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Study of microcrystalline silicon solar cells fabricated by very high frequency plasma-enhanced chemical vapor deposition

Zhang Xiao-Dan Zhao Ying Gao Yan-Tao Zhu Feng Wei Chang-Chun Sun Jian Wang Yan Geng Xin-Hua Xiong Shao-Zhen

Citation:

Study of microcrystalline silicon solar cells fabricated by very high frequency plasma-enhanced chemical vapor deposition

Zhang Xiao-Dan, Zhao Ying, Gao Yan-Tao, Zhu Feng, Wei Chang-Chun, Sun Jian, Wang Yan, Geng Xin-Hua, Xiong Shao-Zhen
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  • Abstract views:  7462
  • PDF Downloads:  1122
  • Cited By: 0
Publishing process
  • Received Date:  15 July 2004
  • Accepted Date:  15 December 2004
  • Published Online:  05 February 2005

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