CoFeB/AlOx/Ta及AlOx/CoFeB/Ta结构中垂直易磁化效应的研究

陈希; 刘厚方; 韩秀峰; 姬扬

doi:10.7498/aps.62.137501

摘要

本文详细研究了在不同氧化层和铁磁层厚度情况下, 底层CoFeB/AlOx/Ta结构和顶层AlOx/CoFeB/Ta结构中的垂直磁各向异性. 在底层CoFeB/AlOx/Ta结构中观察到了垂直磁化的磁滞回线, 证明了其垂直易磁化效应的存在; 而在顶层AlOx/CoFeB/Ta结构中却没有观察到类似的磁滞回线. 对这种对称结构中的非对称现象进行了分析. 研究还发现不同的氧化层和铁磁层厚度均会影响层间界面相互作用的强度, 从而导致结构的垂直磁化曲线矫顽力大小发生改变. 这项研究将对基于AlOx氧化层垂直磁隧道结的研制具有重要的意义.

关键词:

Abstract

The perpendicular magnetic anisotropy (PMA) of the CoFeB/AlOx/Ta structure and the AlOx/CoFeB/Ta structure with different thicknesses of both CoFeB and AlOx is studied. Magnetization curves show that the CoFeB/AlOx/Ta structure has a clear perpendicular magnetic easy axis while the AlOx/CoFeB/Ta structure does not. The cause of the asymmetrical phenomenon in the symmetric structures is analyzed. Dependence of the perpendicular coercivities on the thicknesses of CoFeB and AlOx shows that both of them can affect the strength of the PMA originating from the interfacial interaction. This work will be meaningful for the fabrication of the AlOx-based perpendicular magnetic tunnel junctions.

Keywords:

作者及机构信息

1.
中国科学院半导体研究所, 超晶格与微结构国家重点实验室, 北京 100083;

2.
中国科学院物理研究所, 北京凝聚态物理国家实验室, 北京 100190

基金项目: 国家自然科学基金(批准号: 91021022);国家重点基础研究发展计划(973计划)(批准号: 2009CB929301, 2010CB934400)和国家自然科学基金重点项目(批准号: 10934009)资助的课题.

Authors and contacts

1.
The State Key Laboratory~of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;

2.
Beijing National Laboratory of Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 91021022), the National Basic Research Program of China(Grant Nos. 2009CB929301, 2010CB934400), and the Key Program of the National Natural Science Foundation of China (Grant No. 10934009).

参考文献

[1]	Mangin S, Ravelosona D, Katine J A, Carey M J, Terris B D, Eric E F 2006 Nature Mater. 5 210
[2]	Meng H, Wang J P 2006 Appl. Phys. Lett. 88 172506
[3]	Kou S P, Lu R, Liang J Q 2003 Chin. Phys. Lett. 19 1525
[4]	Kim G, Sakuraba Y, Oogane M, Ando Y, Miyazaki T 2008 Appl. Phys. Lett. 92 172502
[5]	Ding Y, Judy J H, Wang J P 2005 J. Appl. Phys. 97 10J117
[6]	Nishimura N, Hirai T, Koganei A, Ikeda T, Okano K, Sekiguchi Y, Osada Y 2002 J. Appl. Phys. 91 5246
[7]	Mizunuma K, Ikeda S, Park J H, Yamamoto H, Gan H D, Miura K, Hasegawa H, Hayakawa J, Matsukura F, Ohno H 2009 Appl. Phys. Lett. 95 232516
[8]	Ikeda S, Miura K, Yamamoto H, Mizunuma K, Gan H D, Endo M, Kanai S, Hayakawa J, Matsukura F, Ohno H 2010 Nature Mater. 9 721
[9]	Wang W X, Yang Y, Naganuma H, Ando Y, Yu R C, Han X F 2011 Appl. Phys. Lett. 99 012502
[10]	Worledge D C, Hu G, Abraham D W, Sun J Z, Trouilloud P L, Nowak J, Brown S, Gaidis M C, O'Sullivan E J, Robertazzi R P 2011 Appl. Phys. Lett. 98 022501
[11]	Cheng C W, Feng W, Chern G, Lee C M, Wu T 2011 J. Appl. Phys. 110 033916
[12]	Chen Y T, Wu J W 2011 J. Alloy. Compd. 509 9246
[13]	Yamanouchi M, Koizumi R, Ikeda S, Sato H, Mizunuma K, Miura K, Gan H D, Matsukura F, Ohno H 2011 J. Appl. Phys. 109 07C712
[14]	Spoddig D, Köhler U, Haak M, Kneppe M, Schmitte T, Westphalen A, Theis-Bröhl K, Meckenstock R, You D, Pelzl J 2008 Superlattices Microstruct. 43 180
[15]	Hirose Y, Hitosugi T, Kasai J, Furubayashi Y, Nakajima K, Chikyow T, Konuma S, Shimada T, Hasegawa T 2010 Appl. Phys. Lett. 96 042503
[16]	Liu N, Wang H, Zhu T 2012 Acta Phys. Sin. 61 167594 (in Chinese) [刘娜, 王海, 朱涛 2012 物理学报 61 167594]
[17]	Ma Q L 2011 Ph. D. Dissertation (Beijing: Graduate University of Chinese Academy of Sciences) (in Chinese) [马勤礼 2011 博士学位论文(北京: 中国科学院研究生院)
[18]	Endo M, Kanai S, Ikeda S, Matsukura F, Ohno H 2010 Appl. Phys. Lett. 96 212503

施引文献

[1]	Mangin S, Ravelosona D, Katine J A, Carey M J, Terris B D, Eric E F 2006 Nature Mater. 5 210
[2]	Meng H, Wang J P 2006 Appl. Phys. Lett. 88 172506
[3]	Kou S P, Lu R, Liang J Q 2003 Chin. Phys. Lett. 19 1525
[4]	Kim G, Sakuraba Y, Oogane M, Ando Y, Miyazaki T 2008 Appl. Phys. Lett. 92 172502
[5]	Ding Y, Judy J H, Wang J P 2005 J. Appl. Phys. 97 10J117
[6]	Nishimura N, Hirai T, Koganei A, Ikeda T, Okano K, Sekiguchi Y, Osada Y 2002 J. Appl. Phys. 91 5246
[7]	Mizunuma K, Ikeda S, Park J H, Yamamoto H, Gan H D, Miura K, Hasegawa H, Hayakawa J, Matsukura F, Ohno H 2009 Appl. Phys. Lett. 95 232516
[8]	Ikeda S, Miura K, Yamamoto H, Mizunuma K, Gan H D, Endo M, Kanai S, Hayakawa J, Matsukura F, Ohno H 2010 Nature Mater. 9 721
[9]	Wang W X, Yang Y, Naganuma H, Ando Y, Yu R C, Han X F 2011 Appl. Phys. Lett. 99 012502
[10]	Worledge D C, Hu G, Abraham D W, Sun J Z, Trouilloud P L, Nowak J, Brown S, Gaidis M C, O'Sullivan E J, Robertazzi R P 2011 Appl. Phys. Lett. 98 022501
[11]	Cheng C W, Feng W, Chern G, Lee C M, Wu T 2011 J. Appl. Phys. 110 033916
[12]	Chen Y T, Wu J W 2011 J. Alloy. Compd. 509 9246
[13]	Yamanouchi M, Koizumi R, Ikeda S, Sato H, Mizunuma K, Miura K, Gan H D, Matsukura F, Ohno H 2011 J. Appl. Phys. 109 07C712
[14]	Spoddig D, Köhler U, Haak M, Kneppe M, Schmitte T, Westphalen A, Theis-Bröhl K, Meckenstock R, You D, Pelzl J 2008 Superlattices Microstruct. 43 180
[15]	Hirose Y, Hitosugi T, Kasai J, Furubayashi Y, Nakajima K, Chikyow T, Konuma S, Shimada T, Hasegawa T 2010 Appl. Phys. Lett. 96 042503
[16]	Liu N, Wang H, Zhu T 2012 Acta Phys. Sin. 61 167594 (in Chinese) [刘娜, 王海, 朱涛 2012 物理学报 61 167594]
[17]	Ma Q L 2011 Ph. D. Dissertation (Beijing: Graduate University of Chinese Academy of Sciences) (in Chinese) [马勤礼 2011 博士学位论文(北京: 中国科学院研究生院)
[18]	Endo M, Kanai S, Ikeda S, Matsukura F, Ohno H 2010 Appl. Phys. Lett. 96 212503

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