基于阵列波导光栅的光纤布拉格光栅解调技术综述

李科; 董明利; 袁配; 鹿利单; 孙广开; 祝连庆

doi:10.7498/aps.71.20212063

摘要

基于阵列波导光栅的光子集成解调技术是硅光领域的研究热点和难点. 相比传统解调方法, 基于阵列波导光栅的光子集成解调技术因其解调精度高、解调速度快、封装体积小等优势, 在光纤布拉格光栅的高速、高精度解调上具有明显优势. 近年来, 随着光子集成技术的发展, 各科研院所和相关机构对阵列波导光栅的光子集成解调法进行了广泛深入的研究与优化. 本文通过介绍阵列波导光栅工作原理及基于阵列波导光栅的光纤布拉格光栅波长解调原理, 结合基于阵列波导光栅的光纤布拉格光栅解调仪在材料体系和系统性能两个方面的重要进展, 归纳了基于阵列波导光栅的解调仪的典型应用场景, 从新材料、系统集成和规模化三方面对光纤布拉格光栅解调系统的未来发展提出针对性建议, 为基于阵列波导光栅的光子集成解调技术的研究发展提供参考.

关键词:

Abstract

The photonic integrated interrogation technology based on array waveguide grating is a hot but difficult research area in the silicon optical field. Compared with traditional interrogation methods, the photonic integration interrogation technology based on an array waveguide grating has obvious advantages in high-speed and high-precision demodulation of fiber Bragg gratings due to its high demodulation accuracy, fast demodulation speed, and small package size. In recent years, with the development of photonic integration technology, various research institutions and relevant organizations have conducted extensive and in-depth research and optimization on the photonic integration interrogation method of array waveguide gratings. In this paper we introduce the working principle of array waveguide grating and the principle of fiber Bragg grating wavelength interrogation based on array waveguide grating, the important progress of fiber Bragg grating interrogator based on array waveguide grating in both material system and system performance, and summarize the typical applications in interrogator based on array waveguide grating. The future development of fiber Bragg grating demodulation system is proposed from three aspects: new materials, system integration, and scale-up, which provides a reference for the research and development of photonic integrated interrogation technology based on array waveguide grating.

Keywords:

作者及机构信息

1.
北京信息科技大学, 光电测试技术及仪器教育部重点实验室, 北京　100192

2.
北京信息科技大学, 光纤传感与系统北京实验室, 北京　100016

3.
北京信息科技大学, 北京市光电测试技术重点实验室, 北京　100192

通信作者: 董明利, dongml@bistu.edu.cn ; 祝连庆, lqzhu_bistu@sina.com

基金项目: 高等学校学科创新引智计划(先进光电子器件与系统学科创新引智基地)(批准号: D17021)、国家自然科学基金(批准号: 51705024)和北京市教育委员会科技计划重点项目(批准号: KZ201911232044)资助的课题.

Authors and contacts

1.
Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science & Technology University, Beijing 100192, China

2.
Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science & Technology University, Beijing 100016, China

3.
Beijing Key Laboratory of Optoelectronic Measurement Technology, Beijing Information Science & Technology University, Beijing 100192, China

Corresponding author: Dong Ming-Li, dongml@bistu.edu.cn ; Zhu Lian-Qing, lqzhu_bistu@sina.com

Funds: Project supported by the 111 Project of China (Grant No. D17021), the National Natural Science Foundation of China (Grant No. 51705024), and the Key Project of Beijing Municipal Education Commission Science and Technology Program (Grant No. KZ201911232044).

文章全文 : translate this paragraph

参考文献

[1]	Culshaw B, Kersey A 2008 J. Light. Technol. 26 1064 Google Scholar
[2]	Kersey A D, Davis M A, Patrick H J, LeBlanc M, Koo K P, Askins C G, Putnam M A, Friebele E J 1997 J. Light. Technol. 15 1442 Google Scholar
[3]	Wang T, Liu K, Jiang J F, Xue M, Chang P X, Liu T G 2017 Opt. Express 25 14900 Google Scholar
[4]	Kersey A D, Berkoff T A, Morey W W 1993 Opt. Lett. 18 1370 Google Scholar
[5]	Yuan L B 2004 Opt. Laser. Technol. 36 365 Google Scholar
[6]	Fukuma N, Nakamura K, Ueha S 2005 Proceedings of 17th International Conference on Optical Fibre Sensors Bruges, Belgium, May 23, 2005 p852
[7]	吴开拓, 张继华, 张万里 2018 科技资讯 16 106 Google Scholar Wu K T, Zhang J H, Zhang W L 2018 Sci. Technol. Inf. 16 106 Google Scholar
[8]	Marin Y E, Nannipieri T, Oton C J, Pasquale F D 2018 J. Light. Technol. 36 946 Google Scholar
[9]	Marin Y E, Nannipieri T, Oton C J, Pasquale F D 2017 Proceedings of the 25th International Conference on Optical Fiber Sensors Jeju, Korea, April 23, 2017 p10323
[10]	Wang L P, Ren C, Cao D Z, Lan R J, Kang F 2021 Chin. Phys. B 30 064209 Google Scholar
[11]	Zhang W F, Yao J P 2020 Nat. Commun. 11 406 Google Scholar
[12]	Theurer M, Moehrle M, Sigmund A, Velthaus K O, Oldenbeuving R M, Wevers L, Postma F M, Mateman R, Schreuder F, Geskus D, Worhoff K, Dekker R, Heideman R G, Schell M 2020 J. Light. Technol. 38 2630 Google Scholar
[13]	陆子晴, 韩勤, 叶焓, 王帅, 肖峰, 肖帆 2021 物理学报 70 208501 Google Scholar Lu Z Q, Han Q, Ye H, Wang S, Xiao F, Xiao F 2021 Acta Phys. Sin. 70 208501 Google Scholar
[14]	马春生, 秦政坤, 张大明 2012 光波导器件设计与模拟 (北京: 高等教育出版社) 第134, 135页 Ma C S, Qin Z K, Zhang D M 2012 Design and Simulation of Optical Waveguide Devices (Beijing: Higher Education Press) pp134, 135 (in Chinese)
[15]	Li H Q, An Z X, Zhang S, Zuo S S, Zhu W, Zhang S S, Huang B J, Cao L, Zhang C, Zhang Z Y, Song W C, Mao Q H, Mu Y X, Miao C Y, Li E B, Garcia J D P 2021 ACS Photonics. 8 3607 Google Scholar
[16]	Webb D J, Pechstedt R D 2002 Optical Fiber Sensors Conference Technical Digest Portland, OR, USA, May 10, 2002 p569
[17]	Norman D C C, Webb D J, Pechstedt R D 2005 Meas. Sci. Technol. 16 691 Google Scholar
[18]	Norman D C C, Webb D J, Pechstedt R D 2004 Proceedings of the Optical Sensing Strasbourg, France, September 1, 2004 p101
[19]	李鸿强, 王润洁, 张美玲, 高倩, 张赛, 宋文超, 毛泉桦, 李恩邦, Garcia Juan Daniel Prades 2021 应用光学 42 898 Google Scholar Li H Q, Wang R J, Zhang M L, Gao Q, Zhang S, Song W C, Mao Q H, Li E B, Garcia J D P 2021 J Appl. Opt. 42 898 Google Scholar
[20]	Sano Y, Yoshino T 2003 J. Light. Technol. 21 132 Google Scholar
[21]	Sano Y, Hirayama N, Yoshino T 2003 Proceedings of the Integrated Optics: Devices, Materials, and Technologies VII San Jose, CA, United States, June 19, 2003 p197
[22]	Cheng R, Xia L 2016 Opt. Lett. 41 p5254 Google Scholar
[23]	Buck T C, Müller M S, Plattner M, Koch A W 2009 Proceedings of the Optical Measurement Systems for Industrial Inspection VI Munich, Germany, June 17, 2009 p738930
[24]	Kojima S, Hongo A, Komatsuzaki S, Takeda N 2004 Proceedings of the Smart Structures and Materials 2004: Smart Sensor Technology and Measurement Systems San Diego, CA, United States, July 27, 2004 p241
[25]	Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2005 Proceedings of the Smart Structures and Materials 2005: Smart Sensor Technology and Measurement Systems San Diego, California, United States, May 16, 2005 p54
[26]	Hongo A, Kojima S, Komatsuzaki S 2005 Struct. Control. Health. Monit. 12 269 Google Scholar
[27]	Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2006 Proceedings of the Smart Structures and Materials 2006: Smart Sensor Monitoring Systems and Applications San Diego, California, United States, March 30, 2006 p616703
[28]	Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2007 Proceedings of the Sensor Systems and Networks: Phenomena, Technology, and Applications for NDE and Health Monitoring San Diego, California, United States, April 10, 2007 p65300O
[29]	Xiao G Z, Sun F G, Zhang Z Y, Lu Z G, Liu J R, Wu F, Mrad N, Albert J 2007 Microw. Opt. Technol. Lett. 49 668 Google Scholar
[30]	Evenblij R S, Leijtens J A P 2017 International Conference on Space Optics—ICSO La Caleta, Tenerife, Canary Islands, October 7−10, 2014 p105631A
[31]	Pustakhod D, Kleijn E, Williams K, Leijtens X 2016 IEEE Photon. Technol. Lett. 28 2203 Google Scholar
[32]	Kaźmierczak A, Jusza A, Slowikowski M, Stopiński S, Piramidowicz R 2018 Proceedings of the Optical Sensing and Detection V Strasbourg, France, May 9, 2018 p106800M
[33]	Kaźmierczak A, Slowikowski M, Osuch T, Stopiński S, Piramidowicz R 2019 The European Conference on Lasers and Electro-Optics Munich, Germany, June 23–27, 2019 p34
[34]	Slowikowski M, Kaźmierczak A, Stopiński S, Bieniek M, Szostak S, Matuk K, Augustin L, Piramidowicz R 2021 Sensors 21 4238 Google Scholar
[35]	Wu W, Liu X 2009 Asia Communications and Photonics Conference and Exhibition Shanghai, China, November 2−6, 2009 p76302D
[36]	Trita A, Vickers G, Mayordomo I, van Thourhout D V, Vermeiren J 2014 Proceedings of the Silicon Photonics and Photonic Integrated Circuits IV Brussels, Belgium, May 8, 2014 p91330D
[37]	Trita A, Voet E, Vermeiren J, Delbeke D, Dumon P, Pathak S, Van Thourhout D 2015 IEEE Photon. J. 7 1
[38]	Li H Q, Ma X D, Cui B B, Wang Y X, Zhang C, Zhao J F, Zhang Z Y, Tang C X, Li E 2017 Optica 4 692 Google Scholar
[39]	Li H Q, Xie R, Hong Y H, Zhang Z Y, Zhang C, Tang C X, Li E B 2018 Opt. Eng. 57 065103 Google Scholar
[40]	Li H Q, Zhang S, Zhang Z, Zuo S, Zhang S S, Sun Y Q, Zhao D, Zhang Z Y 2020 Nanomaterials 10 1683 Google Scholar
[41]	Weng S M, Yuan P, Zhuang W, Zhang D L, Luo F, Zhu L Q 2021 Photonics 8 214 Google Scholar
[42]	Mendoza E A, Esterkin Y, Kempen C, Sun S J 2010 Proceedings of the Photonics in the Transportation Industry: Auto to Aerospace III Orlando, Florida, United States, April 29, 2010 p76750S
[43]	Xiao G Z, Zhao P, Sun F G, Lu Z G, Zhang Z, Grover C P 2004 Opt. Lett. 29 2222 Google Scholar
[44]	Mrad N, Xiao G Z 2005 International Conference on MEMS, NANO and Smart Systems Banff, Alberta, Canada, July 24–27, 2005 p359
[45]	Xiao G Z, Zhao P, Sun F G, Lu Z G, Zhang Z Y 2005 IEEE Photon. Technol. Lett. 17 1710 Google Scholar
[46]	Xiao G Z, Sun F G, Lu Z G, Zhang Z Y 2005 Fourth IEEE Conference on Sensors Irvine, CA, United States October 31−November 3, 2005 p1104
[47]	Mendoza E A, Esterkin Y, Kempen C, Sun Z J 2011 Photonic Sens. 1 281 Google Scholar
[48]	Ramakrishnan M, Rajan G, Semenova Y, Wolinski T, Domański A, Farrell G 2014 Microw. Opt. Technol. Lett. 56 1167 Google Scholar
[49]	Koch J, Angelmahr M, Schade W 2015 Proceedings of the Fiber Optic Sensors and Applications XII Baltimore, Maryland, United States, May 13, 2015 p94800Y
[50]	Orghici R, Bethmann K, Zywietz U, Reinhardt C, Schade W 2016 Opt. Lett. 41 3940 Google Scholar
[51]	Meyer J, Nedjalkov A, Pichler E, Kelb C, Schade W 2019 Batteries 5 66 Google Scholar
[52]	鹿利单, 祝连庆, 曾周末, 崔一平, 张东亮, 袁配 2021 物理学报 70 034204 Google Scholar Lu L D, Zhu L Q, Zeng Z M, Cui Y P, Zhang D L, Yuan P 2021 Acta Phys. Sin. 70 034204 Google Scholar
[53]	Ji S K, Li K, Yuan P, Sun G K, Lu L D, Meng F Y, Lu Y X, Zhu L Q 2021 Opt. Laser. Technol. 149 107372
[54]	Yuan P, Weng S M, Ji S K, Zhang D L, Zhu L Q 2021 Opt. Eng. 60 066101 Google Scholar
[55]	Sun F G, Xiao G Z, Zhang Z Y, Lu Z G 2007 Opt. Commun. 271 105 Google Scholar
[56]	Liu Z M, Li J 2010 2nd International Asia Conference on Informatics in Control, Automation and Robotics Wuhan, China, March 6–7, 2010 p335
[57]	Marrazzo V R, Riccio M, Maresca L, Irace A, Breglio G 2019 15th Conference on Ph. D. Research in Microelectronics and Electronics Lausanne, Switzerland, July 15–18, 2019 p149
[58]	Ruocco A, Van Thourhout D, Bogaerts W 2014 J. Light. Technol. 32 3351 Google Scholar
[59]	D'Agostino D, Desbordes T, Broeke R, Boerkamp M, Mink J, Ambrosius H P M M, Smit M K 2014 Integrated Photonics Research, Silicon and Nanophotonics San Diego, CA, United States, July 13–17, 2014 p IM2A.4
[60]	Robertson D, Niewczas P, McDonald J R 2005 Proceedings of the 17 th International Conference on Optical Fibre Sensors Bruges, Belgium, May 23, 2005 p844
[61]	Norman D C C, Webb D J, Pechstedt R D 2003 Electron. Lett. 39 1714 Google Scholar
[62]	George D S, Hill S, Howden R I, Smith G W 2009 Proceedings of the 20th International Conference on Optical Fibre Sensors Edinburgh, United Kingdom, October 5, 2009 p75031W
[63]	Fusiek G, Niewczas P, Willshire A J, McDonald J R 2008 IEEE T. Instrum. Meas. 57 2528 Google Scholar
[64]	Guo H L, Xiao G Z, Mrad N, Albert J, Yao J P 2010 J. Light. Technol. 28 2654 Google Scholar
[65]	Zhang J, Tao C Y, Xiao J J, Zhao Y, Jiang X H 2021 Proceedings of the Health Monitoring of Structural and Biological Systems XV Online Only, March 22, 2021 p115930D
[66]	Sun F G, Xiao G Z, Lu Z G, Zhang Z Y, Zhou M, Liu J R 2005 Frontiers in Optics Tucson, AZ, United States, October 16–21, 2005 FThY5
[67]	Guo H L, Xiao G Z, Mrad N, Yao J P 2012 Photonic Sensing: Principles and Applications for Safety and Security Monitoring (New York: John Wiley and Sons) 183
[68]	Su H, Huang X G 2007 Opt. Commun. 275 196 Google Scholar
[69]	Chen L X, Xu W, Huang X G 2012 Appl. Mech. Mater. 226 2062
[70]	Niewczas P, Willshire A J, Dziuda L, McDonald J R 2004 IEEE T. Instrum. Meas. 53 1192 Google Scholar
[71]	Fusiek G, Niewczas P, McDonald J R 2007 IEEE Instrumentation & Measurement Technology Conference IMTC 2007 Warsaw, Poland, May 1–3, 2007 p1
[72]	Fusiek G, Niewczas P, McDonald J R 2008 Sens. Actuator A Phys. 147 177 Google Scholar
[73]	Fender A, Rigg E J, Maier R R J, MacPherson W N, Barton J S, Moore A J, Jones J D C, Zhao D, Zhang L, Bennion I, McCulloch S, Jones B J S 2006 Appl. Opt. 45 9041 Google Scholar
[74]	John R N, Read I, MacPherson W N 2013 Meas. Sci. Technol. 24 075203 Google Scholar
[75]	Marrazzo V R, Fienga F, Riccio M, Irace A, Breglio G 2021 Sensors 21 6214 Google Scholar
[76]	Huang J T, Huang X G, Zhao H W 2008 J. Mod. Opt. 55 2981 Google Scholar
[77]	Moon H M, Kwak S C, Im K, Kim J B, Kim S 2019 IEEE Sens. J. 19 2598 Google Scholar
[78]	Nakamura K, Fujisue T, Ueha S 2007 Proceedings of the Fiber Optic Sensors and Applications V Boston, MA, United States, October 12, 2007 p677006
[79]	张宁, 徐开凯, 陈彦旭, 朱坤峰, 赵建明, 于奇 2019 物理学报 68 167803 Google Scholar Zhang N, Xu K K, Chen Y X, Zhu K F, Zhao J M, Yu Q 2019 Acta Phys. Sin. 68 167803 Google Scholar
[80]	张结印, 高飞, 张建军 2021 物理学报 70 217802 Google Scholar Zhang J Y, Gao F, Zhang J J 2021 Acta Phys. Sin. 70 217802 Google Scholar
[81]	Megalini L, Suran Brunelli S T, Charles W O, Taylor A, Isaac B, Bowers J E, Klamkin J 2018 Materials 11 337 Google Scholar
[82]	Volet N, Spott A, Stanton E J, Davenport M L, Chang L, Peters J D, Briles T C, Vurgaftman I, Meyer J R, Bowers J E 2017 Laser Photonics Rev. 11 1600165 Google Scholar

施引文献

图 1 AWG结构示意图

Fig. 1. Structural diagram of AWG.

下载: 全尺寸图片幻灯片

图 2 基于AWG的FBG波长解调系统

Fig. 2. FBG wavelength interrogation system based on AWG.

下载: 全尺寸图片幻灯片

图 3 AWG边缘滤波法波长解调原理图

Fig. 3. Wavelength interrogation principle of edge filtering method using AWG.

下载: 全尺寸图片幻灯片

图 4 AWG相对强度法波长解调原理图

Fig. 4. Wavelength interrogation principle of relative light intensity method using AWG.

下载: 全尺寸图片幻灯片

图 5 解调函数与3 dB带宽的关系^[54]

Fig. 5. Dependence of interrogation function on the 3 dB bandwidth of AWG (W_{3 dB}).^[54]

下载: 全尺寸图片幻灯片

图 6 游标效应及时分复用技术的实现架构^[58]

Fig. 6. Implementation architecture of AWG-based FBGI based on vernier effect and time-division multiplexing technology^[58].

下载: 全尺寸图片幻灯片

图 7 基于游标效应及时分复用技术的高精度波长解调实现方法^[53]

Fig. 7. Realization of high-precision wavelength interrogation based on vernier effect and time-division multiplexing technology^[53].

下载: 全尺寸图片幻灯片

图 8 修改输入波导后的FBG波长解调系统　(a)基于AWG的解调仪原理图; (b) AWG输入的设计^[31]

Fig. 8. FBG wavelength interrogation system with modified input waveguide: (a) Schematic of the AWG-based interrogator; (b) design of AWG inputs^[31].

下载: 全尺寸图片幻灯片

图 9 AWG传输谱(仅显示4—8通道)　(a)模拟波长响应; (b)测量响应^[31]

Fig. 9. Modified AWG passbands, where only channels 4–8 are shown: (a) Simulated wavelength response; (b) measured wavelength response^[31].

下载: 全尺寸图片幻灯片

图 10 用于FBG传感解调的AWG芯片^[67]

Fig. 10. An illustration of the AWG chip used for FBG sensor interrogation^[67].

下载: 全尺寸图片幻灯片

图 11 (a)混合电压传感器; (b)采用电压传感器和电流互感器的电流传感器; (c)磁致伸缩电流传感器^[72]

Fig. 11. (a) Hybrid voltage sensor; (b) current sensor employing a voltage sensor and a current transformer; (c) magnetostrictive current sensor^[72].

下载: 全尺寸图片幻灯片

图 12 MRI监测系统^[34]

Fig. 12. MRI monitoring system^[34].

下载: 全尺寸图片幻灯片

图 13 实验装置示意图^[77]

Fig. 13. A schematic diagram for experimental set-up^[77].

下载: 全尺寸图片幻灯片

图 14 用于评估FBG麦克风的实验装置^[78]

Fig. 14. Experimental setup for evaluating the FBG microphone^[78].

下载: 全尺寸图片幻灯片

表 1 基于AWG的FBG波长解调系统研究进展

Table 1. Research progress of FBG wavelength interrogation system based on AWG.

研究进展	研究成果	特点
分立组装^[23−27]		系统尺寸仍然很大
InP单片集成^[28−33]		偏振相关性明显
SOI混合/单片集成^[34−40]		单偏振工作, 工艺容差很小
SiO₂混合集成^[41−46]		器件尺寸相对较大, 但其他方面优势明显
聚合物混合集成^[47−50]		特殊应用, 成本较低

下载: 导出CSV

表 2 不同衬底材料体系各自的优缺点以及主要应用场景

Table 2. Advantages and disadvantages of different substrates and their main application scenarios.

材料体系	优点	缺点	主要应用场景
SiO₂	波导损耗低; 与光纤耦合损耗低; 偏振相关性低; 成本低; 制备工艺成熟稳定	弯曲半径大(一般大于1 mm); 器件尺寸较大(大于几个mm²); 不能用来制备有源器件	主要用来制备无源波导器件, 如耦合器、分路器、滤波器、光开关等, 也可以实现无源与有源器件的混合集成
Si/SOI	制备工艺与CMOS兼容; 弯曲半径小(可到5 μm); 器件尺寸小	单偏振工作; 与光纤耦合损耗大; 制备工艺仍处于发展阶段	可制作无源器件, 利用其扩展材料体系(Ⅲ/Ⅴ-Si、Ge-Si)可实现有源、无源器件单片集成, 但目前混合集成占主导地位
InP	直接带隙半导体材料	偏振相关性明显; 工艺难度大	是制备光源、探测器等有源器件的理想成材率; 可真正意义上实现各种有源与无源器件的单片集成
聚合物	制造简单; 后续处理工作量小; 单位成本低	采样率较低; 光谱展宽和光学损耗方面性能较差	可用于制作无源器件, 如AWG、耦合器、光纤光栅等; 便于实现全聚合物传感系统的搭建

下载: 导出CSV

表 3 基于AWG光子集成技术的波长解调仪指标对比

Table 3. Performance comparisons of FBGIs based on AWG-PIC technology with different substrates.

技术方案	材料体系	动态范围	采样率	光源输出功率	波长分辨率	复用能力
色散滤波器或AWG的波分复用技术^[42,47]	SiO₂	≤10000 με (1 FBG); ≤2500 με (12 FBG)	2 kHz (1 FBG); 20 kHz (5 FBG)	<5 dBm	±5 pm@ 100 Hz	色散滤波器: <12 FBG; AWG: >12
单片集成AWG光谱分析技术^[30]	InP	4000 με/4.8 nm (8 FBG)	19.2 kHz	外部光源: 5 mW (FBG反射率>90%)	5 pm	单通道: 8 FBG
混合集成AWG光谱分析技术^[38]	SOI	5—80 ℃	2 kHz	0.8 mW (–1 dBm)	±10 pm	波分复用: 8通道AWG实现4 FBG解调
混合集成AWG光谱分析技术^[51]	聚合物	3.0—4.2 V	2 Hz	6 mW (FBG反射率为90%)	1 pm	3通道AWG实现 1 FBG解调

下载: 导出CSV

[1]	Culshaw B, Kersey A 2008 J. Light. Technol. 26 1064 Google Scholar
[2]	Kersey A D, Davis M A, Patrick H J, LeBlanc M, Koo K P, Askins C G, Putnam M A, Friebele E J 1997 J. Light. Technol. 15 1442 Google Scholar
[3]	Wang T, Liu K, Jiang J F, Xue M, Chang P X, Liu T G 2017 Opt. Express 25 14900 Google Scholar
[4]	Kersey A D, Berkoff T A, Morey W W 1993 Opt. Lett. 18 1370 Google Scholar
[5]	Yuan L B 2004 Opt. Laser. Technol. 36 365 Google Scholar
[6]	Fukuma N, Nakamura K, Ueha S 2005 Proceedings of 17th International Conference on Optical Fibre Sensors Bruges, Belgium, May 23, 2005 p852
[7]	吴开拓, 张继华, 张万里 2018 科技资讯 16 106 Google Scholar Wu K T, Zhang J H, Zhang W L 2018 Sci. Technol. Inf. 16 106 Google Scholar
[8]	Marin Y E, Nannipieri T, Oton C J, Pasquale F D 2018 J. Light. Technol. 36 946 Google Scholar
[9]	Marin Y E, Nannipieri T, Oton C J, Pasquale F D 2017 Proceedings of the 25th International Conference on Optical Fiber Sensors Jeju, Korea, April 23, 2017 p10323
[10]	Wang L P, Ren C, Cao D Z, Lan R J, Kang F 2021 Chin. Phys. B 30 064209 Google Scholar
[11]	Zhang W F, Yao J P 2020 Nat. Commun. 11 406 Google Scholar
[12]	Theurer M, Moehrle M, Sigmund A, Velthaus K O, Oldenbeuving R M, Wevers L, Postma F M, Mateman R, Schreuder F, Geskus D, Worhoff K, Dekker R, Heideman R G, Schell M 2020 J. Light. Technol. 38 2630 Google Scholar
[13]	陆子晴, 韩勤, 叶焓, 王帅, 肖峰, 肖帆 2021 物理学报 70 208501 Google Scholar Lu Z Q, Han Q, Ye H, Wang S, Xiao F, Xiao F 2021 Acta Phys. Sin. 70 208501 Google Scholar
[14]	马春生, 秦政坤, 张大明 2012 光波导器件设计与模拟 (北京: 高等教育出版社) 第134, 135页 Ma C S, Qin Z K, Zhang D M 2012 Design and Simulation of Optical Waveguide Devices (Beijing: Higher Education Press) pp134, 135 (in Chinese)
[15]	Li H Q, An Z X, Zhang S, Zuo S S, Zhu W, Zhang S S, Huang B J, Cao L, Zhang C, Zhang Z Y, Song W C, Mao Q H, Mu Y X, Miao C Y, Li E B, Garcia J D P 2021 ACS Photonics. 8 3607 Google Scholar
[16]	Webb D J, Pechstedt R D 2002 Optical Fiber Sensors Conference Technical Digest Portland, OR, USA, May 10, 2002 p569
[17]	Norman D C C, Webb D J, Pechstedt R D 2005 Meas. Sci. Technol. 16 691 Google Scholar
[18]	Norman D C C, Webb D J, Pechstedt R D 2004 Proceedings of the Optical Sensing Strasbourg, France, September 1, 2004 p101
[19]	李鸿强, 王润洁, 张美玲, 高倩, 张赛, 宋文超, 毛泉桦, 李恩邦, Garcia Juan Daniel Prades 2021 应用光学 42 898 Google Scholar Li H Q, Wang R J, Zhang M L, Gao Q, Zhang S, Song W C, Mao Q H, Li E B, Garcia J D P 2021 J Appl. Opt. 42 898 Google Scholar
[20]	Sano Y, Yoshino T 2003 J. Light. Technol. 21 132 Google Scholar
[21]	Sano Y, Hirayama N, Yoshino T 2003 Proceedings of the Integrated Optics: Devices, Materials, and Technologies VII San Jose, CA, United States, June 19, 2003 p197
[22]	Cheng R, Xia L 2016 Opt. Lett. 41 p5254 Google Scholar
[23]	Buck T C, Müller M S, Plattner M, Koch A W 2009 Proceedings of the Optical Measurement Systems for Industrial Inspection VI Munich, Germany, June 17, 2009 p738930
[24]	Kojima S, Hongo A, Komatsuzaki S, Takeda N 2004 Proceedings of the Smart Structures and Materials 2004: Smart Sensor Technology and Measurement Systems San Diego, CA, United States, July 27, 2004 p241
[25]	Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2005 Proceedings of the Smart Structures and Materials 2005: Smart Sensor Technology and Measurement Systems San Diego, California, United States, May 16, 2005 p54
[26]	Hongo A, Kojima S, Komatsuzaki S 2005 Struct. Control. Health. Monit. 12 269 Google Scholar
[27]	Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2006 Proceedings of the Smart Structures and Materials 2006: Smart Sensor Monitoring Systems and Applications San Diego, California, United States, March 30, 2006 p616703
[28]	Komatsuzaki S, Kojima S, Hongo A, Takeda N, Sakurai T 2007 Proceedings of the Sensor Systems and Networks: Phenomena, Technology, and Applications for NDE and Health Monitoring San Diego, California, United States, April 10, 2007 p65300O
[29]	Xiao G Z, Sun F G, Zhang Z Y, Lu Z G, Liu J R, Wu F, Mrad N, Albert J 2007 Microw. Opt. Technol. Lett. 49 668 Google Scholar
[30]	Evenblij R S, Leijtens J A P 2017 International Conference on Space Optics—ICSO La Caleta, Tenerife, Canary Islands, October 7−10, 2014 p105631A
[31]	Pustakhod D, Kleijn E, Williams K, Leijtens X 2016 IEEE Photon. Technol. Lett. 28 2203 Google Scholar
[32]	Kaźmierczak A, Jusza A, Slowikowski M, Stopiński S, Piramidowicz R 2018 Proceedings of the Optical Sensing and Detection V Strasbourg, France, May 9, 2018 p106800M
[33]	Kaźmierczak A, Slowikowski M, Osuch T, Stopiński S, Piramidowicz R 2019 The European Conference on Lasers and Electro-Optics Munich, Germany, June 23–27, 2019 p34
[34]	Slowikowski M, Kaźmierczak A, Stopiński S, Bieniek M, Szostak S, Matuk K, Augustin L, Piramidowicz R 2021 Sensors 21 4238 Google Scholar
[35]	Wu W, Liu X 2009 Asia Communications and Photonics Conference and Exhibition Shanghai, China, November 2−6, 2009 p76302D
[36]	Trita A, Vickers G, Mayordomo I, van Thourhout D V, Vermeiren J 2014 Proceedings of the Silicon Photonics and Photonic Integrated Circuits IV Brussels, Belgium, May 8, 2014 p91330D
[37]	Trita A, Voet E, Vermeiren J, Delbeke D, Dumon P, Pathak S, Van Thourhout D 2015 IEEE Photon. J. 7 1
[38]	Li H Q, Ma X D, Cui B B, Wang Y X, Zhang C, Zhao J F, Zhang Z Y, Tang C X, Li E 2017 Optica 4 692 Google Scholar
[39]	Li H Q, Xie R, Hong Y H, Zhang Z Y, Zhang C, Tang C X, Li E B 2018 Opt. Eng. 57 065103 Google Scholar
[40]	Li H Q, Zhang S, Zhang Z, Zuo S, Zhang S S, Sun Y Q, Zhao D, Zhang Z Y 2020 Nanomaterials 10 1683 Google Scholar
[41]	Weng S M, Yuan P, Zhuang W, Zhang D L, Luo F, Zhu L Q 2021 Photonics 8 214 Google Scholar
[42]	Mendoza E A, Esterkin Y, Kempen C, Sun S J 2010 Proceedings of the Photonics in the Transportation Industry: Auto to Aerospace III Orlando, Florida, United States, April 29, 2010 p76750S
[43]	Xiao G Z, Zhao P, Sun F G, Lu Z G, Zhang Z, Grover C P 2004 Opt. Lett. 29 2222 Google Scholar
[44]	Mrad N, Xiao G Z 2005 International Conference on MEMS, NANO and Smart Systems Banff, Alberta, Canada, July 24–27, 2005 p359
[45]	Xiao G Z, Zhao P, Sun F G, Lu Z G, Zhang Z Y 2005 IEEE Photon. Technol. Lett. 17 1710 Google Scholar
[46]	Xiao G Z, Sun F G, Lu Z G, Zhang Z Y 2005 Fourth IEEE Conference on Sensors Irvine, CA, United States October 31−November 3, 2005 p1104
[47]	Mendoza E A, Esterkin Y, Kempen C, Sun Z J 2011 Photonic Sens. 1 281 Google Scholar
[48]	Ramakrishnan M, Rajan G, Semenova Y, Wolinski T, Domański A, Farrell G 2014 Microw. Opt. Technol. Lett. 56 1167 Google Scholar
[49]	Koch J, Angelmahr M, Schade W 2015 Proceedings of the Fiber Optic Sensors and Applications XII Baltimore, Maryland, United States, May 13, 2015 p94800Y
[50]	Orghici R, Bethmann K, Zywietz U, Reinhardt C, Schade W 2016 Opt. Lett. 41 3940 Google Scholar
[51]	Meyer J, Nedjalkov A, Pichler E, Kelb C, Schade W 2019 Batteries 5 66 Google Scholar
[52]	鹿利单, 祝连庆, 曾周末, 崔一平, 张东亮, 袁配 2021 物理学报 70 034204 Google Scholar Lu L D, Zhu L Q, Zeng Z M, Cui Y P, Zhang D L, Yuan P 2021 Acta Phys. Sin. 70 034204 Google Scholar
[53]	Ji S K, Li K, Yuan P, Sun G K, Lu L D, Meng F Y, Lu Y X, Zhu L Q 2021 Opt. Laser. Technol. 149 107372
[54]	Yuan P, Weng S M, Ji S K, Zhang D L, Zhu L Q 2021 Opt. Eng. 60 066101 Google Scholar
[55]	Sun F G, Xiao G Z, Zhang Z Y, Lu Z G 2007 Opt. Commun. 271 105 Google Scholar
[56]	Liu Z M, Li J 2010 2nd International Asia Conference on Informatics in Control, Automation and Robotics Wuhan, China, March 6–7, 2010 p335
[57]	Marrazzo V R, Riccio M, Maresca L, Irace A, Breglio G 2019 15th Conference on Ph. D. Research in Microelectronics and Electronics Lausanne, Switzerland, July 15–18, 2019 p149
[58]	Ruocco A, Van Thourhout D, Bogaerts W 2014 J. Light. Technol. 32 3351 Google Scholar
[59]	D'Agostino D, Desbordes T, Broeke R, Boerkamp M, Mink J, Ambrosius H P M M, Smit M K 2014 Integrated Photonics Research, Silicon and Nanophotonics San Diego, CA, United States, July 13–17, 2014 p IM2A.4
[60]	Robertson D, Niewczas P, McDonald J R 2005 Proceedings of the 17 th International Conference on Optical Fibre Sensors Bruges, Belgium, May 23, 2005 p844
[61]	Norman D C C, Webb D J, Pechstedt R D 2003 Electron. Lett. 39 1714 Google Scholar
[62]	George D S, Hill S, Howden R I, Smith G W 2009 Proceedings of the 20th International Conference on Optical Fibre Sensors Edinburgh, United Kingdom, October 5, 2009 p75031W
[63]	Fusiek G, Niewczas P, Willshire A J, McDonald J R 2008 IEEE T. Instrum. Meas. 57 2528 Google Scholar
[64]	Guo H L, Xiao G Z, Mrad N, Albert J, Yao J P 2010 J. Light. Technol. 28 2654 Google Scholar
[65]	Zhang J, Tao C Y, Xiao J J, Zhao Y, Jiang X H 2021 Proceedings of the Health Monitoring of Structural and Biological Systems XV Online Only, March 22, 2021 p115930D
[66]	Sun F G, Xiao G Z, Lu Z G, Zhang Z Y, Zhou M, Liu J R 2005 Frontiers in Optics Tucson, AZ, United States, October 16–21, 2005 FThY5
[67]	Guo H L, Xiao G Z, Mrad N, Yao J P 2012 Photonic Sensing: Principles and Applications for Safety and Security Monitoring (New York: John Wiley and Sons) 183
[68]	Su H, Huang X G 2007 Opt. Commun. 275 196 Google Scholar
[69]	Chen L X, Xu W, Huang X G 2012 Appl. Mech. Mater. 226 2062
[70]	Niewczas P, Willshire A J, Dziuda L, McDonald J R 2004 IEEE T. Instrum. Meas. 53 1192 Google Scholar
[71]	Fusiek G, Niewczas P, McDonald J R 2007 IEEE Instrumentation & Measurement Technology Conference IMTC 2007 Warsaw, Poland, May 1–3, 2007 p1
[72]	Fusiek G, Niewczas P, McDonald J R 2008 Sens. Actuator A Phys. 147 177 Google Scholar
[73]	Fender A, Rigg E J, Maier R R J, MacPherson W N, Barton J S, Moore A J, Jones J D C, Zhao D, Zhang L, Bennion I, McCulloch S, Jones B J S 2006 Appl. Opt. 45 9041 Google Scholar
[74]	John R N, Read I, MacPherson W N 2013 Meas. Sci. Technol. 24 075203 Google Scholar
[75]	Marrazzo V R, Fienga F, Riccio M, Irace A, Breglio G 2021 Sensors 21 6214 Google Scholar
[76]	Huang J T, Huang X G, Zhao H W 2008 J. Mod. Opt. 55 2981 Google Scholar
[77]	Moon H M, Kwak S C, Im K, Kim J B, Kim S 2019 IEEE Sens. J. 19 2598 Google Scholar
[78]	Nakamura K, Fujisue T, Ueha S 2007 Proceedings of the Fiber Optic Sensors and Applications V Boston, MA, United States, October 12, 2007 p677006
[79]	张宁, 徐开凯, 陈彦旭, 朱坤峰, 赵建明, 于奇 2019 物理学报 68 167803 Google Scholar Zhang N, Xu K K, Chen Y X, Zhu K F, Zhao J M, Yu Q 2019 Acta Phys. Sin. 68 167803 Google Scholar
[80]	张结印, 高飞, 张建军 2021 物理学报 70 217802 Google Scholar Zhang J Y, Gao F, Zhang J J 2021 Acta Phys. Sin. 70 217802 Google Scholar
[81]	Megalini L, Suran Brunelli S T, Charles W O, Taylor A, Isaac B, Bowers J E, Klamkin J 2018 Materials 11 337 Google Scholar
[82]	Volet N, Spott A, Stanton E J, Davenport M L, Chang L, Peters J D, Briles T C, Vurgaftman I, Meyer J R, Bowers J E 2017 Laser Photonics Rev. 11 1600165 Google Scholar

[1]	张赞, 黄北举, 陈弘达. 基于可重构硅光滤波器的计算重建片上光谱仪. 物理学报, 2024, 73(14): 140701. doi: 10.7498/aps.73.20240224
[2]	李建宇, 董忠级, 张吉宏, 史雯慧, 郑加金, 韦玮. 具有温度自补偿的保偏光纤布拉格光栅多参量传感器的设计与制备. 物理学报, 2023, 72(14): 144206. doi: 10.7498/aps.72.20230478
[3]	杜特, 马汉斯, 姜鑫鹏, 赵芬, 张兆健, 王志成, 彭政, 张伊祎, 张煜青, 罗鸣宇, 邹宏新, 吴加贵, 闫培光, 朱刚毅, 于洋, 何新, 陈欢, 张振福, 杨俊波. 片上光互连器件的智能化设计研究进展. 物理学报, 2023, 72(18): 184204. doi: 10.7498/aps.72.20230705
[4]	何祖源, 刘庆文, 陈嘉庚. 面向地壳形变观测的超高分辨率光纤应变传感系统. 物理学报, 2017, 66(7): 074208. doi: 10.7498/aps.66.074208
[5]	叶焓, 韩勤, 吕倩倩, 潘盼, 安俊明, 王玉冰, 刘荣瑞, 侯丽丽. 基于选区外延技术的单片集成阵列波导光栅与单载流子探测器的端对接设计. 物理学报, 2017, 66(15): 158502. doi: 10.7498/aps.66.158502
[6]	巩鑫, 华灯鑫, 李仕春, 王骏, 石晓菁. 基于取样光纤布拉格光栅的全光纤拉曼测温分光系统设计及优化. 物理学报, 2016, 65(7): 073601. doi: 10.7498/aps.65.073601
[7]	李政颖, 孙文丰, 李子墨, 王洪海. 基于色散补偿光纤的高速光纤光栅解调方法. 物理学报, 2015, 64(23): 234207. doi: 10.7498/aps.64.234207
[8]	周培基, 李智勇, 俞育德, 余金中. 硅基光子集成研究进展. 物理学报, 2014, 63(10): 104218. doi: 10.7498/aps.63.104218
[9]	王婷婷, 葛益娴, 常建华, 柯炜, 王鸣. 基于椭球封闭空气腔的光纤复合法布里-珀罗结构折射率传感特性研究. 物理学报, 2014, 63(24): 240701. doi: 10.7498/aps.63.240701
[10]	刘颖刚, 车伏龙, 贾振安, 傅海威, 王宏亮, 邵敏. 微纳光纤布拉格光栅折射率传感特性研究. 物理学报, 2013, 62(10): 104218. doi: 10.7498/aps.62.104218
[11]	刘超, 裴丽, 李卓轩, 宁提纲, 高嵩, 康泽新, 孙将. 光纤布拉格光栅型全光纤声光调制器的特性研究. 物理学报, 2013, 62(3): 034208. doi: 10.7498/aps.62.034208
[12]	马晶, 车驰, 于思源, 谭丽英, 周彦平, 王健. 光纤布拉格光栅辐射损伤及其对光谱特性的影响. 物理学报, 2012, 61(6): 064201. doi: 10.7498/aps.61.064201
[13]	李华星, 林机. 布拉格光栅中微扰光声孤子. 物理学报, 2011, 60(12): 124201. doi: 10.7498/aps.60.124201
[14]	李晶, 宁提纲, 裴丽, 周倩, 胡旭东, 祁春慧, 高嵩, 杨龙. 三角形谱啁啾光纤光栅的制备及其在光纤无线单边带调制系统中的应用. 物理学报, 2011, 60(5): 054203. doi: 10.7498/aps.60.054203
[15]	梁瑞冰, 孙琪真, 沃江海, 刘德明. 微纳尺度光纤布拉格光栅折射率传感的理论研究. 物理学报, 2011, 60(10): 104221. doi: 10.7498/aps.60.104221
[16]	任文华, 王燕花, 冯素春, 谭中伟, 刘艳, 简水生. 对光纤布拉格光栅法布里-珀罗腔纵模间隔问题的研究. 物理学报, 2008, 57(12): 7758-7764. doi: 10.7498/aps.57.7758
[17]	贾维国, 史培明, 杨性愉, 张俊萍, 樊国梁. 高斯变迹布拉格光纤光栅中的调制不稳定性. 物理学报, 2007, 56(9): 5281-5286. doi: 10.7498/aps.56.5281
[18]	张邺, 戴一堂, 孙杰, 张冶金, 谢世钟. 基于重构等效啁啾制作光纤光栅编解码器的光码分多址系统实现. 物理学报, 2007, 56(12): 7034-7038. doi: 10.7498/aps.56.7034
[19]	刘艳, 郑凯, 谭中伟, 李彬, 陈勇, 宁提纲, 简水生. 非对称单侧曝光切趾使啁啾光纤光栅获得优化性能. 物理学报, 2006, 55(11): 5859-5865. doi: 10.7498/aps.55.5859
[20]	吕昌贵, 崔一平, 王著元, 恽斌峰. 光纤布拉格光栅法布里-珀罗腔纵模特性研究. 物理学报, 2004, 53(1): 145-150. doi: 10.7498/aps.53.145

计量

文章访问数: 10214
PDF下载量: 315
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板