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织构(Ba,Ca)(Zr,Ti) O3陶瓷全矩阵机电性能及超声换能器应用

刘迎春 朱元博 张洪军 刘海顺 曹文武

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织构(Ba,Ca)(Zr,Ti) O3陶瓷全矩阵机电性能及超声换能器应用

刘迎春, 朱元博, 张洪军, 刘海顺, 曹文武

Full matrix electromechanical properties and applications to ultrasonic transducer of textured (Ba,Ca)(Zr,Ti)O3 ceramics

LIU Yingchun, ZHU Yuanbo, ZHANG Hongjun, LIU Haishun, CAO Wenwu
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  • 织构(Ba,Ca)(Zr,Ti) O3(BCZT)陶瓷兼具高压电、高声速和低介电,十分契合超声换能器高灵敏度和大带宽的发展需求.然而织构陶瓷普遍缺乏器件设计所需的介电εij、压电dij及弹性常数sij等全矩阵机电参数,而且现有机电耦合系数k的计算公式仅适用于极端长径比的理想情况,难以精确描述k随有限长径比的演变规律,这制约了陶瓷的实际应用.本工作通过模板籽晶生长法成功制备出沿[00l]C高度取向(织构度f00l~98%)的织构BCZT陶瓷,通过谐振-反谐振法结合脉冲回波超声测量技术首次建立了完整的全矩阵参数数据库.织构BCZT陶瓷呈现强各向异性泊松比,压电系数d33(605 pC/N)、机电耦合系数k33(0.73)接近于PZT-5H陶瓷,压电电压常数g33(23.6×10-3(V/m/) Pa)较PZT-5H提升20%.基于压电本构方程构建出k关于任意长径比的理论模型,据此设计制备的1-3型BCZT复合材料换能器具有高灵敏度和宽频带,其插入损耗为-33.0 dB,在~3.0 MHz中心频率处-6 dB带宽高达107.1%,优于文献报道的PZT-5H超声换能器.本研究不仅为无铅压电材料的器件化应用提供了完整的机电参数,且为高性能绿色超声诊断设备的发展奠定了理论与技术基础.
    Ultrasound diagnostic technology demonstrates unique clinical value in cardiovascular monitoring, precise ophthalmic diagnosis, and interventional therapy, offering advantages of high efficiency, safety, non-invasiveness, and significant cost-effectiveness. As the core component of ultrasound imaging systems, transducers’ performance directly determines the image resolution. Piezoelectric materials, essential for the acoustic-to-electric energy conversion, exhibit piezoelectric and electromechanical properties that decisively influence transducer sensitivity and bandwidth. While commercial Pb(Zr,Ti)O3 (PZT) ceramics offer excellent performance, the toxicity of the lead element throughout material preparation, service life, and disposal poses significant risks to human health and ecosystems.
    [001]C-textured lead-free (Ba,Ca)(Zr,Ti)O3 (BCZT) ceramics were fabricated via the Template Grain Growth (TGG) method. The materials demonstrate high piezoelectricity, elevated sound velocity, and low dielectric constant, making them highly suitable for developing high-sensitivity and large-bandwidth ultrasonic transducers. However, critical limitations also persist: (1) the absence of full-matrix electromechanical properties such as dielectric constant εij, piezoelectric coefficient dij, and elastic constant sij essential for device design, and (2) the restriction of electromechanical coupling coefficient k calculations to extreme aspect ratios. The inability to accurately model k evolution at finite aspect ratios severely constrains practical applications.
    To overcome such challenges, highly [00l]C-oriented textured BCZT ceramics (texture degree f00l ~ 98%) were synthesized via TGG. The complete full-matrix electromechanical property dataset was established for the first time by integrating resonance-antiresonance spectroscopy with pulse-echo ultrasonic measurements. The textured BCZT ceramics exhibit strong anisotropic Poisson’s ratios. Their piezoelectric coefficient d33 (605 pC/N) and electromechanical coupling coefficient k33 (0.73) is comparable to that of PZT-5H ceramics, while the piezoelectric voltage constant g33 (23.6× 10-3 (V/m/)Pa) is 20 % higher than that of PZT-5H.
    Using the piezoelectric constitutive equations, we developed a theoretical model to predict k at arbitrary aspect ratios. Based on this developed model, the 1-3 BCZT composite transducer with high sensitivity and wide frequency band was designed and fabricated, exhibiting a center frequency of ~ 3.0 MHz. The BCZT transducer achieves an insertion loss of -33.0 dB. The -6 dB bandwidth is as high as 107.1%, which is superior to the ultrasonic transducer made of PZT-5H composite reported in literatures. This work not only provides complete electromechanical parameters for lead-free piezoelectric device applications but also lays a theoretical and technical foundation for the development of high-performance, eco-friendly ultrasonic diagnostic equipments.
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