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作为一种广受欢迎的低温等离子体源,介质阻挡放电(dielectric barrier discharge,DBD)因其广泛的应用前景而备受关注.为了探究不同放电模式的形成机制,本文采用二维轴对称流体模型对大气压氩气DBD的放电模式进行了数值模拟.结果表明,随着电压幅值(Va)增大,放电功率(Pdis)增大,DBD经历了从离散丝状模式、弥散模式、互补丝状模式到柱状模式的演变过程.外加电压与放电电流的波形图表明,无论在哪种放电模式下,正负放电半周期的电流波形都始终保持对称.当Va (及Pdis)较小时,放电电流在每半个周期内呈现单脉冲特性.随着Va (及Pdis)的增大,其演变为双脉冲、三脉冲乃至多脉冲特性.电子密度(ne)与电场(E)的时空演化揭示残余电子在放电模式中起关键作用.E主要由其轴向分量构成,其径向分量在弥散模式下仅会在电极边缘出现.在互补丝状模式中,强微放电(micro-discharges,MDs)与弱MDs的位置在连续的两个半周期内交替出现.在柱状模式中,强MD通道在连续的两个半周期会在固定的位置出现.此外,柱状模式中残余电子通道的直径大于丝状模式.As a popular low-temperature plasma source, dielectric barrier discharge (DBD) has drawn significant attention due to its extensive application field including surface modification, material synthesis, sterilization, etc. DBD has presented different modes with varying experimental conditions. In order to address the formation mechanism of the different modes, a two-dimensional axis-symmetric fluid model is employed to simulate the characteristics of DBD in atmospheric pressure argon. Results indicate that DBD undergoes a scenario from a discretely-filamentary mode, a diffuse mode, a complementarily-filamentary mode, to a columnar mode with increasing voltage amplitude (Va) or discharge power (Pdis). Waveforms of applied voltage and discharge current indicate that for every discharge mode, the discharge current waveforms are always symmetrical for positive and negative discharge half-cycles. The discharge current exhibits single-pulse characteristics per half-cycle with low Va (or Pdis), and turns to double-pulse, triple-pulse, or multi-pulse characteristics per half-cycle with increasing Va (or Pdis). Spatial-temporal evolutions of electron density and electric field reveal that residual electrons play an important role in the discharge mode. Electric field (E) is mainly composed of its axial component, and its radial component only appears at the edge of the electrode in the diffuse mode. In the complementarily-filamentary mode, the locations of the strong-MDs and those of the weak-MDs alternate in the consecutive half-cycles. The strong-MD channels are stationary at fixed locations in the consecutive half-cycles for the columnar mode. In addition, the diameter of residual electrons in the columnar mode is larger than that in the filamentary mode. Moreover, the generation rate of Ar* increases, while the energy efficiency of the discharge shrinks with increasing Va (or Pdis). These results are of great significance for the deep understanding of discharge mode and the improving of DBD performance.
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Keywords:
- dielectric barrier discharge /
- filamentary mode /
- diffuse mode /
- columnar mode
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