适用400 Gbit/s接收系统的铟磷基低暗电流高带宽倏逝波耦合光电探测器阵列

陆子晴; 韩勤; 叶焓; 王帅; 肖峰; 肖帆

doi:10.7498/aps.70.20210781

摘要

相较于面入射型和边入射型光电探测器, 倏逝波耦合型光电探测器(evanescent coupling photodetector, ECPD)能够同时具备高带宽和高量子效率, 因此在高速光通信领域有着广袤的应用前景. ECPD由稀释波导、单模脊波导和PIN光电二极管组成, 通过倏逝波定向耦合提高光纤入射光到探测器吸收芯层的耦合效率. 本文详细介绍了一种铟磷基ECPD阵列的结构设计、实验制备和测试结果. 测试结果表明, 制备的ECPD暗电流较低, 在–3和0 V外加偏压下探测器暗电流低至215和1.23 pA. 在有源区面积为5 μm × 20 μm的情况下, 器件仍能有较高响应度, 为0.5 A/W (无增透膜). 对探测器进行高频性能测试, 探测器阵列的所有探测器带宽均超过25 GHz, 总带宽400 GHz, 可以集成任意光学器件.

关键词:

Abstract

Compared with surface and edge incident photodetectors, evanescent coupling photodetector (ECPD) has high bandwidth and high quantum efficiency, so it has a broad application prospect in the field of high-speed optical communication. The evanescent wave coupled photodetector is composed of a diluted waveguide, a single-mode ridge waveguide and a PIN photodiode. By directional evanescent wave coupling, the coupling efficiency of the incident light from the fiber to the absorption core of the photodetector is improved. In this paper, the structure design, experimental preparation and test results of an indium phosphorus based evanescent wave coupled photodetector array are introduced in detail. The test results show that the dark current of the evanescent wave coupled photodetector array is as low as 215 pA and 1.23 pA under –3 and 0 V bias, respectively. When the active area is 5 μm × 20 μm, the device still has a high responsivity of 0.5 A/W (without antireflection film). The high frequency performance of the detector is tested. The bandwidth of each detector is more than 25 GHz, and the total bandwidth is more than 400 GHz. Any optical device can be integrated. The detector array can be applied to the WDM receiving system of 400 Gbit/s and coherent receiving system of 200 Gbit/s.

Keywords:

作者及机构信息

1.
中国科学院半导体研究所, 集成光电子学国家重点实验室, 北京　100083

2.
中国科学院大学材料科学与光电技术学院, 北京　100049

3.
中国科学院大学电子电器与通信工程学院, 北京　100049

通信作者: 韩勤, hanqin@semi.ac.cn

基金项目: 国家重点研发计划(批准号: 2020YFB1805701)、国家自然科学基金(批准号: 61934003, 61635010, 61674136)和北京市自然科学基金(批准号: 4194093)资助的课题

Authors and contacts

1.
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

2.
College of Materials Science and Opto-electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

3.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

Corresponding author: Han Qin, hanqin@semi.ac.cn

Funds: Project supported by the National Key R&D Program of China (Grant No. 2020YFB1805701), the National Natural Science Foundation of China (Grant Nos. 61934003, 61635010, 61674136), and the Natural Science Foundation of Beijing, China (Grant No. 4194093)

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参考文献

[1]	Poon W A, Luo X, Xu F, Chen H 2009 IEEE J. Proc. 97 1216 Google Scholar
[2]	Lira H L R, Manipatruni S, Lipson M 2009 IEEE J. Opt. Express 17 22271 Google Scholar
[3]	Xu Q, Schmidt B, Shakya J, Lipson M 2006 Opt. Express 14 9431 Google Scholar
[4]	Bosco G, Curri V, Carena A, Poggiolini P, Forghieri F 2011 J. Lightwave Technol. 29 53 Google Scholar
[5]	喻松, 张华, 申静, 张永军, 顾畹仪 2008 物理学报 57 909 Google Scholar Yu S, Zhang H, Shen J, Zhang Y J, Gu W Y 2008 Acta Phys. Sin. 57 909 Google Scholar
[6]	万峰, 武保剑, 曹亚敏, 王瑜浩, 文峰, 邱昆 2019 物理学报 68 114207 Google Scholar Wang F, Wu B J, Cao Y M, Wang Y H, Wen F, Qiu K 2019 Acta Phys. Sin. 68 114207 Google Scholar
[7]	Heck M J R, Bauters J F, Davenport, M L, Doylend J K 2013 IEEE J. Sel. Top. Quantum Electron. 19 6100117 Google Scholar
[8]	Huang B, Xu Z, Wei W, Zan D, Ning G, Zhang Z, Chen H 2011 Opt. Commun. 284 3924 Google Scholar
[9]	Kwack M J, Tanemura T, Higo A, Nakano Y 2012 Opt. Express 20 28734 Google Scholar
[10]	Zhang X L, Liu S T, Lu D, Zhang R K, Ji C 2015 Chin. Phys. Lett. 32 054202
[11]	Nagarajan R, Joyner C H, Schneider R P 2005 IEEE J. Sel. Top. Quantum Electron. 11 50 Google Scholar
[12]	ShengZ, Liu L, Joost B, He S L, Dries V T 2010 Opt. Express 18 1756 Google Scholar
[13]	Kato K, Hata S, Kozen A, Yoshida J I, Kawano K 1991 J. IEEE Photonics Technol. Lett. 3 473 Google Scholar
[14]	Ohnaka K, Inoue U T, Hasegawa H N, Serizawa H 1985 IEEE J. Quantum Electron. 21 1236 Google Scholar
[15]	Demiguel S, Li N, Li X W, Zheng X G, Kim J, Champbell J C, Lu H F, Anselm A 2003 IEEE Photonics Technol. Lett. 15 1761
[16]	Liu S Q, Yang X H, Liu Y, Li B, Han Q 2013 Chin. Phys. B 22 108503 Google Scholar
[17]	Giraudet L, Banfi F, Demiguel S, Herve-Gruyer G 1999 IEEE Photonics Technol. Lett. 11 111
[18]	Magnin V, Giraudet L, Harari J, Decobert J, Pagnot P, Boucherez E, Decoster D 2002 J. Lightwave Technol. 20 477 Google Scholar
[19]	Yang C D, Lei P H, Pong D J, Wu M Y, Ho C L, Ho W J 2004 IEEE J. Quantum Electron. 40 1607 Google Scholar
[20]	Wang Y S, Chang S J, Chiou Y Z, Lin W 2009 J. Electrochem. Soc. 155 307

施引文献

图 1 数值计算的不同吸收区厚度和面积对探测器带宽的影响

Fig. 1. Influence of different thickness and area of absorption region on detector bandwidth is obtained by numerical calculation.

下载: 全尺寸图片幻灯片

图 2 PIN光电探测器3D结构示意图

Fig. 2. 3D structure of PIN photodetector.

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图 3 (a) 倏逝波耦合波导型探测器光场纵向传输强度分布; (b) 光场传输到脊波导时横向电场截面图; (c) 光场传输到光学匹配层时的横向电场截面; (d) 光场被探测器吸收区吸收时的横向电场截面图

Fig. 3. (a) Longitudinal propagation intensity distribution of evanescent coupled waveguide detector; (b) cross section of transverse electric field when light field propagates to ridge waveguide; (c) cross section of transverse electric field in optical matching layer; (d) cross section of transverse electric field when light field is absorbed by absorption region of detector.

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图 4 –5 V偏压, 1 mW/cm²小信号下器件的高频响应

Fig. 4. High frequency response of the device under –5 V bias and 1 mW/cm² small signal.

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图 5 工艺制备流程图

Fig. 5. Process preparation flow chart.

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图 6 器件的暗电流特性

Fig. 6. Dark current characteristics of devices.

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图 7 器件在5 mW功率下的光响应

Fig. 7. Optical response of the device at 5 mW power.

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图 8 器件在–3 V偏压下的高频响应

Fig. 8. High frequency response of the device under –3 V bias.

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图 9 16个器件的高频变化

Fig. 9. High frequency variation of 16 devices.

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表 1 倏逝波导耦合PIN探测器外延结构

Table 1. Epitaxial structure of evanescent waveguide coupled PIN detector.

Function	Component	$ {\lambda }_{\mathrm{g}} $	Doping	Thickness/nm
P contact	P-In_0.53Ga_0.47As	1.69	Zn: 10¹⁹	80
Grading 1	P-In_0.3Ga_0.64AsP	1.32	Zn: 5×10¹⁸	5
Cladding	P-In_0.18Ga_0.39AsP	1.14	Zn: 10¹⁸	410
Spacer	P-In_0.18Ga_0.39AsP	1.14	Zn: 5×10¹⁷	30
Grading 2	P-In_0.34Ga_0.73AsP	1.396	Zn: 10¹⁷	5
Absoption	In_0.53Ga_0.47As	1.69		460
Ethc stop 1	InP			10
n-contact	N-In_0.3Ga_0.64AsP	1.32	Si: 2×10¹⁸	320
Ethc stop 2	InP			10
Diluted waveguide
Substrate	InP			500000

下载: 导出CSV

[1]	Poon W A, Luo X, Xu F, Chen H 2009 IEEE J. Proc. 97 1216 Google Scholar
[2]	Lira H L R, Manipatruni S, Lipson M 2009 IEEE J. Opt. Express 17 22271 Google Scholar
[3]	Xu Q, Schmidt B, Shakya J, Lipson M 2006 Opt. Express 14 9431 Google Scholar
[4]	Bosco G, Curri V, Carena A, Poggiolini P, Forghieri F 2011 J. Lightwave Technol. 29 53 Google Scholar
[5]	喻松, 张华, 申静, 张永军, 顾畹仪 2008 物理学报 57 909 Google Scholar Yu S, Zhang H, Shen J, Zhang Y J, Gu W Y 2008 Acta Phys. Sin. 57 909 Google Scholar
[6]	万峰, 武保剑, 曹亚敏, 王瑜浩, 文峰, 邱昆 2019 物理学报 68 114207 Google Scholar Wang F, Wu B J, Cao Y M, Wang Y H, Wen F, Qiu K 2019 Acta Phys. Sin. 68 114207 Google Scholar
[7]	Heck M J R, Bauters J F, Davenport, M L, Doylend J K 2013 IEEE J. Sel. Top. Quantum Electron. 19 6100117 Google Scholar
[8]	Huang B, Xu Z, Wei W, Zan D, Ning G, Zhang Z, Chen H 2011 Opt. Commun. 284 3924 Google Scholar
[9]	Kwack M J, Tanemura T, Higo A, Nakano Y 2012 Opt. Express 20 28734 Google Scholar
[10]	Zhang X L, Liu S T, Lu D, Zhang R K, Ji C 2015 Chin. Phys. Lett. 32 054202
[11]	Nagarajan R, Joyner C H, Schneider R P 2005 IEEE J. Sel. Top. Quantum Electron. 11 50 Google Scholar
[12]	ShengZ, Liu L, Joost B, He S L, Dries V T 2010 Opt. Express 18 1756 Google Scholar
[13]	Kato K, Hata S, Kozen A, Yoshida J I, Kawano K 1991 J. IEEE Photonics Technol. Lett. 3 473 Google Scholar
[14]	Ohnaka K, Inoue U T, Hasegawa H N, Serizawa H 1985 IEEE J. Quantum Electron. 21 1236 Google Scholar
[15]	Demiguel S, Li N, Li X W, Zheng X G, Kim J, Champbell J C, Lu H F, Anselm A 2003 IEEE Photonics Technol. Lett. 15 1761
[16]	Liu S Q, Yang X H, Liu Y, Li B, Han Q 2013 Chin. Phys. B 22 108503 Google Scholar
[17]	Giraudet L, Banfi F, Demiguel S, Herve-Gruyer G 1999 IEEE Photonics Technol. Lett. 11 111
[18]	Magnin V, Giraudet L, Harari J, Decobert J, Pagnot P, Boucherez E, Decoster D 2002 J. Lightwave Technol. 20 477 Google Scholar
[19]	Yang C D, Lei P H, Pong D J, Wu M Y, Ho C L, Ho W J 2004 IEEE J. Quantum Electron. 40 1607 Google Scholar
[20]	Wang Y S, Chang S J, Chiou Y Z, Lin W 2009 J. Electrochem. Soc. 155 307

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