具有宽调谐范围的微纳光机电系统可调谐垂直腔面发射激光器研究

关宝璐; 张敬兰; 任秀娟; 郭帅; 李硕; 揣东旭; 郭霞; 沈光地

doi:10.7498/aps.60.034206

摘要

基于微纳机械技术设计得到了可调谐垂直腔面发射激光器结构,将具有Al0.8Ga0.2As牺牲层结构的DBR反射镜制备成微纳光机电系统,并与多量子阱有源区光纵向耦合结构相结合.其中,微纳光机电DBR结构不再是简单的分布布拉格反射镜,而是对光波具有高调制作用的可动微纳机械反射镜系统,并在静电力作用下可以动态调谐VCSEL谐振腔的激射波长.实验结果显示,当激光器调谐电压从0 V增加到7 V时,对应激射波长将从968.8 nm蓝移到950 nm,整个调谐范围达到了18.8

关键词:

Abstract

The stucture of tunable vertical cavity surface emitting laser is obtained based on the micro-nano-mechanical technology. The DBR reflector with Al0.8Ga0.2As sacrificial layer consisted the micro-nano reflector systerm, which combines with the multi-well active region coupled structure. In addition, the structure of micro-nano-optical machine system is not only the DBR reflector, but also serves to tune the wavelength of lasing by the electrostatic force. Good laser characteristics are obtained with continuous tuning ranges over 18.8 nm near 968.8 to 950 nm for 0—7 V tuning bias.

Keywords:

vertical cavity surface emitting lasers /
micro-nano-optical machine system /
tunable wavelength

作者及机构信息

1.
北京工业大学,光电子技术省部共建教育部重点实验室,北京 100124

基金项目: 国家重点基础研究发展计划(批准号:2006CB604902),国家自然科学基金(批准号:60908012) 资助的课题.

Authors and contacts

1.
Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China

参考文献

[1]	Chang-Hasnain C J 2000 IEEE Journal of Selected Topics in Quantum Electronics 6 978
[2]	Michael C, Zhou Y, Chang-Hasnain C J 2007 Nature Photonics 1 119
[3]	Andrew A, Mario P 2007 Nature Photonics 1 153
[4]	Iga K 2000 IEEE Journal of Selected Topics in Quantum Electronics 6 1201
[5]	Zhang W L, Pan W, Luo B, Li X F, Zou X H, Wang M Y 2008 Chin. Phys. B 17 1821
[6]	Maute G M, Lambkin V, Slattery J D, Justice S A, Hegarty J P, Huyet S P, Corbett G 2008 IEEE Lasers and Electro-Optics Society (LEOS) Annual Meeting 9 498
[7]	Guan B L, Guo X, Deng J, Qu H W, Lian P, Dong L M, Chen M, Shen G D 2006 Chin. Phys. 15 2959
[8]	Guo X, Shen G D 2008 Chin. Phys. B 17 307
[9]	Guan B L, Guo X, Liang T, Gu X L, Deng J, Guo J, Yang H, Lin Q M, Shen G D 2006 Journal of Applied Physics 100 113508
[10]	Kyungwon A, Michael S F 1995 Phys. Rev. A 52 1691
[11]	Hunt N E J, Schubert E F, Logan R A, Zydzik G J 1992 Appl. Phys. Lett. 61 2287
[12]	Kressel H, Lockwood H F, Nicoll F H, Ettenberg M 1973 IEEE Journal of Quantum Electronics 9 383
[13]	Hayashi Y, Mukaihara T, Hatori N, Ohnoki N, Matsutani A, Koyama F, Iga K 1995 IEEE Photonics Technology Letters 7 1234

施引文献

[1]	Chang-Hasnain C J 2000 IEEE Journal of Selected Topics in Quantum Electronics 6 978
[2]	Michael C, Zhou Y, Chang-Hasnain C J 2007 Nature Photonics 1 119
[3]	Andrew A, Mario P 2007 Nature Photonics 1 153
[4]	Iga K 2000 IEEE Journal of Selected Topics in Quantum Electronics 6 1201
[5]	Zhang W L, Pan W, Luo B, Li X F, Zou X H, Wang M Y 2008 Chin. Phys. B 17 1821
[6]	Maute G M, Lambkin V, Slattery J D, Justice S A, Hegarty J P, Huyet S P, Corbett G 2008 IEEE Lasers and Electro-Optics Society (LEOS) Annual Meeting 9 498
[7]	Guan B L, Guo X, Deng J, Qu H W, Lian P, Dong L M, Chen M, Shen G D 2006 Chin. Phys. 15 2959
[8]	Guo X, Shen G D 2008 Chin. Phys. B 17 307
[9]	Guan B L, Guo X, Liang T, Gu X L, Deng J, Guo J, Yang H, Lin Q M, Shen G D 2006 Journal of Applied Physics 100 113508
[10]	Kyungwon A, Michael S F 1995 Phys. Rev. A 52 1691
[11]	Hunt N E J, Schubert E F, Logan R A, Zydzik G J 1992 Appl. Phys. Lett. 61 2287
[12]	Kressel H, Lockwood H F, Nicoll F H, Ettenberg M 1973 IEEE Journal of Quantum Electronics 9 383
[13]	Hayashi Y, Mukaihara T, Hatori N, Ohnoki N, Matsutani A, Koyama F, Iga K 1995 IEEE Photonics Technology Letters 7 1234

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