搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

介电层表面直接生长石墨烯的研究进展

杨慧慧 高峰 戴明金 胡平安

引用本文:
Citation:

介电层表面直接生长石墨烯的研究进展

杨慧慧, 高峰, 戴明金, 胡平安

Research progress of direct synthesis of graphene on dielectric layer

Yang Hui-Hui, Gao Feng, Dai Ming-Jin, Hu Ping-An
PDF
导出引用
  • 作为21世纪备受瞩目的材料,石墨烯兼具优异的电、热、光与力学性质,具有十分广阔的研究价值与应用价值.目前主要通过在金属基底上生长获得石墨烯,并将其转移至目标介电层基底上以构筑电子器件.转移过程不可避免地引入了褶皱、裂纹、破损以及聚合物/金属残留,严重损害了石墨烯的性能.因而直接在介电基底上制备高质量的石墨烯薄膜具有重要意义.本文总结了近年来在介电衬底上直接生长石墨烯的研究进展:阐述了金属辅助法、等离子体增强法以及热力学或动力学调控法等多种生长手段;介绍了多种介电/绝缘基底包括SiO2/Si,Al2O3,SrTiO3,h-BN,SiC,Si3N4以及玻璃表面生长石墨烯的特点与性能,分析了其可能的生长机理.根据拉曼谱图、薄层电阻、透光率、载流子迁移率等评估指标,将多种方法得到的石墨烯质量进行了总结与比较,并提出了直接在介电衬底上生成石墨烯的研究难点与趋势.
    As one of the most appealing materials, graphene possesses remarkable electric, thermal, photoelectric and mechanic characteristics, which make it extremely valuable both for fundamental researches and practical applications. Nowadays the synthesis of graphene is commonly achieved by growing on metal substrate via chemical vapor deposition. For the integration in micro-electric device, the as-grown graphene needs to be transferred onto target dielectric layer. However, wrinkles, cracks, damages, and chemical residues from the metal substrate and the auxiliary polymer are inevitably introduced to graphene during such a transfer process, which are greatly detrimental to the performances of the graphene devices. Therefore, the direct synthesis of graphene on dielectric layer is of great importance. Many researches about this subject have been carried out in the last few years. While only few papers have systematically reviewed the direct growth of graphene on dielectric layer. For the in-depth understanding and further research of it, a detailed overview is required. In this paper, we summarize the recent research progress of the direct syntheses of graphene on dielectric layers, and expatiate upon different growth methods, including metal assisted growth, plasma enhanced growth, thermodynamics versus kinetics tailored growth, et al. Then differences in property between graphenes grown on various dielectric and insulating layers which serve as growth substrates in the direct growing process are discussed, such as SiO2/Si, Al2O3, SrTiO3, h-BN, SiC, Si3N4 and glass. Some kinds of mechanisms for graphene to be directly grown on dielectric layers have been proposed in different reports. Here in this paper, we review the possible growth mechanisms and divide them into van der Waals epitaxial growth and catalytic growth by SiC nanoparticles or oxygen atoms. Detailed data including Raman signals, sheet resistances, transmittances, carrier motilities are listed for the direct comparison of the quality among the graphenes grown on dielectric layers. The research focus and major problems existing in this field are presented in the last part of this paper. We also prospect the possible developing trend in the direct syntheses of high quality graphenes on dielectric layers in the future.
      通信作者: 胡平安, hupa@hit.edu.cn
    • 基金项目: 国家重点基础研究发展计划(批准号:2013CB632900)和国家自然科学基金(批准号:61390502,21373068)资助的课题.
      Corresponding author: Hu Ping-An, hupa@hit.edu.cn
    • Funds: Project supported by the National Basic Research Program of China (Grant No. 2013CB632900) and the National Natural Science Foundation of China (Grant Nos. 61390502, 21373068).
    [1]

    Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666

    [2]

    Novoselov K S, Geim A K, Morozov S V, Jiang D, Katsnelson M I, Grigorieva I V, Dubonos S V, Firsov A A 2005 Nature 438 197

    [3]

    Novoselov K S, Jiang Z, Zhang Y, Morozov S V, Stormer H L, Zeitler U, Maan J C, Boebinger G S, Kim P, Geim A K 2007 Science 315 1379

    [4]

    Mayorov A S, Gorbachev R V, Morozov S V, Britnell L, Jalil R, Ponomarenko L A, Blake P, Novoselov K S, Watanabe K, Taniguchi T, Geim A K 2011 Nano Lett. 11 2396

    [5]

    Katsnelson M I, Novoselov K S, Geim A K 2006 Nat. Phys. 2 620

    [6]

    Guo W, Jing F, Xiao J, Zhou C, Lin Y, Wang S 2016 Adv. Mater. 28 3152

    [7]

    Pan Y, Zhang H, Shi D, Sun J, Du S, Liu F, Gao H J 2009 Adv. Mater. 21 2777

    [8]

    Lin Y C, Lu C C, Yeh C H, Jin C, Suenaga K, Chiu P W 2012 Nano Lett. 12 414

    [9]

    Cheng Z, Zhou Q, Wang C, Li Q, Wang C, Fang Y 2011 Nano Lett. 11 767

    [10]

    Suk J W, Lee W H, Lee J, Chou H, Piner R D, Hao Y, Akinwande D, Ruoff R S 2013 Nano Lett. 13 1462

    [11]

    Ambrosi A, Pumera M 2014 Nanoscale 6 472

    [12]

    Suzuki S, Orofeo C M, Wang S, Maeda F, Takamura M, Hibino H 2013 J. Phys. Chem. C 117 22123

    [13]

    Li X, Zhu Y, Cai W, Borysiak M, Han B, Chen D, Piner R D, Colombo L, Ruoff R S 2009 Nano Lett. 9 4359

    [14]

    Chen X, Wu B, Liu Y 2016 Chem. Soc. Rev. 45 2057

    [15]

    Wang H, Yu G 2016 Adv. Mater. 28 4956

    [16]

    Li X S, Cai W W, Colombo L, Ruoff R S 2009 Nano Lett. 9 4268

    [17]

    Levendorf M P, Ruiz-Vargas C S, Garg S, Park J 2009 Nano Lett. 9 4479

    [18]

    Ismach A, Druzgalski C, Penwell S, Schwartzberg A, Zheng M, Javey A, Bokor J, Zhang Y 2010 Nano Lett. 10 1542

    [19]

    Shin H J, Choi W M, Yoon S M, Han G H, Woo Y S, Kim E S, Chae S J, Li X S, Benayad A, Loc D D, Gunes F, Lee Y H, Choi J Y 2011 Adv. Mater. 23 4392

    [20]

    Yan Z, Peng Z W, Sun Z Z, Yao J, Zhu Y, Zheng Liu, Ajayan P M, Tour J M 2011 ACS Nano 5 8187

    [21]

    Tamaoki M, Imaeda H, Kishimoto S, Mizutani T 2013 Appl. Phys. Lett. 103 183114

    [22]

    Xiong W, Zhou Y S, Jiang L J, Sarkar A, Mahjouri-Samani M, Xie Z Q, Gao Y, Ianno N J, Jiang L, Lu Y F 2013 Adv. Mater. 25 630

    [23]

    Zhuo Q Q, Wang Q, Zhang Y P, Zhang D, Li Q L, Gao C H, Sun Y Q, Ding L, Sun Q J, Wang S D, Zhong J, Sun X H, Lee S T 2015 ACS Nano 9 594

    [24]

    Kim K S, Zhao Y, Jang H, Lee S Y, Kim J M, Kim K S, Ahn J H, Kim P, Choi J Y, Hong B H 2009 Nature 457 706

    [25]

    Teng P Y, Lu C C, Akiyama-Hasegawa K, Lin Y C, Yeh C H, Suenaga K, Chiu P W 2012 Nano Lett. 12 1379

    [26]

    Kim H, Song I, Park C, Son M, Hong M, Kim Y, Kim J S, Shin H J, Baik J, Choi H C 2013 ACS Nano 7 6575

    [27]

    Yen W C, Chen Y Z, Yeh C H, He J H, Chiu P W, Chueh Y L 2014 Sci. Rep. 4 4739

    [28]

    Murakami K, Tanaka S, Hirukawa A, Hiyama T, Kuwajima T, Kano E, Takeguchi M, Fujita J I 2015 Appl. Phys. Lett. 106 093112

    [29]

    Sun J, Chen Z, Yuan L, Chen Y, Ning J, Liu S, Ma D, Song X, Priydarshi M K, Bachmatiuk A, Rummeli M H, Ma T, Zhi L, Huang L, Zhang Y, Liu Z 2016 ACS Nano 10 11136

    [30]

    Reina A, Thiele S, Jia X, Bhaviripudi S, Dresselhaus M S, Schaefer J A, Kong J 2009 Nano Res. 2 509

    [31]

    Peng Z, Yan Z, Sun Z, Tour J M 2011 ACS Nano 5 8241

    [32]

    Su C Y, Lu A Y, Wu C Y, Li Y T, Liu K K, Zhang W, Lin S Y, Juang Z Y, Zhong Y L, Chen F R, Li L J 2011 Nano Lett. 11 3612

    [33]

    Kato T, Hatakeyama R 2012 ACS Nano 6 8508

    [34]

    Kwak J, Chu J H, Choi J K, Park S D, Go H, Kim S Y, Park K, Kim S D, Kim Y W, Yoon E, Kodambaka S, Kwon S Y 2012 Nat. Commun. 3 645

    [35]

    Wang J, Zeng M, Tan L, Dai B, Deng Y, Rummeli M, Xu H, Li Z, Wang S, Peng L, Eckert J, Fu L 2013 Sci. Rep. 3 2670

    [36]

    Tan L F, Zeng M Q, Zhang T, Fu L 2015 Nanoscale 7 9105

    [37]

    Berman D, Deshmukh S A, Narayanan B, Sankaranarayanan S K, Yan Z, Balandin A A, Zinovev A, Rosenmann D, Sumant A V 2016 Nat. Commun. 7 12099

    [38]

    Zhang L, Shi Z, Wang Y, Yang R, Shi D, Zhang G 2011 Nano Res. 4 315

    [39]

    Medina H, Lin Y C, Jin C, Lu C C, Yeh C H, Huang K P, Suenaga K, Robertson J, Chiu P W 2012 Adv. Funct. Mater. 22 2123

    [40]

    Wei D, Lu Y, Han C, Niu T, Chen W, Wee A T 2013 Angew. Chem. Int. Ed. Engl. 52 14121

    [41]

    Wei D C, Peng L, Li M L, Mao H Y, Niu T C, Han C, Chen W, Wee A T S 2015 ACS Nano 9 164

    [42]

    Kim Y S, Joo K, Jerng S K, Lee a H, Moon D, Kim j, Yoon E, Chun S H 2014 ACS Nano 8 2230

    [43]

    Kim Y S, Joo K, Jerng S K, Lee J H, Yoon E, Chun S H 2014 Nanoscale 6 10100

    [44]

    Hao Y, Bharathi M S, Wang L, Liu Y, Chen H, Nie S, Wang X, Chou H, Tan C, Fallahazad B, Ramanarayan H, Magnuson C W, Tutuc E, Yakobson B I, McCarty K F, Zhang Y W, Kim P, Hone J, Colombo L, Ruoff R S 2013 Science 342 720

    [45]

    Chen J, Wen Y, Guo Y, Wu B, Huang L, Xue Y, Geng D, Wang D, Yu G, Liu Y 2011 J. Am. Chem. Soc. 133 17548

    [46]

    Behura S, Nguyen P, Che S, Debbarma R, Berry V 2015 J. Am. Chem. Soc. 137 13060

    [47]

    Chen J, Guo Y, Jiang L, Xu Z, Huang L, Xue Y, Geng D, Wu B, Hu W, Yu G, Liu Y 2014 Adv. Mater. 26 1348

    [48]

    Pang J, Mendes R G, Wrobel P S, Wlodarski M D, Ta H Q, Zhao L, Giebeler L, Trzebicka B, Gemming T, Fu L, Liu Z, Eckert J, Bachmatiuk A, Rummeli M H 2017 ACS Nano 11 1946

    [49]

    Hwang J, Shields V B, Thomas C I, Shivaraman S, Hao D, Kim M, Woll A R, Tompa G S, Spencer M G 2010 J. Cryst. Growth 312 3219

    [50]

    Fanton M A, Robinson J A, Puls C, Liu Y, Hollander M J, Weiland B E, LaBella M, Trumbull K, Kasarda R, Howsare C, Stitt J, Snyder D W 2011 ACS Nano 5 8062

    [51]

    Hwang J, Kim M, Campbell D, Alsalman H A, Kwak J Y, Shivaraman S, Woll A R, Singh A K, Hennig R G, Gorantla S, mmeli M H R, Spencer M G 2013 ACS Nano 7 385

    [52]

    Miyasaka Y, Nakamura A, Temmyo J 2011 Jpn. J. Appl. Phys. 50 04DH12

    [53]

    Song H J, Son M, Park C, Lim H, Levendorf M P, Tsen A W, Park J, Choi H C 2012 Nanoscale 4 3050

    [54]

    Park J, Lee J, Choi J H, Hwang D K, Song Y W 2015 Sci. Rep. 5 11839

    [55]

    Sun J, Gao T, Song X, Zhao Y, Lin Y, Wang H, Ma D, Chen Y, Xiang W, Wang J, Zhang Y, Liu Z 2014 J. Am. Chem. Soc. 136 6574

    [56]

    Li X A, Liu Z R, Wang B L, Yang J P, Ma Y W, Feng X M, Huang W, Gu M F 2013 Synth. Met. 174 50

    [57]

    Rmmeli M H, Bachmatiuk A, Scott A, Brrnert F, Warner J H, Hoffman V, Lin J H, Cuniberti G, Bchner B 2010 ACS Nano 4 4206

    [58]

    Young A F, Dean C R, Meric I, Sorgenfrei S, Ren H, Watanabe K, Taniguchi T, Hone J, Shepard K L, Kim P 2012 Phys. Rev. B 85 235458

    [59]

    Ding X, Ding G, Xie X, Huang F, Jiang M 2011 Carbon 49 2522

    [60]

    Tang S, Ding G, Xie X, Chen J, Wang C, Ding X, Huang F, Lu W, Jiang M 2012 Carbon 50 329

    [61]

    Son M, Lim H, Hong M, Choi H C 2011 Nanoscale 3 3089

    [62]

    Mishra N, Miseikis V, Convertino D, Gemmi M, Piazza V, Coletti C 2016 Carbon 96 497

    [63]

    Yang W, Chen G, Shi Z, Liu C C, Zhang L, Xie G, Cheng M, Wang D, Yang R, Shi D, Watanabe K, Taniguchi T, Yao Y, Zhang Y, Zhang G 2013 Nat. Mater. 12 792

    [64]

    Yankowitz M, Xue J, Cormode D, Sanchez-Yamagishi J D, Watanabe K, Taniguchi T, Jarillo-Herrero P, Jacquod P, LeRoy B J 2012 Nat. Phys. 8 382

    [65]

    Tang S, Wang H, Zhang Y, Li A, Xie H, Liu X, Liu L, Li T, Huang F, Xie X, Jiang M 2013 Sci. Rep. 3 2666

    [66]

    Wang M, Jang S K, Jang W J, Kim M, Park S Y, Kim S W, Kahng S J, Choi J Y, Ruoff R S, Song Y J, Lee S 2013 Adv. Mater. 25 2746

    [67]

    Gao T, Song X, Du H, Nie Y, Chen Y, Ji Q, Sun J, Yang Y, Zhang Y, Liu Z 2015 Nat. Commun. 6 6835

    [68]

    Tang S, Wang H, Wang H S, Sun Q, Zhang X, Cong C, Xie H, Liu X, Zhou X, Huang F, Chen X, Yu T, Ding F, Xie X, Jiang M 2015 Nat. Commun. 6 6499

    [69]

    Li Q C, Zhao Z F, Yan B M, Song X J, Zhang Z P, Li J, Wu X S, Bian Z Q, Zou X L, Zhang Y F, Liu Z F 2017 Adv. Mater. 29 1701325

    [70]

    Berger C, Song M Z, Li X B, Wu X S, Brown N, Naud C C, Mayou D, Li T B, Hass J, Marchenkov A N, Conrad E H, First P N, Heer W A D 2006 Science 312 1191

    [71]

    Emtsev K V, Bostwick A, Horn K, Jobst J, Kellogg G L, Ley L, McChesney J L, Ohta T, Reshanov S A, Rohrl J, Rotenberg E, Schmid A K, Waldmann D, Weber H B, Seyller T 2009 Nat. Mater. 8 203

    [72]

    Varchon F, Feng R, Hass J, Li X, Nguyen B N, Naud C, Mallet P, Veuillen J Y, Berger C, Conrad E H, Magaud L 2007 Phys. Rev. Lett. 99 126805

    [73]

    Virojanadara C, Zakharov A A, Yakimova R, Johansson L I 2010 Surf. Sci. 604 L4

    [74]

    Walter A L, Jeon K J, Bostwick A, Speck F, Ostler M, Seyller T, Moreschini L, Kim Y S, Chang Y J, Horn K, Rotenberg E 2011 Appl. Phys. Lett. 98 184102

    [75]

    Ostler M, Fromm F, Koch R J, Wehrfritz P, Speck F, Vita H, Bttcher S, Horn K, Seyller T 2014 Carbon 70 258

    [76]

    Virojanadara C, Watcharinyanon S, Zakharov A A, Johansson L I 2010 Phys. Rev. B 82 205402

    [77]

    Xia C, Watcharinyanon S, Zakharov A A, Yakimova R, Hultman L, Johansson L I, Virojanadara C 2012 Phys. Rev. B 85 045418

    [78]

    Emtsev K V, Zakharov A A, Coletti C, Forti S, Starke U 2011 Phys. Rev. B 84 125423

    [79]

    Sun J, Lindvall N, Cole M T, Yurgens A 2011 Appl. Phys. Lett. 98 252107

    [80]

    Chen J, Guo Y, Wen Y, Huang L, Xue Y, Geng D, Wu B, Luo B, Yu G, Liu Y 2013 Adv. Mater. 25 992

    [81]

    Sun J, Chen Y, Priydarshi M K, Chen Z, Bachmatiuk A, Zou Z, Chen Z, Song X, Gao Y, Rummeli M H, Zhang Y, Liu Z 2015 Nano Lett. 15 5846

    [82]

    Sun J, Chen Y, Cai X, Ma B, Chen Z, Priydarshi M K, Chen K, Gao T, Song X, Ji Q, Guo X, Zou D, Zhang Y, Liu Z 2015 Nano Res. 8 3496

    [83]

    Chen Y, Sun J, Gao J, Du F, Han Q, Nie Y, Chen Z, Bachmatiuk A, Priydarshi M K, Ma D, Song X, Wu X, Xiong C, Rummeli M H, Ding F, Zhang Y, Liu Z 2015 Adv. Mater. 27 7839

    [84]

    Chen J, Zhao X, Tan S J, Xu H, Wu B, Liu B, Fu D, Fu W, Geng D, Liu Y, Liu W, Tang W, Li L, Zhou W, Sum T C, Loh K P 2017 J. Am. Chem. Soc. 139 1073

    [85]

    Chen X D, Chen Z, Jiang W S, Zhang C, Sun J, Wang H, Xin W, Lin L, Priydarshi M K, Yang H, Liu Z B, Tian J G, Zhang Y, Zhang Y, Liu Z 2017 Adv. Mater. 29 1603428

    [86]

    Wang E, Lu X, Ding S, Yao W, Yan M, Wan G, Deng K, Wang S, Chen G, Ma L, Jung J, Fedorov A V, Zhang Y, Zhang G, Zhou S 2016 Nat. Phys. 12 1111

    [87]

    Gorbachev R V, Song J C W, Yu G L, Kretinin A V, Withers F, Cao Y, Mishchenko A, Grigorieva I V, Novoselov K S, Levitov L S, Geim A K 2014 Science 346 448

    [88]

    Krishna Kumar R, Chen X, Auton G H, Mishchenko A, Bandurin D A, Morozov S V, Cao Y, Khestanova E, Ben Shalom M, Kretinin A V, Novoselov K S, Eaves L, Grigorieva I V, Ponomarenko L A, Falko V I, Geim A K 2017 Science 357 181

    [89]

    Scott A, Dianat A, Brrnert F, Bachmatiuk A, Zhang S, Warner J H, Borowiak-Paleń E, Knupfer M, Bchner B, Cuniberti G, Rmmeli M H 2011 Appl. Phys. Lett. 98 073110

  • [1]

    Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666

    [2]

    Novoselov K S, Geim A K, Morozov S V, Jiang D, Katsnelson M I, Grigorieva I V, Dubonos S V, Firsov A A 2005 Nature 438 197

    [3]

    Novoselov K S, Jiang Z, Zhang Y, Morozov S V, Stormer H L, Zeitler U, Maan J C, Boebinger G S, Kim P, Geim A K 2007 Science 315 1379

    [4]

    Mayorov A S, Gorbachev R V, Morozov S V, Britnell L, Jalil R, Ponomarenko L A, Blake P, Novoselov K S, Watanabe K, Taniguchi T, Geim A K 2011 Nano Lett. 11 2396

    [5]

    Katsnelson M I, Novoselov K S, Geim A K 2006 Nat. Phys. 2 620

    [6]

    Guo W, Jing F, Xiao J, Zhou C, Lin Y, Wang S 2016 Adv. Mater. 28 3152

    [7]

    Pan Y, Zhang H, Shi D, Sun J, Du S, Liu F, Gao H J 2009 Adv. Mater. 21 2777

    [8]

    Lin Y C, Lu C C, Yeh C H, Jin C, Suenaga K, Chiu P W 2012 Nano Lett. 12 414

    [9]

    Cheng Z, Zhou Q, Wang C, Li Q, Wang C, Fang Y 2011 Nano Lett. 11 767

    [10]

    Suk J W, Lee W H, Lee J, Chou H, Piner R D, Hao Y, Akinwande D, Ruoff R S 2013 Nano Lett. 13 1462

    [11]

    Ambrosi A, Pumera M 2014 Nanoscale 6 472

    [12]

    Suzuki S, Orofeo C M, Wang S, Maeda F, Takamura M, Hibino H 2013 J. Phys. Chem. C 117 22123

    [13]

    Li X, Zhu Y, Cai W, Borysiak M, Han B, Chen D, Piner R D, Colombo L, Ruoff R S 2009 Nano Lett. 9 4359

    [14]

    Chen X, Wu B, Liu Y 2016 Chem. Soc. Rev. 45 2057

    [15]

    Wang H, Yu G 2016 Adv. Mater. 28 4956

    [16]

    Li X S, Cai W W, Colombo L, Ruoff R S 2009 Nano Lett. 9 4268

    [17]

    Levendorf M P, Ruiz-Vargas C S, Garg S, Park J 2009 Nano Lett. 9 4479

    [18]

    Ismach A, Druzgalski C, Penwell S, Schwartzberg A, Zheng M, Javey A, Bokor J, Zhang Y 2010 Nano Lett. 10 1542

    [19]

    Shin H J, Choi W M, Yoon S M, Han G H, Woo Y S, Kim E S, Chae S J, Li X S, Benayad A, Loc D D, Gunes F, Lee Y H, Choi J Y 2011 Adv. Mater. 23 4392

    [20]

    Yan Z, Peng Z W, Sun Z Z, Yao J, Zhu Y, Zheng Liu, Ajayan P M, Tour J M 2011 ACS Nano 5 8187

    [21]

    Tamaoki M, Imaeda H, Kishimoto S, Mizutani T 2013 Appl. Phys. Lett. 103 183114

    [22]

    Xiong W, Zhou Y S, Jiang L J, Sarkar A, Mahjouri-Samani M, Xie Z Q, Gao Y, Ianno N J, Jiang L, Lu Y F 2013 Adv. Mater. 25 630

    [23]

    Zhuo Q Q, Wang Q, Zhang Y P, Zhang D, Li Q L, Gao C H, Sun Y Q, Ding L, Sun Q J, Wang S D, Zhong J, Sun X H, Lee S T 2015 ACS Nano 9 594

    [24]

    Kim K S, Zhao Y, Jang H, Lee S Y, Kim J M, Kim K S, Ahn J H, Kim P, Choi J Y, Hong B H 2009 Nature 457 706

    [25]

    Teng P Y, Lu C C, Akiyama-Hasegawa K, Lin Y C, Yeh C H, Suenaga K, Chiu P W 2012 Nano Lett. 12 1379

    [26]

    Kim H, Song I, Park C, Son M, Hong M, Kim Y, Kim J S, Shin H J, Baik J, Choi H C 2013 ACS Nano 7 6575

    [27]

    Yen W C, Chen Y Z, Yeh C H, He J H, Chiu P W, Chueh Y L 2014 Sci. Rep. 4 4739

    [28]

    Murakami K, Tanaka S, Hirukawa A, Hiyama T, Kuwajima T, Kano E, Takeguchi M, Fujita J I 2015 Appl. Phys. Lett. 106 093112

    [29]

    Sun J, Chen Z, Yuan L, Chen Y, Ning J, Liu S, Ma D, Song X, Priydarshi M K, Bachmatiuk A, Rummeli M H, Ma T, Zhi L, Huang L, Zhang Y, Liu Z 2016 ACS Nano 10 11136

    [30]

    Reina A, Thiele S, Jia X, Bhaviripudi S, Dresselhaus M S, Schaefer J A, Kong J 2009 Nano Res. 2 509

    [31]

    Peng Z, Yan Z, Sun Z, Tour J M 2011 ACS Nano 5 8241

    [32]

    Su C Y, Lu A Y, Wu C Y, Li Y T, Liu K K, Zhang W, Lin S Y, Juang Z Y, Zhong Y L, Chen F R, Li L J 2011 Nano Lett. 11 3612

    [33]

    Kato T, Hatakeyama R 2012 ACS Nano 6 8508

    [34]

    Kwak J, Chu J H, Choi J K, Park S D, Go H, Kim S Y, Park K, Kim S D, Kim Y W, Yoon E, Kodambaka S, Kwon S Y 2012 Nat. Commun. 3 645

    [35]

    Wang J, Zeng M, Tan L, Dai B, Deng Y, Rummeli M, Xu H, Li Z, Wang S, Peng L, Eckert J, Fu L 2013 Sci. Rep. 3 2670

    [36]

    Tan L F, Zeng M Q, Zhang T, Fu L 2015 Nanoscale 7 9105

    [37]

    Berman D, Deshmukh S A, Narayanan B, Sankaranarayanan S K, Yan Z, Balandin A A, Zinovev A, Rosenmann D, Sumant A V 2016 Nat. Commun. 7 12099

    [38]

    Zhang L, Shi Z, Wang Y, Yang R, Shi D, Zhang G 2011 Nano Res. 4 315

    [39]

    Medina H, Lin Y C, Jin C, Lu C C, Yeh C H, Huang K P, Suenaga K, Robertson J, Chiu P W 2012 Adv. Funct. Mater. 22 2123

    [40]

    Wei D, Lu Y, Han C, Niu T, Chen W, Wee A T 2013 Angew. Chem. Int. Ed. Engl. 52 14121

    [41]

    Wei D C, Peng L, Li M L, Mao H Y, Niu T C, Han C, Chen W, Wee A T S 2015 ACS Nano 9 164

    [42]

    Kim Y S, Joo K, Jerng S K, Lee a H, Moon D, Kim j, Yoon E, Chun S H 2014 ACS Nano 8 2230

    [43]

    Kim Y S, Joo K, Jerng S K, Lee J H, Yoon E, Chun S H 2014 Nanoscale 6 10100

    [44]

    Hao Y, Bharathi M S, Wang L, Liu Y, Chen H, Nie S, Wang X, Chou H, Tan C, Fallahazad B, Ramanarayan H, Magnuson C W, Tutuc E, Yakobson B I, McCarty K F, Zhang Y W, Kim P, Hone J, Colombo L, Ruoff R S 2013 Science 342 720

    [45]

    Chen J, Wen Y, Guo Y, Wu B, Huang L, Xue Y, Geng D, Wang D, Yu G, Liu Y 2011 J. Am. Chem. Soc. 133 17548

    [46]

    Behura S, Nguyen P, Che S, Debbarma R, Berry V 2015 J. Am. Chem. Soc. 137 13060

    [47]

    Chen J, Guo Y, Jiang L, Xu Z, Huang L, Xue Y, Geng D, Wu B, Hu W, Yu G, Liu Y 2014 Adv. Mater. 26 1348

    [48]

    Pang J, Mendes R G, Wrobel P S, Wlodarski M D, Ta H Q, Zhao L, Giebeler L, Trzebicka B, Gemming T, Fu L, Liu Z, Eckert J, Bachmatiuk A, Rummeli M H 2017 ACS Nano 11 1946

    [49]

    Hwang J, Shields V B, Thomas C I, Shivaraman S, Hao D, Kim M, Woll A R, Tompa G S, Spencer M G 2010 J. Cryst. Growth 312 3219

    [50]

    Fanton M A, Robinson J A, Puls C, Liu Y, Hollander M J, Weiland B E, LaBella M, Trumbull K, Kasarda R, Howsare C, Stitt J, Snyder D W 2011 ACS Nano 5 8062

    [51]

    Hwang J, Kim M, Campbell D, Alsalman H A, Kwak J Y, Shivaraman S, Woll A R, Singh A K, Hennig R G, Gorantla S, mmeli M H R, Spencer M G 2013 ACS Nano 7 385

    [52]

    Miyasaka Y, Nakamura A, Temmyo J 2011 Jpn. J. Appl. Phys. 50 04DH12

    [53]

    Song H J, Son M, Park C, Lim H, Levendorf M P, Tsen A W, Park J, Choi H C 2012 Nanoscale 4 3050

    [54]

    Park J, Lee J, Choi J H, Hwang D K, Song Y W 2015 Sci. Rep. 5 11839

    [55]

    Sun J, Gao T, Song X, Zhao Y, Lin Y, Wang H, Ma D, Chen Y, Xiang W, Wang J, Zhang Y, Liu Z 2014 J. Am. Chem. Soc. 136 6574

    [56]

    Li X A, Liu Z R, Wang B L, Yang J P, Ma Y W, Feng X M, Huang W, Gu M F 2013 Synth. Met. 174 50

    [57]

    Rmmeli M H, Bachmatiuk A, Scott A, Brrnert F, Warner J H, Hoffman V, Lin J H, Cuniberti G, Bchner B 2010 ACS Nano 4 4206

    [58]

    Young A F, Dean C R, Meric I, Sorgenfrei S, Ren H, Watanabe K, Taniguchi T, Hone J, Shepard K L, Kim P 2012 Phys. Rev. B 85 235458

    [59]

    Ding X, Ding G, Xie X, Huang F, Jiang M 2011 Carbon 49 2522

    [60]

    Tang S, Ding G, Xie X, Chen J, Wang C, Ding X, Huang F, Lu W, Jiang M 2012 Carbon 50 329

    [61]

    Son M, Lim H, Hong M, Choi H C 2011 Nanoscale 3 3089

    [62]

    Mishra N, Miseikis V, Convertino D, Gemmi M, Piazza V, Coletti C 2016 Carbon 96 497

    [63]

    Yang W, Chen G, Shi Z, Liu C C, Zhang L, Xie G, Cheng M, Wang D, Yang R, Shi D, Watanabe K, Taniguchi T, Yao Y, Zhang Y, Zhang G 2013 Nat. Mater. 12 792

    [64]

    Yankowitz M, Xue J, Cormode D, Sanchez-Yamagishi J D, Watanabe K, Taniguchi T, Jarillo-Herrero P, Jacquod P, LeRoy B J 2012 Nat. Phys. 8 382

    [65]

    Tang S, Wang H, Zhang Y, Li A, Xie H, Liu X, Liu L, Li T, Huang F, Xie X, Jiang M 2013 Sci. Rep. 3 2666

    [66]

    Wang M, Jang S K, Jang W J, Kim M, Park S Y, Kim S W, Kahng S J, Choi J Y, Ruoff R S, Song Y J, Lee S 2013 Adv. Mater. 25 2746

    [67]

    Gao T, Song X, Du H, Nie Y, Chen Y, Ji Q, Sun J, Yang Y, Zhang Y, Liu Z 2015 Nat. Commun. 6 6835

    [68]

    Tang S, Wang H, Wang H S, Sun Q, Zhang X, Cong C, Xie H, Liu X, Zhou X, Huang F, Chen X, Yu T, Ding F, Xie X, Jiang M 2015 Nat. Commun. 6 6499

    [69]

    Li Q C, Zhao Z F, Yan B M, Song X J, Zhang Z P, Li J, Wu X S, Bian Z Q, Zou X L, Zhang Y F, Liu Z F 2017 Adv. Mater. 29 1701325

    [70]

    Berger C, Song M Z, Li X B, Wu X S, Brown N, Naud C C, Mayou D, Li T B, Hass J, Marchenkov A N, Conrad E H, First P N, Heer W A D 2006 Science 312 1191

    [71]

    Emtsev K V, Bostwick A, Horn K, Jobst J, Kellogg G L, Ley L, McChesney J L, Ohta T, Reshanov S A, Rohrl J, Rotenberg E, Schmid A K, Waldmann D, Weber H B, Seyller T 2009 Nat. Mater. 8 203

    [72]

    Varchon F, Feng R, Hass J, Li X, Nguyen B N, Naud C, Mallet P, Veuillen J Y, Berger C, Conrad E H, Magaud L 2007 Phys. Rev. Lett. 99 126805

    [73]

    Virojanadara C, Zakharov A A, Yakimova R, Johansson L I 2010 Surf. Sci. 604 L4

    [74]

    Walter A L, Jeon K J, Bostwick A, Speck F, Ostler M, Seyller T, Moreschini L, Kim Y S, Chang Y J, Horn K, Rotenberg E 2011 Appl. Phys. Lett. 98 184102

    [75]

    Ostler M, Fromm F, Koch R J, Wehrfritz P, Speck F, Vita H, Bttcher S, Horn K, Seyller T 2014 Carbon 70 258

    [76]

    Virojanadara C, Watcharinyanon S, Zakharov A A, Johansson L I 2010 Phys. Rev. B 82 205402

    [77]

    Xia C, Watcharinyanon S, Zakharov A A, Yakimova R, Hultman L, Johansson L I, Virojanadara C 2012 Phys. Rev. B 85 045418

    [78]

    Emtsev K V, Zakharov A A, Coletti C, Forti S, Starke U 2011 Phys. Rev. B 84 125423

    [79]

    Sun J, Lindvall N, Cole M T, Yurgens A 2011 Appl. Phys. Lett. 98 252107

    [80]

    Chen J, Guo Y, Wen Y, Huang L, Xue Y, Geng D, Wu B, Luo B, Yu G, Liu Y 2013 Adv. Mater. 25 992

    [81]

    Sun J, Chen Y, Priydarshi M K, Chen Z, Bachmatiuk A, Zou Z, Chen Z, Song X, Gao Y, Rummeli M H, Zhang Y, Liu Z 2015 Nano Lett. 15 5846

    [82]

    Sun J, Chen Y, Cai X, Ma B, Chen Z, Priydarshi M K, Chen K, Gao T, Song X, Ji Q, Guo X, Zou D, Zhang Y, Liu Z 2015 Nano Res. 8 3496

    [83]

    Chen Y, Sun J, Gao J, Du F, Han Q, Nie Y, Chen Z, Bachmatiuk A, Priydarshi M K, Ma D, Song X, Wu X, Xiong C, Rummeli M H, Ding F, Zhang Y, Liu Z 2015 Adv. Mater. 27 7839

    [84]

    Chen J, Zhao X, Tan S J, Xu H, Wu B, Liu B, Fu D, Fu W, Geng D, Liu Y, Liu W, Tang W, Li L, Zhou W, Sum T C, Loh K P 2017 J. Am. Chem. Soc. 139 1073

    [85]

    Chen X D, Chen Z, Jiang W S, Zhang C, Sun J, Wang H, Xin W, Lin L, Priydarshi M K, Yang H, Liu Z B, Tian J G, Zhang Y, Zhang Y, Liu Z 2017 Adv. Mater. 29 1603428

    [86]

    Wang E, Lu X, Ding S, Yao W, Yan M, Wan G, Deng K, Wang S, Chen G, Ma L, Jung J, Fedorov A V, Zhang Y, Zhang G, Zhou S 2016 Nat. Phys. 12 1111

    [87]

    Gorbachev R V, Song J C W, Yu G L, Kretinin A V, Withers F, Cao Y, Mishchenko A, Grigorieva I V, Novoselov K S, Levitov L S, Geim A K 2014 Science 346 448

    [88]

    Krishna Kumar R, Chen X, Auton G H, Mishchenko A, Bandurin D A, Morozov S V, Cao Y, Khestanova E, Ben Shalom M, Kretinin A V, Novoselov K S, Eaves L, Grigorieva I V, Ponomarenko L A, Falko V I, Geim A K 2017 Science 357 181

    [89]

    Scott A, Dianat A, Brrnert F, Bachmatiuk A, Zhang S, Warner J H, Borowiak-Paleń E, Knupfer M, Bchner B, Cuniberti G, Rmmeli M H 2011 Appl. Phys. Lett. 98 073110

  • [1] 丁业章, 叶寅, 李多生, 徐锋, 朗文昌, 刘俊红, 温鑫. WC-Co硬质合金表面石墨烯沉积生长分子动力学仿真研究. 物理学报, 2023, 72(6): 068703. doi: 10.7498/aps.72.20221332
    [2] 邓旭良, 冀先飞, 王德君, 黄玲琴. 石墨烯过渡层对金属/SiC接触肖特基势垒调控的第一性原理研究. 物理学报, 2022, 71(5): 058102. doi: 10.7498/aps.71.20211796
    [3] 陈善登, 白清顺, 窦昱昊, 郭万民, 王洪飞, 杜云龙. 金刚石晶界辅助石墨烯沉积的成核机理仿真. 物理学报, 2022, 71(8): 086103. doi: 10.7498/aps.71.20211981
    [4] 徐翔, 张莹, 闫庆, 刘晶晶, 王骏, 徐新龙, 华灯鑫. 不同堆垛结构二硫化铼/石墨烯异质结的光电化学特性. 物理学报, 2021, 70(9): 098203. doi: 10.7498/aps.70.20201904
    [5] 周海涛, 熊希雅, 罗飞, 罗炳威, 刘大博, 申承民. 原位生长技术制备石墨烯强化铜基复合材料. 物理学报, 2021, 70(8): 086201. doi: 10.7498/aps.70.20201943
    [6] 白清顺, 窦昱昊, 何欣, 张爱民, 郭永博. 基于分子动力学模拟的铜晶面石墨烯沉积生长机理. 物理学报, 2020, 69(22): 226102. doi: 10.7498/aps.69.20200781
    [7] 王晓愚, 毕卫红, 崔永兆, 付广伟, 付兴虎, 金娃, 王颖. 基于化学气相沉积方法的石墨烯-光子晶体光纤的制备研究. 物理学报, 2020, 69(19): 194202. doi: 10.7498/aps.69.20200750
    [8] 崔树稳, 李璐, 魏连甲, 钱萍. 双层石墨烯层间限域CO氧化反应的密度泛函研究. 物理学报, 2019, 68(21): 218101. doi: 10.7498/aps.68.20190447
    [9] 王晓, 黄生祥, 罗衡, 邓联文, 吴昊, 徐运超, 贺君, 贺龙辉. 镍层间掺杂多层石墨烯的电子结构及光吸收特性研究. 物理学报, 2019, 68(18): 187301. doi: 10.7498/aps.68.20190523
    [10] 宋航, 刘杰, 陈超, 巴龙. 离子凝胶薄膜栅介石墨烯场效应管. 物理学报, 2019, 68(9): 097301. doi: 10.7498/aps.68.20190058
    [11] 张晓波, 青芳竹, 李雪松. 化学气相沉积石墨烯薄膜的洁净转移. 物理学报, 2019, 68(9): 096801. doi: 10.7498/aps.68.20190279
    [12] 俎凤霞, 张盼盼, 熊伦, 殷勇, 刘敏敏, 高国营. 以石墨烯为电极的有机噻吩分子整流器的设计及电输运特性研究. 物理学报, 2017, 66(9): 098501. doi: 10.7498/aps.66.098501
    [13] 谷季唯, 王锦程, 王志军, 李俊杰, 郭灿, 唐赛. 不同衬底条件下石墨烯结构形核过程的晶体相场法研究. 物理学报, 2017, 66(21): 216101. doi: 10.7498/aps.66.216101
    [14] 李浩, 付志兵, 王红斌, 易勇, 黄维, 张继成. 铜基底上双层至多层石墨烯常压化学气相沉积法制备与机理探讨. 物理学报, 2017, 66(5): 058101. doi: 10.7498/aps.66.058101
    [15] 冯奇, 李梦凯, 唐海通, 王晓东, 高忠民, 孟繁玲. 石墨烯/聚乙烯醇/聚偏氟乙烯基纳米复合薄膜的介电性能. 物理学报, 2016, 65(18): 188101. doi: 10.7498/aps.65.188101
    [16] 王彬, 冯雅辉, 王秋实, 张伟, 张丽娜, 马晋文, 张浩然, 于广辉, 王桂强. 化学气相沉积法制备的石墨烯晶畴的氢气刻蚀. 物理学报, 2016, 65(9): 098101. doi: 10.7498/aps.65.098101
    [17] 韩林芷, 赵占霞, 马忠权. 化学气相沉积法制备大尺寸单晶石墨烯的工艺参数研究. 物理学报, 2014, 63(24): 248103. doi: 10.7498/aps.63.248103
    [18] 王浪, 冯伟, 杨连乔, 张建华. 化学气相沉积法制备石墨烯的铜衬底预处理研究. 物理学报, 2014, 63(17): 176801. doi: 10.7498/aps.63.176801
    [19] 张玉萍, 刘陵玉, 陈琦, 冯志红, 王俊龙, 张晓, 张洪艳, 张会云. 具有分离门电抽运石墨烯中电子-空穴等离子体的冷却效应. 物理学报, 2013, 62(9): 097202. doi: 10.7498/aps.62.097202
    [20] 王文荣, 周玉修, 李铁, 王跃林, 谢晓明. 高质量大面积石墨烯的化学气相沉积制备方法研究. 物理学报, 2012, 61(3): 038702. doi: 10.7498/aps.61.038702
计量
  • 文章访问数:  5417
  • PDF下载量:  428
  • 被引次数: 0
出版历程
  • 收稿日期:  2017-08-05
  • 修回日期:  2017-09-26
  • 刊出日期:  2017-11-05

/

返回文章
返回