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物理学报. 1992, 41(2): 302-305.
doi: 10.7498/aps.41.302.
反应溅射a-Si:H/a-Ge:H超晶格的热稳定性
- 收稿日期: 1991-02-04
- 刊出日期: 1992-01-05
摘要: 通过红外透射谱和X射线衍射谱研究a-si:H/a-Ge:H超晶格的热稳定性,发现当周期厚度较小时,超晶格的晶化温度比体膜a-Ge:H的大,对实验结果作初步讨论。
English Abstract
INVESTIGATION ON THERMAL STABILITY OF REACTIVE- SPUTTERING a-Si:H/a-Ge:H SUPERLATTICES
- Received Date:
04 February 1991
- Published Online:
05 January 1992
Abstract: The thermal stability of a-Si:H/a-Ge:H superlattices was studied using LR and XRD spec tra. It was found that the crystallization temperature of superlattices with small layer thickness is higher than that of bulk a-Ge:H. Results are discussed preliminarily.
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