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Phase transformation in process of deposition of cubic boron nitride thin films

Chen Hao Deng Jin-Xiang Liu Jun-Kai Zhou Tao Zhang Yan Chen Guang-Hua

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Phase transformation in process of deposition of cubic boron nitride thin films

Chen Hao, Deng Jin-Xiang, Liu Jun-Kai, Zhou Tao, Zhang Yan, Chen Guang-Hua
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  • Abstract views:  8509
  • PDF Downloads:  1562
  • Cited By: 0
Publishing process
  • Received Date:  07 July 2006
  • Accepted Date:  24 January 2007
  • Published Online:  05 March 2007

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