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DEPOSITION OF HIGH-QUALITY c-BN FILM ENHANCED BY PULSED DC BIAS TECHNIQUE

TIAN JING-ZE Lü FAN-XIU XIA LI-FANG

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DEPOSITION OF HIGH-QUALITY c-BN FILM ENHANCED BY PULSED DC BIAS TECHNIQUE

TIAN JING-ZE, Lü FAN-XIU, XIA LI-FANG
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  • Abstract views:  7395
  • PDF Downloads:  718
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Publishing process
  • Received Date:  11 January 2001
  • Accepted Date:  23 April 2001
  • Published Online:  20 November 2001

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