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A STUDY ON ELECTRICAL RESISTIVITY OF RF SPUTTERING Pd FILMS

SHI YI-SHENG ZHAO TE-XIU LIU HONG-TU WANG XIAO-PING

Citation:

A STUDY ON ELECTRICAL RESISTIVITY OF RF SPUTTERING Pd FILMS

SHI YI-SHENG, ZHAO TE-XIU, LIU HONG-TU, WANG XIAO-PING
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  • Abstract views:  7339
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Publishing process
  • Received Date:  25 December 1989
  • Published Online:  20 March 2005

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