Mohammad M A, Morgan D V 1989 Phys. State A 115 213

Chanelere C, Autran J L, Devine R A B, Balland B 1998 J. Mater. Sci. and Enging. R22 269 Atanassova E, Paskaleva A 2007 J. Microelectronics Reliability 47 913 Rubio F, Albella J M, Martinz-Duart J M 1982 Thin Solid Films 90 405 Herrmann W C 1981 J. Vac. Sci. Technol. 18 1303 Tu Y K, Lin C C, Wang W S, Huang S L 1987 Proceedings of the SPIE 836 40 Xu C, Yao J K, Ma J Y, Jin Y X, Shao J D 2007 Chin. Opt. Lett. 5 727 Xu C, Li D W, Ma J Y, Jin Y X, Shao J D, Ma J Y, Jin Y X, Shao J D, Fan Z X 2008 Opt. Laser Technol. 40 545 Tien P K 1971 Appl. Opt. 10 2395 Hensier D H, Cuthbert J D, Martin R J, Tien P K 1971 Appl. Opt. 10 1037 Lo G Q, Kwong D L, Lee S 1992 Appl. Phys. 60 3286 Nishimura Y, Tokunaga K, Tsuji M 1993 Thin Solid Films 226 144 Porporati A, Roitti S, Sbaizero O 2003 J. European Ceramic Society 23 247 Demiryont H, Sites James R, Geib Kent 1985 Appl. Opt. 24 490 Marius G, Wilhelm H, Markus K T 2007 Thin Solid Films 516 136 Cevro M, Carter M 1995 Opt. Eng. 34 596 Pai Y H, Chou C C, Shieu F S 2008 Materials Chemistry and Physics 107 524 Riekkinen T, Molarius J 2003 Microelectron. Eng. 70 392 Huang T W, Lee H Y, Hsieh Y W, Lee C H 2002 J. Cryst. Growth 237 492 Reith T M, Ficalora P J 1983 J. Vac. Sci. Technol. A 1 1362 Paskaleva A, Atanassova E, Dimitrova T 2000 Vacuum 58 470 Gruger H, Kunath Ch, Kurth E, Sorge S, Pufe W, Pechstein T, 2004 Thin Solid Films 447/448 509 Spassov D, Atanassova E, Beshkov G 2000 Microelectronics Journal 31 653 Zhang J Y, Fang Q, Boyd I W 1999 Appl. Surf. Sci. 138 320 Pignolet A, Rao G M, Krupanidhi S B 1995 Thin Solid Films 258 230 Masse J P, Szymanowski H, Zabeida O, Amassian A, Klemberg-Sapieha J E, Martinu L 2006 Thin Solid Films 515 1674 Xu C, Xiao Q L, Ma J Y, Jin Y X, Shao J D, Fan Z X 2008 Appl. Surf. Sci. 254 6554 Zhou J C, Luo D T, Li Y Z, Liu Z 2009 Trans. Nonferrous Met. Soc. China 19 359 Zhang G Y, Xue Y Y, Guo P T, Wang H H, Ma Z J 2008 Piezoel Ectectrics and Acoustooptics 30 12(in Chinese) [张光勇、 薛亦渝、郭培涛、王汉华、马中杰 2008 压电与声光 30 12] Guo P T, Xue Y Y, Zhang G Y, Wang H H 2007 Vacuum 44 32(in Chinese) [郭培涛、薛亦渝、张光勇、王汉华、马中杰 2007 真空44 32] Azim O A, Abdel-Aziz M M, Yahia I S 2009 Appl. Surf. Sci. 255 4829 Lee C C, Chen H C, Jaing C C 2005 Appl. Opt. 44 2996 Rabady R, Avrutsky I 2005 Appl. Opt. 44 378 Lin Y C, Lu W Q 1990 Principle in Optical Films (Beijing: National Defense Industry Press) p101(in Chinese)[林永昌、卢维强 1990 光学薄膜原理(北京:国防工业出版社)第101页] Xu C, Qiang Y H, Zhu Y B, Zhai T T, Guo L T, Zhao Y L, Shao J D, Fan Z X 2010 Vacuum doi:10.1016/j.vacuum.2010.02.009