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金刚石以其低介电损耗的优势在微波和深空观测窗口领域有重要应用前景。本文通过对不同物性的微波等离子体化学气相沉积设备制备的单晶金刚石开展介电特性测试，结合双折射显微镜、拉曼、PL和XRD等手段对单晶金刚石材料特性的表征结果，系统研究了影响单晶金刚石介电损耗的关键因素。测试得到单晶金刚石的介电损耗tan δ值最低达到4.94×10-5。分析认为，单晶金刚石介电损耗与金刚石内部缺陷分布、金刚石内部分层以及外电场作用下晶格振动引起的声子极化有关。金刚石的缺陷密度是影响单晶金刚石介电损耗的主要因素，随着测试频率提高，缺陷极化损耗和界面极化损耗会进一步提高单晶金刚石的介电损耗。金刚石内部的周期性缺陷可以一定程度上抑制声子极化损耗从而减小单晶金刚石介电损耗。本研究能够为进一步提高金刚石的介电特性提供参考。Diamond holds significant application potential in microwave and deep-space observation windows due to its exceptionally low dielectric loss. This study aims to systematically investigate the key factors influencing the dielectric loss tangent (tanδ) of single-crystal diamond (SCD) and to establish correlations between its dielectric properties and material characteristics. To this end, dielectric property measurements were performed on SCD samples synthesized using microwave plasma chemical vapor deposition (MPCVD) systems under different growth conditions. A comprehensive material characterization was carried out using birefringence microscopy, Raman spectroscopy, photoluminescence (PL), and X-ray diffraction (XRD) to analyze crystal quality, defect distribution, and strain. The experimental results show that the measured tanδ of the SCD samples reached a minimum value of 4.94 × 10-5. Detailed analysis reveals that the dielectric loss in SCD is attributed to a combination of factors: the density and distribution of internal defects (e.g., vacancies and impurities), the presence of internal growth sectors and boundaries, and phonon polarization losses induced by lattice vibrations under an external electric field. It is conclusively identified that defect density is the predominant factor governing dielectric loss. Furthermore, the study demonstrates that as the test frequency increases, contributions from defect polarization and interfacial polarization at sector boundaries become more pronounced, leading to higher overall loss. Interestingly, it was found that certain periodic defect structures can partially suppress the phonon-polarization related loss mechanism, thereby contributing to a lower tanδ in some samples. In conclusion, this work elucidates the multi-faceted origins of dielectric loss in SCD and provides valuable insights and a methodological framework for guiding the synthesis and processing of diamond crystals with further enhanced dielectric properties for advanced microwave and terahertz applications.
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Keywords:
- diamond /
- dielectric properties /
- Raman spectroscopy /
- X-ray diffraction
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