基于压电驻极体的微能量采集

张咪; 左西; 杨同青; 张晓青

doi:10.7498/aps.69.20200815

摘要

综述了以压电驻极体换能器为核心部件的微能量采集研究, 包括压电驻极体的基本物理原理和性能特点, 以及该材料在微能量采集领域的应用研究. 压电驻极体是具有微孔结构的驻极体材料, 其压电效应是基体聚合物的驻极体性能和材料微孔机械结构协同作用的结果, 是一类新型人工微结构柔性机电耦合材料. 压电驻极体以强压电效应、柔韧、低密度、低声阻抗、薄膜型等为特征, 是制备轻量化柔性传感器和机械能量采集器的理想换能材料. 压电驻极体已被应用于振动能量采集器、人体运动能量采集器、以及声能采集器的研究中. 根据压电驻极体膜受力方向的不同, 可以将能量采集器的工作模式分为33模式和31模式两种. 本文对基于压电驻极体的三类能量采集器的研究状况进行综述, 并讨论未来的发展方向.

关键词:

Abstract

In this paper, the progress of micro-energy harvesters by using piezoelectret-based transducers as a core element is reviewed, including basic physical principle and properties of piezoelectrets, and their applications in micro-energy harvesting. Piezoelectret is electret-based piezoelectric polymer with a foamed structure. The piezoelectric effect of such material is a synergistic effect of the electret property of the matrix polymer and the foam mechanical structure in the material. Piezoelectret, featuring strong piezoelectric effect, flexibility, low density, very small acoustic impedance and film form, is an ideal electromechanical material for lightweight flexible sensors and mechanical energy harvesters. The piezoelectret prepared by means of grid, template patterning, supercritical CO₂ assisted low-temperature assembly, lithography mold combined with rotary coating and hot pressing has regular voids and good piezoelectric properties. Piezoelectret has been used to harvest vibrational energy, human motion energy and sound energy. According to the stress direction applied to the piezoelectrets, operating modes of energy harvesters can be divided into 33 and 31 modes. The vibrational energy harvesters based on piezoelectret are utilized to harvest medium frequency vibrational energy generated by factory machines, aircrafts, automobiles, etc. Such energy harvesters can generate considerable power even in a small size. Human motion energy harvesters are generally used to power wearable sensors. The high sensitivity, lightweight, and flexibility of the piezoelectret make such a material a promising candidate for harvesting human motion energy. Owing to very small acoustic impedance, high figure-of-merit, flat response in audio and low-frequency ultrasonic range, the piezoelectrets are more appropriate for acoustic energy harvesting in air medium than conventional PZT and ferroelectric polymer PVDF.In the future, specific micro-energy harvesters using piezoelectrets as transduction material can be designed and fabricated according to the practical application environment, and their performance can be enhanced by using flexible connections of transduction elements.

Keywords:

作者及机构信息

1.
同济大学物理科学与工程学院, 上海市特殊人工微结构材料及技术重点实验室, 上海　200092

2.
同济大学材料科学与工程学院, 上海　201804

通信作者: 杨同青, yangtongqing@tongji.edu.cn ; 张晓青, x.zhang@tongji.edu.cn

基金项目: 国家自然科学基金(批准号: 61761136004)资助的课题

Authors and contacts

1.
Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

2.
School of Materials Science and Engineering, Tongji University, Shanghai 201804, China

Corresponding author: Yang Tong-Qing, yangtongqing@tongji.edu.cn ; Zhang Xiao-Qing, x.zhang@tongji.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 61761136004)

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施引文献

Fig. 1. (a) Schematic of the molecular chain of β-phase PVDF; (b) charge-spring model for the occurrence of piezoelectricity in polymers; (c) piezoelectret PP (ellipsoidal areas are gas bubble and the dark area is the polymer matrix). Reproduced with permission. Copyright 2004, IEEE^[28].

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图 2 压电驻极体的层状理论模型^[42]

Fig. 2. Layer model of piezoelectrets^[42].

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Fig. 3. Dependence of the piezoelectric activity (thick line) and elastic coefficient (thin line) on the sample density, and the cross section diagram of the corresponding cellular structures. Reproduced with permission. Copyright 2006, John Wiley and Sons^[43].

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Fig. 4. Schematic diagram of preparation of cellular piezoelectrets based on melt stretching (top) and foaming agent foams (bottom) processes. Reproduced with permission. Copyright 2010, SPIE^[44].

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图 5 多孔氟聚合物压电驻极体示意图　(a) 均匀多孔FEP层合膜示意图(经允许转载, 版权所有2005, IEEE)^[46]; (b) 用平行矩形开口的PTFE模板制备具有管状通道的双层FEP薄膜的工艺示意图和孔洞的SEM图(经AIP出版社许可转载)^[47]; (c) 金属栅网压印制备PTFE-FEP-PTFE层合膜示意图(经允许转载, 版权所有2006, Springer Nature)^[48]; (d) 模板压印制备平行隧道结构FEP层合膜示意图(图片经允许转载, 版权所有2018, Elsevier Publishing)^[17]

Fig. 5. Schematic of piezoelectrets of cellular fluoropolymer: (a) Schematic of uniform cellular FEP laminated film. Reproduced with permission. Copyright 2005, IEEE^[46]; (b) a schematic illustration of the fabrication process with a PTFE template with parallel rectangular openings to prepare a two-layer FEP film with tubular channels and the SEM image of the air voids. Reproduced with the permission of AIP Publishing^[47]; (c) schematic of PTFE-FEP-PTFE laminated film prepared by metal mesh patterning. Reproduced with permission. Copyright 2006, Springer Nature^[48]; (d) schematic of template patterning fabrication process of FEP laminated film with parallel-tunnel structure. Images reproduced with permission. Copyright 2018, Elsevier Publishing^[17].

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Fig. 6. Schematic preparation process of other typical cellular piezoelectrets: (a) Schematic of COC laminated film prepared by supercritical CO₂-assisted low temperature assembly method. Reproduced with permission. Copyright 2013, John Wiley and Sons^[53]; (b) schematic of preparing arched bubble PET/EVA/PET composite film. Images reproduced with permission. Copyright 2017 Elsevier Publishing^[56].

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图 7 极化方式　(a) 电晕极化; (b) 接触法极化

Fig. 7. Polarization methods: (a) Corona polarization; (b) contact polarization.

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图 8 (a) 沿压电驻极体膜平面双轴加载示意图; (b) 垂直于压电驻极体膜平面加载示意图^[30]

Fig. 8. (a) Schematic of biaxial loading along the plane of piezoelectret film; (b) schematic of loading perpendicular to the piezoelectret film^[30].

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Fig. 10. (a) Schematic of energy harvesting setup; (b) FENG; (c) measured normalized power generated by a FENG; (d) setup of energy harvester to power LED. Images reproduced with permission. Copyright 2018, Elsevier Publishing^[17].

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图 11 (a) FEP单极性压电驻极体结构的截面示意图(上层膜带负电, 下层膜不带电); (b)归一化输出功率与频率的关系; (c) 用FEP单极性铁电驻极体能量采集装置点亮LED灯^[11]

Fig. 11. (a) Schematic cross sectional view of the structure of the FEP unipolar ferroelectret (The upper layer is negatively charged and the lower layer is not charged); (b) normalized output power vs. frequency; (c) setup of energy harvester to power LED^[11].

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图 12 可穿戴传感器　(a) PP可穿戴声纹识别传感器(图片经允许转载, 版权所有2017, American Chemical Society)^[71]; (b) 多孔PP/PZT复合框架的三维细胞传感器阵列(图片经允许转载, 版权所有2018, American Chemical Society)^[72]; (c) PFA压电柔性压力传感器(图片经允许转载, 版权所有2018, Royal Society of Chemistry)^[73]

Fig. 12. Wearable sensors: (a) Voiceprint recognition system based on PP films. Images reproduced with permission. Copyright 2017, American Chemical Society^[71]; (b) three-dimensional cellular sensor array (3D-CSA) array for wearable biomedical monitoring based on cellular PP/PZT composite films; Images reproduced with permission. Copyright 2018, American Chemical Society^[72]; (c) flexible piezoelectret-based pressure sensors based on PFA films. Images reproduced with permission. Copyright 2018, Royal Society of Chemistry^[73].

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Fig. 13. Self-powered wireless remote system: (a) Schematic diagram and photograph of raised bubble shape FEP laminated films; (b) the fan can be controlled by self-powered wireless remote system. Images reproduced with permission. Copyright 2017, Royal Society of Chemistry^[74].

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Fig. 14. Underfloor energy harvesting system based on piezoelectrets: (a) FEP/p-PTFE/FEP multilayer films; (b) schematic view and photograph of the system. Images reproduced with permission. Copyright 2019, Japanese Journal of Applied Physics^[75].

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图 15 IXPP声能采集器　(a) IXPP压电驻极体薄膜的制备过程、工作原理、以及实物图; (b) 声能采集系统示意图; (c) 结合亥姆霍兹共振腔制得的声能采集器件的示意图和实物图; (d) PP压电驻极体膜和IXPP压电驻极体膜制备得到的声能采集器件的灵敏度-频率曲线图; (e) 五个表面都附着IXPP样品的声能采集器件的输出功率-频率曲线图^[76,77]. 图片经允许转载, 图(a), (b), (c), (e)版权所有2019, IOP Publishing Ltd., 图(d)版权所有2018, IEEE

Fig. 15. IXPP acoustic energy harvesters: (a) Schematic views of the preparation process, the working principle and the photographs of IXPP piezoelectret films; (b) experimental configuration of measurements for output power of IXPP acoustic energy harvesters; (c) cross-sectional view and optical image of IXPP energy harvesters made of a Helmholtz resonator with one IXPP piezoelectret film; (d) free-field sensitivities of PP and IXPP microphones in audio range; (e) schematic view (inset) and generated output power of an acoustic energy harvester consisting of a Helmholtz resonator with five IXPP films^[76,77]. Images reproduced with permission. Panels (a), (b), (c), (e) Copyright 2019, IOP Publishing Ltd., Panel (d) Copyright 2018, IEEE.

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表 1 一些材料的压电系数^[17]

Table 1. Piezoelectric coefficients of some materials^[17].

材料		$ {d}_{33} $/pC·N^–1	$ {g}_{33} $/V·m·N^–1	$ {d}_{33} \cdot {g}_{33} $/TPa^–1	$ {d}_{31} $/pC·N^–1	$ {g}_{31} $/V·m·N^–1	$ {d}_{31} \cdot {g}_{31} $/TPa^–1	Ref.
PZT-5H		640	0.021	13.44	–283	–0.0093	2.6	[33]
PVDF		–33	0.33	–10.89	23	0.216	5.0	[34]
压电驻极体	PP	140	13*	1820	～2	～0.2	～0.4	[35]
	IXPP	620	18.06	11200	—	—	—	[36]
	圆形孔洞FEP层压膜	350	30*	10500	—	—	—	[37]
	交叉隧道FEP层压膜	300	28*	8400	—	—	—	[38]
	平行隧道FEP层压膜	—	—	—	32*	3	96	[17]
	PDMS	350	28.8	10083	—	—	—	[39]
*由${g}_{33}=\dfrac{ {d}_{33} }{ {\varepsilon }_{0}{\varepsilon }_{\rm{r} } }$计算得到, $ {\varepsilon }_{\rm{r}} $为1.2.

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[1]	Statista Research Department https://www.statista.com/statistics/471264/iot-number-of-connected-devices-worldwide/ [2020-4-25]
[2]	Fan K Q, Zhang Y W, E S J, Tang L H, Qu H H 2019 Appl. Phys. Lett. 115 203903 Google Scholar
[3]	Zhu J X, Liu X M, Shi Q F, et al. 2020 Micromachines-Basel 11 7 Google Scholar
[4]	Yang Y Y W, Wang S, Stein P, Xu B X, Yang T Q 2017 Smart Mater. Struct. 26 045011 Google Scholar
[5]	Kim H, Tadesse Y, Priya S 2009 Energy Harvesting Technologies 3 39 Google Scholar
[6]	Panda P K, Sahoo B 2015 Ferroelectr. 474 128 Google Scholar
[7]	Bauer S, Gerhard-Multhaupt R, Sessler G M 2004 Phys. Today 57 37 Google Scholar
[8]	Bauer S 2006 IEEE Trans. Dielectr. Electr. Insul. 13 953 Google Scholar
[9]	Qiu X L 2010 J. Appl. Phys. 108 011101 Google Scholar
[10]	Mohebbi A, Mighri F, Ajji A, Rodrigue D 2018 Adv. Polym. Tech. 37 468 Google Scholar
[11]	Ma X C, Zhang X Q, Sessler G M, Chen L, Yang X Y, Dai Y, He P F 2019 AIP Adv. 9 125334 Google Scholar
[12]	张欣梧, 张晓青 2013 物理学报 62 167702 Google Scholar Zhang X W, Zhang X Q 2013 Acta Phys. Sin. 62 167702 Google Scholar
[13]	Gerhard-Multhaupt R 2002 IEEE Trans. Dielectr. Electr. Insul. 9 850 Google Scholar
[14]	Zhang X Q, Huang J F, Chen J B, Wan Z M, Wang S, Xia Z F 2007 Appl. Phys. Lett. 91 182901 Google Scholar
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