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基于阵列波导光栅的光子集成解调技术是硅光领域的研究热点和难点. 相比传统解调方法, 基于阵列波导光栅的光子集成解调技术因其解调精度高、解调速度快、封装体积小等优势, 在光纤布拉格光栅的高速、高精度解调上具有明显优势. 近年来, 随着光子集成技术的发展, 各科研院所和相关机构对阵列波导光栅的光子集成解调法进行了广泛深入的研究与优化. 本文通过介绍阵列波导光栅工作原理及基于阵列波导光栅的光纤布拉格光栅波长解调原理, 结合基于阵列波导光栅的光纤布拉格光栅解调仪在材料体系和系统性能两个方面的重要进展, 归纳了基于阵列波导光栅的解调仪的典型应用场景, 从新材料、系统集成和规模化三方面对光纤布拉格光栅解调系统的未来发展提出针对性建议, 为基于阵列波导光栅的光子集成解调技术的研究发展提供参考.The photonic integrated interrogation technology based on array waveguide grating is a hot but difficult research area in the silicon optical field. Compared with traditional interrogation methods, the photonic integration interrogation technology based on an array waveguide grating has obvious advantages in high-speed and high-precision demodulation of fiber Bragg gratings due to its high demodulation accuracy, fast demodulation speed, and small package size. In recent years, with the development of photonic integration technology, various research institutions and relevant organizations have conducted extensive and in-depth research and optimization on the photonic integration interrogation method of array waveguide gratings. In this paper we introduce the working principle of array waveguide grating and the principle of fiber Bragg grating wavelength interrogation based on array waveguide grating, the important progress of fiber Bragg grating interrogator based on array waveguide grating in both material system and system performance, and summarize the typical applications in interrogator based on array waveguide grating. The future development of fiber Bragg grating demodulation system is proposed from three aspects: new materials, system integration, and scale-up, which provides a reference for the research and development of photonic integrated interrogation technology based on array waveguide grating.
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Keywords:
- fiber Bragg gratings /
- wavelength demodulation /
- arrayed waveguide grating /
- photonic integrated circuit
[1] Culshaw B, Kersey A 2008 J. Light. Technol. 26 1064Google Scholar
[2] Kersey A D, Davis M A, Patrick H J, LeBlanc M, Koo K P, Askins C G, Putnam M A, Friebele E J 1997 J. Light. Technol. 15 1442Google Scholar
[3] Wang T, Liu K, Jiang J F, Xue M, Chang P X, Liu T G 2017 Opt. Express 25 14900Google Scholar
[4] Kersey A D, Berkoff T A, Morey W W 1993 Opt. Lett. 18 1370Google Scholar
[5] Yuan L B 2004 Opt. Laser. Technol. 36 365Google Scholar
[6] Fukuma N, Nakamura K, Ueha S 2005 Proceedings of 17th International Conference on Optical Fibre Sensors Bruges, Belgium, May 23, 2005 p852
[7] 吴开拓, 张继华, 张万里 2018 科技资讯 16 106Google Scholar
Wu K T, Zhang J H, Zhang W L 2018 Sci. Technol. Inf. 16 106Google Scholar
[8] Marin Y E, Nannipieri T, Oton C J, Pasquale F D 2018 J. Light. Technol. 36 946Google Scholar
[9] Marin Y E, Nannipieri T, Oton C J, Pasquale F D 2017 Proceedings of the 25th International Conference on Optical Fiber Sensors Jeju, Korea, April 23, 2017 p10323
[10] Wang L P, Ren C, Cao D Z, Lan R J, Kang F 2021 Chin. Phys. B 30 064209Google Scholar
[11] Zhang W F, Yao J P 2020 Nat. Commun. 11 406Google Scholar
[12] Theurer M, Moehrle M, Sigmund A, Velthaus K O, Oldenbeuving R M, Wevers L, Postma F M, Mateman R, Schreuder F, Geskus D, Worhoff K, Dekker R, Heideman R G, Schell M 2020 J. Light. Technol. 38 2630Google Scholar
[13] 陆子晴, 韩勤, 叶焓, 王帅, 肖峰, 肖帆 2021 物理学报 70 208501Google Scholar
Lu Z Q, Han Q, Ye H, Wang S, Xiao F, Xiao F 2021 Acta Phys. Sin. 70 208501Google Scholar
[14] 马春生, 秦政坤, 张大明 2012 光波导器件设计与模拟 (北京: 高等教育出版社) 第134, 135页
Ma C S, Qin Z K, Zhang D M 2012 Design and Simulation of Optical Waveguide Devices (Beijing: Higher Education Press) pp134, 135 (in Chinese)
[15] Li H Q, An Z X, Zhang S, Zuo S S, Zhu W, Zhang S S, Huang B J, Cao L, Zhang C, Zhang Z Y, Song W C, Mao Q H, Mu Y X, Miao C Y, Li E B, Garcia J D P 2021 ACS Photonics. 8 3607Google Scholar
[16] Webb D J, Pechstedt R D 2002 Optical Fiber Sensors Conference Technical Digest Portland, OR, USA, May 10, 2002 p569
[17] Norman D C C, Webb D J, Pechstedt R D 2005 Meas. Sci. Technol. 16 691Google Scholar
[18] Norman D C C, Webb D J, Pechstedt R D 2004 Proceedings of the Optical Sensing Strasbourg, France, September 1, 2004 p101
[19] 李鸿强, 王润洁, 张美玲, 高倩, 张赛, 宋文超, 毛泉桦, 李恩邦, Garcia Juan Daniel Prades 2021 应用光学 42 898Google Scholar
Li H Q, Wang R J, Zhang M L, Gao Q, Zhang S, Song W C, Mao Q H, Li E B, Garcia J D P 2021 J Appl. Opt. 42 898Google Scholar
[20] Sano Y, Yoshino T 2003 J. Light. Technol. 21 132Google Scholar
[21] Sano Y, Hirayama N, Yoshino T 2003 Proceedings of the Integrated Optics: Devices, Materials, and Technologies VII San Jose, CA, United States, June 19, 2003 p197
[22] Cheng R, Xia L 2016 Opt. Lett. 41 p5254Google Scholar
[23] Buck T C, Müller M S, Plattner M, Koch A W 2009 Proceedings of the Optical Measurement Systems for Industrial Inspection VI Munich, Germany, June 17, 2009 p738930
[24] Kojima S, Hongo A, Komatsuzaki S, Takeda N 2004 Proceedings of the Smart Structures and Materials 2004: Smart Sensor Technology and Measurement Systems San Diego, CA, United States, July 27, 2004 p241
[25] Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2005 Proceedings of the Smart Structures and Materials 2005: Smart Sensor Technology and Measurement Systems San Diego, California, United States, May 16, 2005 p54
[26] Hongo A, Kojima S, Komatsuzaki S 2005 Struct. Control. Health. Monit. 12 269Google Scholar
[27] Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2006 Proceedings of the Smart Structures and Materials 2006: Smart Sensor Monitoring Systems and Applications San Diego, California, United States, March 30, 2006 p616703
[28] Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2007 Proceedings of the Sensor Systems and Networks: Phenomena, Technology, and Applications for NDE and Health Monitoring San Diego, California, United States, April 10, 2007 p65300O
[29] Xiao G Z, Sun F G, Zhang Z Y, Lu Z G, Liu J R, Wu F, Mrad N, Albert J 2007 Microw. Opt. Technol. Lett. 49 668Google Scholar
[30] Evenblij R S, Leijtens J A P 2017 International Conference on Space Optics—ICSO La Caleta, Tenerife, Canary Islands, October 7−10, 2014 p105631A
[31] Pustakhod D, Kleijn E, Williams K, Leijtens X 2016 IEEE Photon. Technol. Lett. 28 2203Google Scholar
[32] Kaźmierczak A, Jusza A, Slowikowski M, Stopiński S, Piramidowicz R 2018 Proceedings of the Optical Sensing and Detection V Strasbourg, France, May 9, 2018 p106800M
[33] Kaźmierczak A, Slowikowski M, Osuch T, Stopiński S, Piramidowicz R 2019 The European Conference on Lasers and Electro-Optics Munich, Germany, June 23–27, 2019 p34
[34] Slowikowski M, Kaźmierczak A, Stopiński S, Bieniek M, Szostak S, Matuk K, Augustin L, Piramidowicz R 2021 Sensors 21 4238Google Scholar
[35] Wu W, Liu X 2009 Asia Communications and Photonics Conference and Exhibition Shanghai, China, November 2−6, 2009 p76302D
[36] Trita A, Vickers G, Mayordomo I, van Thourhout D V, Vermeiren J 2014 Proceedings of the Silicon Photonics and Photonic Integrated Circuits IV Brussels, Belgium, May 8, 2014 p91330D
[37] Trita A, Voet E, Vermeiren J, Delbeke D, Dumon P, Pathak S, Van Thourhout D 2015 IEEE Photon. J. 7 1
[38] Li H Q, Ma X D, Cui B B, Wang Y X, Zhang C, Zhao J F, Zhang Z Y, Tang C X, Li E 2017 Optica 4 692Google Scholar
[39] Li H Q, Xie R, Hong Y H, Zhang Z Y, Zhang C, Tang C X, Li E B 2018 Opt. Eng. 57 065103Google Scholar
[40] Li H Q, Zhang S, Zhang Z, Zuo S, Zhang S S, Sun Y Q, Zhao D, Zhang Z Y 2020 Nanomaterials 10 1683Google Scholar
[41] Weng S M, Yuan P, Zhuang W, Zhang D L, Luo F, Zhu L Q 2021 Photonics 8 214Google Scholar
[42] Mendoza E A, Esterkin Y, Kempen C, Sun S J 2010 Proceedings of the Photonics in the Transportation Industry: Auto to Aerospace III Orlando, Florida, United States, April 29, 2010 p76750S
[43] Xiao G Z, Zhao P, Sun F G, Lu Z G, Zhang Z, Grover C P 2004 Opt. Lett. 29 2222Google Scholar
[44] Mrad N, Xiao G Z 2005 International Conference on MEMS, NANO and Smart Systems Banff, Alberta, Canada, July 24–27, 2005 p359
[45] Xiao G Z, Zhao P, Sun F G, Lu Z G, Zhang Z Y 2005 IEEE Photon. Technol. Lett. 17 1710Google Scholar
[46] Xiao G Z, Sun F G, Lu Z G, Zhang Z Y 2005 Fourth IEEE Conference on Sensors Irvine, CA, United States October 31−November 3, 2005 p1104
[47] Mendoza E A, Esterkin Y, Kempen C, Sun Z J 2011 Photonic Sens. 1 281Google Scholar
[48] Ramakrishnan M, Rajan G, Semenova Y, Wolinski T, Domański A, Farrell G 2014 Microw. Opt. Technol. Lett. 56 1167Google Scholar
[49] Koch J, Angelmahr M, Schade W 2015 Proceedings of the Fiber Optic Sensors and Applications XII Baltimore, Maryland, United States, May 13, 2015 p94800Y
[50] Orghici R, Bethmann K, Zywietz U, Reinhardt C, Schade W 2016 Opt. Lett. 41 3940Google Scholar
[51] Meyer J, Nedjalkov A, Pichler E, Kelb C, Schade W 2019 Batteries 5 66Google Scholar
[52] 鹿利单, 祝连庆, 曾周末, 崔一平, 张东亮, 袁配 2021 物理学报 70 034204Google Scholar
Lu L D, Zhu L Q, Zeng Z M, Cui Y P, Zhang D L, Yuan P 2021 Acta Phys. Sin. 70 034204Google Scholar
[53] Ji S K, Li K, Yuan P, Sun G K, Lu L D, Meng F Y, Lu Y X, Zhu L Q 2021 Opt. Laser. Technol. 149 107372
[54] Yuan P, Weng S M, Ji S K, Zhang D L, Zhu L Q 2021 Opt. Eng. 60 066101Google Scholar
[55] Sun F G, Xiao G Z, Zhang Z Y, Lu Z G 2007 Opt. Commun. 271 105Google Scholar
[56] Liu Z M, Li J 2010 2nd International Asia Conference on Informatics in Control, Automation and Robotics Wuhan, China, March 6–7, 2010 p335
[57] Marrazzo V R, Riccio M, Maresca L, Irace A, Breglio G 2019 15th Conference on Ph. D. Research in Microelectronics and Electronics Lausanne, Switzerland, July 15–18, 2019 p149
[58] Ruocco A, Van Thourhout D, Bogaerts W 2014 J. Light. Technol. 32 3351Google Scholar
[59] D'Agostino D, Desbordes T, Broeke R, Boerkamp M, Mink J, Ambrosius H P M M, Smit M K 2014 Integrated Photonics Research, Silicon and Nanophotonics San Diego, CA, United States, July 13–17, 2014 p IM2A.4
[60] Robertson D, Niewczas P, McDonald J R 2005 Proceedings of the 17 th International Conference on Optical Fibre Sensors Bruges, Belgium, May 23, 2005 p844
[61] Norman D C C, Webb D J, Pechstedt R D 2003 Electron. Lett. 39 1714Google Scholar
[62] George D S, Hill S, Howden R I, Smith G W 2009 Proceedings of the 20th International Conference on Optical Fibre Sensors Edinburgh, United Kingdom, October 5, 2009 p75031W
[63] Fusiek G, Niewczas P, Willshire A J, McDonald J R 2008 IEEE T. Instrum. Meas. 57 2528Google Scholar
[64] Guo H L, Xiao G Z, Mrad N, Albert J, Yao J P 2010 J. Light. Technol. 28 2654Google Scholar
[65] Zhang J, Tao C Y, Xiao J J, Zhao Y, Jiang X H 2021 Proceedings of the Health Monitoring of Structural and Biological Systems XV Online Only, March 22, 2021 p115930D
[66] Sun F G, Xiao G Z, Lu Z G, Zhang Z Y, Zhou M, Liu J R 2005 Frontiers in Optics Tucson, AZ, United States, October 16–21, 2005 FThY5
[67] Guo H L, Xiao G Z, Mrad N, Yao J P 2012 Photonic Sensing: Principles and Applications for Safety and Security Monitoring (New York: John Wiley and Sons) 183
[68] Su H, Huang X G 2007 Opt. Commun. 275 196Google Scholar
[69] Chen L X, Xu W, Huang X G 2012 Appl. Mech. Mater. 226 2062
[70] Niewczas P, Willshire A J, Dziuda L, McDonald J R 2004 IEEE T. Instrum. Meas. 53 1192Google Scholar
[71] Fusiek G, Niewczas P, McDonald J R 2007 IEEE Instrumentation & Measurement Technology Conference IMTC 2007 Warsaw, Poland, May 1–3, 2007 p1
[72] Fusiek G, Niewczas P, McDonald J R 2008 Sens. Actuator A Phys. 147 177Google Scholar
[73] Fender A, Rigg E J, Maier R R J, MacPherson W N, Barton J S, Moore A J, Jones J D C, Zhao D, Zhang L, Bennion I, McCulloch S, Jones B J S 2006 Appl. Opt. 45 9041Google Scholar
[74] John R N, Read I, MacPherson W N 2013 Meas. Sci. Technol. 24 075203Google Scholar
[75] Marrazzo V R, Fienga F, Riccio M, Irace A, Breglio G 2021 Sensors 21 6214Google Scholar
[76] Huang J T, Huang X G, Zhao H W 2008 J. Mod. Opt. 55 2981Google Scholar
[77] Moon H M, Kwak S C, Im K, Kim J B, Kim S 2019 IEEE Sens. J. 19 2598Google Scholar
[78] Nakamura K, Fujisue T, Ueha S 2007 Proceedings of the Fiber Optic Sensors and Applications V Boston, MA, United States, October 12, 2007 p677006
[79] 张宁, 徐开凯, 陈彦旭, 朱坤峰, 赵建明, 于奇 2019 物理学报 68 167803Google Scholar
Zhang N, Xu K K, Chen Y X, Zhu K F, Zhao J M, Yu Q 2019 Acta Phys. Sin. 68 167803Google Scholar
[80] 张结印, 高飞, 张建军 2021 物理学报 70 217802Google Scholar
Zhang J Y, Gao F, Zhang J J 2021 Acta Phys. Sin. 70 217802Google Scholar
[81] Megalini L, Suran Brunelli S T, Charles W O, Taylor A, Isaac B, Bowers J E, Klamkin J 2018 Materials 11 337Google Scholar
[82] Volet N, Spott A, Stanton E J, Davenport M L, Chang L, Peters J D, Briles T C, Vurgaftman I, Meyer J R, Bowers J E 2017 Laser Photonics Rev. 11 1600165Google Scholar
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表 1 基于AWG的FBG波长解调系统研究进展
Table 1. Research progress of FBG wavelength interrogation system based on AWG.
表 2 不同衬底材料体系各自的优缺点以及主要应用场景
Table 2. Advantages and disadvantages of different substrates and their main application scenarios.
材料体系 优点 缺点 主要应用场景 SiO2 波导损耗低; 与光纤耦合损耗低; 偏振相关性低; 成本低; 制备工艺成熟稳定 弯曲半径大(一般大于1 mm); 器件尺寸较大(大于几个mm2); 不能用来制备有源器件 主要用来制备无源波导器件, 如耦合器、分路器、滤波器、光开关等, 也可以实现无源与有源器件的混合集成 Si/SOI 制备工艺与CMOS兼容; 弯曲半径小(可到5 μm); 器件尺寸小 单偏振工作; 与光纤耦合损耗大; 制备工艺仍处于发展阶段 可制作无源器件, 利用其扩展材料体系(Ⅲ/Ⅴ-Si、Ge-Si)可实现有源、无源器件单片集成, 但目前混合集成占主导地位 InP 直接带隙半导体材料 偏振相关性明显; 工艺难度大 是制备光源、探测器等有源器件的理想成材率; 可真正意义上实现各种有源与无源器件的单片集成 聚合物 制造简单; 后续处理工作量小; 单位成本低 采样率较低; 光谱展宽和光学损耗方面性能较差 可用于制作无源器件, 如AWG、耦合器、光纤光栅等; 便于实现全聚合物传感系统的搭建 表 3 基于AWG光子集成技术的波长解调仪指标对比
Table 3. Performance comparisons of FBGIs based on AWG-PIC technology with different substrates.
技术方案 材料体系 动态范围 采样率 光源输出功率 波长分辨率 复用能力 色散滤波器或AWG的
波分复用技术[42,47]SiO2 ≤10000 με (1 FBG);
≤2500 με (12 FBG)2 kHz (1 FBG);
20 kHz (5 FBG)<5 dBm ±5 pm@
100 Hz色散滤波器: <12 FBG;
AWG: >12单片集成AWG光谱
分析技术[30]InP 4000 με/4.8 nm
(8 FBG)19.2 kHz 外部光源: 5 mW (FBG反射率>90%) 5 pm 单通道: 8 FBG 混合集成AWG光谱
分析技术[38]SOI 5—80 ℃ 2 kHz 0.8 mW (–1 dBm) ±10 pm 波分复用: 8通道AWG实现4 FBG解调 混合集成AWG光谱
分析技术[51]聚合物 3.0—4.2 V 2 Hz 6 mW (FBG反射率为90%) 1 pm 3通道AWG实现
1 FBG解调 -
[1] Culshaw B, Kersey A 2008 J. Light. Technol. 26 1064Google Scholar
[2] Kersey A D, Davis M A, Patrick H J, LeBlanc M, Koo K P, Askins C G, Putnam M A, Friebele E J 1997 J. Light. Technol. 15 1442Google Scholar
[3] Wang T, Liu K, Jiang J F, Xue M, Chang P X, Liu T G 2017 Opt. Express 25 14900Google Scholar
[4] Kersey A D, Berkoff T A, Morey W W 1993 Opt. Lett. 18 1370Google Scholar
[5] Yuan L B 2004 Opt. Laser. Technol. 36 365Google Scholar
[6] Fukuma N, Nakamura K, Ueha S 2005 Proceedings of 17th International Conference on Optical Fibre Sensors Bruges, Belgium, May 23, 2005 p852
[7] 吴开拓, 张继华, 张万里 2018 科技资讯 16 106Google Scholar
Wu K T, Zhang J H, Zhang W L 2018 Sci. Technol. Inf. 16 106Google Scholar
[8] Marin Y E, Nannipieri T, Oton C J, Pasquale F D 2018 J. Light. Technol. 36 946Google Scholar
[9] Marin Y E, Nannipieri T, Oton C J, Pasquale F D 2017 Proceedings of the 25th International Conference on Optical Fiber Sensors Jeju, Korea, April 23, 2017 p10323
[10] Wang L P, Ren C, Cao D Z, Lan R J, Kang F 2021 Chin. Phys. B 30 064209Google Scholar
[11] Zhang W F, Yao J P 2020 Nat. Commun. 11 406Google Scholar
[12] Theurer M, Moehrle M, Sigmund A, Velthaus K O, Oldenbeuving R M, Wevers L, Postma F M, Mateman R, Schreuder F, Geskus D, Worhoff K, Dekker R, Heideman R G, Schell M 2020 J. Light. Technol. 38 2630Google Scholar
[13] 陆子晴, 韩勤, 叶焓, 王帅, 肖峰, 肖帆 2021 物理学报 70 208501Google Scholar
Lu Z Q, Han Q, Ye H, Wang S, Xiao F, Xiao F 2021 Acta Phys. Sin. 70 208501Google Scholar
[14] 马春生, 秦政坤, 张大明 2012 光波导器件设计与模拟 (北京: 高等教育出版社) 第134, 135页
Ma C S, Qin Z K, Zhang D M 2012 Design and Simulation of Optical Waveguide Devices (Beijing: Higher Education Press) pp134, 135 (in Chinese)
[15] Li H Q, An Z X, Zhang S, Zuo S S, Zhu W, Zhang S S, Huang B J, Cao L, Zhang C, Zhang Z Y, Song W C, Mao Q H, Mu Y X, Miao C Y, Li E B, Garcia J D P 2021 ACS Photonics. 8 3607Google Scholar
[16] Webb D J, Pechstedt R D 2002 Optical Fiber Sensors Conference Technical Digest Portland, OR, USA, May 10, 2002 p569
[17] Norman D C C, Webb D J, Pechstedt R D 2005 Meas. Sci. Technol. 16 691Google Scholar
[18] Norman D C C, Webb D J, Pechstedt R D 2004 Proceedings of the Optical Sensing Strasbourg, France, September 1, 2004 p101
[19] 李鸿强, 王润洁, 张美玲, 高倩, 张赛, 宋文超, 毛泉桦, 李恩邦, Garcia Juan Daniel Prades 2021 应用光学 42 898Google Scholar
Li H Q, Wang R J, Zhang M L, Gao Q, Zhang S, Song W C, Mao Q H, Li E B, Garcia J D P 2021 J Appl. Opt. 42 898Google Scholar
[20] Sano Y, Yoshino T 2003 J. Light. Technol. 21 132Google Scholar
[21] Sano Y, Hirayama N, Yoshino T 2003 Proceedings of the Integrated Optics: Devices, Materials, and Technologies VII San Jose, CA, United States, June 19, 2003 p197
[22] Cheng R, Xia L 2016 Opt. Lett. 41 p5254Google Scholar
[23] Buck T C, Müller M S, Plattner M, Koch A W 2009 Proceedings of the Optical Measurement Systems for Industrial Inspection VI Munich, Germany, June 17, 2009 p738930
[24] Kojima S, Hongo A, Komatsuzaki S, Takeda N 2004 Proceedings of the Smart Structures and Materials 2004: Smart Sensor Technology and Measurement Systems San Diego, CA, United States, July 27, 2004 p241
[25] Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2005 Proceedings of the Smart Structures and Materials 2005: Smart Sensor Technology and Measurement Systems San Diego, California, United States, May 16, 2005 p54
[26] Hongo A, Kojima S, Komatsuzaki S 2005 Struct. Control. Health. Monit. 12 269Google Scholar
[27] Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2006 Proceedings of the Smart Structures and Materials 2006: Smart Sensor Monitoring Systems and Applications San Diego, California, United States, March 30, 2006 p616703
[28] Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2007 Proceedings of the Sensor Systems and Networks: Phenomena, Technology, and Applications for NDE and Health Monitoring San Diego, California, United States, April 10, 2007 p65300O
[29] Xiao G Z, Sun F G, Zhang Z Y, Lu Z G, Liu J R, Wu F, Mrad N, Albert J 2007 Microw. Opt. Technol. Lett. 49 668Google Scholar
[30] Evenblij R S, Leijtens J A P 2017 International Conference on Space Optics—ICSO La Caleta, Tenerife, Canary Islands, October 7−10, 2014 p105631A
[31] Pustakhod D, Kleijn E, Williams K, Leijtens X 2016 IEEE Photon. Technol. Lett. 28 2203Google Scholar
[32] Kaźmierczak A, Jusza A, Slowikowski M, Stopiński S, Piramidowicz R 2018 Proceedings of the Optical Sensing and Detection V Strasbourg, France, May 9, 2018 p106800M
[33] Kaźmierczak A, Slowikowski M, Osuch T, Stopiński S, Piramidowicz R 2019 The European Conference on Lasers and Electro-Optics Munich, Germany, June 23–27, 2019 p34
[34] Slowikowski M, Kaźmierczak A, Stopiński S, Bieniek M, Szostak S, Matuk K, Augustin L, Piramidowicz R 2021 Sensors 21 4238Google Scholar
[35] Wu W, Liu X 2009 Asia Communications and Photonics Conference and Exhibition Shanghai, China, November 2−6, 2009 p76302D
[36] Trita A, Vickers G, Mayordomo I, van Thourhout D V, Vermeiren J 2014 Proceedings of the Silicon Photonics and Photonic Integrated Circuits IV Brussels, Belgium, May 8, 2014 p91330D
[37] Trita A, Voet E, Vermeiren J, Delbeke D, Dumon P, Pathak S, Van Thourhout D 2015 IEEE Photon. J. 7 1
[38] Li H Q, Ma X D, Cui B B, Wang Y X, Zhang C, Zhao J F, Zhang Z Y, Tang C X, Li E 2017 Optica 4 692Google Scholar
[39] Li H Q, Xie R, Hong Y H, Zhang Z Y, Zhang C, Tang C X, Li E B 2018 Opt. Eng. 57 065103Google Scholar
[40] Li H Q, Zhang S, Zhang Z, Zuo S, Zhang S S, Sun Y Q, Zhao D, Zhang Z Y 2020 Nanomaterials 10 1683Google Scholar
[41] Weng S M, Yuan P, Zhuang W, Zhang D L, Luo F, Zhu L Q 2021 Photonics 8 214Google Scholar
[42] Mendoza E A, Esterkin Y, Kempen C, Sun S J 2010 Proceedings of the Photonics in the Transportation Industry: Auto to Aerospace III Orlando, Florida, United States, April 29, 2010 p76750S
[43] Xiao G Z, Zhao P, Sun F G, Lu Z G, Zhang Z, Grover C P 2004 Opt. Lett. 29 2222Google Scholar
[44] Mrad N, Xiao G Z 2005 International Conference on MEMS, NANO and Smart Systems Banff, Alberta, Canada, July 24–27, 2005 p359
[45] Xiao G Z, Zhao P, Sun F G, Lu Z G, Zhang Z Y 2005 IEEE Photon. Technol. Lett. 17 1710Google Scholar
[46] Xiao G Z, Sun F G, Lu Z G, Zhang Z Y 2005 Fourth IEEE Conference on Sensors Irvine, CA, United States October 31−November 3, 2005 p1104
[47] Mendoza E A, Esterkin Y, Kempen C, Sun Z J 2011 Photonic Sens. 1 281Google Scholar
[48] Ramakrishnan M, Rajan G, Semenova Y, Wolinski T, Domański A, Farrell G 2014 Microw. Opt. Technol. Lett. 56 1167Google Scholar
[49] Koch J, Angelmahr M, Schade W 2015 Proceedings of the Fiber Optic Sensors and Applications XII Baltimore, Maryland, United States, May 13, 2015 p94800Y
[50] Orghici R, Bethmann K, Zywietz U, Reinhardt C, Schade W 2016 Opt. Lett. 41 3940Google Scholar
[51] Meyer J, Nedjalkov A, Pichler E, Kelb C, Schade W 2019 Batteries 5 66Google Scholar
[52] 鹿利单, 祝连庆, 曾周末, 崔一平, 张东亮, 袁配 2021 物理学报 70 034204Google Scholar
Lu L D, Zhu L Q, Zeng Z M, Cui Y P, Zhang D L, Yuan P 2021 Acta Phys. Sin. 70 034204Google Scholar
[53] Ji S K, Li K, Yuan P, Sun G K, Lu L D, Meng F Y, Lu Y X, Zhu L Q 2021 Opt. Laser. Technol. 149 107372
[54] Yuan P, Weng S M, Ji S K, Zhang D L, Zhu L Q 2021 Opt. Eng. 60 066101Google Scholar
[55] Sun F G, Xiao G Z, Zhang Z Y, Lu Z G 2007 Opt. Commun. 271 105Google Scholar
[56] Liu Z M, Li J 2010 2nd International Asia Conference on Informatics in Control, Automation and Robotics Wuhan, China, March 6–7, 2010 p335
[57] Marrazzo V R, Riccio M, Maresca L, Irace A, Breglio G 2019 15th Conference on Ph. D. Research in Microelectronics and Electronics Lausanne, Switzerland, July 15–18, 2019 p149
[58] Ruocco A, Van Thourhout D, Bogaerts W 2014 J. Light. Technol. 32 3351Google Scholar
[59] D'Agostino D, Desbordes T, Broeke R, Boerkamp M, Mink J, Ambrosius H P M M, Smit M K 2014 Integrated Photonics Research, Silicon and Nanophotonics San Diego, CA, United States, July 13–17, 2014 p IM2A.4
[60] Robertson D, Niewczas P, McDonald J R 2005 Proceedings of the 17 th International Conference on Optical Fibre Sensors Bruges, Belgium, May 23, 2005 p844
[61] Norman D C C, Webb D J, Pechstedt R D 2003 Electron. Lett. 39 1714Google Scholar
[62] George D S, Hill S, Howden R I, Smith G W 2009 Proceedings of the 20th International Conference on Optical Fibre Sensors Edinburgh, United Kingdom, October 5, 2009 p75031W
[63] Fusiek G, Niewczas P, Willshire A J, McDonald J R 2008 IEEE T. Instrum. Meas. 57 2528Google Scholar
[64] Guo H L, Xiao G Z, Mrad N, Albert J, Yao J P 2010 J. Light. Technol. 28 2654Google Scholar
[65] Zhang J, Tao C Y, Xiao J J, Zhao Y, Jiang X H 2021 Proceedings of the Health Monitoring of Structural and Biological Systems XV Online Only, March 22, 2021 p115930D
[66] Sun F G, Xiao G Z, Lu Z G, Zhang Z Y, Zhou M, Liu J R 2005 Frontiers in Optics Tucson, AZ, United States, October 16–21, 2005 FThY5
[67] Guo H L, Xiao G Z, Mrad N, Yao J P 2012 Photonic Sensing: Principles and Applications for Safety and Security Monitoring (New York: John Wiley and Sons) 183
[68] Su H, Huang X G 2007 Opt. Commun. 275 196Google Scholar
[69] Chen L X, Xu W, Huang X G 2012 Appl. Mech. Mater. 226 2062
[70] Niewczas P, Willshire A J, Dziuda L, McDonald J R 2004 IEEE T. Instrum. Meas. 53 1192Google Scholar
[71] Fusiek G, Niewczas P, McDonald J R 2007 IEEE Instrumentation & Measurement Technology Conference IMTC 2007 Warsaw, Poland, May 1–3, 2007 p1
[72] Fusiek G, Niewczas P, McDonald J R 2008 Sens. Actuator A Phys. 147 177Google Scholar
[73] Fender A, Rigg E J, Maier R R J, MacPherson W N, Barton J S, Moore A J, Jones J D C, Zhao D, Zhang L, Bennion I, McCulloch S, Jones B J S 2006 Appl. Opt. 45 9041Google Scholar
[74] John R N, Read I, MacPherson W N 2013 Meas. Sci. Technol. 24 075203Google Scholar
[75] Marrazzo V R, Fienga F, Riccio M, Irace A, Breglio G 2021 Sensors 21 6214Google Scholar
[76] Huang J T, Huang X G, Zhao H W 2008 J. Mod. Opt. 55 2981Google Scholar
[77] Moon H M, Kwak S C, Im K, Kim J B, Kim S 2019 IEEE Sens. J. 19 2598Google Scholar
[78] Nakamura K, Fujisue T, Ueha S 2007 Proceedings of the Fiber Optic Sensors and Applications V Boston, MA, United States, October 12, 2007 p677006
[79] 张宁, 徐开凯, 陈彦旭, 朱坤峰, 赵建明, 于奇 2019 物理学报 68 167803Google Scholar
Zhang N, Xu K K, Chen Y X, Zhu K F, Zhao J M, Yu Q 2019 Acta Phys. Sin. 68 167803Google Scholar
[80] 张结印, 高飞, 张建军 2021 物理学报 70 217802Google Scholar
Zhang J Y, Gao F, Zhang J J 2021 Acta Phys. Sin. 70 217802Google Scholar
[81] Megalini L, Suran Brunelli S T, Charles W O, Taylor A, Isaac B, Bowers J E, Klamkin J 2018 Materials 11 337Google Scholar
[82] Volet N, Spott A, Stanton E J, Davenport M L, Chang L, Peters J D, Briles T C, Vurgaftman I, Meyer J R, Bowers J E 2017 Laser Photonics Rev. 11 1600165Google Scholar
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