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Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer

Wang Bo Liang Zhong-Zhu Kong Yan-Mei Liang Jing-Qiu Fu Jian-Guo Zheng Ying Zhu Wan-Bin Lü Jin-Guang Wang Wei-Biao Pei Shu Zhang Jun

Citation:

Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer

Wang Bo, Liang Zhong-Zhu, Kong Yan-Mei, Liang Jing-Qiu, Fu Jian-Guo, Zheng Ying, Zhu Wan-Bin, Lü Jin-Guang, Wang Wei-Biao, Pei Shu, Zhang Jun
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  • Abstract views:  8987
  • PDF Downloads:  944
  • Cited By: 0
Publishing process
  • Received Date:  06 May 2009
  • Accepted Date:  23 June 2009
  • Published Online:  05 January 2010

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