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文章针对锗硅异质结双极晶体管(SiGe HBT)进行TCAD仿真建模，基于SiGe HBT器件模型搭建低噪放大器(LNA)电路，开展单粒子瞬态(SET)的混合仿真，研究SET脉冲随离子不同LET值、入射角度的变化规律，结果表明：随着入射离子LET值的增大，LNA端口的SET脉冲的幅值增大，振荡时间延长；随着离子入射角的增大，LNA端口的SET脉冲的幅值先增大后减小，振荡时间减小。使用反模(IM)共射共基结构(Cascode)降低LNA对单粒子效应的敏感度，验证了采用IM结构的LNA电路的相关射频性能。针对离子于共基极(CB)晶体管、共发射极(CE)晶体管两种位置入射进行SET实验。实验结果与本实验中的正向模式相比，IM Cascode结构的LNA电路的瞬态电流持续时间明显减少，并且峰值减小了66%及以上。In the article,TCAD simulation modeling is carried out for silicon germanium heterojunction transistor (SiGe HBT),and an X-band low noise amplifier (LNA) circuit is built based on the SiGe HBT device model to carry out the hybrid simulation of single-particle transient (SET).The variation rule of SET pulse with different LET values and incident angles of ions is studied,and the results show that:with the increase of incident LET value,the amplitude of SET pulse at the LNA port increases,and the oscillation time is prolonged;with the increase of incident angle of ions,the amplitude of SET pulse at the LNA port first increases and then decreases,and the oscillation time decreases.With the development of the characterization process,the cutoff frequency (fT),as well as the maximum oscillation frequency (fMAX) of SiGe HBT devices with IM structures,were measured considering the use of inverse-mode (IM) common emitter and common-base structures (Cascode) to reduce the sensitivity of the LNAs to single-particle effects.The article calibrates the devices of the TCAD platform as well as the devices of the ADS platform,establishes F-F LNAs as well as I-F LNAs on the ADS,respectively,and verifies the relevant RF performances of the LNA circuits using the IM-structured SiGe HBTs as the core devices.SET experiments are performed on the Sentaurus TCAD platform for the F-F LNA and I-F LNA circuits for ions incident at two positions:common base (CB) transistor and common emitter (CE) transistor,respectively.It is concluded that the LNA with IM structure still shows good RF performance compared with the standard LNA at 130 nm.The transient current duration of the LNA circuit with IM Cascode structure is significantly reduced,and the peak value is reduced by 66% or more,which significantly reduces the sensitivity of the SiGe LNA circuit to SET.
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Keywords:
- SiGe HBT /
- single particle effect /
- inverse mode /
- hybrid simulation
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