Zhu X L, Fan Q P, Qian F, Wei L, Wang H B, Wu W D, Cao L F 2014 Chin. Phys. Lett. 31 124204
[13] Cao L F, Frster E, Fuhrmann A, Wang C K, Kuang L Y, Liu S Y, Ding Y K 2007 Appl. Phys. Lett. 90 053501
[14] Wang C K, Kuang L Y, Wang Z B, Liu S Y, Ding Y K, Cao L F, Foerster E, Wang D Q, Xie C Q, Ye T C 2007 Rev. Sci. Instrum. 78 053503
[15] Wang C K, Kuang L Y, Wang Z B, Cao L F, Liu S Y, Ding Y K, Wang D Q, Xie C Q, Ye T C, Hu G Y 2008 Rev. Sci. Instrum. 79 123502
[16] Beynon T D, Kirk I, Mathews T R 1992 Opt. Lett. 17 544
[17] Choy C M, Cheng L M 1994 Appl. Opt. 33 794
[18] Wei L, Kuang L Y, Fan W, Zang H P, Cao L F, Gu Y Q, Wang X F 2011 Opt. Express 19 21419
[19] Fan W, Wei L, Zang H P, Cao L F, Zhu B, Zhu X L, Xie C Q, Gao Y L, Zhao Z Q, Gu Y Q 2013 Opt. Express 21 1473
[20] Greve M M, Vial A M, Stamnes J J, Holst B 2013 Opt. Express 21 28483
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