-
In this paper, We measure the plasma parameters using a single probe to study the characteristics of our designed magnetic control direct current glow discharge experimental device. We can obtain the relationship between the electron density and pressure, the electron density distribution and the magnetic field type, the electron density distribution, the magnetic field strength, etc. In addition, magnetic field generated by coils is calculated by the finite element method , through which the distributions of two magnetic fields with different connection modes are simulated. In experiment the states of the plasma are controled partly by these two different types of magnetic field position, and this “control” role is consistent with existing theory.
[1] Foerch R, Mcintyre N S, Hunter D H 1990 Journal of Polymer Science A 28 193
[2] Wu Z, Shi Y, Xie H 1995 Surface Engineering 11 53
[3] Vossen J L, Kem W 1978 Thin FiIra Process?(New York: Academic Press) p15
[4] Chapman B 1980 Glow Discharge processes (New York: Wiley) 139
[5] Chien C Y, Gupta M C 2005 Joumal of Applied Physics, 81 1257
[6] Surefire M, Graves D B, Vellum G M 1990 Phys. Rev. A 41 1112
[7] Shu Qin, Allen McTeer 2007 Surface and Coatings Technology. 201 6508
[8] Qayyum A, Shaista Ieb, Naveed MA 2007 Journal of Quantitative Spectroscopy & Radiative Transfer 81 163
[9] Gekelman W, Pfister H, Lucky Z 1991 Rev. Sci. Instr. 62 2875
[10] Pierre T, Leclert G, Braun F 1987 Rev. Sci. Instr. 58 6
[11] Zimmerman E D 1993 J. Fusion. Energy 12 289
[12] Wu S T 2002 Fusion Engineering and Design. 63-64 59
[13] Wong K L 1980 Phys. Rev. Lett. 45 117
[14] Ma J X, Li Y F, Xiao D L, Li J J, Li Y R 2005 Rev. Sci Instr. 76 062205
[15] Gekelman W, Stenzel R L 1975 Rev. Sci. Instr. 46 1386
[16] Li J, Chen Q M, Li Z G 1996 Acta Phys. Sin. 45 953 (in Chinese) [李军, 陈清明, 李再光 1996 物理学报 45 953]
[17] Zodiacatan V 1988 Phys. Rev. A 38 2044
[18] Horn T, Bowmen M D, Chino K, Karaoke K 1996 Appl. Phys. Lett. 69 3683
[19] Hunter M, Germane H, Meichsner J 1997 Appl. Phys. Lett. 81 3683
[20] Chi L F, Lin K X, Yao R H, Lin X Y, Yu C Y, Yu Y P 2001 Acta Phys.Sin. 50 1313 (in Chinese) [池凌飞, 林揆训, 姚若河, 林璇英, 余楚迎, 余云鹏 2001 物理学报 50 1313]
[21] Wan S D, Wang H 2004 Research and Exploration In Laboratory 23 50 (in Chinese) [万树德, 汪海 2004 实验室研究与探索 23 50]
[22] Xu X J, Zhu D C 1996 Gas Discharge Physics (Shanghai: Fudan University Press) p106 (in Chinese) [徐学基, 诸定昌 1996 气体放电物理学 (上海：复旦大学出版社)第106页]
[23] Hao Y P, Yang L, Tu E L, Chen J Y, Zhu Z W, Wang X L 2010 Acta Phys.Sin. 59 2610 (in Chinese) [郝艳捧, 阳林, 涂恩来, 陈建阳, 朱展文, 王晓蕾 2010 物理学报 59 2610]
[24] Wang Y Z 1985 Vacuum Technology (Sichuan: Sichuan Science and Technology Press) p20(in Chinese) [王欲知 1985 真空技术 (四川：四川科学技术出版社)第20页]
[25] Zhang Y M 2007 Thermotics (Beijing: Science Press) p25 ( in Chinese) [张玉民 2007 热学 (北京: 科学出版社)第25页]
[26] Wang B, Gong F J, Ye Y F, Guan X C, Chen H 2006 Physics Teaching and Discussion 24(281) 51(in Chinese) [王彪, 龚福君, 叶宇飞, 官小川, 陈洪 2006 物理教学探讨 24 51]
[27] Li D, Chen Y H, Ma J X, Yang W H 2006 Plasma Physics ( Beijing: Higher Education Press) p156 (in Chinese) [李 定, 陈银华, 马锦秀, 杨维紘 2006 等离子体物理学 (北京: 高等教育出版社) 第156页]
[28] Yang J J 1983 Gas Discharge (Beijing: Science Press) p20 (in Chinese) [杨津基 1983 气体放电(北京：科学出版社)第20页]
[29] Kolobov V I 2006 Journal of Physics D: Applied Physics. 39 R487
[30] Ding F 2010 Ph.D. Dissertation (HeFei: University of Science and Technology of China) (in Chinese) [丁芳 2010 博士学位论文 (合肥：中国科技大学)]
[31] Zhu S L, Zhang S D 2000 Lamps and Lighting 24(6) 47 (in Chinese) [朱绍龙, 张善端 2000 灯与照明 24 (6) 47]
-
[1] Foerch R, Mcintyre N S, Hunter D H 1990 Journal of Polymer Science A 28 193
[2] Wu Z, Shi Y, Xie H 1995 Surface Engineering 11 53
[3] Vossen J L, Kem W 1978 Thin FiIra Process?(New York: Academic Press) p15
[4] Chapman B 1980 Glow Discharge processes (New York: Wiley) 139
[5] Chien C Y, Gupta M C 2005 Joumal of Applied Physics, 81 1257
[6] Surefire M, Graves D B, Vellum G M 1990 Phys. Rev. A 41 1112
[7] Shu Qin, Allen McTeer 2007 Surface and Coatings Technology. 201 6508
[8] Qayyum A, Shaista Ieb, Naveed MA 2007 Journal of Quantitative Spectroscopy & Radiative Transfer 81 163
[9] Gekelman W, Pfister H, Lucky Z 1991 Rev. Sci. Instr. 62 2875
[10] Pierre T, Leclert G, Braun F 1987 Rev. Sci. Instr. 58 6
[11] Zimmerman E D 1993 J. Fusion. Energy 12 289
[12] Wu S T 2002 Fusion Engineering and Design. 63-64 59
[13] Wong K L 1980 Phys. Rev. Lett. 45 117
[14] Ma J X, Li Y F, Xiao D L, Li J J, Li Y R 2005 Rev. Sci Instr. 76 062205
[15] Gekelman W, Stenzel R L 1975 Rev. Sci. Instr. 46 1386
[16] Li J, Chen Q M, Li Z G 1996 Acta Phys. Sin. 45 953 (in Chinese) [李军, 陈清明, 李再光 1996 物理学报 45 953]
[17] Zodiacatan V 1988 Phys. Rev. A 38 2044
[18] Horn T, Bowmen M D, Chino K, Karaoke K 1996 Appl. Phys. Lett. 69 3683
[19] Hunter M, Germane H, Meichsner J 1997 Appl. Phys. Lett. 81 3683
[20] Chi L F, Lin K X, Yao R H, Lin X Y, Yu C Y, Yu Y P 2001 Acta Phys.Sin. 50 1313 (in Chinese) [池凌飞, 林揆训, 姚若河, 林璇英, 余楚迎, 余云鹏 2001 物理学报 50 1313]
[21] Wan S D, Wang H 2004 Research and Exploration In Laboratory 23 50 (in Chinese) [万树德, 汪海 2004 实验室研究与探索 23 50]
[22] Xu X J, Zhu D C 1996 Gas Discharge Physics (Shanghai: Fudan University Press) p106 (in Chinese) [徐学基, 诸定昌 1996 气体放电物理学 (上海：复旦大学出版社)第106页]
[23] Hao Y P, Yang L, Tu E L, Chen J Y, Zhu Z W, Wang X L 2010 Acta Phys.Sin. 59 2610 (in Chinese) [郝艳捧, 阳林, 涂恩来, 陈建阳, 朱展文, 王晓蕾 2010 物理学报 59 2610]
[24] Wang Y Z 1985 Vacuum Technology (Sichuan: Sichuan Science and Technology Press) p20(in Chinese) [王欲知 1985 真空技术 (四川：四川科学技术出版社)第20页]
[25] Zhang Y M 2007 Thermotics (Beijing: Science Press) p25 ( in Chinese) [张玉民 2007 热学 (北京: 科学出版社)第25页]
[26] Wang B, Gong F J, Ye Y F, Guan X C, Chen H 2006 Physics Teaching and Discussion 24(281) 51(in Chinese) [王彪, 龚福君, 叶宇飞, 官小川, 陈洪 2006 物理教学探讨 24 51]
[27] Li D, Chen Y H, Ma J X, Yang W H 2006 Plasma Physics ( Beijing: Higher Education Press) p156 (in Chinese) [李 定, 陈银华, 马锦秀, 杨维紘 2006 等离子体物理学 (北京: 高等教育出版社) 第156页]
[28] Yang J J 1983 Gas Discharge (Beijing: Science Press) p20 (in Chinese) [杨津基 1983 气体放电(北京：科学出版社)第20页]
[29] Kolobov V I 2006 Journal of Physics D: Applied Physics. 39 R487
[30] Ding F 2010 Ph.D. Dissertation (HeFei: University of Science and Technology of China) (in Chinese) [丁芳 2010 博士学位论文 (合肥：中国科技大学)]
[31] Zhu S L, Zhang S D 2000 Lamps and Lighting 24(6) 47 (in Chinese) [朱绍龙, 张善端 2000 灯与照明 24 (6) 47]
计量
- 文章访问数: 6415
- PDF下载量: 1005
- 被引次数: 0
下载:
