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Effects of charging at dielectric surfaces on the characteristics of the sheath for plasma immersion ion implantation

Li Xue-Chun Wang You-Nian

Citation:

Effects of charging at dielectric surfaces on the characteristics of the sheath for plasma immersion ion implantation

Li Xue-Chun, Wang You-Nian
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  • Abstract views:  7914
  • PDF Downloads:  623
  • Cited By: 0
Publishing process
  • Received Date:  26 September 2003
  • Accepted Date:  11 November 2003
  • Published Online:  05 April 2004

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