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When using a fly’s eye lens system for illumination homogenization of a highly coherent light source, interference effects between the sub-beams result in a periodic speckle distribution of illumination intensity, which disrupts illumination uniformity. It has been shown that using a rotating optical phase-shift plate behind the fly’s eye lens can eliminate interference patterns, but it only demonstrated engineering realizations. There is still a lack of detailed theoretical analysis and technical guidance on the methods of phase modulation and statistical averaging for fly’s eye lens homogenization systems. In this paper, a simulation model of fly’s eye random phase modulation homogenization system is developed and fully researched. Each sub-beam of the fly’s eye lens is randomly phase-modulated to break the coherence condition, and the illumination intensity of multiple independent modulations is cumulated to eliminate the interference pattern. The more times the intensity is cumulated, the better the homogenization is. Meanwhile, this paper analyzes the influence of the diffraction effect on homogenization, and explores the influence of the sub-lens size and focal length on the homogenization results in the diffracting-type and imaging-type systems. For an imaging type system, it is necessary to ensure that the first fly’s eye lens is on the front focal plane of the second fly’s eye lens By optimizing the parameters of the fly’s eye lens, a gaussian beam with a non-uniformity of 117% is homogenized into a flat-topped beam with a non-uniformity of 1.2 % in a square illumination area of 100 mm2 using an imaging-type system with p=1.8 mm and fA=9mm. This fly’s eye lens random phase modulation homogenization system has a simple structure, low energy loss and good illumination uniformity, and can be used in systems with high coherent laser input and high resolution requirements. This technology can be used in the field of deep-ultraviolet mask defect detection.
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Keywords:
- high-coherence light /
- homogenization /
- fly’s eye lens /
- phase modulation
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[1] Yu D Y, Tan H Y 2006 Engineering Optics (Beijing: China Machine Press) p165 (in Chinese) [郁道银，谈恒英 2006 工程光学 (北京:机械工业出版社） 第165页]
[2] Xu Z Y 2006 Laser & Infrared 36 737 (in Chinese) [许祖彦 2006 激光与红外 36 737]
[3] Deng L X, Dong T H, Fang Y W, Yang Y H, Gu C, Ming H, Xu L X 2021 Optics & Laser Technology 135 106686
[4] Wierer J J, Tsao J Y 2015 Phys. Status Solidi A 212 980
[5] Farshidianfar M H, Khajepouhor A, Gerlich A P 2017 Surface & Coatings Technology 315 326
[6] Takada A, Tojo T, Shibuya M 2008 Journal of Micro-nanolithography Mems and Moems 7 043010.
[7] Dickey F M 2014 Laser Beam Shaping Theory and Techniques Second Edition (Boca Raton: CRC Press) p406-414
[8] Deng X, Liang X, Chen Z, Yu W, Ma R 1986 Appl. Opt. 25 377
[9] Streibl N, Nölscher U, Jahns J, Walker S 1991 Appl. Opt. 30 2739
[10] Zheng X, Dai S Y, Zhang Y Y, Zhao S 2023 Acta Optica Sinica 43 1014005（in Chinese)[郑昕，戴深宇，张玉莹，赵帅 2023 光学学报 43 1014005]
[11] Zhang F, Zhu J, Yang B X, Huang L H, Hu X B, Xiao Y F, Huang H J 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, Beijing, China, November 17-19, 2013, p904619
[12] Jin Y H, Hassan A L, Jiang Y J 2016 Optics Express 24 24846
[13] Bu¨ttner A, Zeitner U D 2002 Optical Engineering 41 2393
[14] Fu S Z, Sun Y Q, Huang X G, Wu J, Zhou G L, Gu Y 2003 Chinese Journel of Lasers 30 129（in Chinese）[傅思祖，孙玉琴，黄秀光，吴江，周关林，顾援 2003 中国激光 30 129]
[15] Harder I, Lano M, Lindlein N, Schwider J 2004 Photon Management Strasbourg, France, April 26-30, 2004, p99
[16] Wippermann F, Zeitner U D, Dannberg P, Bräuer A, Sinzinger S 2007 Opt. Express 15 6218
[17] Cao A, Pang H, Wang J Z, Zhang M, Shi L F, Deng Q L 2015 IEEE Photonics Journal 7 2400207
[18] Kopp C, Ravel L, Meyrueis P 1999 Journal of Optics A Pure and Applied Optics 1 398
[19] Pei X Z, Liang Y H, Wang F, Zhu L X, Xie C Q 2019 Acta Photonica Sinica 48 314001 (in Chinese) [裴宪梓,梁永浩,王菲,朱效立,谢常青 2019 光子学报 48 314001]
[20] Zhao X H, Gao Y Q, Li F J, Ji L L, Cui Y, Rao D X, Feng W, Ma W X 2019 Appl. Opt. 58 2121
[21] Li F J, Gao Y Q, Zhao X H, Xia L, Liu D, Ji L L, Feng W, Rao D X, Cui Y, Shi H T, Liu J N, Ma W X, Sui Z 2020 Appl. Opt. 59 2976
[22] Voelkel R, Weible K J 2008 Optical Fabrication, Testing, & Metrology III Glasgow, Scotland, United Kingdom, September 2-5,2008, p71020J
[23] Oohashi K, Inoue H, Nomura T, Ono A, Tabata M, Suzuki H 2000 Photomask and Next Generation Lithography Mask Technology VII Kanagawa, Japan, April 12-13, 2000, p452
[24] Goodman J W (translated by Chen J B, Qin K C, Cao Q Z) 2020 Introduction to Fourier Optics (Beijing: Science Press) pp145-151 (in Chinese) [古德曼 J W著 (陈家壁，秦克诚，曹其智译) 2020 傅里叶光学导论（北京:科学出版社）第145-151页]
[25] Li L, Han X Q, Zhao S W, Bao H Y, Wang X B 2014 Laser & Optoelectronics Prog. 51 011401-1(in Chinese) [李丽,韩学勤，赵士伟，包鸿音，王兴宾 2014 激光与光电子学进展 51 011401-1]
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