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Process-induced mechanical stress effects on deep submicron CMOS device

Li Rui Wang Qing-Dong

Citation:

Process-induced mechanical stress effects on deep submicron CMOS device

Li Rui, Wang Qing-Dong
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  • Abstract views:  8769
  • PDF Downloads:  2467
  • Cited By: 0
Publishing process
  • Received Date:  17 August 2007
  • Accepted Date:  30 August 2007
  • Published Online:  20 July 2008

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