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Dependence of GaN film sheet resistance on the N2 carrier gas percentage

Xi Guang-Yi Hao Zhi-Biao Wang Lai Li Hong-Tao Jiang Yang Zhao Wei Ren Fan Han Yan-Jun Sun Chang-Zheng Luo Yi

Citation:

Dependence of GaN film sheet resistance on the N2 carrier gas percentage

Xi Guang-Yi, Hao Zhi-Biao, Wang Lai, Li Hong-Tao, Jiang Yang, Zhao Wei, Ren Fan, Han Yan-Jun, Sun Chang-Zheng, Luo Yi
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  • Abstract views:  7695
  • PDF Downloads:  1076
  • Cited By: 0
Publishing process
  • Received Date:  29 February 2008
  • Accepted Date:  11 April 2008
  • Published Online:  20 November 2008

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