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Plasma source ion implantation near the end of a cylindrical bore using an auxiliary electrode for finite rise time voltage pulses

Liu Cheng Sen Wang De Zhen

Citation:

Plasma source ion implantation near the end of a cylindrical bore using an auxiliary electrode for finite rise time voltage pulses

Liu Cheng Sen, Wang De Zhen
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  • Abstract views:  6933
  • PDF Downloads:  585
  • Cited By: 0
Publishing process
  • Received Date:  22 March 2002
  • Accepted Date:  27 April 2002
  • Published Online:  03 April 2005

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