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Terahertz thickness measurement is of great important in materials research and industrial test. And it’s can be applied in materials measurement including wood, paper, ceramics, plastics, and composite materials. Atomic superheterodyne terahertz detector has extremely high sensitivity. The sensitivity of terahertz electric field strength measurement can reach 5.76 μV cm-1 Hz-1/2. Simultaneously, the linear dynamic range is better than 60 dB. So, it can be applied to realize precise thickness measurement of materials through the terahertz transmission efficiency. The experiments in this paper demonstrated the thickness measurement of sapphire crystal and organic materials PTFE. The terahertz signal is shown in Figure A1(a,b). The thickness can be calculated from the transmittance, which is consistent with the result measured directly with a vernier caliper. Furthermore, single-layer graphene and few-layer graphene can be clearly distinguished from terahertz transmission signals, as shown in Figure A1(c). Even for niobium meta thin films with thickness 1 μm, very weak terahertz signal can be well distinguished due to the high sensitivity of atomic superheterodyne terahertz detector. In summary, the technology developed for terahertz thickness measurement based on atomic superheterodyne detection is very important for defect detection, coating check, and parameter measurement of materials.
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