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中国物理学会期刊

n型透明导电薄膜CdIn2O4电学性质的研究和大面积制备的最佳条件

CSTR: 32037.14.aps.54.1736

Study on electrical properties of n-type transparent and conductiveCdIn22O44 thin film and the optimum preparation parameters for large- area film

CSTR: 32037.14.aps.54.1736
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  • 在Ar+O22气氛中,采用射频反应溅射Cd-In靶制备CdIn22O44 薄膜.制得的薄膜经x射线衍射(XRD)检测为CdIn22O44和CdO相组成的多晶.从理论上分析了热 处理前后氧空位、掺杂点缺陷和富氧电子陷阱在影响膜的载流子浓度和电子散射中所起的重要作用.同时,对样品 进行Hall效应、Seebeck效应测试并得出不同载流子浓度下的迁移率、有效质量、弛豫时间以及它们之间的相互关系,特别强调

     

    Transparent and conductive oxides CdIn22O44 thin films wer e prepared by radio-frequency reactive sputtering from a Cd-In alloy target in Ar+O22 atmosphere. The structure and constitution of the films were obtained by x-ray diffraction. All films prepared contained the polycrystalline CdIn22O44 while a secondar y crystalline phase of CdO was also present. Theoretically, it is proposed that three types of point defects play the most important role in affecting the carri er concentration and the scattering of conduction electrons, namely, oxygen vaca ncies, impure point defects and dissolved surplus oxygen trap centers. By the me asurement and computing for Hall and themopower, we could get carrier concentrat ion, Hall mobility, effective mass and relaxation time. At the same time, this p aper formulated the effect on optical band-gap due to band-gap narrowing and B urstein-Moss (B-M) shift, and a proper substrate temperature, namely Tss≈280℃, was used in sputtering for getting higher transmittance of light. Analy sis indicated that better thin films were prepared at oxygen density of 8%. By p ost-deposition heat treatment, a charge-carrier mobility of 31×10-4-4m2/V·s and resistivity of 189×10-5Ω·m were obtained, and the thin films also retain high visible transmittance.

     

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