-
采用有限差分时域算法计算(AlxGa1-x)2O3薄膜衬底上的周期性三角晶格Al纳米孔阵列的透过率，研究不同(AlxGa1-x)2O3衬底的Al组分x以及Al纳米孔阵列的厚度、孔径和周期对其光学传输特性的影响。数值计算结果表明，当x=0时，在263 nm和358 nm波长范围处出现两个强透射峰，随着x的增大，其中位于263 nm处的透射峰发生轻微蓝移，强度则先增强后下降；358 nm处的透射峰发生明显蓝移且不断加强。若纳米孔阵列的周期不变，随着空气柱孔径增大时，紫外波段两强透射峰峰值位置分别位于244 nm和347 nm处，两峰均先发生红移再蓝移，透过率不断增大，反射率减小。随着周期扩大，紫外波段两强透射峰分别位于249 nm和336 nm处，两透射峰均发生明显红移，其中249 nm处的透射峰红移至304 nm，336 nm处的透射峰红移至417 nm，并且透过率不断降低。随着Al厚度的增大，位于380 nm处的透射峰峰值位置发生蓝移，且透过率不断下降。
-
关键词:
- (AlxGa1-x)2O3 /
- Al纳米孔阵列 /
- 局域表面等离子体共振 /
- 超常透射
The Finite Difference Time Domain method was used to compute the transmission of periodic triangular-lattice Al nanopore arrays on (AlxGa1-x)2O3 thin film substrates. The impact of Al component x in(AlxGa1-x)2O3 substrate, as well as the thickness, aperture and period of Al nanopore array on its optical transmission behavior was studied systematically.
The numerical results indicate there are two strong transmission peaks at 263 nm and 358 nm when x=0. As x increases, the transmission peak at 263 nm exhibits a slight blue-shift with an initial increase followed by a decrease in intensity. Meanwhile, the transmission peak at 358 nm demonstrates a noticeable blue-shift and its intensity strengthens continuously. The change of Al component x has a significant effect on the peak position of the transmission peak in the longer ultraviolet band and the peak transmission in the shorter ultraviolet band. If the periodic structure of the nanopore array keeps unchangeable, the two prominent transmission peaks appear near 244 nm and 347 nm respectively as the air column apertures enlarge. Remarkably, these dual peaks initially undergo a red-shift, and subsequently a blue-shift, all while the transmission rises steadily and the reflectivity diminishes. The change in aperture size can significantly affect the peak transmission, and by controlling the aperture size appropriately, the transmission intensity can be significantly enhanced. With the expansion of the period, the two strong transmission peaks are located at 249 nm and 336 nm respectively, and the two transmission peaks show obvious red-shift. The former transmission peak is redshifted to 304 nm, and the latter one is redshifted to 417 nm. Moreover, the transmission at these peaks continues to decrease. The change in period can significantly affect the central wavelength of the transmission peak, and the periodicity of the array plays a dominant role in modulating the peak position over a large wavelength range. As Al thickness increases, a blue-shift of the transmission peak at 380 nm occurs, and the transmission decreases continuously. The change in thickness significantly affects the transmission intensity of the transmission peak in the longer ultraviolet band and the visible light region, but it is not as pronounced as the effect of aperture size on transmission intensity.
Through reasonable design and optimization of structural parameters of Al nanopore array/(AlxGa1-x)2O3, the peak position of transmission peak can be effectively regulated and the extraordinary transmission in ultraviolet band can be achieved.-
Keywords:
- (AlxGa1-x)2O3 /
- Nanopore array /
- Local surface plasmon resonance /
- Extraordinary transmission
-
[1] Ebbesen T W, Lezec H J, Ghaemi H F, Thio T, Wolff P A 1998 Nature 391 667
[2] Wang L S, Wang G X, Yang K, Zhang W N, Liu W J 2023 Opt. Commun. 535
[3] Hou Y M 2011 Plasmonics 6 289
[4] Tam H T T, Kajikawa K 2021 Opt. Express. 29 35191
[5] Yue W S, Wang Z H, Yang Y, Li J Q, Wu Y, Chen L Q, Ooi B, Wang X B, Zhang X X 2014 Nanoscale 6 7917
[6] Guan J F, Yu X, Ding G T, Chen T, Lu y Q 2024 Acta Phys. Sin. (in Chinese) [关建飞，俞潇，丁冠天，陈陶，陆云清 2024 物理学报]
[7] Lu Y Q, Cheng X Y, Xu M, Xu j, Wang J 2016 Acta Phys. Sin. 65 113 (in Chinese) [陆云清，成心怡，许敏，许吉，王瑾 2016 物理学报 65 113]
[8] Du B B, Yang Y, Zhang Y, Jia P P, Ebendorff-Heidepriem H, Ruan Y L, Yang D X 2019 J. Phys. D: Appl. Phys. 52 1.
[9] Ozbay E 2006 Science 311 189
[10] Barnes W L, Dereux A, Ebbesen T W 2003 Nature 424 824
[11] Ekinci Y, Solak H H, David C 2007 Opt. Lett. 32 172
[12] Hu J L, Shen M Z, Li Z G, Li X H, Liu G Q, Wang X D, Kan C X, Li Y 2017 Nanotechnology 28 215205
[13] Zhang X G, Liu G Q, Liu, Z Q, Hu Y, Cai Z J, Liu X S, Fu G L, Liu M L 2014 Opt. Eng. 53 1
[14] Watanabe Y, Inami W, Kawata Y 2011 J. Appl. Phys. 109 023112
[15] Ekinci Y, Solak H H, Loeffler J F 2008 J. Appl. Phys. 104 083107
[16] Li H J, Wu Z Y, Wu S Y, Tian P F, Fang Z L 2023 J. Alloys Compd. 960
[17] Bhuiyan A F M A U, Feng Z X, Meng L Y, Fiedler A, Huang H L, Neal A T, Steinbrunner E, Mou S, Hwang J, Rajan S, Zhao H P 2022 J. Appl. Phys. 131
[18] Huang R, Wang Z Y, Wu K, Xu H, Wang Q, Guo Y C 2024 J. Semicond. 45 69
[19] Xi H R, Yang T F, Xie M Y, Liang X J, Fang Z L, Ye Y, Chen Y, Wei Y M, Wang Z, Guan H Y, Lu H H 2024 Laser Photon. Rev. 18
[20] Dashkov A S, Khakhulin S A, Shapran D A, Glinskii G F, KostrominN A, Vasilev A L, Yakunin S N, Komkov O S, Pirogov E V, Sobolev M S, Goray L I, Bouravleuv A D 2024 J. Semicond. 45 57
[21] Zhukovsky S V, Andryieuski A, Takayama O, Shkondin E, Malureanu R, Jensen F, Lavrinenko A V 2015 Phys. Rev. Lett. 115 177402
[22] Tolmachev V A, Mavlyanov R K, Kalinin D A, Zharova Y A, Zaitseva N V, Pavlov S I 2017 Opt. Spectrosc. 123 928
[23] Pan L, Song B A, Xiao C F, Zhang P Q, Lin C G, Dai S X 2020 Acta Phys. Sin. 69 93 (in Chinese) [潘磊，宋宝安，肖传富，张培晴，林常规，戴世勋 2020 物理学报 69 93]
[24] Schmidt-Grund R, Kranert C, von Wenckstern H, Zviagin V, Lorenz M, Grundmann M 2015 J. Appl. Phys. 117 165307-1
[25] Tolmachev V A, Mavlyanov R K, Kalinin D A, Zharova Y A, Zaitseva N V, Pavlov S I 2017 Opt. Spectrosc. 123 928
[26] MALITSON I H 1962 J. Opt. Soc. Am. 52 1377
[27] Genet C, Ebbesen T W 2007 Nature 445 39
[28] Van der Molen K L, Klein Koerkamp K J, Enoch S, Segerink F B, van Hulst N F, Kuipers L 2005 Phys. Rev. B 72 045421
[29] Han J G, Azad A K, Gong M F, Lu X C, Zhang W L 2007 Appl. Phys. Lett. 91 071122
[30] Liu Z W, Steele J M, Srituravanich W, Pikus Y, Sun C, Zhang X 2005 Nano Lett. 5 1726
[31] Bethe H A 1944 Phys.Rev. 66 163
计量
- 文章访问数: 97
- PDF下载量: 2
- 被引次数: 0
下载:
