Polarization modulation scanning optical microscopy method

Zhang Yang; Zhang Zhi-Hao; Wang Yu-Jian; Xue Xiao-Lan; Chen Ling-Xiu; Shi Li-Wei

doi:10.7498/aps.73.20240688

Abstract

Since the discovery of monolayer graphene, the novel physical properties of two-dimensional (2D) materials, particularly those with fewer layers that often exhibit unique properties different from bulk materials, have received significant attention. Therefore, accurately determining the layer number or obtaining the microscopic surface morphology is crucial in the laboratory fabrication and during device manufacturing. However, traditional detection methods have numerous drawbacks. There is an urgent need for a convenient, accurate, and non-destructive scientific method to characterize the layer number and surface microstructure of 2D materials. By combining the experimental setup of laser scanning photocurrent spectroscopy, we develop a polarization-modulated scanning optical microscope based on the principle of reflectance difference spectroscopy. By monitoring the reflectivity of the samples, we can observe changes in the reflection signal strength of MoS₂ with different layer numbers. The intensity of the reflectance differential spectral signal reflects changes in the layer count within the sample. We can characterize the changes in the number of layers of 2D materials in a non-contact manner by using polarization-modulated scanning optical microscopy. Through the study of the reflectance differential spectra of two typical 2D layered materials, MoS₂ and ReSe₂, we find that our polarization-modulated scanning optical microscope system is also more sensitive to the characteristics of the stacking anisotropy of the 2D materials than the conventional reflection microscope. This indicates that our research contributes to a better understanding of the layer number characteristics and anisotropic properties of layered 2D materials. Furthermore, our research also provides a non-contact optical method to characterize the number of layers and optical anisotropy of two-dimensional layered material.

Keywords:

Authors and contacts

School of Materials Science and Physics, China University of Mining and Technology, Xuzhou 221116, China

Corresponding author: Zhang Yang, yangzhang@cumt.edu.cn ; Shi Li-Wei, slw@cumt.edu.cn

Funds: Project supported by the Special Funds of the National Natural Science Foundation of China (Grant No. 62341406), the Young Scientists Fund of the Natural Science Foundation of Jiangsu Province, China (Grant No. BK20221113), and the Science and Technology Project-Basic Research Plan of Xuzhou, China (Grant No. KC23004).

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References

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Cited By

图 1 RDS的实验原理图

Figure 1. Experimental schematic diagram of RDS.

DownLoad: Full-Size Img PowerPoint

图 2 偏振调制扫描光学显微镜光路图

Figure 2. Polarization-modulated scanning optical microscope optical path diagram.

DownLoad: Full-Size Img PowerPoint

图 3 MoS₂光学显微镜照片及反射谱二维图像　(a) 0°的MoS₂光学显微镜照片; (b) 90°的MoS₂光学显微镜照片; (c), (d)分别为对应的MoS₂反射谱(DC信号)的二维图像; (e), (f) 分别为对应的MoS₂ AFM图像. 黑线为标度尺, 大小为10 μm

Figure 3. Optical microscope image and reflectance spectrum two-dimensional (2D) image of MoS₂: (a) Optical microscope photographs of MoS₂ at 0°; (b) optical microscope photographs of MoS₂ at 90°; (c), (d) 2D images of the corresponding MoS₂ reflection spectra (DC signals), respectively; (e), (f) AFM images of the corresponding MoS₂. The black line is a scale with a size of 10 μm.

DownLoad: Full-Size Img PowerPoint

图 4 MoS₂光学显微镜照片及反射差分谱二维图像　(a) 0°的MoS₂光学显微镜照片; (b) 90°的MoS₂光学显微镜照片; (c), (d)分别为对应的MoS₂ 各向异性信号(RDS信号)的二维图像. 黑线为标度尺, 大小为10 μm

Figure 4. Optical microscope image and reflectance differential spectrum 2D Image of MoS₂: (a) Optical microscope photographs of MoS₂ at 0°; (b) optical microscope photographs of MoS₂ at 90°; (c), (d) 2D images of the corresponding MoS₂ anisotropic signal (RDS signal), respectively. The black line is a scale with a size of 10 μm.

DownLoad: Full-Size Img PowerPoint

图 5 MoS₂反射谱与反射差分谱的空间映射图　(a)不同层数MoS₂的反射谱的强度空间映射图; (b)不同层数MoS₂的RDS信号强度空间映射图

Figure 5. Spatial mapping of MoS₂ reflectance spectrum and reflectance differential spectrum: (a) Intensity spatial mapping of reflection spectra for different layers of MoS₂; (b) intensity spatial mapping of RDS signal for different layers of MoS₂.

DownLoad: Full-Size Img PowerPoint

图 6 不同层数MoS₂的RDS信号强度随层数的变化

Figure 6. Relationship between the RDS signal intensity of MoS₂ and the number of layers.

DownLoad: Full-Size Img PowerPoint

图 7 ReSe₂的光学显微镜照片、DC信号的二维图像及RDS信号的二维图像　(a) 0° 的ReSe₂的光学显微镜照片; (c) 0°的ReSe₂的DC信号的二维图像; (e) 0°的ReSe₂的RDS信号的二维图像; (b) 90°的ReSe₂的光学显微镜照片; (d) 90°的ReSe₂的DC信号的二维图像; (f) 90°的ReSe₂的RDS信号的二维图像. 黑线为标度尺, 大小为10 μm

Figure 7. Optical microscope image of ReSe₂, 2D image of DC signal, and 2D image of RDS signal: (a) Optical microscope photographs of ReSe₂ at 0°; (c) 2D image of DC signal of ReSe₂ at 0°; (e) 2D image of RDS signal of ReSe₂ at 0°; (b) optical microscope photographs of ReSe₂ at 90°; (d) 2D image of DC signal of ReSe₂ at 90°; (f) 2D image of RDS signal of ReSe₂ at 90°. The black line is a scale with a size of 10 μm.

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

[1]	Castro Neto A H, Guinea F, Peres N M R, Novoselov K S, Geim A K 2009 Rev. Mod. Phys. 81 109 Google Scholar
[2]	Geim A K, Novoselov K S 2007 Nat. Mater. 6 183 Google Scholar
[3]	Geim A K, Grigorieva I V 2013 Nature 499 419 Google Scholar
[4]	Butler S Z, Hollen S M, Cao L, Cui Y, Gupta J A, Gutierrez H R, Heinz T F, Hong S S, Huang J, Ismach A F, Johnston-Halperin E, Kuno M, Plashnitsa V V, Robinson R D, Ruoff R S, Salahuddin S, Shan J, Shi L, Spencer M G, Terrones M, Windl W, Goldberger J E 2013 ACS Nano 7 2898 Google Scholar
[5]	Qiao J, Kong X H, Hu Z X, Yang F, Ji W 2014 Nat. Commun. 5 4475 Google Scholar
[6]	Wang Q H, Kalantar-Zadeh K, Kis A, Coleman J N, Strano M S 2012 Nat. Nanotechnol. 7 699 Google Scholar
[7]	Splendiani A, Sun L, Zhang Y B, Li T S, Kim J, Chim C Y, Galli G, Wang F 2010 Nano Lett. 10 1271 Google Scholar
[8]	Mak K F, Lee C, Hone J, Shan J, Heinz T F 2010 Phys. Rev. Lett. 105 136805 Google Scholar
[9]	Chhowalla M, Shin H S, Eda G, Li L J, Loh K P, Zhang H 2013 Nat. Chem. 5 263 Google Scholar
[10]	Kim T, Kim D, Kim T, Kim H, Shin C 2022 Microsc. Microanal. 28 1604 Google Scholar
[11]	Dong X C, Li H W, Yan Y T, Cheng H R, Zhang H X, Zhang Y C, Le T D, Wang K, Dong J, Jakobi M, Yetisen A K, Koch A W 2022 Adv. Theory Simul. 5 2200140 Google Scholar
[12]	de Graaf S, Kooi B J 2022 2D Mater. 9 015009 Google Scholar
[13]	Xiao Y P, Zheng W W, Yuan B, Wen C, Lanza M 2021 Cryst. Res. Technol. 56 2100056 Google Scholar
[14]	Jin Y, Yu K 2021 J. Phys. D: Appl. Phys. 54 393001 Google Scholar
[15]	Zhou X, Liu Y S, Hu X M, Fang L, Song Y M, Liu D M, Luo J B 2020 Nanotechnology 31 285710 Google Scholar
[16]	Caplins B W, Holm J D, Keller R R 2019 Carbon 149 400 Google Scholar
[17]	Liang F, Xu H J, Wu X, Wang C L, Luo C, Zhang J 2018 Chin. Phys. B 27 037802 Google Scholar
[18]	Zhang X, Qiao X F, Shi W, Wu J B, Jiang D S, Tan P H 2015 Chem. Soc. Rev. 44 2757 Google Scholar
[19]	Li X L, Qiao X F, Han W P, Lu Y, Tan Q H, Liu X L, Tan P H 2015 Nanoscale 7 8135 Google Scholar
[20]	Lee K R, Youn J, Yoo S 2024 Nanophotonics 13 1417 Google Scholar
[21]	Wang Q, Qin J, Xiao Y, Xu W, Ding L 2023 Electronics 12 864 Google Scholar
[22]	Zou B, Zhou Y, Zhou Y, Wu Y Y, He Y, Wang X N, Yang J F, Zhang L H, Chen Y X, Zhou S, Guo H X, Sun H R 2022 Nano Res. 15 8470 Google Scholar
[23]	Wang S Y, Chen G X, Guo Q Q, Huang K X, Zhang X L, Yan X Q, Liu Z B, Tian J G 2021 Nanoscale Adv. 3 3114 Google Scholar
[24]	乔晓粉, 李晓莉, 刘赫男, 石薇, 刘雪璐, 吴江滨, 谭平恒 2016 物理学报 65 136801 Google Scholar Qiao X F, Li X L, Liu H N, Shi W, Liu X L, Wu J B, Tan P H 2016 Acta Phys. Sin. 65 136801 Google Scholar
[25]	Jiang H, Shi H Y, Sun X D, Gao B 2018 Appl. Phys. Lett. 113 213105 Google Scholar
[26]	Jiang H, Shi H Y, Sun X D, Gao B 2018 ACS Photonics 5 2509 Google Scholar
[27]	Huang W, Yu J L, Liu Y, Peng Y, Wang L J, Liang P, Chen T S, Xu X G, Liu F Q, Chen Y H 2024 Chin. Phys. B 33 037801 Google Scholar
[28]	Huang W, Liu Y, Zhu L P, Zheng X T, Li Y, Wu Q, Wang Y X, Wang X Q, Chen Y H 2016 Opt. Express 24 15059 Google Scholar
[29]	Yu J L, Chen Y H, Cheng S Y, Lai Y F 2013 Appl. Opt. 52 1035 Google Scholar
[30]	Wu S J, Chen Y H, Yu J L, Gao H S, Jiang C Y, Huang J L, Zhang Y H, Wei Y, Ma W Q 2013 Nanoscale Res. Lett. 8 298 Google Scholar
[31]	Kim E D, Majumdar A, Kim H, Petroff P, Vuckovic J 2010 Appl. Phys. Lett. 97 053111 Google Scholar
[32]	Aspnes D E, Harbison J P, Studna A A, Florez L T 1987 Phys. Rev. Lett. 59 1687 Google Scholar
[33]	沈万福 2019 博士论文(天津: 天津大学) Shen W F 2019 Ph. D. Dissertation (Tianjin: Tianjin University
[34]	蒋虎 2019 博士论文 (哈尔滨: 哈尔滨工业大学) Jiang H 2019 Ph. D. Dissertation (Haerbin: Harbin Institute of Technology
[35]	Shi Y F, Wang L L, Q X F, Li S, Liu Y, Li X L, Zhao X H 2020 Nanoscale Res. Lett. 15 43 Google Scholar
[36]	Ermolaev G A, Voronin K V, Toksumakov A N, Grudinin D V, Fradkin I M, Mazitov A, Slavich A S, Tatmyshevskiy M K, Yakubovsky D I, Solovey V R, Kirtaev R V 2024 Nat. Commun. 15 1552 Google Scholar

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