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STUDY OF DEFECTS IN LOW-DOSE P+ IMPLANTED AND RAPID THERMAL ANNEALED SILICON

LI XIAO-LEI LU FANG SUN HENG-HUI HUANG QING-HONG

Citation:

STUDY OF DEFECTS IN LOW-DOSE P+ IMPLANTED AND RAPID THERMAL ANNEALED SILICON

LI XIAO-LEI, LU FANG, SUN HENG-HUI, HUANG QING-HONG
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  • Abstract views:  7481
  • PDF Downloads:  588
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Publishing process
  • Received Date:  03 June 1991
  • Published Online:  05 March 1992

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