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STUDY ON LOW ENERGY ION BEAM NITRIDATION OF Si BY HIGH RESOLUTION CHANNELING-BACKSCATTERING

ZHU DE-ZHANG PAN HAO-CHANG CAO JIAN-QING ZHU FU-YING CHEN GUO-MING CHEN GUO-LIANG YANG JIE ZOU SHI-CHANG

Citation:

STUDY ON LOW ENERGY ION BEAM NITRIDATION OF Si BY HIGH RESOLUTION CHANNELING-BACKSCATTERING

ZHU DE-ZHANG, PAN HAO-CHANG, CAO JIAN-QING, ZHU FU-YING, CHEN GUO-MING, CHEN GUO-LIANG, YANG JIE, ZOU SHI-CHANG
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(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

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Publishing process
  • Received Date:  18 October 1989
  • Published Online:  05 April 1990

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