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中国物理学会期刊
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空心圆管端点附近等离子体源离子注入过程中鞘层的时空演化

物理学报, 2003, 52(1): 109-114.
DOI: 10.7498/aps.52.109
CSTR: 32037.14.aps.52.109

Plasma source ion implantation near the end of a cylindrical bore using an auxiliary electrode for finite rise time voltage pulses

Acta Phys. Sin., 2003, 52(1): 109-114.
DOI: 10.7498/aps.52.109
CSTR: 32037.14.aps.52.109