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Since the last decades, superconducting single-photon technology has been extensively used in the quantum security communication and the linear-optic quantum computing fields. Especially, the device based on the coplanar waveguide resonator has attracted substantial interests due to its evident advantages, including the relatively simple structure, the sufficiently high detection efficiency, and the photon-resolving capability, etc. With the profound investigation in optimizing the depositing methods and the material selections, as well as the the development of the relevant theories, the technology of single photon detection based on the coplanar waveguide resonator has obtained a breakthrough. In this review paper we begin from the basic principle of the coplanar waveguide detector, then interpret the relevant theory and some design details of the devices. Finally, based on some of the recent experimental results measured with the low-temperature devices in our lab, we give a brief perspective on the future development of the superconducting coplanar waveguide single photon detectors.
[1] Devoret M H, Schoelkopf R J 2013 Science 339 1169
[2] Xiang Z L, Ashhab S, You J Q, Nori F 2013 Rev. Mod. Phys. 85 623
[3] Zhao N, Liu J S, Li T F, Chen W 2013, Acta Phys. Sin. 62 010301 (in Chinese) [赵娜, 刘建设, 李铁夫, 陈炜2013 物理学报62 010301]
[4] Day P K, Leduc H G, Mazin B A, Vayonakis A, Zmuidzinas J 2003 Nature 425 817
[5] Hiskett P A, Rosenberg D, Peterson C G, Hughes R J, Nam S, Lita A E, Miller A J, Nordholt J E 2006 New J. Phys. 8 193
[6] Knill E, Laflamme R, Milburn G J 2001 Nature 409 46
[7] Wang H P, Wang G L, Ni H Q, Xu Y Q, Niu Z C, Gao F Q 2013 Acta Phys. Sin. 62 194205 (in Chinese)[王红培, 王广龙, 倪海桥, 徐应强, 牛智川, 高凤岐2013 物理学报62 194205]
[8] Yin W H, Han Q, Yang X H 2012 Acta Phys. Sin. 61 248502 (in Chinese) [尹伟红, 韩勤, 杨晓红2012 物理学报 61 248502]
[9] Sun Z B, Ma H Q, Lei B, Yang H D, Wu L A, Zhai G J, Feng J 2007 Acta Phys. Sin. 56 5790 (in Chinese)[孙志斌, 马海强, 雷鸣, 杨捍东, 吴令安, 翟光杰, 冯稷2007 物理学报56 5790]
[10] Watanabe K, Yoshida K, Aoki T Kohjiro S 1994 Jpn. J. Appl. Phys. 33 5708
[11] Baselmans J, Barends R, Hovenier J N, Gao J R, Hoevers H, Korte P, Klapwijk T M 2005 Bulletin de la Societe Royale des Sciences de Liege 74 5
[12] Mattis D C, Bardeen J 1958 Phys. Rev. 11 2
[13] Gao J S, Daal M, Vayonakis A, Kumar S, Zmuidzinas J, Sadoulet B, Mazin B A, Day P K, Leduc H G 2008 Appl. Phys. Lett. 92 152505
[14] Gao J, Vissers M R, Sandberg M O, Silva F C S, Nam S W, Pappas D P, Wisbey D S, Langman E C, Meeker S R, Mazin B A, Leduc H G, Zmuidzinas J, Irwin K D 2012 Appl. Phys. Lett. 101 142602
[15] Zhang L B, Kang L, Chen J, Zhao Q Y, Jia T, Xu W W, Cao C H, Jin B B, Wu P H 2011 Acta. Phys. Sin. 60 038501 (in Chinese) [张蜡宝, 康琳, 陈健, 赵清源, 郏涛, 许伟伟, 曹春海, 金飚兵, 吴培亨2011 物理学报60 038501]
[16] Zhou Y, Zhang L B, Jia T, Zhao Q Y, Gu M, Qiu J, Kang L, Chen J, Wu P H 2012 Acta. Phys. Sin. 61 208501 (in Chinese)[周渝, 张蜡宝, 郏涛, 赵清源, 顾敏, 邱健, 康琳, 陈健, 吴培亨2012 物理学报61 208501]
[17] Tsman G N, Okunev O, Chulkova G, Lipatov A, Semenov A, Smirnov K, Voronov B, Dzardanov A, Williams C, Sobolewski R 2001 Appl. Phys. Lett. 79 705
[18] Lita A E, Miller A J, Nam S W 2008 Opt. Express 16 3032
[19] Fujii G, Fukuda D, Numata T, Yoshizawa A, Tsuchida H, Inoue S 2012 J. Low. Temp. Phys. 10 1007
[20] Nielsen M A, Chuang I L 2000 Quantum Computation and Quantum Information (Cambrige: Cambrige University Press)
[21] Sadleir J E, Smith S J, Robinson I K, Finkbeiner F M, Chervenak J A, Bandler S R, Eckart M E, Kilbourne C A 2011 Phys. Rev. B 84 184502
[22] Friedrich S, Funk T, Drury O, Labov S E, Cramer S P 2002 Rev. Sci. Inst. 73 1629
[23] Irwin K D, Hilton G C 2005 Chr. Enss (2 Ed.): Cryogenic Particle Detection, Topics Appl. Phys. 99 63
[24] Martin D D E, Verhoeve P 2010 Superconducting tunnel junctions
[25] Natarajan C M, Tanner M G, Hadfield R H 2012 Superconductor Science and Technology 25 063001
[26] Mazin B A 2004 Microwave Kinetic Inductance Detectors (California: California Institute of Thechnology)
[27] Calvo M 2008 Development of Kinetic Inductance Detectors for the study of the Cosmic Microwave Background Polarization (Roma: Sapienza University)
[28] Chambers R G 1952 Proceedings of the Royal Society of London. Series A, Mathematical and Physical Sciences 215 481
[29] London F 1936 Nature 137 991
[30] Pippard A B 1953 Proceedings of the Royal Society of London. Series A, Mathematical and Physical Sciences 216 547
[31] Mattis D C, Bardeen J 1958 Phys. Rev. 111 412
[32] Glover R E, Tinkham M 1957 Physical Review 108 243
[33] Zmuidzinas J 2012 Annu. Rev. Condens.Matter Phys. 3 169
[34] Gao J, Zmuidzinas J, Mazin B A, Leduc H G, Day P K 2007 Appl. Phys. Lett. 90 102507
[35] Gao J, Daal M, Martinis J M, Vayonakis A, Zmuidzinas J, Sadoulet B, Mazin B A, Day P K, Leduc H G 2008 Appl. Phys. Lett. 92 212504
[36] Anderson P W, Halperin B I, Varma C M 1972 Philos. Mag. 25 1
[37] Phillips W A 1972 J. Low Temp. Phys. 7 351
[38] Li J S, Yin M, Wang J X, He D Y 2005 Chinese Physics Letters 22 3130
[39] Gao J S 2008 The Physics of Superconducting Microwave Resonators (Califonia: California Institute of Technology)
[40] Kumar S, Day P, LeDuc H, Mazin B, Eckart M, Gao J, Zmuidzinas J 2006 Santa Barbara: APS March Meeting Abstract B38 2
[41] Barends R, Baselmans J J A, Hovenier J N, Gao J R, Yates S J C, Klapwijk T M, Hoevers H F C 2007 IEEE Trans. Appl. Supercond. 17 263
[42] Pozar D M 1998 Microwave Engineering, 2nd New York
[43] Doyle S, Mauskopf P, Zhang J, Withington S, Goldie D, Glowacka D, Roesch M 2009 In AIP Conference Proceedings 1185 156
[44] Simons R 2001 Coplanar Waveguide Circuits, Components and Systems. Wiley-Interscience
[45] Gevorgian S S 1994 Electro. Lett. 30 15
[46] Sergeev A, Mitin V, Karasik B 2002 Appl. Phys. Lett. 80 817
[47] Beenakker C Schnenberger C 2003 Phys. Today 5 37
[48] Kozorezov A G, Volkov A F, Wigmore J K, Peacock A, Poelaert A, Hartog R den 2000 Phys. Rev. B 61 11807
[49] Fano U 1947 Phys. Rev. 72 26
[50] Zhang X, Zhang D L 2007 Chin. Phys. 16 2656
[51] Li H J, Wang Y W, Wei L F, Zhou P J, Wei Q, Cao C H, Fang Y R, Yu Y, Wu P H 2013 Chi. Sci. Bull. 58 1
[52] Ponchak G E, Papapolymerou J, Tentzeris M M 2005 IEEE Trans. Microw. Theory Techn. 53 713
[53] Lindstrom T, Healey J E, Colclough M S, Muirhead C M, Tzalenchuk A Ya 2009 Phys. Rev. B 80 132501
[54] Wisbey D S, Gao J, Vissers M R, Silva F C S, Kline J S, Vale L, Pappas D P 2010 J. Appl. Phys. 108 093918
[55] Wang Y W, Zhou P J, Wei L F, Li H J, Zhang B H, Zhang M, Wei Q, Fang Y R, Cao C H 2013 J. Appl. Phys. 114 153109
[56] De Visser P J, Withington S, Goldie D J 2010 J. Appl. Phys. 108 114504
[57] Gao J, Mazin B A, Daal M, Day P, LeDuc H, Zmuidzinas J 2006 In Proc. SPIE 6275 627509
[58] McHugh S, Mazin B A, Serfass B, Meeker S, O’Brien K, Duan R, Rakanti R, Werthimer D 2012 Review of Scientific Instruments 83 044702
[59] Sandberg M, Vissers M R, Kline J S, Weides M, Gao J, Wisbey D S, Pappas D P 2012 Appl. Phys. Lett. 100 262605
[60] Quaranta O, Cecil T W, Miceli A 2013 IEEE Trans. Appl. Supercon. 23 3
[61] Vissers M R, GaoJ, Sandberg M, Duff S M, Wisbey D S, Irwin K D Pappas D P 2013 Appl. Phys. Lett. 102 232603.
[62] Moore D C, Golwala S, Bumble B, Cornell B, Mazin B A, Gao J, Day P K, LeDuc H G, Zmuidzinas J 2012 J. Low, Temp. Phys. 167 329
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[1] Devoret M H, Schoelkopf R J 2013 Science 339 1169
[2] Xiang Z L, Ashhab S, You J Q, Nori F 2013 Rev. Mod. Phys. 85 623
[3] Zhao N, Liu J S, Li T F, Chen W 2013, Acta Phys. Sin. 62 010301 (in Chinese) [赵娜, 刘建设, 李铁夫, 陈炜2013 物理学报62 010301]
[4] Day P K, Leduc H G, Mazin B A, Vayonakis A, Zmuidzinas J 2003 Nature 425 817
[5] Hiskett P A, Rosenberg D, Peterson C G, Hughes R J, Nam S, Lita A E, Miller A J, Nordholt J E 2006 New J. Phys. 8 193
[6] Knill E, Laflamme R, Milburn G J 2001 Nature 409 46
[7] Wang H P, Wang G L, Ni H Q, Xu Y Q, Niu Z C, Gao F Q 2013 Acta Phys. Sin. 62 194205 (in Chinese)[王红培, 王广龙, 倪海桥, 徐应强, 牛智川, 高凤岐2013 物理学报62 194205]
[8] Yin W H, Han Q, Yang X H 2012 Acta Phys. Sin. 61 248502 (in Chinese) [尹伟红, 韩勤, 杨晓红2012 物理学报 61 248502]
[9] Sun Z B, Ma H Q, Lei B, Yang H D, Wu L A, Zhai G J, Feng J 2007 Acta Phys. Sin. 56 5790 (in Chinese)[孙志斌, 马海强, 雷鸣, 杨捍东, 吴令安, 翟光杰, 冯稷2007 物理学报56 5790]
[10] Watanabe K, Yoshida K, Aoki T Kohjiro S 1994 Jpn. J. Appl. Phys. 33 5708
[11] Baselmans J, Barends R, Hovenier J N, Gao J R, Hoevers H, Korte P, Klapwijk T M 2005 Bulletin de la Societe Royale des Sciences de Liege 74 5
[12] Mattis D C, Bardeen J 1958 Phys. Rev. 11 2
[13] Gao J S, Daal M, Vayonakis A, Kumar S, Zmuidzinas J, Sadoulet B, Mazin B A, Day P K, Leduc H G 2008 Appl. Phys. Lett. 92 152505
[14] Gao J, Vissers M R, Sandberg M O, Silva F C S, Nam S W, Pappas D P, Wisbey D S, Langman E C, Meeker S R, Mazin B A, Leduc H G, Zmuidzinas J, Irwin K D 2012 Appl. Phys. Lett. 101 142602
[15] Zhang L B, Kang L, Chen J, Zhao Q Y, Jia T, Xu W W, Cao C H, Jin B B, Wu P H 2011 Acta. Phys. Sin. 60 038501 (in Chinese) [张蜡宝, 康琳, 陈健, 赵清源, 郏涛, 许伟伟, 曹春海, 金飚兵, 吴培亨2011 物理学报60 038501]
[16] Zhou Y, Zhang L B, Jia T, Zhao Q Y, Gu M, Qiu J, Kang L, Chen J, Wu P H 2012 Acta. Phys. Sin. 61 208501 (in Chinese)[周渝, 张蜡宝, 郏涛, 赵清源, 顾敏, 邱健, 康琳, 陈健, 吴培亨2012 物理学报61 208501]
[17] Tsman G N, Okunev O, Chulkova G, Lipatov A, Semenov A, Smirnov K, Voronov B, Dzardanov A, Williams C, Sobolewski R 2001 Appl. Phys. Lett. 79 705
[18] Lita A E, Miller A J, Nam S W 2008 Opt. Express 16 3032
[19] Fujii G, Fukuda D, Numata T, Yoshizawa A, Tsuchida H, Inoue S 2012 J. Low. Temp. Phys. 10 1007
[20] Nielsen M A, Chuang I L 2000 Quantum Computation and Quantum Information (Cambrige: Cambrige University Press)
[21] Sadleir J E, Smith S J, Robinson I K, Finkbeiner F M, Chervenak J A, Bandler S R, Eckart M E, Kilbourne C A 2011 Phys. Rev. B 84 184502
[22] Friedrich S, Funk T, Drury O, Labov S E, Cramer S P 2002 Rev. Sci. Inst. 73 1629
[23] Irwin K D, Hilton G C 2005 Chr. Enss (2 Ed.): Cryogenic Particle Detection, Topics Appl. Phys. 99 63
[24] Martin D D E, Verhoeve P 2010 Superconducting tunnel junctions
[25] Natarajan C M, Tanner M G, Hadfield R H 2012 Superconductor Science and Technology 25 063001
[26] Mazin B A 2004 Microwave Kinetic Inductance Detectors (California: California Institute of Thechnology)
[27] Calvo M 2008 Development of Kinetic Inductance Detectors for the study of the Cosmic Microwave Background Polarization (Roma: Sapienza University)
[28] Chambers R G 1952 Proceedings of the Royal Society of London. Series A, Mathematical and Physical Sciences 215 481
[29] London F 1936 Nature 137 991
[30] Pippard A B 1953 Proceedings of the Royal Society of London. Series A, Mathematical and Physical Sciences 216 547
[31] Mattis D C, Bardeen J 1958 Phys. Rev. 111 412
[32] Glover R E, Tinkham M 1957 Physical Review 108 243
[33] Zmuidzinas J 2012 Annu. Rev. Condens.Matter Phys. 3 169
[34] Gao J, Zmuidzinas J, Mazin B A, Leduc H G, Day P K 2007 Appl. Phys. Lett. 90 102507
[35] Gao J, Daal M, Martinis J M, Vayonakis A, Zmuidzinas J, Sadoulet B, Mazin B A, Day P K, Leduc H G 2008 Appl. Phys. Lett. 92 212504
[36] Anderson P W, Halperin B I, Varma C M 1972 Philos. Mag. 25 1
[37] Phillips W A 1972 J. Low Temp. Phys. 7 351
[38] Li J S, Yin M, Wang J X, He D Y 2005 Chinese Physics Letters 22 3130
[39] Gao J S 2008 The Physics of Superconducting Microwave Resonators (Califonia: California Institute of Technology)
[40] Kumar S, Day P, LeDuc H, Mazin B, Eckart M, Gao J, Zmuidzinas J 2006 Santa Barbara: APS March Meeting Abstract B38 2
[41] Barends R, Baselmans J J A, Hovenier J N, Gao J R, Yates S J C, Klapwijk T M, Hoevers H F C 2007 IEEE Trans. Appl. Supercond. 17 263
[42] Pozar D M 1998 Microwave Engineering, 2nd New York
[43] Doyle S, Mauskopf P, Zhang J, Withington S, Goldie D, Glowacka D, Roesch M 2009 In AIP Conference Proceedings 1185 156
[44] Simons R 2001 Coplanar Waveguide Circuits, Components and Systems. Wiley-Interscience
[45] Gevorgian S S 1994 Electro. Lett. 30 15
[46] Sergeev A, Mitin V, Karasik B 2002 Appl. Phys. Lett. 80 817
[47] Beenakker C Schnenberger C 2003 Phys. Today 5 37
[48] Kozorezov A G, Volkov A F, Wigmore J K, Peacock A, Poelaert A, Hartog R den 2000 Phys. Rev. B 61 11807
[49] Fano U 1947 Phys. Rev. 72 26
[50] Zhang X, Zhang D L 2007 Chin. Phys. 16 2656
[51] Li H J, Wang Y W, Wei L F, Zhou P J, Wei Q, Cao C H, Fang Y R, Yu Y, Wu P H 2013 Chi. Sci. Bull. 58 1
[52] Ponchak G E, Papapolymerou J, Tentzeris M M 2005 IEEE Trans. Microw. Theory Techn. 53 713
[53] Lindstrom T, Healey J E, Colclough M S, Muirhead C M, Tzalenchuk A Ya 2009 Phys. Rev. B 80 132501
[54] Wisbey D S, Gao J, Vissers M R, Silva F C S, Kline J S, Vale L, Pappas D P 2010 J. Appl. Phys. 108 093918
[55] Wang Y W, Zhou P J, Wei L F, Li H J, Zhang B H, Zhang M, Wei Q, Fang Y R, Cao C H 2013 J. Appl. Phys. 114 153109
[56] De Visser P J, Withington S, Goldie D J 2010 J. Appl. Phys. 108 114504
[57] Gao J, Mazin B A, Daal M, Day P, LeDuc H, Zmuidzinas J 2006 In Proc. SPIE 6275 627509
[58] McHugh S, Mazin B A, Serfass B, Meeker S, O’Brien K, Duan R, Rakanti R, Werthimer D 2012 Review of Scientific Instruments 83 044702
[59] Sandberg M, Vissers M R, Kline J S, Weides M, Gao J, Wisbey D S, Pappas D P 2012 Appl. Phys. Lett. 100 262605
[60] Quaranta O, Cecil T W, Miceli A 2013 IEEE Trans. Appl. Supercon. 23 3
[61] Vissers M R, GaoJ, Sandberg M, Duff S M, Wisbey D S, Irwin K D Pappas D P 2013 Appl. Phys. Lett. 102 232603.
[62] Moore D C, Golwala S, Bumble B, Cornell B, Mazin B A, Gao J, Day P K, LeDuc H G, Zmuidzinas J 2012 J. Low, Temp. Phys. 167 329
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