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本文提出了一种紧凑的基于多模干涉效应的氧化钽（Ta2O5）波长双工器，用于实现980nm和1550 nm波长的复用和解复用。该器件采用对称干涉和配对干涉级联的混合多模干涉波导结构，在不利用亚波长光栅等复杂结构调控泵浦光和信号光拍长的基础上，将分段多模干涉波导的总长度缩短为普通配对型多模干涉波导结构的1/3。采用三维有限时域差分(3D-FDTD)工具对建立的模型进行分析和优化，结果表明所设计的MMI型双工器具有较低的插损和较高的工艺容差性，在980 nm处插损为0.4 dB，1550 nm处插损为0.8 dB，消光比均优于16dB。该器件在1550 nm波长周围的1-dB带宽达150 nm，在980 nm波长周围的1-dB带宽达70 nm。文中设计的多级干涉结构极大地降低了MMI器件的设计难度并缩小了980/1550 nm波分复用/解复用器的整体尺寸，有望应用在片上集成的掺铒波导放大器和激光器领域。此外，不同多模干涉机制级联的设计思路为分离两个中心波长相隔较远的光信号提供了技术参考，在通信波段和中红外波段波分复用/解复用器件上具有潜在的应用价值。On-chip erbium-doped/erbium-ytterbium co-doped waveguide amplifiers (EDWAs/EYCDWAs) have received extensive research attention in recent years, As an important component of EDWA, there has been relatively little research on integrated wavelength division multiplexing/demultiplexing devices for 980 nm pump light and 1550 nm signal light. This article aims to propose a compact Ta2O5 980 / 1550 nm wavelength diplexer based on multimode interference effects. The device employs a structure of symmetric interference and paired interference cascade, which reduces the total length of the segmented multimode interference waveguide to one-third of the ordinary paired multimode interference waveguide without using any complex structures such as subwavelength gratings to regulate the beat length of the pump and signal light. The three-dimensional finite difference time domain (3D-FDTD) tool was used to analyze and optimize the established model. The results demonstrate that the designed MMI diplexer has low insertion loss and high process tolerance, with an insertion loss of 0.4 dB at 980 nm and 0.8 dB at 1550 nm, and the extinction ratios are both better than 16 dB. Moreover, the 1-dB bandwidth is up to 150 nm around the 1550 nm wavelength and up to 70 nm around the 980 nm wavelength. The segmented structure designed in the article greatly reduces the design difficulty of MMI devices and reduces the overall size of 980 / 1550 nm wavelength division multiplexers/demultiplexers. It is expected to be applied in on-chip integrated erbium-doped waveguide amplifiers and lasers. In addition, the segmented design approach of cascading the hybrid multimode interference mechanism provides a technical reference for separating two optical signals with far apart center wavelengths such as 800 / 1310 nm and 1550 / 2000 nm, and has potential application value in communication and mid infrared diplexing devices.
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Keywords:
- Multimode inteference /
- Cascade /
- Wavelength division multiplexing /
- Ta2O5
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