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A micro-spectrometer without moving parts that can be manufactured through micro-opto-electro-mechanical system techniques is developed, and the interference system is introduced. The fabrication of the micro multi-mirrors, which is the core part of the system, is investigated and wet etching of silicon in KOH solution is testified to be a good method. The root mean square surface roughness of the reflect surface made up of Si planes (111) through wet etching is less than 10 nm.
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Keywords:
- Fourier transform spectrometer /
- micro multi-mirror /
- micro-opto-electro-mechanical system /
- space modulation
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