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Nitrogen doped 4H-SiC homoepitaxial layers grown by CVD

Jia Ren-Xu Zhang Yi-Men Zhang Yu-Ming Wang Yue-Hu

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Nitrogen doped 4H-SiC homoepitaxial layers grown by CVD

Jia Ren-Xu, Zhang Yi-Men, Zhang Yu-Ming, Wang Yue-Hu
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  • Abstract views:  10951
  • PDF Downloads:  1381
  • Cited By: 0
Publishing process
  • Received Date:  06 December 2007
  • Accepted Date:  08 May 2008
  • Published Online:  05 May 2008

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