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微米量级表面结构形貌特性对二次电子发射抑制的优化

胡晶 曹猛 李永东 林舒 夏宁

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微米量级表面结构形貌特性对二次电子发射抑制的优化

胡晶, 曹猛, 李永东, 林舒, 夏宁

Optimization of surface morphology with micro meter size for suppressing secondary electron emission

Hu Jing, Cao Meng, Li Yong-Dong, Lin Shu, Xia Ning
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  • 抑制二次电子倍增效应是提高空间大功率微波器件和粒子加速器等设备性能的重要课题,而使用表面处理降低材料的二次电子发射系数是抑制二次电子倍增的有效手段.为优化寻找抑制效果最好的表面形貌,本文采用蒙特卡罗方法模拟了各种微米量级不同表面形貌的二次电子发射特性,研究占空比、深宽比、结构形状及排列方式等的影响.模拟结果表明,正方形、圆形、三角形凸起和凹陷结构的二次电子发射系数随占空比和深宽比的增大而减小,但存在饱和值;凸起结构的排列方式对二次电子发射系数的影响不大,但是凸起结构形状却对二次电子发射系数的影响较大,其中三角形的抑制效果最佳.对凹陷结构而言,不同形状的抑制效果差别不大;同时,占空比和深宽比相同时,凸起结构较凹陷结构抑制效果更佳.究其原因,核心在于垂直侧壁的遮挡效应,凹陷结构遮挡效应的大小与陷阱垂直高度有关,而凸起结构遮挡效应的大小和凸起部分的斜方向投影大小有关.
    Suppression of the secondary electron (SE) multipactor is a key issue for improving the performance of high power microwave devices and particle accelerators. The decrease of the SE emission yield (SEY) by using certain surface morphology is one of the effective methods. To optimize the surface morphology, we simulate the SE emissions of different surface structures by using the Monte Carlo method. The effects of geometric parameters, such as duty ratio of area, depth-to-height ratio, pattern and its arrangement on SEY are investigated. For surface morphology with patterns of square, round and triangle, and for both convex and concave structures, the corresponding values of SEY first decrease and then become steady with the increase of duty ratio of area and depth-to-height ratio. For convex structures, the values of SEY are different for different pattern shapes, in which triangle pattern has the smallest SEY. However, the value of SEY is nearly independent of arrangement of pattern. For concave structures, on the other hand, the value of SEY is scarcely different for different patterns or different arrangements. In general, a convex structure has a better suppression effect than a concave structure if other geometric parameters are identical. The shading effect from side wall of structure is found to be the intrinsic reason of the suppression effect.
      通信作者: 曹猛, mengcao@mail.xjtu.edu.cn
    • 基金项目: 国家自然科学基金(批准号:U1537210,11375139)资助的课题.
      Corresponding author: Cao Meng, mengcao@mail.xjtu.edu.cn
    • Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. U1537210, 11375139).
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    Charbonnier F 1988 J. Vac. Sci. Technol. B 16 880

    [2]

    Song B P, Fan Z Z, Su G Q, Mu H B, Zhang G J, Liu C L 2014 High Power Laser and Particle Beams 26 065008(in Chinese)[宋佰鹏, 范壮壮, 苏国强, 穆海宝, 张冠军, 刘纯亮 2014 强激光与粒子束 26 065008]

    [3]

    Kirby R E, King F K 2001 Nucl. Instrum. Methods Phys. Res. 469 1

    [4]

    Pivi M T F, Collet G, King F, Kirby R E, Markiewicz T, Raubenheimer T O, Seeman J, Pimpec F L 2010 Nucl. Instrum. Methods Phys. Res. A 621 47

    [5]

    Federmann S, Caspers F, Mahner E 2011 Phys. Rev. Spec. Top.-Accel. Beams 14 012802

    [6]

    Lin S, Yan Y J, Li Y D, Liu C L 2014 Acta Phys. Sin. 63 147902 (in Chinese)[林舒, 闫杨娇, 李永东, 刘纯亮 2014 物理学报 63 147902]

    [7]

    Valizadeh R, Malyshev O B, Wang S, Zolotovskaya S, Gillespie W A, Abdolvandand A 2014 Appl. Phys. Lett. 105 231605

    [8]

    Li Y, Cui W Z, Zhang N, Wang X B, Wang H G, Li Y D, Zhang J F 2014 Chin. Phys. B 23 048402

    [9]

    Li Y, Cui W Z, Wang H G 2015 Phys. Plasmas 22 053108

    [10]

    Pivi M, King F K, Kirby R E, Raubenheimer T O, Stupakov G, Pimpec F L 2008 J. Appl. Phys. 104 104904

    [11]

    Suetsugu Y, Fukuma H, Pivi M, Wang L 2009 Nucl. Instrum. Methods Phys. Res. Sect. A:Accel. Spectrom. Dect. Assoc. Equip. 604 449

    [12]

    Zhang N, Cao M, Cui W Z, Hu T C, Wang R, Li Y 2015 Acta Phys. Sin. 64 207901 (in Chinese)[张娜, 曹猛, 崔万照, 胡天存, 王瑞, 李韵 2015 物理学报 64 207901]

    [13]

    Nistor V, Gonzlez L A, Aguilera L, Montero I, Galn L, Wochner U, Raboso D 2014 Appl. Surf. Sci. 315 445

    [14]

    Aguilera L, Montero I, Dvila M E, Ruiz A, Galn L, Nistor V, Raboso D, Palomares J, Soria F 2013 J. Phys. D:Appl. Phys. 46 165104

    [15]

    Ye M, He Y N, Wang R, Hu T C, Zhang N, Yang J, Cui W Z, Zhang Z B 2014 Acta Phys. Sin. 63 147901 (in Chinese)[叶鸣, 贺永宁, 王瑞, 胡天存, 张娜, 杨晶, 崔万照, 张忠兵 2014 物理学报 63 147901]

    [16]

    Wang Z W, Ye M, Chen L, He Y N, Cui W Z, Zhang Z B 2016 High Power Laser and Particle Beams 28 124002 (in Chinese)[王泽卫, 叶鸣, 陈亮, 贺永宁, 崔万照, 张忠兵 2016 强激光与粒子束 28 124002]

    [17]

    He Y N, Peng W B, Cui W Z, Ye M, Zhao X L, Wang D, Hu T C, Wang R, Li Y 2016 AIP Adv. 6 025122

    [18]

    Cui W Z, Li Y, Yang J, Hu T C, Wang X B, Wang R, Zhang N, Zhang H T, He Y N 2016 Chin. Phys. B 25 068401

    [19]

    Cao M, Zhang N, Hu T C, Wang F, Cui W Z 2015 J. Phys. D:Appl. Phys. 48 55501

    [20]

    Penn D R 1987 Phys. Rev. B:Condens. Matter 35 482

    [21]

    Ye M, He Y N, Hu S G, Wang R, Hu T C, Yang J, Cui W Z 2013 J. Appl. Phys. 113 074904

  • [1]

    Charbonnier F 1988 J. Vac. Sci. Technol. B 16 880

    [2]

    Song B P, Fan Z Z, Su G Q, Mu H B, Zhang G J, Liu C L 2014 High Power Laser and Particle Beams 26 065008(in Chinese)[宋佰鹏, 范壮壮, 苏国强, 穆海宝, 张冠军, 刘纯亮 2014 强激光与粒子束 26 065008]

    [3]

    Kirby R E, King F K 2001 Nucl. Instrum. Methods Phys. Res. 469 1

    [4]

    Pivi M T F, Collet G, King F, Kirby R E, Markiewicz T, Raubenheimer T O, Seeman J, Pimpec F L 2010 Nucl. Instrum. Methods Phys. Res. A 621 47

    [5]

    Federmann S, Caspers F, Mahner E 2011 Phys. Rev. Spec. Top.-Accel. Beams 14 012802

    [6]

    Lin S, Yan Y J, Li Y D, Liu C L 2014 Acta Phys. Sin. 63 147902 (in Chinese)[林舒, 闫杨娇, 李永东, 刘纯亮 2014 物理学报 63 147902]

    [7]

    Valizadeh R, Malyshev O B, Wang S, Zolotovskaya S, Gillespie W A, Abdolvandand A 2014 Appl. Phys. Lett. 105 231605

    [8]

    Li Y, Cui W Z, Zhang N, Wang X B, Wang H G, Li Y D, Zhang J F 2014 Chin. Phys. B 23 048402

    [9]

    Li Y, Cui W Z, Wang H G 2015 Phys. Plasmas 22 053108

    [10]

    Pivi M, King F K, Kirby R E, Raubenheimer T O, Stupakov G, Pimpec F L 2008 J. Appl. Phys. 104 104904

    [11]

    Suetsugu Y, Fukuma H, Pivi M, Wang L 2009 Nucl. Instrum. Methods Phys. Res. Sect. A:Accel. Spectrom. Dect. Assoc. Equip. 604 449

    [12]

    Zhang N, Cao M, Cui W Z, Hu T C, Wang R, Li Y 2015 Acta Phys. Sin. 64 207901 (in Chinese)[张娜, 曹猛, 崔万照, 胡天存, 王瑞, 李韵 2015 物理学报 64 207901]

    [13]

    Nistor V, Gonzlez L A, Aguilera L, Montero I, Galn L, Wochner U, Raboso D 2014 Appl. Surf. Sci. 315 445

    [14]

    Aguilera L, Montero I, Dvila M E, Ruiz A, Galn L, Nistor V, Raboso D, Palomares J, Soria F 2013 J. Phys. D:Appl. Phys. 46 165104

    [15]

    Ye M, He Y N, Wang R, Hu T C, Zhang N, Yang J, Cui W Z, Zhang Z B 2014 Acta Phys. Sin. 63 147901 (in Chinese)[叶鸣, 贺永宁, 王瑞, 胡天存, 张娜, 杨晶, 崔万照, 张忠兵 2014 物理学报 63 147901]

    [16]

    Wang Z W, Ye M, Chen L, He Y N, Cui W Z, Zhang Z B 2016 High Power Laser and Particle Beams 28 124002 (in Chinese)[王泽卫, 叶鸣, 陈亮, 贺永宁, 崔万照, 张忠兵 2016 强激光与粒子束 28 124002]

    [17]

    He Y N, Peng W B, Cui W Z, Ye M, Zhao X L, Wang D, Hu T C, Wang R, Li Y 2016 AIP Adv. 6 025122

    [18]

    Cui W Z, Li Y, Yang J, Hu T C, Wang X B, Wang R, Zhang N, Zhang H T, He Y N 2016 Chin. Phys. B 25 068401

    [19]

    Cao M, Zhang N, Hu T C, Wang F, Cui W Z 2015 J. Phys. D:Appl. Phys. 48 55501

    [20]

    Penn D R 1987 Phys. Rev. B:Condens. Matter 35 482

    [21]

    Ye M, He Y N, Hu S G, Wang R, Hu T C, Yang J, Cui W Z 2013 J. Appl. Phys. 113 074904

计量
  • 文章访问数:  1725
  • PDF下载量:  41
  • 被引次数: 0
出版历程
  • 收稿日期:  2018-03-17
  • 修回日期:  2018-05-13
  • 刊出日期:  2018-09-05

微米量级表面结构形貌特性对二次电子发射抑制的优化

  • 1. 西安交通大学电子与信息工程学院, 电子物理与器件教育部重点实验室, 西安 710049
  • 通信作者: 曹猛, mengcao@mail.xjtu.edu.cn
    基金项目: 

    国家自然科学基金(批准号:U1537210,11375139)资助的课题.

摘要: 抑制二次电子倍增效应是提高空间大功率微波器件和粒子加速器等设备性能的重要课题,而使用表面处理降低材料的二次电子发射系数是抑制二次电子倍增的有效手段.为优化寻找抑制效果最好的表面形貌,本文采用蒙特卡罗方法模拟了各种微米量级不同表面形貌的二次电子发射特性,研究占空比、深宽比、结构形状及排列方式等的影响.模拟结果表明,正方形、圆形、三角形凸起和凹陷结构的二次电子发射系数随占空比和深宽比的增大而减小,但存在饱和值;凸起结构的排列方式对二次电子发射系数的影响不大,但是凸起结构形状却对二次电子发射系数的影响较大,其中三角形的抑制效果最佳.对凹陷结构而言,不同形状的抑制效果差别不大;同时,占空比和深宽比相同时,凸起结构较凹陷结构抑制效果更佳.究其原因,核心在于垂直侧壁的遮挡效应,凹陷结构遮挡效应的大小与陷阱垂直高度有关,而凸起结构遮挡效应的大小和凸起部分的斜方向投影大小有关.

English Abstract

参考文献 (21)

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