柔性无机铁电薄膜的制备及其应用

蓝顺; 潘豪; 林元华

doi:10.7498/aps.69.20201365

摘要

无机铁电薄膜材料有着优异的电、光特性, 被广泛应用于介电、信息存储、压电、光电等领域. 然而, 基于单晶刚性基底和高温、含氧的合成环境的传统制备工艺, 大大限制了其在柔性电子器件中的应用. 实现无机铁电薄膜材料的柔性化可以将这些材料的性能优势进一步应用到可穿戴电子器件中, 是下一代可穿戴电子器件领域的重要发展方向. 本文综述了无机钙钛矿结构铁电薄膜的柔性化制备工艺, 包括直接在柔性基底上生长和将铁电薄膜从刚性基底上剥离、转印到柔性基底两类. 并介绍了柔性无机铁电薄膜的应用, 对其研究现状及未来发展进行了总结与展望.

关键词:

无机铁电薄膜 /
柔性 /
钙钛矿 /
制备

Abstract

Inorganic ferroelectric films exhibit excellent electric and optic properties, which have been widely used in dielectrics, memory, piezoelectric, photoelectric devices, etc. However, conventional synthesis strategies based on rigid single-crystal substrates severely limit their applications in flexible electronics. Realization of flexible inorganic ferroelectric films can introduce the excellent properties of inorganic ferroelectric materials into flexible devices, which is the developing trend for the next generation of electronic devices. In this review, the strategies to fabricate flexible inorganic perovskite structures’ ferroelectric films are summarized, including 1) direct growth on flexible substrates, 2) transferring ferroelectric film from a rigid substrate to a flexible one. Subsequently, the applications of flexible inorganic ferroelectric films are briefly introduced. Finally, research status, prospects and future development trend of flexible inorganic ferroelectric films are discussed.

Keywords:

作者及机构信息

清华大学材料学院, 新型陶瓷与精细工艺国家重点实验室, 北京　100084

通信作者: 林元华, linyh@tsinghua.edu.cn

基金项目: 国家自然科学基金(批准号: 51729201, 51532003)资助的课题

Authors and contacts

State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China

Corresponding author: Lin Yuan-Hua, linyh@tsinghua.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grants Nos. 51729201, 51532003)

文章全文 : translate this paragraph

参考文献

[1]	Xu S, Zhang Y, Jia L, Mathewson K E, Jang K I, Kim J, Fu H, Huang X, Chava P, Wang R, Bhole S, Wang L, Na Y J, Guan Y, Flavin M, Han Z, Huang Y, Rogers J A 2014 Science 344 70 Google Scholar
[2]	Lacour S P 2015 Nat. Mater. 14 659 Google Scholar
[3]	Jung Y H, Hong S K, Wang H S, Han J H, Pham T X, Park H, Kim J, Kang S, Yoo C D, Lee K J 2020 Adv. Mater. 32 1904020
[4]	Park B H, Kang B S, Bu S D, Noh T W, Lee J, Jo W 1999 Nature 401 682 Google Scholar
[5]	Lee H N, Hesse D, Zakharov N, Gösele U 2002 Science 296 2006 Google Scholar
[6]	Pan H, Li F, Liu Y, Zhang Q, Wang M, Lan S, Zheng Y, Ma J, Gu L, Shen Y, Yu P, Zhang S, Chen L Q, Lin Y H, Nan C W 2019 Science 365 578 Google Scholar
[7]	Zhao P, Wang H, Wu L, Chen L, Cai Z, Li L, Wang X 2019 Adv. Energy Mater. 9 1803048 Google Scholar
[8]	Kim J, Saremi S, Acharya M, Velarde G, Parsonnet E, Donahue P, Qualls A, Garcia D, Martin L W 2020 Science 369 81 Google Scholar
[9]	Cao H C, Evans A G 1993 J. Am. Ceram. Soc. 76 890 Google Scholar
[10]	Li P, Zhai J, Shen B, Zhang S, Li X, Zhu F, Zhang X 2018 Adv. Mater. 30 1705171 Google Scholar
[11]	Kakekhani A, Ismail Beigi S, Altman E I 2016 Surf. Sci. 650 302 Google Scholar
[12]	Khan M A, Nadeem M A, Idriss H 2016 Surf. Sci. Rep. 71 1 Google Scholar
[13]	Han X, Chen X, Tang X, Chen Y L, Liu J H, Shen Q D 2016 Adv. Funct. Mater. 26 3640 Google Scholar
[14]	Liu Y, Aziguli H, Zhang B, Xu W, Lu W, Bernholc J, Wang Q 2018 Nature 562 96 Google Scholar
[15]	Zhang X, Jiang J, Shen Z, Dan Z, Li M, Lin Y, Nan C W, Chen L, Shen Y 2018 Adv. Mater. 30 1707269 Google Scholar
[16]	Lim S, Son D, Kim J, Lee Y B, Song J K, Choi S, Lee D J, Kim J H, Lee M, Hyeon T, Kim D H 2015 Adv. Funct. Mater. 25 375 Google Scholar
[17]	Hwang S K, Bae I, Kim R H, Park C 2012 Adv. Mater. 24 5910 Google Scholar
[18]	Li Q, Chen L, Gadinski M R, Zhang S, Zhang G, Li H, Haque A, Chen L, Jackson T N, Wang Q 2015 Nature 523 576 Google Scholar
[19]	Kim K L, Lee W, Hwang S K, Joo S H, Cho S M, Song G, Cho S H, Jeong B, Hwang I, Ahn J H, Yu Y J, Shin T J, Kwak S K, Kang S J, Park C 2016 Nano Lett. 16 334 Google Scholar
[20]	Pan H, Ma J, Ma J, Zhang Q, Liu X, Guan B, Gu L, Zhang X, Zhang Y J, Li L, Shen Y, Lin Y H, Nan C W 2018 Nat. Commun. 9 1813 Google Scholar
[21]	Liang Z, Liu M, Ma C, Shen L, Lu L, Jia C L 2018 J. Mater. Chem. A 6 12291 Google Scholar
[22]	Jiang J, Shen Z, Qian J, Dan Z, Guo M, He Y, Lin Y, Nan C, Chen L, Shen Y 2019 Nano Energy 62 220 Google Scholar
[23]	Bao Z, Hou C, Shen Z, Sun H, Zhang G, Luo Z, Dai Z, Wang C, Chen X, Li L, Yin Y, Shen Y, Li X 2020 Adv. Mater. 32 1907227 Google Scholar
[24]	Li Q, Liu F, Yang T, Gadinski M R, Zhang G, Chen L, Wang Q 2016 Proc. Natl. Acad. Sci. U. S. A. 113 9995 Google Scholar
[25]	Zhang T, Chen X, Thakur Y, Lu B, Zhang Q, Runt J, Zhang Q M 2020 Sci. Adv. 6 6622 Google Scholar
[26]	Choi K J, Biegalski M, Li Y L, Sharan A, Schubert J, Uecker R, Reiche P, Chen Y B, Pan X Q, Gopalan V, Chen L Q, Schlom D G, Eom C B 2004 Science 306 1005 Google Scholar
[27]	Rojac T, Bencan A, Malic B, Tutuncu G, Jones J L, Daniels J E, Damjanovic D 2014 J. Am. Ceram. Soc. 97 1993 Google Scholar
[28]	Park S E, Shrout T R 1997 J. Appl. Phys. 82 1804 Google Scholar
[29]	Li F, Cabral M J, Xu B, Cheng Z, Dickey E C, LeBeau J M, Wang J, Luo J, Taylor S, Hackenberger W, Bellaiche L, Xu Z, Chen L Q, Shrout T R, Zhang S 2019 Science 364 264 Google Scholar
[30]	Won S S, Seo H, Kawahara M, Glinsek S, Lee J, Kim Y, Jeong C K, Kingon A I, Kim S 2019 Nano Energy 55 182 Google Scholar
[31]	Palneedi H, Yeo H G, Hwang G T, Annapureddy V, Kim J W, Choi J J, Trolier McKinstry S, Ryu J 2017 APL Mater. 5 096111 Google Scholar
[32]	Ko Y J, Kim D Y, Won S S, Ahn C W, Kim I W, Kingon A I, Kim S, Ko J, Jung J H 2016 ACS Appl. Mater. Interfaces 8 6504 Google Scholar
[33]	Bretos I, Jimenez R, Wu A, Kingon A I, Vilarinho P M, Calzada M L 2014 Adv. Mater. 26 1405 Google Scholar
[34]	Tomczyk M, Bretos I, Jiménez R, Mahajan A, Ramana E V, Calzada M L, Vilarinho P M 2017 J. Mater. Chem. C 5 12529 Google Scholar
[35]	Yu H, Chung C C, Shewmon N, Ho S, Carpenter J H, Larrabee R, Sun T, Jones J L, Ade H, O'Connor B T, So F 2017 Adv. Funct. Mater. 27 1700461 Google Scholar
[36]	Ke S, Chen C, Fu N, Zhou H, Ye M, Lin P, Yuan W, Zeng X, Chen L, Huang H 2016 ACS Appl. Mater. Interfaces 8 28406 Google Scholar
[37]	Liu W Y, Liao J J, Jiang J, Zhou Y C, Chen Q, Mo S T, Yang Q, Peng Q X, Jiang L M 2020 J. Mater. Chem. C 8 3878 Google Scholar
[38]	Ma B, Tong S, Narayanan M, Liu S, Chao S, Balachandran U 2011 Mater. Res. Bull. 46 1124 Google Scholar
[39]	Yeo H G, Ma X, Rahn C D, Troliermckinstry S 2016 Adv. Funct. Mater. 26 5940 Google Scholar
[40]	Liang W, Li Z, Bi Z, Nan T, Du H, Nan C, Chen C, Jia Q, Lin Y 2014 J. Mater. Chem. C 2 708 Google Scholar
[41]	Lee H J, Won S S, Cho K H, Han C K, Mostovych N, Kingon A I, Kim S, Lee H Y 2018 Appl. Phys. Lett. 112 092901 Google Scholar
[42]	Yeo H G, Xue T, Roundy S, Ma X, Rahn C, Trolier McKinstry S 2018 Adv. Funct. Mater. 28 1801327 Google Scholar
[43]	Kingon A I, Srinivasan S 2005 Nat. Mater. 4 233 Google Scholar
[44]	Wu A, Vilarinho P M, Reaney I, Miranda Salvado I M 2003 Chem. Mater. 15 1147 Google Scholar
[45]	Bharadwaja S S N, Dechakupt T, Trolier McKinstry S, Beratan H 2008 J. Am. Ceram. Soc. 91 1580 Google Scholar
[46]	Wang Z J, Cao Z P, Otsuka Y, Yoshikawa N, Kokawa H, Taniguchi S 2008 Appl. Phys. Lett. 92 222905 Google Scholar
[47]	Bretos I, Jiménez R, Tomczyk M, Rodríguez Castellón E, Vilarinho P M, Calzada M L 2016 Sci. Rep. 6 20143 Google Scholar
[48]	Bretos I, Jiménez R, Ricote J, Sirera R, Calzada M L 2020 Adv. Funct. Mater. 30 2001897 Google Scholar
[49]	Arthur J R 2002 Surf. Sci. 500 189 Google Scholar
[50]	Kourkoutis L F, Song J H, Hwang H Y, Muller D A 2010 Proc. Natl. Acad. Sci. U. S. A. 107 11682 Google Scholar
[51]	Matthews J W, Blakeslee A E 1974 J. Cryst. Growth 27 118 Google Scholar
[52]	Koma A, Yoshimura K 1986 Surf. Sci. 174 556 Google Scholar
[53]	Koma A, Ueno K, Saiki K 1991 J. Cryst. Growth 111 1029 Google Scholar
[54]	Koma A 1999 J. Cryst. Growth 201 236 Google Scholar
[55]	Bitla Y, Chu Y H 2017 FlatChem 3 26 Google Scholar
[56]	Reichelt K, Lutz H O 1971 J. Cryst. Growth 10 103 Google Scholar
[57]	Derose J A, Thundat T, Nagahara L A, Lindsay S 1991 Surf. Sci. 256 102 Google Scholar
[58]	Baski A A, Fuchs H 1994 Surf. Sci. 313 275 Google Scholar
[59]	Dishner M H, Ivey M M, Gorer S, Hemminger J C, Feher F J 1998 J. Vac. Sci. Technol. 16 3295 Google Scholar
[60]	Ji Q, Zhang Y, Gao T, Zhang Y, Ma D, Liu M, Chen Y, Qiao X, Tan P H, Kan M, Feng J, Sun Q, Liu Z 2013 Nano Lett. 13 3870 Google Scholar
[61]	Zhou Y, Nie Y, Liu Y, Yan K, Hong J, Jin C, Zhou Y, Yin J, Liu Z, Peng H 2014 ACS Nano 8 1485 Google Scholar
[62]	Xia J, Zhu D, Wang L, Huang B, Huang X, Meng X 2015 Adv. Funct. Mater. 25 4255 Google Scholar
[63]	Bitla Y, Chu Y H 2016 International Conference of Asian Union of Magnetics Societies (ICAUMS) August 1–5, 2016, Tainan, China p18162406
[64]	Amrillah T, Bitla Y, Shin K, Yang T, Hsieh Y H, Chiou Y Y, Liu H J, Do T H, Su D, Chen Y C, Jen S U, Chen L Q, Kim K H, Juang J Y, Chu Y H 2017 ACS Nano 11 6122 Google Scholar
[65]	Jiang J, Bitla Y, Huang C W, Do T H, Liu H J, Hsieh Y H, Ma C H, Jang C Y, Lai Y H, Chiu P W, Wu W W, Chen Y C, Zhou Y C, Chu Y H 2017 Sci. Adv. 3 1700121 Google Scholar
[66]	Liang Z, Liu M, Shen L, Lu L, Ma C, Lu X, Lou X, Jia C L 2019 ACS Appl. Mater. Interfaces 11 5247 Google Scholar
[67]	Qian J, Han Y, Yang C, Lv P, Zhang X, Feng C, Lin X, Huang S, Cheng X, Cheng Z 2020 Nano Energy 74 104862 Google Scholar
[68]	Yang Y, Yuan G, Yan Z, Wang Y, Lu X, Liu J M 2017 Adv. Mater. 29 1700425 Google Scholar
[69]	Konagai M, Sugimoto M, Takahashi K 1978 J. Cryst. Growth 45 277 Google Scholar
[70]	Park K I, Xu S, Liu Y, Hwang G T, Kang S J, Wang Z L, Lee K J 2010 Nano Lett. 10 4939 Google Scholar
[71]	Gan Q, Rao R A, Eom C B, Garrett J L, Lee M 1998 Appl. Phys. Lett. 72 978 Google Scholar
[72]	Deneke C, Wild E, Boldyreva K, Baunack S, Cendula P, Monch I, Simon M, Malachias A, Dorr K, Schmidt O G 2011 Nanoscale Res. Lett. 6 621 Google Scholar
[73]	Qi Y, Jafferis N T, Jr Lyons K, Lee C M, Ahmad H, McAlpine M C 2010 Nano Lett. 10 524 Google Scholar
[74]	Qi Y, Kim J, Nguyen T D, Lisko B, Purohit P K, McAlpine M C 2011 Nano Lett. 11 1331 Google Scholar
[75]	Bakaul S R, Serrao C R, Lee M, Yeung C W, Sarker A, Hsu S L, Yadav A K, Dedon L, You L, Khan A I, Clarkson J D, Hu C, Ramesh R, Salahuddin S 2016 Nat. Commun. 7 10547 Google Scholar
[76]	An F, Qu K, Zhong G, Dong Y, Ming W, Zi M, Liu Z, Wang Y, Qi B, Ding Z, Xu J, Luo Z, Gao X, Xie S, Gao P, Li J 2020 Adv. Funct. Mater. 31 2003495 Google Scholar
[77]	Lu D, Baek D J, Hong S S, Kourkoutis L F, Hikita Y, Hwang H Y 2016 Nat. Mater. 15 1255 Google Scholar
[78]	Ji D, Cai S, Paudel T R, Sun H, Zhang C, Han L, Wei Y, Zang Y, Gu M, Zhang Y, Gao W, Huyan H, Guo W, Wu D, Gu Z, Tsymbal E Y, Wang P, Nie Y, Pan X 2019 Nature 570 87 Google Scholar
[79]	Dong G, Li S, Yao M, Zhou Z, Zhang Y Q, Han X, Luo Z, Yao J, Peng B, Hu Z, Huang H, Jia T, Li J, Ren W, Ye Z G, Ding X, Sun J, Nan C W, Chen L Q, Li J, Liu M 2019 Science 366 475 Google Scholar
[80]	Han L, Fang Y, Zhao Y, Zang Y, Gu Z, Nie Y, Pan X 2020 Adv. Mater. Interfaces 7 1901604 Google Scholar
[81]	Takahashi R, Lippmaa M 2020 ACS Appl. Mater. Interfaces 12 25042 Google Scholar
[82]	Zhang Y, Ma C, Lu X, Liu M 2019 Mater. Horizons 6 911 Google Scholar
[83]	Do Y H, Kang M G, Kim J S, Kang C Y, Yoon S J 2012 Sens. Actuator A Phys. 184 124 Google Scholar
[84]	Delmdahl R, Patzel R, Brune J 2013 Phys. Procedia 41 241 Google Scholar
[85]	Lee H S, Chung J, Hwang G T, Jeong C K, Jung Y, Kwak J H, Kang H, Byun M, Kim W D, Hur S, Oh S H, Lee K J 2014 Adv. Funct. Mater. 24 6914 Google Scholar
[86]	Park K I, Son J H, Hwang G T, Jeong C K, Ryu J, Koo M, Choi I, Lee S H, Byun M, Wang Z L, Lee K J 2014 Adv. Mater. 26 2514 Google Scholar
[87]	Jeong C K, Park K, Son J H, Hwang G T, Lee S H, Park D Y, Lee H E, Lee H K, Byun M, Lee K J 2014 Energy Environ. Sci. 7 4035 Google Scholar
[88]	Kim S, Son J H, Lee S H, You B K, Park K I, Lee H K, Byun M, Lee K J 2014 Adv. Mater. 26 7480 Google Scholar
[89]	Lee H E, Kim S J, Ko J, Yeom H, Byun C, Lee S H, Joe D J, Im T, Park S K, Lee K J 2016 Adv. Funct. Mater. 26 6170 Google Scholar
[90]	Peng Y, Que M, Lee H E, Bao R, Wang X, Lu J, Yuan Z, Li X, Tao J, Sun J, Zhai J, Lee K J, Pan C 2019 Nano Energy 58 633 Google Scholar
[91]	Tsakalakos L, Sands T 2000 Appl. Phys. Lett. 76 227 Google Scholar
[92]	Kim J, Park H, Hannon J B, Bedell S W, Fogel K, Sadana D K, Dimitrakopoulos C 2013 Science 342 833 Google Scholar
[93]	Kim J, Bayram C, Park H, Cheng C W, Dimitrakopoulos C, Ott J A, Reuter K B, Bedell S W, Sadana D K 2014 Nat. Commun. 5 4836 Google Scholar
[94]	Kim Y, Cruz S S, Lee K, Alawode B O, Choi C, Song Y, Johnson J M, Heidelberger C, Kong W, Choi S, Qiao K, Almansouri I, Fitzgerald E A, Kong J, Kolpak A M, Hwang J, Kim J 2017 Nature 544 340 Google Scholar
[95]	Kong W, Li H, Qiao K, Kim Y, Lee K, Nie Y, Lee D, Osadchy T, Molnar R J, Gaskill D K, Myers Ward R L, Daniels K M, Zhang Y, Sundram S, Yu Y, Bae S H, Rajan S, Shao Horn Y, Cho K, Ougazzaden A, Grossman J C, Kim J 2018 Nat. Mater. 17 999 Google Scholar
[96]	Kum H S, Lee H, Kim S, Lindemann S, Kong W, Qiao K, Chen P, Irwin J, Lee J H, Xie S, Subramanian S, Shim J, Bae S H, Choi C, Ranno L, Seo S, Lee S, Bauer J, Li H, Lee K, Robinson J A, Ross C A, Schlom D G, Rzchowski M S, Eom C B, Kim J 2020 Nature 578 75 Google Scholar
[97]	Scott J F 2007 Science 315 954 Google Scholar
[98]	Gao W, You L, Wang Y, Yuan G, Chu Y, Liu Z, Liu J 2017 Adv. Electron. Mater. 3 1600542 Google Scholar
[99]	Gao D, Tan Z, Fan Z, Guo M, Hou Z, Chen D, Qin M, Zeng M, Zhou G, Gao X, Lu X, Liu J M 2019 ACS Appl. Mater. Interfaces 11 27088 Google Scholar
[100]	Yao Z, Song Z, Hao H, Yu Z, Cao M, Zhang S, Lanagan M T, Liu H 2017 Adv. Mater. 29 1601727 Google Scholar
[101]	Palneedi H, Peddigari M, Hwang G, Jeong D, Ryu J 2018 Adv. Funct. Mater. 28 1803665 Google Scholar
[102]	Zou K, Dan Y, Xu H, Zhang Q, Lu Y, Huang H, He Y 2019 Mater. Res. Bull. 113 190 Google Scholar
[103]	Yang L, Kong X, Li F, Hao H, Cheng Z, Liu H, Li J F, Zhang S 2019 Prog. Mater. Sci. 102 72 Google Scholar
[104]	Ma B, Kwon D K, Narayanan M, Balachandran U 2009 J. Electroceram. 22 383 Google Scholar
[105]	Zhang Y, Li Y, Hao X, Jiang H, Zhai J 2019 J. Am. Ceram. Soc. 102 6107 Google Scholar
[106]	Zhang Y, Li Y, Du J, Sun N, Hao X, Jiang H, Zhai J 2019 J. Mater. Sci.: Mater. Electron. 30 11945 Google Scholar
[107]	Michael Sapia E K, Li H U, Jackson T N, Trolier Mckinstry S 2015 J. Appl. Phys. 118 13574 Google Scholar
[108]	Sun Z, Ma C, Liu M, Cui J, Lu L, Lu J, Lou X, Jin L, Wang H, Jia C L 2017 Adv. Mater. 29 1604427 Google Scholar
[109]	Ma B, Hu Z, Koritala R E, Lee T H, Dorris S E, Balachandran U 2015 J. Mater. Sci.: Mater. Electron. 26 9279 Google Scholar
[110]	Yang C, Lv P, Qian J, Han Y, Ouyang J, Lin X, Huang S, Cheng Z 2019 Adv. Energy Mater. 9 1803949 Google Scholar
[111]	Lv P, Yang C, Qian J, Wu H, Huang S, Cheng X, Cheng Z 2020 Adv. Energy Mater. 10 1904229 Google Scholar
[112]	Liang Z, Ma C, Shen L, Lu L, Lu X, Lou X, Liu M, Jia C L 2019 Nano Energy 57 519 Google Scholar
[113]	Shen B z, Li Y, Hao X 2019 ACS Appl. Mater. Interfaces 11 34117 Google Scholar
[114]	Han S, Zhou Y, Roy V A L 2013 Adv. Mater. 25 5425 Google Scholar
[115]	Gao H, Yang Y, Wang Y, Chen L, Wang J, Yuan G, Liu J 2019 ACS Appl. Mater. Interfaces 11 35169 Google Scholar
[116]	Arimoto Y, Ishiwara H 2004 MRS Bull. 29 823 Google Scholar
[117]	Sun J, Zheng X 2011 IEEE Trans. Electron Devices 58 3559 Google Scholar
[118]	Vasilopoulou M, Kim B S, Kim H P, da Silva W J, Schneider F K, Mat Teridi M A, Gao P, Mohd Yusoff A R b, Nazeeruddin M K 2020 Nano Lett. 20 5081 Google Scholar
[119]	Bakaul S R, Serrao C R, Lee O, Lu Z, Yadav A, Carraro C, Maboudian R, Ramesh R, Salahuddin S 2017 Adv. Mater. 29 1605699 Google Scholar
[120]	Su L, Lu X, Chen L, Wang Y, Yuan G, Liu J 2018 ACS Appl. Mater. Interfaces 10 21428 Google Scholar
[121]	Yang B, Li C, Liu M, Wei R, Tang X, Hu L, Song W, Zhu X, Sun Y 2020 Journal of Materiomics 6 600 Google Scholar
[122]	Yang C, Han Y, Qian J, Lv P, Lin X, Huang S, Cheng Z 2019 ACS Appl. Mater. Interfaces 11 12647 Google Scholar
[123]	Lee W, Kahya O, Toh C T, Özyilmaz B, Ahn J H 2013 Nanotechnology 24 475202 Google Scholar
[124]	Ren C, Zhong G, Xiao Q, Tan C, Feng M, Zhong X, An F, Wang J, Zi M, Tang M, Tang Y, Jia T, Li J 2019 Adv. Funct. Mater. 30 1906131 Google Scholar
[125]	Wang Z L, Song J 2006 Science 312 242 Google Scholar
[126]	Chang C, Tran V H, Wang J, Fuh Y, Lin L 2010 Nano Lett. 10 726 Google Scholar
[127]	Martins P, Lopes A C, Lancerosmendez S 2014 Prog. Polym. Sci. 39 683 Google Scholar
[128]	Kwon J, Seung W, Sharma B K, Kim S, Ahn J 2012 Energy Environ. Sci. 5 8970 Google Scholar
[129]	Hwang G T, Park H, Lee J H, Oh S, Park K I, Byun M, Park H, Ahn G, Jeong C K, No K, Kwon H, Lee S G, Joung B, Lee K J 2014 Adv. Mater. 26 4880 Google Scholar
[130]	Dagdeviren C, Su Y, Joe P, Yona R, Liu Y, Kim Y S, Huang Y, Damadoran A R, Xia J, Martin L W, Huang Y, Rogers J A 2014 Nat. Commun. 5 4496 Google Scholar
[131]	Inaoka T, Shintaku H, Nakagawa T, Kawano S, Ogita H, Sakamoto T, Hamanishi S, Wada H, Ito J 2011 Proc. Natl. Acad. Sci. U. S. A. 108 18390 Google Scholar
[132]	Peng B, Zhang Q, Li X, Sun T, Fan H, Ke S, Ye M, Wang Y, Lu W, Niu H, Scott J F, Zeng X, Huang H 2015 Adv. Electron. Mater. 1 1500052 Google Scholar
[133]	Fan Z, Fan H, Lu Z, Li P, Huang Z, Tian G, Yang L, Yao J, Chen C, Chen D, Yan Z, Lu X, Gao X, Liu J M 2017 Phys. Rev. Appl. 7 014020 Google Scholar
[134]	Zhang Q, Xie L, Liu G, Prokhorenko S, Nahas Y, Pan X, Bellaiche L, Gruverman A, Valanoor N 2017 Adv. Mater. 29 1702375 Google Scholar
[135]	Wang J J, Su Y J, Wang B, Ouyang J, Ren Y H, Chen L Q 2020 Nano Energy 72 104665 Google Scholar

施引文献

图 1 PZT/LNO/Ni-Cr柔性薄膜的(a)照片(插图为薄膜结构示意图)和(b)室温10 kHz下的电滞回线^[32]; (c) PLZO柔性薄膜在1000次弯折前后的电滞回线对比(插图为柔性薄膜弯折照片)^[41]; (d) 不同双氧水预处理时长的柔性BTO/Ni膜磁电耦合系数随磁场的变化^[40]

Fig. 1. (a) Photograph of a flexible PZT film (inset: schematic structure illustration) and (b) P-E loop of the PZT film measured at 10 kHz^[32]; (c) P-E loops of a flexible PLZO film before and after 1000 bending cycles (inset: photograph of the bending state of the PLZO film)^[41]; (d) magneto-electric (ME) voltage coefficients of the flexible BTO/Ni assemblies as a function of dc magnetic field^[40]. Plane (a), (b) reprinted with permission from Ref. [32]. Copyright 2016 American Chemical Society. Plane (c) reprinted from Ref. [41], with the permission of AIP Publishing.

下载: 全尺寸图片幻灯片

图 2 (a) PhS方法的示意图^[34]; (b) 400 ℃退火的PZT薄膜的P-E回线, 下方插图为非开关部分的贡献, 上方插图为开关部分^[47]; (c) 不同工艺制备的BFO薄膜在140 K, 10 kHz条件下的P-E回线^[34]

Fig. 2. (a) Schematic illustration of the PhS method^[34]; (b) P-E loop of the PZT film annealed at 400 °C, the lower inset of (b) correspond to the non-switching contribution to the polarization, the upper inset correspond to the compensated ferroelectric hysteresis loop^[47]; (c) P-E loops for seeded and seeded + UV-irradiated BFO films measured at 140 K and 10 kHz^[34].

下载: 全尺寸图片幻灯片

图 3 PZT(Zr/Ti = 20:80)/SRO/CFO/mica柔性铁电存储器^[65]　(a) 实物图及局部AFM图; (b) 面外θ-2θ扫面结果; (c) 面内Φ扫; (d) RSM图; (e) 断面TEM图像, PZT/SRO和SRO/CFO/mica界面局部放大图以及PZT, SRO和云母的选定区域衍射模式

Fig. 3. PZT(Zr/Ti = 20∶80)/SRO/CFO/mica flexible ferroelectric memory^[65]: (a) Photograph of the flexible ferroelectric device on mica with corresponding AFM image of PZT surface; (b) θ-2θ scan of the heterostructure; (c) Φ scans at PZT {002}, SRO {002}, CFO {004}, and mica {202} diffraction peaks (a.u., arbitrary units); (d) reciprocal space mapping of the heterostructure around the PZT (002) peak (r.l.u., relative lattice units); (e) cross-sectional TEM images of PZT/SRO and SRO/CFO/mica interfaces, and the corresponding selected area electron diffraction patterns.

下载: 全尺寸图片幻灯片

图 4 两种不同刻蚀方法示意图　(a)刻蚀基底^[70]; (b) 刻蚀牺牲层^[75]

Fig. 4. Schematic illustration of two etching processes: (a) Etching the substrate^[70]; (b) etching the sacrificial layer^[75]. Plane (a) reprinted with permission from Ref. [70]. Copyright 2010 American Chemical Society.

下载: 全尺寸图片幻灯片

图 5 (a) LLO剥离-转印示意图^[87]; (b), (c)使用不同能量激光的LLO工艺转印到PET基底上的PZT薄膜表面的SEM照片, 图(b)和(c)对应的激光能量分别为420和 500 mJ/cm², 标尺为3 μm^[87]

Fig. 5. (a) Schematic diagram of the LLO fabrication process^[87]; (b), (c) SEM images of surfaces of the PZT films transferred to a PET substrate by the LLO process using different energy laser: (b) 420 and (c) 500 mJ/cm²^[87]. Scale bars, 3 μm.

下载: 全尺寸图片幻灯片

图 6 石墨烯缓冲层辅助剥离过程示意图^[93]

Fig. 6. Schematic of the process of growing and transferring single-crystalline thin films based on epitaxial graphene buffer layer^[93].

下载: 全尺寸图片幻灯片

图 7 BST^[99]柔性薄膜在(a)不同半径弯折时与弯折后的介电频谱(flat-1为初始态, flat-2为r = 5 mm弯折之后; flat-3为r = 2 mm弯折之后)和(b) r = 5 mm时18.6 GHz的介电常数和损耗随弯折次数的变化

Fig. 7. (a) Frequency domain spectroscopy of BST flexible film in the bending states and flat states after bending with different radii (flat 1−3: initial state and flat states after bending at r = 5 mm and 2 mm, respectively); (b) ε_r and tanδ of BST flexible film at 18.6 GHz as a function of bending cycle (r = 5 mm)^[99]. Reprinted with permission from Ref. [99]. Copyright 2019 American Chemical Society.

下载: 全尺寸图片幻灯片

图 8 FeRAM^[115]和FeFET^[118]的示意图　(a) P-E回线, 插图为FeRAM结构示意图; (b) FeRAM1疲劳特性; (c) FeFET结构示意图; (d) FeFET的转移特性

Fig. 8. Schematic of FeRAM^[115] and FeFET^[118]: (a) P-E loop and the insert is the schematic illustration of FeRAM; (b) fatigue characterization of FeRAM; (c) the schematic illustration of FeFET; (d) transfer characteristics of the FeFET. Plane (a), (b) reprinted with permission from Ref [115]. Copyright 2019 American Chemical Society. Plane (c), (d) reprinted with permission from Ref [118]. Copyright 2020 American Chemical Society.

下载: 全尺寸图片幻灯片

图 9 几种云母基柔性铁电存储器的性能数据对比　(a), (d) PZT (Zr/Ti = 20:80)^[65], (a)不同弯折半径时的P-E回线和(d) 1000次弯折前后拉伸、压缩和平整状态的疲劳性能; (b), (e) BLT^[120], (b) 10000次弯折前后及弯折时的P-E回线和(e)疲劳性能; (c), (f) BFO^[122], (c)不同弯折半径时拉伸、压缩条件下的P-E回线和(f)1000次弯折前后的疲劳性能

Fig. 9. Performance of mica-based flexible ferroelectric memories. (a) P-E loops of PZT (Zr/Ti = 20:80) -based memories with various tensile and compressive radii and (d) fatigue performance at unbent, compressively bent and tensilely bent before and after 1000 cycle conditions^[65]; (b) P-E loops of BLT-based memories at bending state and flat states before and after 10000 cycle conditions and (e) fatigue performance^[120]; (c) P-E loops of BFO-based memories with various compressive and tensile bending radii and (f) fatigue performance an unbent and compressively and tensilely bent for 1000 cycle conditions^[122]. Plane (b), (e) reprinted with permission from Ref. [120]. Copyright 2018 American Chemical Society. Plane (c), (f) reprinted with permission from Ref. [122]. Copyright 2019 American Chemical Society.

下载: 全尺寸图片幻灯片

图 10 PZT阵列(a)组成的MOSFET示意图和(b)实际器件照片^[130]

Fig. 10. (a) Schematic illustration of the device that includes a square array of piezoelectric thin-film transducers and (b) photograph of the device laminated on a wrist. Scale bar, 2 cm^[130].

下载: 全尺寸图片幻灯片

表 1 最近报道的有代表性的柔性和刚性基底的介电薄膜的储能性能

Table 1. Energy storage properties of recently-reported representative dielectrics on rigid and flexible substrates.

材料	基底	U_e/J·cm^–3	η/%	E_b/MV·m^–1	T_w/℃	疲劳次数	弯折次数
0.25BFO-0.3BTO-0.45STO^[6]	Nb:STO	112	80	490	–100—150	10⁸	—
BCT/BZT multilayer^[108]	Nb:STO	83.9	78.4	800	–100—200	10⁶	—
BZT^[21]	Nb:STO	78.7	80.5	697	–150—200	10⁶	—
PLZT^[109]	LNO/Ni	85	65	450	—	—	—
Mn:NBT-BT-BFO^[110]	Pt/F-mica	81.9	64.4	229	25—200	10⁹	10³ (r = 4 mm)
NKBT/BSMT multilayer^[111]	Pt/F-mica	91	68	303	–50—200	10⁸	10⁴ (r = 4 mm)
BZT^[112]	LSMO/STO/F-mica	65.1	72.9	615	–100—200	10⁶	10³ (r = 4 mm)
PLZT^[113]	LNO/F-mica	40.2	58	200	30—180	10⁷	2 × 10³ (r = 4 mm)

下载: 导出CSV

[1]	Xu S, Zhang Y, Jia L, Mathewson K E, Jang K I, Kim J, Fu H, Huang X, Chava P, Wang R, Bhole S, Wang L, Na Y J, Guan Y, Flavin M, Han Z, Huang Y, Rogers J A 2014 Science 344 70 Google Scholar
[2]	Lacour S P 2015 Nat. Mater. 14 659 Google Scholar
[3]	Jung Y H, Hong S K, Wang H S, Han J H, Pham T X, Park H, Kim J, Kang S, Yoo C D, Lee K J 2020 Adv. Mater. 32 1904020
[4]	Park B H, Kang B S, Bu S D, Noh T W, Lee J, Jo W 1999 Nature 401 682 Google Scholar
[5]	Lee H N, Hesse D, Zakharov N, Gösele U 2002 Science 296 2006 Google Scholar
[6]	Pan H, Li F, Liu Y, Zhang Q, Wang M, Lan S, Zheng Y, Ma J, Gu L, Shen Y, Yu P, Zhang S, Chen L Q, Lin Y H, Nan C W 2019 Science 365 578 Google Scholar
[7]	Zhao P, Wang H, Wu L, Chen L, Cai Z, Li L, Wang X 2019 Adv. Energy Mater. 9 1803048 Google Scholar
[8]	Kim J, Saremi S, Acharya M, Velarde G, Parsonnet E, Donahue P, Qualls A, Garcia D, Martin L W 2020 Science 369 81 Google Scholar
[9]	Cao H C, Evans A G 1993 J. Am. Ceram. Soc. 76 890 Google Scholar
[10]	Li P, Zhai J, Shen B, Zhang S, Li X, Zhu F, Zhang X 2018 Adv. Mater. 30 1705171 Google Scholar
[11]	Kakekhani A, Ismail Beigi S, Altman E I 2016 Surf. Sci. 650 302 Google Scholar
[12]	Khan M A, Nadeem M A, Idriss H 2016 Surf. Sci. Rep. 71 1 Google Scholar
[13]	Han X, Chen X, Tang X, Chen Y L, Liu J H, Shen Q D 2016 Adv. Funct. Mater. 26 3640 Google Scholar
[14]	Liu Y, Aziguli H, Zhang B, Xu W, Lu W, Bernholc J, Wang Q 2018 Nature 562 96 Google Scholar
[15]	Zhang X, Jiang J, Shen Z, Dan Z, Li M, Lin Y, Nan C W, Chen L, Shen Y 2018 Adv. Mater. 30 1707269 Google Scholar
[16]	Lim S, Son D, Kim J, Lee Y B, Song J K, Choi S, Lee D J, Kim J H, Lee M, Hyeon T, Kim D H 2015 Adv. Funct. Mater. 25 375 Google Scholar
[17]	Hwang S K, Bae I, Kim R H, Park C 2012 Adv. Mater. 24 5910 Google Scholar
[18]	Li Q, Chen L, Gadinski M R, Zhang S, Zhang G, Li H, Haque A, Chen L, Jackson T N, Wang Q 2015 Nature 523 576 Google Scholar
[19]	Kim K L, Lee W, Hwang S K, Joo S H, Cho S M, Song G, Cho S H, Jeong B, Hwang I, Ahn J H, Yu Y J, Shin T J, Kwak S K, Kang S J, Park C 2016 Nano Lett. 16 334 Google Scholar
[20]	Pan H, Ma J, Ma J, Zhang Q, Liu X, Guan B, Gu L, Zhang X, Zhang Y J, Li L, Shen Y, Lin Y H, Nan C W 2018 Nat. Commun. 9 1813 Google Scholar
[21]	Liang Z, Liu M, Ma C, Shen L, Lu L, Jia C L 2018 J. Mater. Chem. A 6 12291 Google Scholar
[22]	Jiang J, Shen Z, Qian J, Dan Z, Guo M, He Y, Lin Y, Nan C, Chen L, Shen Y 2019 Nano Energy 62 220 Google Scholar
[23]	Bao Z, Hou C, Shen Z, Sun H, Zhang G, Luo Z, Dai Z, Wang C, Chen X, Li L, Yin Y, Shen Y, Li X 2020 Adv. Mater. 32 1907227 Google Scholar
[24]	Li Q, Liu F, Yang T, Gadinski M R, Zhang G, Chen L, Wang Q 2016 Proc. Natl. Acad. Sci. U. S. A. 113 9995 Google Scholar
[25]	Zhang T, Chen X, Thakur Y, Lu B, Zhang Q, Runt J, Zhang Q M 2020 Sci. Adv. 6 6622 Google Scholar
[26]	Choi K J, Biegalski M, Li Y L, Sharan A, Schubert J, Uecker R, Reiche P, Chen Y B, Pan X Q, Gopalan V, Chen L Q, Schlom D G, Eom C B 2004 Science 306 1005 Google Scholar
[27]	Rojac T, Bencan A, Malic B, Tutuncu G, Jones J L, Daniels J E, Damjanovic D 2014 J. Am. Ceram. Soc. 97 1993 Google Scholar
[28]	Park S E, Shrout T R 1997 J. Appl. Phys. 82 1804 Google Scholar
[29]	Li F, Cabral M J, Xu B, Cheng Z, Dickey E C, LeBeau J M, Wang J, Luo J, Taylor S, Hackenberger W, Bellaiche L, Xu Z, Chen L Q, Shrout T R, Zhang S 2019 Science 364 264 Google Scholar
[30]	Won S S, Seo H, Kawahara M, Glinsek S, Lee J, Kim Y, Jeong C K, Kingon A I, Kim S 2019 Nano Energy 55 182 Google Scholar
[31]	Palneedi H, Yeo H G, Hwang G T, Annapureddy V, Kim J W, Choi J J, Trolier McKinstry S, Ryu J 2017 APL Mater. 5 096111 Google Scholar
[32]	Ko Y J, Kim D Y, Won S S, Ahn C W, Kim I W, Kingon A I, Kim S, Ko J, Jung J H 2016 ACS Appl. Mater. Interfaces 8 6504 Google Scholar
[33]	Bretos I, Jimenez R, Wu A, Kingon A I, Vilarinho P M, Calzada M L 2014 Adv. Mater. 26 1405 Google Scholar
[34]	Tomczyk M, Bretos I, Jiménez R, Mahajan A, Ramana E V, Calzada M L, Vilarinho P M 2017 J. Mater. Chem. C 5 12529 Google Scholar
[35]	Yu H, Chung C C, Shewmon N, Ho S, Carpenter J H, Larrabee R, Sun T, Jones J L, Ade H, O'Connor B T, So F 2017 Adv. Funct. Mater. 27 1700461 Google Scholar
[36]	Ke S, Chen C, Fu N, Zhou H, Ye M, Lin P, Yuan W, Zeng X, Chen L, Huang H 2016 ACS Appl. Mater. Interfaces 8 28406 Google Scholar
[37]	Liu W Y, Liao J J, Jiang J, Zhou Y C, Chen Q, Mo S T, Yang Q, Peng Q X, Jiang L M 2020 J. Mater. Chem. C 8 3878 Google Scholar
[38]	Ma B, Tong S, Narayanan M, Liu S, Chao S, Balachandran U 2011 Mater. Res. Bull. 46 1124 Google Scholar
[39]	Yeo H G, Ma X, Rahn C D, Troliermckinstry S 2016 Adv. Funct. Mater. 26 5940 Google Scholar
[40]	Liang W, Li Z, Bi Z, Nan T, Du H, Nan C, Chen C, Jia Q, Lin Y 2014 J. Mater. Chem. C 2 708 Google Scholar
[41]	Lee H J, Won S S, Cho K H, Han C K, Mostovych N, Kingon A I, Kim S, Lee H Y 2018 Appl. Phys. Lett. 112 092901 Google Scholar
[42]	Yeo H G, Xue T, Roundy S, Ma X, Rahn C, Trolier McKinstry S 2018 Adv. Funct. Mater. 28 1801327 Google Scholar
[43]	Kingon A I, Srinivasan S 2005 Nat. Mater. 4 233 Google Scholar
[44]	Wu A, Vilarinho P M, Reaney I, Miranda Salvado I M 2003 Chem. Mater. 15 1147 Google Scholar
[45]	Bharadwaja S S N, Dechakupt T, Trolier McKinstry S, Beratan H 2008 J. Am. Ceram. Soc. 91 1580 Google Scholar
[46]	Wang Z J, Cao Z P, Otsuka Y, Yoshikawa N, Kokawa H, Taniguchi S 2008 Appl. Phys. Lett. 92 222905 Google Scholar
[47]	Bretos I, Jiménez R, Tomczyk M, Rodríguez Castellón E, Vilarinho P M, Calzada M L 2016 Sci. Rep. 6 20143 Google Scholar
[48]	Bretos I, Jiménez R, Ricote J, Sirera R, Calzada M L 2020 Adv. Funct. Mater. 30 2001897 Google Scholar
[49]	Arthur J R 2002 Surf. Sci. 500 189 Google Scholar
[50]	Kourkoutis L F, Song J H, Hwang H Y, Muller D A 2010 Proc. Natl. Acad. Sci. U. S. A. 107 11682 Google Scholar
[51]	Matthews J W, Blakeslee A E 1974 J. Cryst. Growth 27 118 Google Scholar
[52]	Koma A, Yoshimura K 1986 Surf. Sci. 174 556 Google Scholar
[53]	Koma A, Ueno K, Saiki K 1991 J. Cryst. Growth 111 1029 Google Scholar
[54]	Koma A 1999 J. Cryst. Growth 201 236 Google Scholar
[55]	Bitla Y, Chu Y H 2017 FlatChem 3 26 Google Scholar
[56]	Reichelt K, Lutz H O 1971 J. Cryst. Growth 10 103 Google Scholar
[57]	Derose J A, Thundat T, Nagahara L A, Lindsay S 1991 Surf. Sci. 256 102 Google Scholar
[58]	Baski A A, Fuchs H 1994 Surf. Sci. 313 275 Google Scholar
[59]	Dishner M H, Ivey M M, Gorer S, Hemminger J C, Feher F J 1998 J. Vac. Sci. Technol. 16 3295 Google Scholar
[60]	Ji Q, Zhang Y, Gao T, Zhang Y, Ma D, Liu M, Chen Y, Qiao X, Tan P H, Kan M, Feng J, Sun Q, Liu Z 2013 Nano Lett. 13 3870 Google Scholar
[61]	Zhou Y, Nie Y, Liu Y, Yan K, Hong J, Jin C, Zhou Y, Yin J, Liu Z, Peng H 2014 ACS Nano 8 1485 Google Scholar
[62]	Xia J, Zhu D, Wang L, Huang B, Huang X, Meng X 2015 Adv. Funct. Mater. 25 4255 Google Scholar
[63]	Bitla Y, Chu Y H 2016 International Conference of Asian Union of Magnetics Societies (ICAUMS) August 1–5, 2016, Tainan, China p18162406
[64]	Amrillah T, Bitla Y, Shin K, Yang T, Hsieh Y H, Chiou Y Y, Liu H J, Do T H, Su D, Chen Y C, Jen S U, Chen L Q, Kim K H, Juang J Y, Chu Y H 2017 ACS Nano 11 6122 Google Scholar
[65]	Jiang J, Bitla Y, Huang C W, Do T H, Liu H J, Hsieh Y H, Ma C H, Jang C Y, Lai Y H, Chiu P W, Wu W W, Chen Y C, Zhou Y C, Chu Y H 2017 Sci. Adv. 3 1700121 Google Scholar
[66]	Liang Z, Liu M, Shen L, Lu L, Ma C, Lu X, Lou X, Jia C L 2019 ACS Appl. Mater. Interfaces 11 5247 Google Scholar
[67]	Qian J, Han Y, Yang C, Lv P, Zhang X, Feng C, Lin X, Huang S, Cheng X, Cheng Z 2020 Nano Energy 74 104862 Google Scholar
[68]	Yang Y, Yuan G, Yan Z, Wang Y, Lu X, Liu J M 2017 Adv. Mater. 29 1700425 Google Scholar
[69]	Konagai M, Sugimoto M, Takahashi K 1978 J. Cryst. Growth 45 277 Google Scholar
[70]	Park K I, Xu S, Liu Y, Hwang G T, Kang S J, Wang Z L, Lee K J 2010 Nano Lett. 10 4939 Google Scholar
[71]	Gan Q, Rao R A, Eom C B, Garrett J L, Lee M 1998 Appl. Phys. Lett. 72 978 Google Scholar
[72]	Deneke C, Wild E, Boldyreva K, Baunack S, Cendula P, Monch I, Simon M, Malachias A, Dorr K, Schmidt O G 2011 Nanoscale Res. Lett. 6 621 Google Scholar
[73]	Qi Y, Jafferis N T, Jr Lyons K, Lee C M, Ahmad H, McAlpine M C 2010 Nano Lett. 10 524 Google Scholar
[74]	Qi Y, Kim J, Nguyen T D, Lisko B, Purohit P K, McAlpine M C 2011 Nano Lett. 11 1331 Google Scholar
[75]	Bakaul S R, Serrao C R, Lee M, Yeung C W, Sarker A, Hsu S L, Yadav A K, Dedon L, You L, Khan A I, Clarkson J D, Hu C, Ramesh R, Salahuddin S 2016 Nat. Commun. 7 10547 Google Scholar
[76]	An F, Qu K, Zhong G, Dong Y, Ming W, Zi M, Liu Z, Wang Y, Qi B, Ding Z, Xu J, Luo Z, Gao X, Xie S, Gao P, Li J 2020 Adv. Funct. Mater. 31 2003495 Google Scholar
[77]	Lu D, Baek D J, Hong S S, Kourkoutis L F, Hikita Y, Hwang H Y 2016 Nat. Mater. 15 1255 Google Scholar
[78]	Ji D, Cai S, Paudel T R, Sun H, Zhang C, Han L, Wei Y, Zang Y, Gu M, Zhang Y, Gao W, Huyan H, Guo W, Wu D, Gu Z, Tsymbal E Y, Wang P, Nie Y, Pan X 2019 Nature 570 87 Google Scholar
[79]	Dong G, Li S, Yao M, Zhou Z, Zhang Y Q, Han X, Luo Z, Yao J, Peng B, Hu Z, Huang H, Jia T, Li J, Ren W, Ye Z G, Ding X, Sun J, Nan C W, Chen L Q, Li J, Liu M 2019 Science 366 475 Google Scholar
[80]	Han L, Fang Y, Zhao Y, Zang Y, Gu Z, Nie Y, Pan X 2020 Adv. Mater. Interfaces 7 1901604 Google Scholar
[81]	Takahashi R, Lippmaa M 2020 ACS Appl. Mater. Interfaces 12 25042 Google Scholar
[82]	Zhang Y, Ma C, Lu X, Liu M 2019 Mater. Horizons 6 911 Google Scholar
[83]	Do Y H, Kang M G, Kim J S, Kang C Y, Yoon S J 2012 Sens. Actuator A Phys. 184 124 Google Scholar
[84]	Delmdahl R, Patzel R, Brune J 2013 Phys. Procedia 41 241 Google Scholar
[85]	Lee H S, Chung J, Hwang G T, Jeong C K, Jung Y, Kwak J H, Kang H, Byun M, Kim W D, Hur S, Oh S H, Lee K J 2014 Adv. Funct. Mater. 24 6914 Google Scholar
[86]	Park K I, Son J H, Hwang G T, Jeong C K, Ryu J, Koo M, Choi I, Lee S H, Byun M, Wang Z L, Lee K J 2014 Adv. Mater. 26 2514 Google Scholar
[87]	Jeong C K, Park K, Son J H, Hwang G T, Lee S H, Park D Y, Lee H E, Lee H K, Byun M, Lee K J 2014 Energy Environ. Sci. 7 4035 Google Scholar
[88]	Kim S, Son J H, Lee S H, You B K, Park K I, Lee H K, Byun M, Lee K J 2014 Adv. Mater. 26 7480 Google Scholar
[89]	Lee H E, Kim S J, Ko J, Yeom H, Byun C, Lee S H, Joe D J, Im T, Park S K, Lee K J 2016 Adv. Funct. Mater. 26 6170 Google Scholar
[90]	Peng Y, Que M, Lee H E, Bao R, Wang X, Lu J, Yuan Z, Li X, Tao J, Sun J, Zhai J, Lee K J, Pan C 2019 Nano Energy 58 633 Google Scholar
[91]	Tsakalakos L, Sands T 2000 Appl. Phys. Lett. 76 227 Google Scholar
[92]	Kim J, Park H, Hannon J B, Bedell S W, Fogel K, Sadana D K, Dimitrakopoulos C 2013 Science 342 833 Google Scholar
[93]	Kim J, Bayram C, Park H, Cheng C W, Dimitrakopoulos C, Ott J A, Reuter K B, Bedell S W, Sadana D K 2014 Nat. Commun. 5 4836 Google Scholar
[94]	Kim Y, Cruz S S, Lee K, Alawode B O, Choi C, Song Y, Johnson J M, Heidelberger C, Kong W, Choi S, Qiao K, Almansouri I, Fitzgerald E A, Kong J, Kolpak A M, Hwang J, Kim J 2017 Nature 544 340 Google Scholar
[95]	Kong W, Li H, Qiao K, Kim Y, Lee K, Nie Y, Lee D, Osadchy T, Molnar R J, Gaskill D K, Myers Ward R L, Daniels K M, Zhang Y, Sundram S, Yu Y, Bae S H, Rajan S, Shao Horn Y, Cho K, Ougazzaden A, Grossman J C, Kim J 2018 Nat. Mater. 17 999 Google Scholar
[96]	Kum H S, Lee H, Kim S, Lindemann S, Kong W, Qiao K, Chen P, Irwin J, Lee J H, Xie S, Subramanian S, Shim J, Bae S H, Choi C, Ranno L, Seo S, Lee S, Bauer J, Li H, Lee K, Robinson J A, Ross C A, Schlom D G, Rzchowski M S, Eom C B, Kim J 2020 Nature 578 75 Google Scholar
[97]	Scott J F 2007 Science 315 954 Google Scholar
[98]	Gao W, You L, Wang Y, Yuan G, Chu Y, Liu Z, Liu J 2017 Adv. Electron. Mater. 3 1600542 Google Scholar
[99]	Gao D, Tan Z, Fan Z, Guo M, Hou Z, Chen D, Qin M, Zeng M, Zhou G, Gao X, Lu X, Liu J M 2019 ACS Appl. Mater. Interfaces 11 27088 Google Scholar
[100]	Yao Z, Song Z, Hao H, Yu Z, Cao M, Zhang S, Lanagan M T, Liu H 2017 Adv. Mater. 29 1601727 Google Scholar
[101]	Palneedi H, Peddigari M, Hwang G, Jeong D, Ryu J 2018 Adv. Funct. Mater. 28 1803665 Google Scholar
[102]	Zou K, Dan Y, Xu H, Zhang Q, Lu Y, Huang H, He Y 2019 Mater. Res. Bull. 113 190 Google Scholar
[103]	Yang L, Kong X, Li F, Hao H, Cheng Z, Liu H, Li J F, Zhang S 2019 Prog. Mater. Sci. 102 72 Google Scholar
[104]	Ma B, Kwon D K, Narayanan M, Balachandran U 2009 J. Electroceram. 22 383 Google Scholar
[105]	Zhang Y, Li Y, Hao X, Jiang H, Zhai J 2019 J. Am. Ceram. Soc. 102 6107 Google Scholar
[106]	Zhang Y, Li Y, Du J, Sun N, Hao X, Jiang H, Zhai J 2019 J. Mater. Sci.: Mater. Electron. 30 11945 Google Scholar
[107]	Michael Sapia E K, Li H U, Jackson T N, Trolier Mckinstry S 2015 J. Appl. Phys. 118 13574 Google Scholar
[108]	Sun Z, Ma C, Liu M, Cui J, Lu L, Lu J, Lou X, Jin L, Wang H, Jia C L 2017 Adv. Mater. 29 1604427 Google Scholar
[109]	Ma B, Hu Z, Koritala R E, Lee T H, Dorris S E, Balachandran U 2015 J. Mater. Sci.: Mater. Electron. 26 9279 Google Scholar
[110]	Yang C, Lv P, Qian J, Han Y, Ouyang J, Lin X, Huang S, Cheng Z 2019 Adv. Energy Mater. 9 1803949 Google Scholar
[111]	Lv P, Yang C, Qian J, Wu H, Huang S, Cheng X, Cheng Z 2020 Adv. Energy Mater. 10 1904229 Google Scholar
[112]	Liang Z, Ma C, Shen L, Lu L, Lu X, Lou X, Liu M, Jia C L 2019 Nano Energy 57 519 Google Scholar
[113]	Shen B z, Li Y, Hao X 2019 ACS Appl. Mater. Interfaces 11 34117 Google Scholar
[114]	Han S, Zhou Y, Roy V A L 2013 Adv. Mater. 25 5425 Google Scholar
[115]	Gao H, Yang Y, Wang Y, Chen L, Wang J, Yuan G, Liu J 2019 ACS Appl. Mater. Interfaces 11 35169 Google Scholar
[116]	Arimoto Y, Ishiwara H 2004 MRS Bull. 29 823 Google Scholar
[117]	Sun J, Zheng X 2011 IEEE Trans. Electron Devices 58 3559 Google Scholar
[118]	Vasilopoulou M, Kim B S, Kim H P, da Silva W J, Schneider F K, Mat Teridi M A, Gao P, Mohd Yusoff A R b, Nazeeruddin M K 2020 Nano Lett. 20 5081 Google Scholar
[119]	Bakaul S R, Serrao C R, Lee O, Lu Z, Yadav A, Carraro C, Maboudian R, Ramesh R, Salahuddin S 2017 Adv. Mater. 29 1605699 Google Scholar
[120]	Su L, Lu X, Chen L, Wang Y, Yuan G, Liu J 2018 ACS Appl. Mater. Interfaces 10 21428 Google Scholar
[121]	Yang B, Li C, Liu M, Wei R, Tang X, Hu L, Song W, Zhu X, Sun Y 2020 Journal of Materiomics 6 600 Google Scholar
[122]	Yang C, Han Y, Qian J, Lv P, Lin X, Huang S, Cheng Z 2019 ACS Appl. Mater. Interfaces 11 12647 Google Scholar
[123]	Lee W, Kahya O, Toh C T, Özyilmaz B, Ahn J H 2013 Nanotechnology 24 475202 Google Scholar
[124]	Ren C, Zhong G, Xiao Q, Tan C, Feng M, Zhong X, An F, Wang J, Zi M, Tang M, Tang Y, Jia T, Li J 2019 Adv. Funct. Mater. 30 1906131 Google Scholar
[125]	Wang Z L, Song J 2006 Science 312 242 Google Scholar
[126]	Chang C, Tran V H, Wang J, Fuh Y, Lin L 2010 Nano Lett. 10 726 Google Scholar
[127]	Martins P, Lopes A C, Lancerosmendez S 2014 Prog. Polym. Sci. 39 683 Google Scholar
[128]	Kwon J, Seung W, Sharma B K, Kim S, Ahn J 2012 Energy Environ. Sci. 5 8970 Google Scholar
[129]	Hwang G T, Park H, Lee J H, Oh S, Park K I, Byun M, Park H, Ahn G, Jeong C K, No K, Kwon H, Lee S G, Joung B, Lee K J 2014 Adv. Mater. 26 4880 Google Scholar
[130]	Dagdeviren C, Su Y, Joe P, Yona R, Liu Y, Kim Y S, Huang Y, Damadoran A R, Xia J, Martin L W, Huang Y, Rogers J A 2014 Nat. Commun. 5 4496 Google Scholar
[131]	Inaoka T, Shintaku H, Nakagawa T, Kawano S, Ogita H, Sakamoto T, Hamanishi S, Wada H, Ito J 2011 Proc. Natl. Acad. Sci. U. S. A. 108 18390 Google Scholar
[132]	Peng B, Zhang Q, Li X, Sun T, Fan H, Ke S, Ye M, Wang Y, Lu W, Niu H, Scott J F, Zeng X, Huang H 2015 Adv. Electron. Mater. 1 1500052 Google Scholar
[133]	Fan Z, Fan H, Lu Z, Li P, Huang Z, Tian G, Yang L, Yao J, Chen C, Chen D, Yan Z, Lu X, Gao X, Liu J M 2017 Phys. Rev. Appl. 7 014020 Google Scholar
[134]	Zhang Q, Xie L, Liu G, Prokhorenko S, Nahas Y, Pan X, Bellaiche L, Gruverman A, Valanoor N 2017 Adv. Mater. 29 1702375 Google Scholar
[135]	Wang J J, Su Y J, Wang B, Ouyang J, Ren Y H, Chen L Q 2020 Nano Energy 72 104665 Google Scholar

[1]	李雨凡, 薛文清, 李玉超, 战艳虎, 谢倩, 李艳凯, 查俊伟. 三明治结构柔性储能电介质材料研究进展. 物理学报, 2024, 73(2): 027702. doi: 10.7498/aps.73.20230614
[2]	张俊廷, 纪克, 谢禹, 李超. 基于钙钛矿的二维铁磁体Sr₂RuO₄单层. 物理学报, 2024, 73(22): 226101. doi: 10.7498/aps.73.20241042
[3]	王辉, 郑德旭, 姜箫, 曹越先, 杜敏永, 王开, 刘生忠, 张春福. 基于协同钝化策略制备高性能柔性钙钛矿太阳能电池. 物理学报, 2024, 73(7): 078401. doi: 10.7498/aps.73.20231846
[4]	陈乐迪, 范仁浩, 刘雨, 唐贡惠, 马中丽, 彭茹雯, 王牧. 基于柔性超构材料宽带调控太赫兹波的偏振态. 物理学报, 2022, 71(18): 187802. doi: 10.7498/aps.71.20220801
[5]	宋谢飞, 晒旭霞, 李洁, 马新茹, 伏云昌, 曾春华. 无机非铅钙钛矿Cs₃Bi₂I₉的电子和光学性质. 物理学报, 2022, 71(1): 017101. doi: 10.7498/aps.71.20211599
[6]	杨华礼, 谢亚丽, 芦增星, 汪志明, 李润伟. 柔性磁性薄膜材料与器件研究进展. 物理学报, 2022, 71(9): 097503. doi: 10.7498/aps.71.20212354
[7]	宋谢飞, 晒旭霞, 李洁, 马新茹, 伏云昌, 曾春华. 无机非铅钙钛矿Cs3Bi2I9的电子和光学性质. 物理学报, 2021, (): . doi: 10.7498/aps.70.20211599
[8]	谈溥川, 赵超超, 樊瑜波, 李舟. 自驱动柔性生物医学传感器的研究进展. 物理学报, 2020, 69(17): 178704. doi: 10.7498/aps.69.20201012
[9]	杨自欣, 高章然, 孙晓帆, 蔡宏灵, 张凤鸣, 吴小山. 铅基钙钛矿铁电晶体高临界转变温度的机器学习研究. 物理学报, 2019, 68(21): 210502. doi: 10.7498/aps.68.20190942
[10]	赵润, 杨浩. 多铁性钙钛矿薄膜的氧空位调控研究进展. 物理学报, 2018, 67(15): 156101. doi: 10.7498/aps.67.20181028
[11]	赵国栋, 杨亚利, 任伟. 钙钛矿型氧化物非常规铁电研究进展. 物理学报, 2018, 67(15): 157504. doi: 10.7498/aps.67.20180936
[12]	兰林锋, 张鹏, 彭俊彪. 氧化物薄膜晶体管研究进展. 物理学报, 2016, 65(12): 128504. doi: 10.7498/aps.65.128504
[13]	柴磊, 钟敏. 钙钛矿太阳能电池近期进展. 物理学报, 2016, 65(23): 237902. doi: 10.7498/aps.65.237902
[14]	叶红军, 王大威, 姜志军, 成晟, 魏晓勇. 钙钛矿结构SnTiO3铁电相变的第一性原理研究. 物理学报, 2016, 65(23): 237101. doi: 10.7498/aps.65.237101
[15]	刘海文, 朱爽爽, 文品, 覃凤, 任宝平, 肖湘, 侯新宇. 基于发卡式开口谐振环的柔性双频带超材料. 物理学报, 2015, 64(3): 038101. doi: 10.7498/aps.64.038101
[16]	刘浩, 薛玉明, 乔在祥, 李微, 张超, 尹富红, 冯少君. 铜锌锡硫薄膜材料及其器件应用研究进展. 物理学报, 2015, 64(6): 068801. doi: 10.7498/aps.64.068801
[17]	夏祥, 刘喜哲. CH3NH3I在制备CH3NH3PbI(3-x)Clx钙钛矿太阳能电池中的作用. 物理学报, 2015, 64(3): 038104. doi: 10.7498/aps.64.038104
[18]	董京, 柴玉华, 赵跃智, 石巍巍, 郭玉秀, 仪明东, 解令海, 黄维. 柔性有机场效应晶体管研究进展. 物理学报, 2013, 62(4): 047301. doi: 10.7498/aps.62.047301
[19]	余柏林, 唐新峰, 祁　琼, 张清杰. CoSb3纳米热电材料的制备及热传输特性. 物理学报, 2004, 53(9): 3130-3135. doi: 10.7498/aps.53.3130
[20]	向军, 李莉萍, 苏文辉. 钙钛矿型氧离子导体KNb1-xMgxO3-δ的制备和表征. 物理学报, 2003, 52(6): 1474-1478. doi: 10.7498/aps.52.1474

计量

文章访问数: 15172
PDF下载量: 715
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板

柔性无机铁电薄膜的制备及其应用